• Title/Summary/Keyword: Line profile

Search Result 767, Processing Time 0.029 seconds

The Etching Mechanism of $CeO_2$ Thin Films using Inductively Coupled Plasma (유도 결합 플라즈마를 이용한 $CeO_2$ 박막의 식각 메카니즘)

  • 오창석;김창일
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.14 no.9
    • /
    • pp.695-699
    • /
    • 2001
  • Cerium dioxide (CeO$_2$) was used as the intermediate layer between the ferroelectric thin film and Si substrate in a metal-ferroelectric-semiconductor field effect transistor (MFSFET), to improve the interface property by preventing the interdiffusion of the ferroelectric material and the Si substrate. In this study, CeO$_2$ thin films were etched with a CF$_4$/Ar gas combination in inductively coupled plasma (ICP). The maximum etch rate of CeO$_2$ thin films was 270$\AA$/min under CF$_4$/(CF$_4$+Ar) of 0.2, 600 W/-200V, 15 mTorr, and $25^{\circ}C$. The selectivities of CeO$_2$ to PR and SBT were 0.21, 0.25, respectively. The surface reaction in the etching of CeO$_2$ thin films was investigated with x-ray photoelectron spectroscopy (XPS). There is a chemical reaction between Ce and F. Compounds such as Ce-F$_{x}$ remains on the surface of CeO$_2$ thin films. Those products can be removed by Ar ion bombardment. The results of secondary ion mass spectrometry (SIMS) were consistent with those of XPS. Scanning electron microscopy (SEM) was used to examine etched profiles of CeO$_2$ thin films. The etch profile of over-etched CeO$_2$ films with the 0.5${\mu}{\textrm}{m}$ line was approximately 65$^{\circ}$.>.

  • PDF

Effects of Molding Condition on Surface Unevenness of GFRP Composites in Compression Molding (GFRP 복합재료의 압축성형에서 표면요철에 미치는 성형조건의 영향)

  • Kim, Hyoung-Seok;Kim, Jin-Woo;Kim, Yong-Jae;Lee, Dong-Gi
    • Transactions of the Korean Society of Mechanical Engineers A
    • /
    • v.34 no.11
    • /
    • pp.1649-1657
    • /
    • 2010
  • We have investigated the unexpected phenomena on the surface of molded GFRP composites. The major cause of the unevenness, as a result of which the surface becomes rough, is a shrinking of the matrix in the process of holding pressure and cooling temperature. The higher holding pressure load in a molding process and the lower demolding temperature in an annealing experiment, the better GFRP composites moldings improved its appearance. In addition, by taking the holding pressure and demolding temperature into consideration, we evaluate the process that causes the surface unevenness and the variation in the fiber projection height.

Gas Temperature Measurement in Supersonic Flows by N2+ Emission Spectroscopy (질소 이온 발광 분광법을 이용한 초음속 유동의 기체 온도 측정)

  • Shin, Ji-Chul
    • Transactions of the Korean Society of Mechanical Engineers B
    • /
    • v.34 no.3
    • /
    • pp.245-250
    • /
    • 2010
  • The procedure for estimating the gas (rotational) temperature of an air discharge in supersonic flows is presented in detail. Since direct measurement of the temperature in a supersonic flow is difficult, a nonintrusive measurement was performed by optical emission spectroscopy based on the emission spectra of nitrogen molecular ions. A detailed explanation, including the equations for emission line intensity, is presented in order to understand the structure of the emission spectra of nitrogen molecular ions. Using the obtained representation for emission spectrum, a synthetic spectrum of the first negative system of $N_2^+$ is obtained, and it is compared with the experimentally measured spectrum. Within a relative error of approximately 6.8% for the overall band spectra, the synthetic and measured spectra agree well. In the case of a 25-mA DC air discharge in a supersonic (Mach 3) flow, the gas temperature profile shows an approximately linear variation and a peak temperature of approximately 350 K.

