• Journal of Navigation and Port Research
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• v.37 no.4
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• pp.329-335
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• 2013

This paper is to develop the position error equations including the attitude errors, the errors of nadir and ship's heading, and the errors of ship's position in the free-gyro positioning and directional system. In doing so, the determination of ship's position by two free gyro vectors was discussed and the algorithmic design of the free-gyro positioning and directional system was introduced briefly. Next, the errors of transformation matrices of the gyro and body frames, i.e. attitude errors, were examined and the attitude equations were also derived. The perturbations of the errors of the nadir angle including ship's heading were investigated in each stage from the sensor of rate of motion of the spin axis to the nadir angle obtained. Finally, the perturbation error equations of ship's position used the nadir angles were derived in the form of a linear error model and the concept of FDOP was also suggested by using covariance of position error.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.4 no.3
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• pp.58-66
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• 1995

It is very important to test motion accuracy and performance of NC machine tools as they affect that of all other machines machined by them in industry. In this paper, in has become possible to detect errors of linear displacement of radial direction for circular motion test using newly assembled magnetic type of linear scales so called Magnescale ball bar system, and to calculate time interval getting error motion data and revolution angle of circular motion in machining center using tick pulses come out from computer. And a set of error data gotten from test is expressed to a plot by computer treatment and to numerics of error motion by statistical treatment and results of test are compared with those of Renishaw ball bar system.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.5
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• pp.1-6
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• 2004

Measurements of circular motion accuracy of NC lathe have achieved with ball bar systems proposed by Bryan, but the ball bar systems have ifluenced on the measuring data by way of the accuracy of the balls and the contacts of balls and bar seats. Therefore in this study, error data during of circular motion of ATC(Automatic Tool Changer) of NC lathe will be acquired by reading zx plane coordinates using two optical linear scales. Two optical linear scales of measuring unit are fixed on z-x plane of NC lathe, and the moving part is fixed to ATC and then is made to receive data of coordinates of the ATC at constant time intervals using tick pulses comming out from computer. And then, error data files of radial direction of circular motion are calculated with the data read, and the aspect of circular motion are modeled to plots, and are analysed by means of statistical treatments of circularity, means, standard deviations etc.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.4
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• pp.26-31
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• 2008

A precision four-degree-of-freedom measurement system has been developed for simultaneous measurement of four motion errors of a linear stage, which include straightness and angular errors, The system employs a retro-reflector to detect the straightness errors and a plane mirror to detect the angular errors. A common-path compensation method for laser beam drift is put forward, and the experimental results show that the influences of beam drift on four motion errors can be reduced simultaneously. In comparison with the API 5D laser measuring system, the accuracy for straightness measurement is about ${\pm}1.5{\mu}m$ within the measuring range of ${\pm}650{\mu}m$, and the accuracy for pitch and yaw measurements is about ${\pm}1.5$ arc-seconds within the range of ${\pm}600$ arc-seconds.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.10 no.6
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• pp.1-7
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• 2001

It is very important to test circular motion accuracy of NC machine tools as it affects all other machines machined by them in industries. In this paper, it has become possible to detect errors of linear displacement of radial directions for circle tar motion accuracy test using newly assembled magnetic type of linear scale so called Magnescale ball-bar system. It has also organized computer program systems using tick pulses come out from computer for getting error motion data at colt start time interval in circular motion test on NC lathe. Error data gotten from test is expressed to plots and analysed to numerics by various statistical treatments.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.12
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• pp.114-120
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clearance of table is controlled corresponding to the amount of eror with the actively controlled variable capillary, named as ACC. In previous paper, through the basic test, it was confirmed that by the use of ACC, the error motion within 2.7$\mu$ m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the frequency bandwidth of 5.5Hz, structurally. In this paper, we performed practical compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy, iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error, the linear and angular motion error are improved upto 0.25$\mu$ m and 0.4arcsec, which are about 1/10 and 1/3 of the non-compensated motion errors respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.692-695
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• 2000

This paper is concerned with Accuracy Design of LM Guide System in Machine Tools. Elastic deformation of bearing is calculated by Hertz contact theory and motion error of LM block is analyzed. A new algorithm using block stiffness is proposed fur the analysis of motion accuracy of the table. The best advantage of this algorithm is fast analysis speed because it isn't necessary iteration processes for satisfying equilibrium equation of the table. Motion errors of the table analyzed under artificial form error of rail theoretically and experimentally. Only one of two rails is bent by putting a thickness gauge into horizontal direction. This form error of rail is measured by gap sensor against the other rail. Then, motion errors of the table are predicted by proposed new algorithm theoretically and measured by laser interferometer. Measurements are carried out by changing the preload and thickness. The results show that the table motion errors are reduced from 1/2 to 1/60 times than form error of rail according to its height and width. And the effect of preloading is almost negligible.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.466-469
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• 1995

This paper presents a design and performance of the 6 D.O.F linear motion table with a magnetic bearing suspension. The linear positioning of the table with a 150mm stroke is driven by a brushless DC Linear motor and the other attitudes of the stage are controlled by the analog PD controller with magnetic bearing actuators. Each magnetic bearing unit which consists of 3 electromagnets, 3 capacitance probes and 3 backup bearings affords controlled forces by detecting the air gap between the probes and guideways. An integral type capacitance probe amplifier is equipped on the upper plate of the table so that the probe line to the probe amplifier can be shorter therefore the problems due to the stray capacitance and noise can be reduced. Form the pitch-yaw errormeasured by the autocollimator, the vertical and horizont straightness errors of the table are derived that they are maintained below 1.mu. m over 100mm stroke. The positioning accuracy of the linear motion is maintained below 2 .mu. m and the repeatability error is below 1 .mu. m

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.51-60
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• 2005

This paper describes a robust control scheme for high-speed and long stroke scanning motion of high precision linear motor system consisting of linear motor, air bearing guide and position measurement system using heterodyne interferometer. Nowadays, semiconductor process and inspection of wafer or LCD need high speed and long travel length for their high throughput and extremely small velocity fluctuations or tracking errors. In order to satisfy these conditions, linear motor system are widely used because they have large thrust force and do not need motion conversion mechanisms such as ball screw, rack & pinion or capstan with which the system are burdened. However linear motors have a problem called force ripple. Force ripple deteriorates the tracking performances and makes periodic position errors. So, force ripple must be compensated. To maximize the tracking performance of linear motor system, we propose the control scheme which is composed of a robust control method, Time Delay Controller (TDC) and a feedforward control method, Zero Phase Error Tracking Control (ZPETC) for accurate tracking a given trajectory and an adaptive force ripple compensation (AFC) algorithm fur estimating and compensating force ripple. The adaptive ripple compensation is continuously refined on the basis of tracking error. Computer simulation results based on modeled parameters verify the effectiveness of the proposed control scheme for high-speed, long stroke and high precision scanning motion and show that the proposed control scheme can achieve a sup error tracking performance in comparison to conventional TDC control.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.250-256
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clarance of table is actively controlled corresponding to the amount of error with the nariable capillary,anmed as ACC. In previous paper,through the basic test, it was confirmed that by the use of ACC,the error motion within 2.7 .mu.m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the freqency bandwidth of 5.5Hz structurally. In this paper,we performed practital compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy,iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error,the linear and angular motion error are improved upto 0.25 .mu.m and 0.4arcsec,which are about 1/10 and 1/3 of the non-compensated motion errors respectively.