A study on Fabrication of Ferroelectric SST Thin Films by Liquid Delivery MOCVD Process (Liquid Delivery MOCVD공정을 이용한 강유전체 SBT 박막의 제조기술에 관한 연구)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2003.05c
- /
- pp.111-115
- /
- 2003