Changes in Interface Properties of TCO/a-Si:H Layer by Zn Buffer Layer in Silicon Heterojunction Solar Cells (실리콘 이종접합 태양전지의 Zn 확산방지층에 의한 TCO/a-Si:H 층간의 계면특성 변화)

  • Tark, Sung-Ju;Son, Chang-Sik;Kim, Dong-Hwan
    • Korean Journal of Materials Research
    • /
    • v.21 no.6
    • /
    • pp.341-346
    • /
    • 2011
  • In this study, we inserted a Zn buffer layer into a AZO/p-type a-si:H layer interface in order to lower the contact resistance of the interface. For the Zn layer, the deposition was conducted at 5 nm, 7 nm and 10 nm using the rf-magnetron sputtering method. The results were compared to that of the AZO film to discuss the possibility of the Zn layer being used as a transparent conductive oxide thin film for application in the silicon heterojunction solar cell. We used the rf-magnetron sputtering method to fabricate Al 2 wt.% of Al-doped ZnO (AZO) film as a transparent conductive oxide (TCO). We analyzed the electro-optical properties of the ZnO as well as the interface properties of the AZO/p-type a-Si:H layer. After inserting a buffer layer into the AZO/p-type a-Si:H layers to enhance the interface properties, we measured the contact resistance of the layers using a CTLM (circular transmission line model) pattern, the depth profile of the layers using AES (auger electron spectroscopy), and the changes in the properties of the AZO thin film through heat treatment. We investigated the effects of the interface properties of the AZO/p-type a-Si:H layer on the characteristics of silicon heterojunction solar cells and the way to improve the interface properties. When depositing AZO thin film on a-Si layer, oxygen atoms are diffused from the AZO thin film towards the a-Si layer. Thus, the characteristics of the solar cells deteriorate due to the created oxide film. While a diffusion of Zn occurs toward the a-Si in the case of AZO used as TCO, the diffusion of In occurs toward a-Si in the case of ITO used as TCO.

Genetic Identification on Natural Population of Triploid Crucian Carp, Carassius auraus in Korea (자연산 3배체 붕어 (Carassius auratus) 클론 집단에 대한 유전학적 동정)

  • Kim Eung Oh;LEE Jong Yoon;Nam Yoon Kwon;Noh Jae Koo;Lee Sang Yun;Kim Dong Soo
    • Korean Journal of Fisheries and Aquatic Sciences
    • /
    • v.35 no.6
    • /
    • pp.589-594
    • /
    • 2002
  • Natural clonal stock of triploid crucian carp, Carassius aurahs was identified and its cytogenetic, molecular genetic and morphological traits were studied. Cytogenetic analysis of the clonal crucian carp revealed that they were natural triploidy, evidenced by 1.5-fold increases of cell size, DNA content, and chromosome number. Multi-locus DNA fingerprinting using $(GATA)_4$ probe showed that they had an identical fingerprint profile, indicating the clonal propagation of the population. External morphology and morphometric characteristics of triploid individuals were much uniform compared to those of diploids. Natural triploid crucian carp was proven to be all-female in this study.

The Change of Bone and Soft Tissue Profile after Sagittal Split Osteotomy of Ramus (하악골후방이동술 후 골격구조와 연부조직의 변화)

