• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.690-695
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• 2005

Flexible circular cantilever beams when excited externally introduce a lot of dynamic characteristics. The non-linear elements that these flexible beams develop include non-linearity due to inertia terms, spring, and damping. They show different characteristics of motion from each other. In the modes of lower order, the non-linearity due to spring is prevalent, while the non-linearity due to inertia Is prevalent in the modes of higher order. To analyze these effects the non-linear phenomena are analyzed experimentally. When the response characteristics of non-linear vibration are analyzed using autospectrum, it is possible to analyze the subharmonic and superharmonic mot ion by comparison. The phase change is analyzed using the method of phase portrait and the non-linear characteristics of response characteristics that are developed in flexible structures can be predicted and applied to the stage of design.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.985-986
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.969-970
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• 2011

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.51-60
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• 2005

This paper describes a robust control scheme for high-speed and long stroke scanning motion of high precision linear motor system consisting of linear motor, air bearing guide and position measurement system using heterodyne interferometer. Nowadays, semiconductor process and inspection of wafer or LCD need high speed and long travel length for their high throughput and extremely small velocity fluctuations or tracking errors. In order to satisfy these conditions, linear motor system are widely used because they have large thrust force and do not need motion conversion mechanisms such as ball screw, rack & pinion or capstan with which the system are burdened. However linear motors have a problem called force ripple. Force ripple deteriorates the tracking performances and makes periodic position errors. So, force ripple must be compensated. To maximize the tracking performance of linear motor system, we propose the control scheme which is composed of a robust control method, Time Delay Controller (TDC) and a feedforward control method, Zero Phase Error Tracking Control (ZPETC) for accurate tracking a given trajectory and an adaptive force ripple compensation (AFC) algorithm fur estimating and compensating force ripple. The adaptive ripple compensation is continuously refined on the basis of tracking error. Computer simulation results based on modeled parameters verify the effectiveness of the proposed control scheme for high-speed, long stroke and high precision scanning motion and show that the proposed control scheme can achieve a sup error tracking performance in comparison to conventional TDC control.

• Journal of IKEEE
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• v.24 no.3
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• pp.735-742
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• 2020

The pick & place module is used as a core module in the process equipment for producing and inspecting semiconductor components. The conventional pick & place module has the disadvantage that the precision and durability of the system are reduced and the size and weight of the module are increased by using a conversion device that converts rotary motion into linear motion. In this study, we proposed a pick & place module that implements up-and-down linear motion without a conversion device by improving such disadvantage and employs a linear motor with no limit on average thrust and travel distance. Design parameter values, that can reduce cogging force while maintaining average thrust by selecting parameters for designing a core type linear motor with a large thrust to volume ratio and analyzing the effect of cogging force according to design parameter changes through magnetic analysis, was selected. Average thrust and cogging force were measured for the pick & place module composed of the manufactured linear motor and compared with the design values.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.653-656
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• 2005

This paper introduces design, fabrication and experiment process of a novel scanner for the high speed AFM(Atomic Force Microscope). A proper design modification is proposed through analyses on the dynamic characteristics of the existing linear motion stages using a dynamic analysis program, Recurdyn. Since the scanning speed of each direction is allowed to be different, the linear motion stage for the high-speed scanner of AFM can be so designed to have different resonance frequencies for the modes with one dominant displacement in the desired directions. One way to achieve this objective is to use one-direction flexure mechanism for each direction and to mount one stage for fast motion on the other stage for slow motion. This unsymmetrical configuration separates the frequencies of the two vibration modes with one dominant displacement in each desired direction, hence, the coupling between the motions in the two directions. In addition, a pair of actuators is used for each axis to decrease the cross talks in the two motions and gives a force large enough to actuate the slow motion stage, which carries the fast motion stage. After these design modifications, a novel scanner with scanning speed higher than 10 Hz can be achieved to realize undistorted images in the high speed AFM.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.40 no.1
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• pp.43-48
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• 2012

