• Journal of the Semiconductor & Display Technology
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• v.19 no.4
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• pp.18-21
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• 2020

Undetected wafer slip during the lift pin-down motion in semiconductor equipment may affect the center to edge variation, wafer warpage, and pattern misalignment in plasma equipment. Direct measuring of the amount of wafer slip inside the plasma process chamber is not feasible because of the hardware space limitation inside the plasma chamber. In this paper, we demonstrated a practice for the wafer lift pin-up and down motions with respect to the gear ratio, operating voltage, and pulse width modulation to maintain accurate wafer position using remote control linear servo motor with an experimentally designed chamber mockup. We noticed that the pin moving velocity and gear ratio are the most influencing parameters to be control, and the step-wised position control algorithm showed the most suitable for the reduction of wafer slip.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.7-12
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• 2004

Large-sized pins are usually used to lift and handle large low speed diesel engine crankshaft. There has then been a need to reduce and optimize the weight of the traditionally used pins. Making an hole by cutting the inside of the pin out was investigated in view of static and fracture strength. To compensate the stress increase caused by the introduction of the inner hole, the groove in the circumferential direction pre-existing on the pin is to be removed. Finite element analysis was carried out for both the original model and weight reduced model. Stress intensity factors for semi-elliptical defects assumed on the pin for the original model and weight reduced model was calculated using the ASME method and compared with the fracture toughness test result of the pin material. The diameter of the cutting hole for the revised model was determined based on the analysis results.

• Applied Microscopy
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• v.46 no.1
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• pp.14-19
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• 2016

Currently, focused ion beams (FIB) are widely used for specimen preparation in atom probe tomography (APT), which is a three-dimensional and atomic-scale compositional analysis tool. Specimen preparation, in which a specific region of interest is identified and a sharp needle shape created, is the first step towards successful APT analysis. The FIB technique is a powerful tool for site-specific specimen preparation because it provides a lift-out technique and a controllable manipulation function. In this paper, we demonstrate a general procedure containing the crucial points of FIB-based specimen preparation. We introduce aluminum holders with moveable pin and an axial rotation manipulator for specimen handling, which are useful for flipping and rotating the specimen to present the backside and the perpendicular direction. We also describe specimen preparation methods for nanowires and nanopowders, using a pick-up method and an embedding method by epoxy resin, respectively.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.143-146
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• 2005

In modern automotive control modules, mechanical failures of surface mounted electronic components such as microprocessors, crystals, capacitors, transformers, inductors, and ball grid array packages, etc., are mai or roadblocks to design cycle time and product reliability. This paper presents a general methodology of failure analysis and fatigue prediction of these electronic components under automotive vibration environments. Mechanical performance of these packages is studied through finite element modeling approach fur given vibration environments in automotive application. Using the results of vibration simulation, fatigue lift is predicted based on cumulative damage analysis and material durability information. Detailed model of solder/lead joints is built to correlate the system level model and obtain solder strains/stresses. The primary focus in this paper is on surface-mount interconnect fatigue failures and the critical component selected for this analysis is 80 pin plastic leaded microprocessor.

• Tribology and Lubricants
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• v.33 no.1
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• pp.23-30
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• 2017

The electric controlled marine diesel engine has fuel pump generating the high pressurized fuel for fuel injection to combustion chamber via a common rail. Fuel pump consists of a cam-roller system. Journal bearing installed between a roller and a cam-roller pin is subjected to fluctuating heavy and instant loads by cam lift. First, Kinematic analysis is carried out to predict bearing loads during one cycle acting on the journal bearing. Second, flexible multi-body dynamic analysis and transient elasto-hydrodynamic(EHD) lubrication analysis for journal bearing considering elastic deformation of cam-roller pin, roller and bearing are conducted using AVL EXCITE/PU software to predict lubrication performance. The clearance ratio and journal groove shape providing lubrication oil are important parameter in bearing design having good performance and can be changed easier than other design parameters such as diameter, width, oil supply pressure and bearing material grade. Generally, journal bearing performance is represented by the minimum oil film thickness(MOFT) and peak oil film pressure(POFP). As well as the traditional design parameters(MOFT, POFP), in this study, temperature rise of lubrication oil is also evaluated through the side leakage flow of supplied oil. By the evaluating MOFT, POFP and temperature rise, the optimum bearing clearance ratio is decided.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.9
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• pp.1914-1922
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• 2002

Operating test of power-transmission plastic spur gears were performed inspecting both characteristics of friction-wear and endurance, and suggesting endurance improvement method that either drills internal holes of tooth or inserts metallic pin in the internal hole of tooth and verifying this newly-provided method. In case of acetal gears, amount of friction-wear is observed to increase by development of plastic deformation and increase of tooth stiffness due to brittle material property of acetal. To the contrary, in case of nylon gears, suggested method is shown to drop down the tooth temperature for about 3∼10$^{\circ}C$ than original gear, thus amount of wear is reduced by over 30% and operating lift prolonged by more than 200%. Hence, suggested method is proved to be practically applicable to the plastic gears made by soft polymers such as Nylon.