  • Hwang, Jee Hoon;Seul, Chul Hwan;Park, Beyoung Yun
    • Archives of Plastic Surgery
    • /
    • v.32 no.5
    • /
    • pp.547-554
    • /
    • 2005
  • Orthognathic surgery for Class III malocclusion requires an elaborate preoperative planning using cephalometries or Mock surgery models which enable the surgeon to anticipate postoperative skeletal changes of maxilla and mandible as well as dentition. After surgery, patient's satisfaction is greatly influenced by appearance of soft tissue change. Therefore, it is imperative to predict a relatively accurate soft tissue change prior to surgery. A 5 year retrospective study was designed to evaluate the soft tissue change after sagittal split osteotomy of ramus(SSRO) for class III malocclusion. Analyses of preoperative and postoperative anthropometric measurements were performed. Patients who were treated only by SSRO for class III malocclusion and could follow up for 6 months were studied. Among them, the patients who had history of cleft palate and lip or hemifacial microsomia were excluded. Soft tissue changes were estimated by using the frontal and lateral photographs. Skeletal changes were observed by measuring amount of set back and angular changes of mandible to the reference line by using cephalometries. Relapses were also measured 6 months after the operation. We could observe skeletal changes were more profound than soft tissue changes concerning amount of set back, but soft tissue changes were also profound in angle. Relapse was more profound in skeleton than soft tissue but the amount was not significant. In spite of the variables which may affect proper assessment of the soft tissue change after skeletal relocation, this study can serve as a guide for exact prediction of the postoperative change of soft tissue and skeleton.

Deep X-ray Mask with Integrated Micro-Actuator for 3D Microfabrication via LIGA Process (3차원 LIGA 미세구조물 제작을 위한 마이크로 액추에이터 내장형 X-선 마스크)

  • Lee, Kwang-Cheol;Lee, Seung-S.
    • Transactions of the Korean Society of Mechanical Engineers A
    • /
    • v.26 no.10
    • /
    • pp.2187-2193
    • /
    • 2002
  • We present a novel method for 3D microfabrication with LIGA process that utilizes a deep X-ray mask in which a micro-actuator is integrated. The integrated micro-actuator oscillates the X-ray absorber, which is formed on the shuttle mass of the micro-actuator, during X-ray exposures to modify the absorbed dose profile in X-ray resist, typically PMMA. 3D PMMA microstructures according to the modulated dose contour are revealed after GG development. An X-ray mask with integrated comb drive actuator is fabricated using deep reactive ion etching, absorber electroplating, and bulk micromachining with silicon-on-insulator (SOI) wafer. 1mm $\times$ 1 mm, 20 $\mu$m thick silicon shuttle mass as a mask blank is supported by four 1 mm long suspension beams and is driven by the comb electrodes. A 10 $\mu$m thick, 50 $\mu$m line and spaced gold absorber pattern is electroplated on the shuttle mass before the release step. The fundamental frequency and amplitude are around 3.6 kHz and 20 $\mu$m, respectively, for a do bias of 100 V and an ac bias of 20 $V_{p-p}$ (peak-peak). Fabricated PMMA microstructure shows 15.4 $\mu$m deep, S-shaped cross section in the case of 1.6 kJ $cm^{-3}$ surface dose and GG development at 35$^{\circ}C$ for 40 minutes.

The Effect of Paint Baking on the Strength and Failure of Spot Welds for Advanced High Strength Steels (고강도 강판 저항 점용접부 강도 및 파단에 미치는 Paint Baking의 영향)

  • Choi, Chul Young;Lee, Dongyun;Kim, In-Bae;Kim, Yangdo;Park, Yeong-Do
    • Korean Journal of Metals and Materials
    • /
    • v.49 no.12
    • /
    • pp.967-976
    • /
    • 2011
  • Conventional fracture tests of resistance spot welds have been performed without consideration of the paint baking process in the automobile manufacturing line. The aim of this paper is to investigate the effect of the paint baking process on load carrying capacity and fracture mode for resistance spot welded 590 dual phase (DP), 780DP, 980DP, 590 transformation in duced plasticity (TRIP), 780TRIP and 1180 complex phase (CP) steels. With paint baking after resistance spot welding, the l-shape tensile test (LTT) and nano-indentation test were conducted on the as-welded and paint baked samples. Paint baking increased the load-carrying capacity of the resistance spot welded samples and improved the fracture appearance from partial interfacial fracture (PIF) to button fracture (BF). Improvement in fracture appearance after LTT is observed on weldments of 780 MPa grade TRIP steels, especially in the low welding current range with paint baking conditions. The higher carbon contents (or carbon equivalent) are attributed to the low weldability of the resistance spot welding of high strength steels. Improvement of the fracture mode and load carrying ability has been achieved with ferrite hardening and carbide formation during the paint baking process. The average nano-indentation hardness profile for each weld zone shows hardening of the base metal and softening of the heat affected zone (HAZ) and the weld metal, which proves that microstructural changes occur during low temperature heat treatment.

