• 한국정밀공학회지
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• 제14권9호
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• pp.68-79
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• 1997

A six DOF fine manipulator based on magnetic levitation is developed. Since most of magnetic levitation system are inherently unstable, a proposed magnetically levitated fine manipulator is implemented by use of an antagonistic structure to increase stability. From mathematical modeling and experiment, the equations of motion are derived. In addition, a six DOF sensing system is implemented by use of three 2-axis PSD sensors. A model reference-$H_{\infty}$ controller is applied to the system for the position control, In application of the fine manipulator, a wafer probing system is proposed to identify nonfunctional circuts. The probing system requires compliance to avoid destruction of DUT(device under test). A feedfor- ward-PD controllers are presented by the terms of the position accuracy, the settling time and the force accuracy.y.

• Journal of Power Electronics
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• 제16권5호
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• pp.1773-1780
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• 2016

This paper proposes a wide air-gap control method for the multi-module permanent magnet linear synchronous motor (MM-PMLSM) based on independent vector control. In particular, the MM-PMLSM consists of symmetrical multi-module and multi-phase structures, which are basically three-phase configurations without a neutral point, unlike conventional three-phase machines. In addition, there are no additional magnetic levitation windings to control the normal force of the air-gap between each stator and mover. Hence, in this paper, a dq-axis current control applying a d-q transformation and an independent vector control are proposed for the air-gap control between the two symmetric stators and mover of the MM-PMLSM. The characteristics and control performance of the MM-PMLSM are analyzed under the concept of vector control. As a result, the proposed method is easily implemented without additional windings to control the air-gap and the mover position. The effectiveness of the proposed independent vector control algorithm is verified through experimental results.

• Journal of Mechanical Science and Technology
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• 제20권9호
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• pp.1492-1501
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• 2006

A transportation system of single wafer has been developed to be applied to semiconductor manufacturing process of the next generation. In this study, the experimental apparatus consists of two kinds of track, one is for propelling a wafer, so called control track, the other is for generating an air film to transfer a wafer, so called transfer track. The wafer transportation speed has been evaluated by the numerical and the experimental methods for three types of nozzle position a..ay (i.e., the front-, face- and rear-array) in an air levitation system. Test facility for 300mm wafer has been equipped with two control tracks and one transfer track of 1500mm length from the starting point to the stopping point. From the present results, it is found that the experimental values of the wafer transportation speed are well in agreement with the computed ones. Namely, the computed values of the maximum wafer transportation speed $V_{max}$ are slightly higher than the experimental ones by about $15{\times}20%$. The disparities in $V_{max}$ between the numerical and the experimental results become smaller as the air velocity increases. Also, at the same air flow rate, the order of wafer transportation speeds is : $V_{max}$ for the front-array > $V_{max}$ for the face-array > $V_{max}$ for the rear-array. However, the face-array is rather more stable than any other type of nozzle array to ensure safe transportation of a wafer.

• 전기학회논문지
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• 제64권7호
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• pp.1096-1103
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• 2015

Electromagnetic levitation system(EMLS) is one of the well known nonlinear systems due to its high degree of nonlinearities. Moreover, when there are uncertain parameters in EMLS, it is not easy to have an accurate control of EMLS. In this paper, we first apply a standard input-output feedback linearzing controller to EMLS and investigate the possible control error caused by uncertain coil resistor. Then, as a remedy, we design and apply a robust controller using Lyapunov redesign technique to deal with this uncertain coil resistor in the system. The validity of our robust controller is verified via system analysis and experimental results.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 B
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• pp.864-866
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• 2003

In this paper, the improvement of control performance for a magnetic levitation system is presented. The model of a single-magnet system with rail is derived. As a conventional controller, PID controller is designed and implemented. This controller has a narrow stability margin due to low-order controller structure so that it cause unstability for a flexible rail. So to improve the control performance and stability margin, a robust controller as a new controller is designed and implemented using a VME-based digital controller. As a result, the controller performance of the new designed controller is better than that of the conventional controller.

• 한국공작기계학회논문집
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• 제16권2호
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• pp.1-7
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• 2007

Active magnetic bearing has been adopted to support the rotor by electomagnetic force without mechanical contact and lubrication process. A property of the control system for magnetic bearing is improved in accordance with making higher system gain. If the control system has integral part, an excessive overshoot response is shown by making higher integral gain. Therefore, this paper suggests a PID control system in order to eliminate the overshoot at the first stage and improve response characteristics to an impact disturbance at the status of levitation. The control gain was obtained by LQR design method which has the structure of I-PD control system in the state space. The PID control system containing prefilter has the same structure as the I-PD control system. Therefore, the PID control system adopted is able to be tuned by LQR design method. Finally, this paper shows the effect of the prefilter on the active magnetic bearing system through response experiments for levitation responses.