• Transactions of Materials Processing
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• v.15 no.8 s.89
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• pp.609-614
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• 2006

Micro-alloyed steels(MA steels) for cold forging was developed to replace the usual quenched and tempered steel. MA steels have several advantages over the conventional quenched and tempered carbon steels. First of all, energy consumption could be lowered due to the elimination of spherodizing annealing and quenching/tempering heat treatment. Also, bending during quenching could be avoided when MA steels are applied for manufacturing of long fastener parts. However, larger amount of load is exerted on the dies compared than in the case of conventional mild steels, which might lead to the earlier fracture of dies, when MA forging steels are applied in forging practice. Therefore, die lift could be a critical factor to determine whether HA forging steels could be widely applied in cold forging practice. In the present study, authors have investigated the forging characteristics of non-heat treated micro-alloyed steel by using a series of experimental and numerical analyses. Firstly, microstructural features and its effect on the deformation behavior have been studied. Numerical analysis has been done on the forging of guide rod pin to investigate for the optimization of forging process and die stress prediction.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.2 s.257
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• pp.197-204
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• 2007

Fretting is a contact damage process that occurs between two contact surfaces. Fretting fatigue reduces fatigue strength of the material due to low amplitude oscillatory sliding and changes in the contact surfaces of strongly connected machine and structure such as bolt, key, pin, fixed rivet and connected shaft, which have relative slip of repeatedly extreme low frequency amplitude. In this research, the fretting fatigue behavior of 2024-T3511 and 7050-T7451 aluminum alloys used mainly in aircraft and automobile industry were experimentally estimated. Based on this experimental wort the following results were obtained: (1) A significant decrease of fatigue lift was observed in the fretting fatigue compared to the plain fatigue. The fatigue limit of 2024-T3511 aluminum alloy decreased about 59% while 7050-T7451 aluminum alloy decreased about 75%. (2) In 7050-T7451 specimen using ATSI4030 contact pad, crack was initiated more early stage than using 2024-T3511 contact pad. (3) In all specimens, oblique cracks were initiated at contact edge. (4) Tire tracks and rubbed scars were observed in the oblique crack region of fracture surface.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.47 no.11
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• pp.1-5
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• 2010

We developed a novel micro-electro mechanical systems (MEMS) test socket using silicon on insulator (SOI) substrate with the cantilever array structure. We designed the round shaped cantilevers with the maximum length of $350{\mu}m$, the maximum width of $200{\mu}m$ and the thickness of $10{\mu}m$ for $650{\mu}m$ pitch for 8 mm x 8 mm area and 121 balls square ball grid array (BGA) packages. The MEMS test socket was fabricated by MEMS technology using metal lift off process and deep reactive ion etching (DRIE) silicon etcher and so on. The MEMS test socket has a simple structure, low production cost, fine pitch, high pin count and rapid prototyping. We verified the performances of the MEMS test sockets such as deflection as a function of the applied force, path resistance between the cantilever and the metal pad and the contact resistance. Fabricated cantilever has 1.3 gf (gram force) at $90{\mu}m$ deflection. Total path resistance was less than $17{\Omega}$. The contact resistance was approximately from 0.7 to $0.75{\Omega}$ for all cantilevers. Therefore the test socket is suitable for BGA integrated circuit (IC) packages tests.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.11
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• pp.1727-1732
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• 2010

Forensic engineering is the area of expertise of people qualified to serve as engineering experts in courts of law or during arbitration proceedings. An aerial-lifter can lift and carry load, including people, using power. Recently, failure of aerial-lifter internal parts while working and sweeping causing injuries and damage to property almost always generates conflict between the automaker and customer. Hence, the investigation of such events generally involves an engineering analysis. One of the possible reasons for accidents, such as a vehicle catching fire is the failure of oil pressure machine and the supporting pin. The results of formal inspections and engineering tests can reveal the cause for the failure of the mechanical parts. Therefore, the failure mechanism is analyzed by adopting fractography methods and by applying an instrumented indentation technique to compare the material properties of the reference part with those of the malfunctioning part.