Comparative analysis of commonly used peak calling programs for ChIP-Seq analysis

  • Jeon, Hyeongrin;Lee, Hyunji;Kang, Byunghee;Jang, Insoon;Roh, Tae-Young
    • Genomics & Informatics
    • /
    • v.18 no.4
    • /
    • pp.42.1-42.9
    • /
    • 2020
  • Chromatin immunoprecipitation coupled with high-throughput DNA sequencing (ChIP-Seq) is a powerful technology to profile the location of proteins of interest on a whole-genome scale. To identify the enrichment location of proteins, many programs and algorithms have been proposed. However, none of the commonly used peak calling programs could accurately explain the binding features of target proteins detected by ChIP-Seq. Here, publicly available data on 12 histone modifications, including H3K4ac/me1/me2/me3, H3K9ac/me3, H3K27ac/me3, H3K36me3, H3K56ac, and H3K79me1/me2, generated from a human embryonic stem cell line (H1), were profiled with five peak callers (CisGenome, MACS1, MACS2, PeakSeq, and SISSRs). The performance of the peak calling programs was compared in terms of reproducibility between replicates, examination of enriched regions to variable sequencing depths, the specificity-to-noise signal, and sensitivity of peak prediction. There were no major differences among peak callers when analyzing point source histone modifications. The peak calling results from histone modifications with low fidelity, such as H3K4ac, H3K56ac, and H3K79me1/me2, showed low performance in all parameters, which indicates that their peak positions might not be located accurately. Our comparative results could provide a helpful guide to choose a suitable peak calling program for specific histone modifications.

Effect of yttrium additives on the shear bond strength of porcelain fused to Ni-Cr alloy for porcelain fused metal crown (도재용착용 Ni-Cr계 합금의 이트륨 첨가물이 도재전단결합강도에 미치는 영향)

  • Woo, Je-Seung;Noh, Se-Ra;Noh, Hyeong-Rok;Lim, Chung-Ha;Lee, Jung-Hwan
    • Journal of Technologic Dentistry
    • /
    • v.41 no.2
    • /
    • pp.71-80
    • /
    • 2019
  • Purpose: In this study, to evaluate the effect of oxide changes on the shear bond strength according to the composition of Ni-Cr alloys for porcelain fused matal crown, T-4 alloys, Zeroy alloys and Zeroy-X alloys were selected. Methods: 20 specimens were fabricated using selected Ni-Cr alloys and porcelain powders. A Ni-Cr alloy having a diameter of 5 mm and a height of 25 mm was produced and the metal surface was polished. Porcelain powder was fired on the polished metal surface to a diameter of 5 mm and a height of 3 mm. The experiment group consisted of three groups, T-4(TNA), Zeroy(ZNA) and Zeroy-X(ZXA). The fabricated specimens were mounted on a jig of a universal testing machine(UTM) and fracture strength was measured by applying a shear force at a UTM crosshead speed of 0.5 mm/min. The fracture strength was calculated as the bond strength between the porcelain and the alloy. The surface of the fractured alloy was analyzed by X-ray diffraction(XRD) and scanning electron microscopy(SEM), and the components of the oxide were measured by energy dispersive X-ray spectroscopy(EDX) line profile method. Results: In SEM, XRD and EDX analysis, yttrium tended to increase the mechanical and chemical bonding forces. The shear bond strength of ZXA group containing yttrium showed the highest value at 27.53 MPa. Conclusion: Based on the results of this study, it is considered that the yttrium-added Ni-Cr alloy is clinically acceptable in porcelain shear bond strength.