This paper proposes a practical linear recursive robust motion deblurring filter using the inertial sensor measurements for strapdown image seekers. The angular rate information obtained from the gyro mounted on the missile is used to define the PSF(point spread function). Since the gyro output contains a unknown but bounded bias error. the motion blur image model can be expressed as the linear uncertain system. In consequence, the motion deblurring problem can be cast into the robust Kalman filtering which provides reliable state estimates even in the presence of the parametric uncertainty due to the gyro bias. Through the computer simulations using the actual IR scenes, it is verified that the proposed algorithm guarantees the robust motion deblurring performance.

• Journal of Biosystems Engineering
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• v.43 no.3
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• pp.194-201
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• 2018

Purpose: The objective of this study was to propose a formula for the theoretical grain mean transport velocities of an elliptically moving oscillator by modifying the grain mean transport velocity formula applied to linear motion and to compare the calculated values with the experimental values of grain mean transport velocity. Methods: The values of the throwing index ($K_v$) and the maximum horizontal velocities for various positions on the elliptical oscillator were obtained using kinematic analysis. To obtain the actual grain transport velocity, the mean transport velocities of perilla grains at six positions on the sieve surface were measured using a high-speed camera and compared with the theoretical values. The cam with an eccentric bearing on the oscillator was designed to be eccentric by 1.6 cm so that the lengths of the major axis of the elliptical motion were 3.2-3.6 cm. The material used in the experiments was perilla grain. Results: The experimental result was consistent with the theoretical value calculated using the proposed formula ($R^2$ is 0.80). It is considered that the angle difference between the maximum accelerations in the directions vertical and horizontal to the sieve has as much influence on the grain mean transport velocity as the value of Kv itself. Conclusions: It was possible to theoretically obtain the grain mean transport velocities through a screening device in elliptical motion by modifying the formula of the grain mean transport velocities used in linear motion.

• Journal of the Korean GEO-environmental Society
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• v.22 no.7
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• pp.5-12
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• 2021

The reliable seismic stability evaluation of the natural slopes and geotechnical structures has become a critical factor of the design. Pseudo-static or permanent displacement methods are typically employed to evaluate the seismic slope performance. In both methods, the effect of input ground motion on the sliding surface is ignored, and failure surface from the limit equilibrium method is used. For the assessment of the seismic sensitivity of failure surface, two-dimensional non-linear finite element analyses are performed. The performance of the finite element model was validated against centrifuge measurements. A parametric study with a range of input ground motion was performed, and numerical results were used to assess the influence of ground motion characteristics on the sliding surface. Based on the results, it is demonstrated that the characteristics of input ground motion have a significant influence on the location of the seismically induce failure surface. In addition to dynamic analysis, pseudo-static analyses were performed to evaluate the discrepancy. It is observed that sliding surfaces developed from pseudo-static and dynamic analyses are different. The location of the failure surface change with the amplitude and T_m of motion. Therefore, it is recommended to determine failure surfaces from dynamic analysis

• Journal of the Earthquake Engineering Society of Korea
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• v.25 no.1
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• pp.43-52
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• 2021

According to several seismic design standards, a ground motion time history should be selected similar to the design response spectrum, or a ground motion time history should be modified by matching procedure to the design response spectrum through the time-domain method. For the response spectrum matching procedure, appropriate seed ground motions need to be selected to maintain recorded earthquake accelerogram characteristics. However, there are no specific criteria for selecting the seed ground motions for applying this methodology. In this study, the characteristics of ground motion time histories between seed motions and spectral matched motions were compared. Intensity measures used in the design were compared, and their change by spectral matching procedure was quantified. In addition, the seed ground motion sets were determined according to the response spectrum shape, and these sets analyzed the response of nonlinear and equivalent linear single degrees of freedom systems to present the seed motion selection conditions for spectral matching. As a result, several considerations for applying the time domain spectral matching method were presented.