• 한국지능시스템학회논문지
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• 제24권3호
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• pp.279-284
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• 2014

본 논문에서는 최적화 기법과 퍼지 PID제어기를 이용한 자기부상시스템의 부상제어기를 제안한다. 흡인식 자기부상시스템은 일반적으로 비선형 특성을 포함하는 불안정한 시스템이기 때문에 일반적인 선형 제어기를 적용할 경우 우수한 성능을 얻기에는 어려운 점이 있다. 본 논문에서 제안된 제어기는 고정파라미터를 갖는 퍼지 PID제어기를 이용하였으며, 퍼지 PID 제어기 파라미터들은 유전자 알고리즘을 이용하여 최적화를 수행하였으며 유전알고리즘의 목적함수로는 일반적으로 사용되는 성능지수 함수를 사용하였다. 제안된 퍼지 PID 제어기를 적용한 자기부상시스템의 성능을 평가하기 위하여 Matlab을 이용하여 시뮬레이션을 수행하였으며, 고전적 PID제어기와 성능을 비교 분석하였다. 제안된 제어기를 적용한 자기부상시스템의 성능이 고전 PID제어기에 비하여 더 우수한 성능을 보임을 시뮬레이션을 통하여 검증하였다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
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• pp.700-703
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• 1997

A robust controller for a 6 DOF magnetically levitated fine manipulator is presented. The proposed controller consists of following two parts : a model reference controller (MRC) and a H$_{\infty}$ controller (HIC). First, the MRC stabilizes the motion of the manipulator. Then, the motion of the manipulator follows that of the reference model. Second, the HIC minimizes errors generated from the MRC due to noise and disturbance since the HIC is a kind of robust controller. The experiments of position control and tracking control are carried out by use of the proposed controller under the conditions of free disturbances and forced disturbances. Also, the experiments using PID controller are carried out under the same conditions. The results from above two controllers are compared to investigate the control performances. As the results, it is observed that the proposed controller has similar position accuracy but better tracking performances comparing to the PID controller as well as good disturbance rejection effect due to the robust characteristics of the controller. In conclusion, it is verified that the proposed controller has the simple control structure, the good tracking performances and good disturbance rejection effect due to the robust characteristics of the controller..

• 공학교육연구
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• 제8권1호
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• pp.5-19
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• 2005

이 논문은 삼척대학교 메카트로닉스 공학부에서 자동제어, 디지털제어, 마이크로 프로세서응용의 실습을 위해 사용되는 자기 부상실습장치의 설계와 제작에 관한 것이다. 이 장치는 MIT 대학의 설계에서 영감을 받아 개발되었으나, MIT의 장치가 아날로그형임에 비해 디지털형으로 개발하였다. 이 실습장치는 아날로그와 디지털 방식으로 동시에 제어하고 모니터할 수 있다. 더구나 부품의 가격은 MIT의 것과 비슷하거나 더 싼 편이다. 그리고 이 장치는 자기 홀 센서나 적외선 센서를 이용하여 제어할 수 있어서 학생들에게는 센서의 사용과 신호처리를 위한 다양한 경험을 얻을 수 있도록 되어있다. 이 설계는 저자들이 제작하여 시험해 보았으며, 학생들에게 실험 프로젝트 형식으로 제공될 것이다. 이 장치는 의도적으로 덜 보상되어지고, 적당한 수준까지만 조립된 상태에서 학생들에게 제공될 것이며, 학생들은 센서신호와 제어기의 성능을 분석한 후 보상기를 설계하고 센서의 신호를 처리할 것이 기대된다.

• 한국산학기술학회논문지
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• 제7권5호
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• pp.830-836
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• 2006

본 논문에서는 기존의 PID 제어기와 퍼지 제어기의 특성을 공통으로 갖는 새로운 형태의 신경회로망 기반 자동 동조 뉴로-퍼지 PID제어기를 제안하였다. 제안된 제어기는 퍼지의 선형성을 이용하여 퍼지 PID 제어기의 퍼지 연산부를 간략화 시키고 일반 PID 제어기와 유사한 입출력 특성을 갖도록 하였으며 비선형 성분 보상을 위하여 제어기 출력에 가장 큰 영향을 미치는 출력측 스케일 계수를 단일 신경 회로망 구조로 변경하고 PID 제어기 구조를 유지하게 하였다. 또한 단일 신경 회로망 구조를 이용함으로써 신경회로망의 초기 연결강도와 계산량에 대한 문제점을 해결하고 오차의 부호 정보에 따라 학습계수를 변화시키는 가변 학습계수 역전파 알고리즘을 사용하여 오버 슈트가 작으면서도 빠른 수렴 속도를 갖도록 하였다. 제안된 제어기를 비선형성이 강한 시스템으로 알려진 자기 부양(magnetic levitation) 시스템에 실제 적용하여 본 논문에서 제안한 제어기의 우수한 성능을 확인하였다.