• Title/Summary/Keyword: Lee Sam

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MOCVD TiN FOR HIGH TEMPERATURE PROCESS

  • Lee, Sang-Hyeob;Kim, Jeong-Tae;Seo, Hwan-Seok;Chae, Moo-Sung;Kim, Sam-Dong
    • Proceedings of the Materials Research Society of Korea Conference
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    • 1998.08a
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    • pp.153.2-153
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    • 1998
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