• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.7
• /
• pp.185-194
• /
• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurred inside the pads. In this paper, a motion error analysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi fad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed qualitatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.

• Journal of the Korean Society for Precision Engineering
• /
• v.12 no.2
• /
• pp.37-47
• /
• 1995

In recent years, it has been variously developed for testing the accuracy of circular motion of NC machine tools, for example Telescoping Ball Bar Method by Bryan, Circular test Method by Knapp and $r^{-{\theta} }$ Method by Tsutsumi etc., but these methods are all 2-dimentional measuring methods on plane. These simple methods of circular motion accuracy test of NC machine tools have been studied by many reserchers as above, but it is not yet settled in the code of measuring methods of motion errors of NC machine tools, because of errors of measuring units and sensors, and also especially the difficulties of centering of measuring units and the spindle of machining center. In this paper, in use of 2 rotary encoders and 1 magnetic type linear scale with resolution of 0.5 .mu. m, it has become possible for measuring of 3 dimentional space motion accuracy.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.21 no.10
• /
• pp.1718-1729
• /
• 1997

This paper describes motion errors due to acceleration and deceleration types of servo motors in NC machine tools. Motion errors are composed of two components : one is due to transient response of a servomechanism and the other comes from gain mismatching of positioning servo motors. It deals with circular interpolation to identify motion errors by using Interface card. Also in order to minimize motion errors, this study presents an effective method to optimize parameters which are connected with motion errors. The proposed method is based upon a second order polynomial regression model and it includes an orthogonal array method to make the effective results of experiments. The validity and reliability of the study were verified on a vertical machining center equipped with FANUC 0MC through a series of experiments and analysis.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.10a
• /
• pp.1380-1383
• /
• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• International Journal of Precision Engineering and Manufacturing
• /
• v.5 no.2
• /
• pp.60-67
• /
• 2004

For improving the motion accuracy of hydrostatic tables, a corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. The reverse analysis is performed firstly to estimate the rail profile from the measured linear and angular motion error, in the algorithm. For the next step, the corrective machining information is obtained based upon the estimated rail pronto. Finally, the motion errors on the correctively machined rail are analyzed by using the motion error analysis method. These processes are iterated until the analyzed motion errors are satisfactory within the target accuracy. In order to verify the validity of the algorithm theoretically, the motion errors calculated by the estimated rail after the corrective machining process, are compared with those by the true rail which is previously assumed as the initially measured value. The motion errors calculated using the estimated rail show good agreement with the assumed values, and it is shown that the algorithm is effective in acquiring the corrective machining information to improve the accuracy of hydrostatic tables.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1996.11a
• /
• pp.671-677
• /
• 1996

This paper proposes a study on the effects of motion errors for acceleration/ deceleration types. The proposed motion errors are consisted of two errors : one due to transient response of servomechanism and the other due to gain mismatching of positioning servo motor. They are derived from using laplace transformation for the block diagram of general purpose feed drive system. In order to minimize them, the paper proposes second order polynomial regression model by using orthogonal array method which describes one of experimental methodolgies. The validity and reliability of the study was veri lied on a vertical machining center equipped with FANUC 0MC through a series of experiments and analyses.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.1144-1149
• /
• 2003

It is very important to measure circular motion accuracy of NC lathes it affects accuracy, performance, interchange ability and quality of machine parts machined by the NC lathes in industries. So, in this study, measuring units system to measure circular motion accuracy two axes circular motion accuracy of NC lathes was composed of two optical linear scales installed on the z and x-axes of work coordinate system on NC lathe and a computer inserted with PC counter card enables to obtain measuring data. Here, ATC(Automatic Tool Changer) and moving part of linear scales are fixed with magnet bases in order to measure circular motion accuracy of the ATC of NC lathe. And next, computer software was developed in order to measure the circular motion accuracy of NC lathe under resolution of 0.1 $\mu\textrm{m}$ using two linear scales, and also computer softwares were developed so that measuring data could be modeled on plots and be analyzed numerically,

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.288-291
• /
• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement

• Journal of the Korean Society for Precision Engineering
• /
• v.20 no.10
• /
• pp.112-119
• /
• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.17 no.5
• /
• pp.44-51
• /
• 2008

In this paper, the optimal tuning of a cross-coupled controller linked with the feedforward controller is studied to reduce contouring and tracking errors of a bi-axial servomechanisms by using the previously developed integrated tuning method. The CCC system for an arbitrary curve, which is combined with the feedforward controller, is formulated by a state-space based on a series of linear motion trajectories. An optimal tuning problem is formulated as a nonlinear constrained optimization problem including relevant controller parameters of the servo. To verify the effectiveness of the proposed optimal tuning procedure, linear and circular motion experiments are performed on the xy-table. Experimental results confirm that both tracking and contouring errors are significantly reduced by applying the proposed control and tuning system.