• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.37-37
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• 2003

Ferroelectric random acess memories (FeRAMs) 재료로 주목받고 있는 강유전 물질은 이미 여러 해 전부터 많은 물질들에 대해 연구가 진행되어 왔다. 그 중 낮은 공정 온도를 가지며 큰 remanent polarization 값을 갖는 lead zirconium titanate (PZT) 박막에 대해 많은 연구가 진행되고 있다. 하지만 Pt 기판위에 증착된 PZT 박막은 높은 피로 현상을 보이는 문제가 있다. 최근 Pulsed laser deposition이나 metal-organic vapor phase epitaxy (MOVPE) 등의 방법에 의해 epitaxial substituted-$Bi_4Ti_3O_{12}$ (La, Nd) 박막에 대해 보고가 되고 있다. 본 연구에서는 높은 remanent polarization 값을 갖는 $(Bi,Ce)_4Ti_3O_{12}$ (BCT) 박막을 pulsed laser deposition 방법을 사용하여 증착하였다. 또한 Bismuth의 양을 변화시켜 Bismuth의 양에 따른 remanent polarization의 변화를 확인하여 보았다. 사용된 기판은 Pt/$TiO_2$/$SiO_2$/Si 기판을 사용하였다.

• 한국전기전자재료학회논문지
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• 제31권2호
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• pp.94-97
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• 2018

Lead zirconate titanate/poly-vinylidene fluoride (PZT/PVDF) piezoelectric devices were fabricated by incorporating carbon nanotubes (CNTs), for use as flexible energy harvesting devices. CNTs were added to maximize the formation of the ${\beta}$ phase of PVDF to enhance the piezoelectricity of the devices. The phase transition of PVDF induced by the addition of CNTs was confirmed by analyzing the X-ray diffraction patterns, scanning electron microscopy images, and atomic force microscopy images. The enhanced output efficiency of the PZT/PVDF piezoelectric devices was confirmed by measuring the output current and voltage of the fabricated devices. The maximum output current and voltage of the PZT/PVDF piezoelectric devices was 200 nA and 350 mV, respectively, upon incorporation of 0.06 wt% CNTs.

• 한국공작기계학회논문집
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• 제14권3호
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• pp.32-37
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• 2005

Several types of smart materials and control scheme are available to adjust the structure actively in various external disturbances. A control scheme was introduced for a specific material. But the effectiveness of the control scheme has some limitation according to the choice of the smart materials and the response of the structure. The ER(Electrorheological) fluid is adequate for a large control force, and the PZT(lead zirconate titanate) patches are suitable for small but arbitrary control force at any point of the structure. It can be used for active control of structure by changing the dynamic characteristics of the structure. But it has some difficulty in suppressing the excited vibration in broad band. To compensate this resonance of the controlled structure, a hybrid controller was constructed using PPF(Positive position feedback) control with PZT and ER fluid control.

• 한국인쇄학회지
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• 제14권1호
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• pp.1-15
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• 1996

In this paper, the preparation of lead zirconium titanate(PZT) thin film by sol-gel processing was descried. Thin film coated with thickness of 4${\mu}{\textrm}{m}$ on the stainless steel substrates using the multiple spin-coating process. The crystalline phases of PZT powder and film were investigated by X-ray diffraction pattern and PZT thin film has perovskite structure over 600 C annealing temperature. Corona charging characteristics of the ferroelectric PZT thin film at 600 C were investigated by electrophotographic measurement. A difference in the charging characteristics between positive and negative corona charging was found. The charge acceptance depended in the polarity of corona and the poling of film. According to the D-E hysteresis measurment, PZT thin film can be poled by corona charging without use of top electrode. The remnant polarization in the PZT thin film is generally in the order of 48$\mu$C/$\textrm{cm}^2$. From this results, the ferroelectric PZT thin film will be possible to apply for the add-on type imaging formation.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.717-720
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• 2001

Ferroelectric lead ziroconate titanate (PZT) thin film were fabricated on the different bottom electrodes. Both Ru and Ru/RuO$_2$bottom electrodes were deposited by RF-magnetron sputteirng method. The structure phase and surface morphology of the PZT thin film were largely affected by the bottom electrode. It was observerd that used of Ru/RuO$_2$double electrode reduced leakage current and better ferroelectric properties compare with RuO$_2$bottom electrode. From these results, Ru/RuO$_2$hybride bottom electrode is thought to be the available structure for the bottom electrode.

• 한국세라믹학회지
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• 제30권7호
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• pp.578-588
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• 1993

Highly c-axis oriented ferroelectric PbTiO3 thin films were deposited on MgO single crystal substrates by RF magnetron sputtering. We have studied the effects of substrate temperature, RF input power, gas comosition, gas pressure and deposition rate on the chemical and structural characteristics of PbTiO3 thin films. The epitaxy relationship of c-axis oriented films was found to be PbTiO3{100}//MgO(100) and their microstructures were highly mosaic. It was found that the most important parameter to achieve epitaxial PbTiO3 films was the substrate temperature. The activation energy for the epitaxy formation was about 0.92eV. Lower gas pressure and RF input power were favorable for the formation of epitaxial c-axis orientation. It was also found that the optimum oxygen content in Ar gas was 10% to obtain the stoichiometric PbTiO3 composition.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1989년도 하계종합학술대회 논문집
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• pp.333-334
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• 1989

Electrically active part of the piezoelectric sound element is a ceramic thin circular disk cemented to a metal base plate (using a type of thermosetting epoxy). The active part is a thin lead zirconate titanate disk (PZT). The piezoelectric sound element is so dimensioned that its basic resonance frequency is approximately if the center of the audible frequency band: This frequency is mainly determined by the geometry and the sort of the metal base plate materials. In this study, four kinds of PZT ceramic and two classes of thin metal base plate were prepared. It is observed that dielectric and pizoelectric properties relate to acoustical properties (particularly sound pressure level).

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.652-655
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• 2003

In this paper, step-down piezoelectric transformer is studied. The piezoelectric transformer, made of lead zirconate titanate solid solution ceramic, is operated by a fundamental contour-extensional vibration mode. The transformer of 14mm length, 14mm width and 4.5mm thickness was made up two shape(Type I and II). The resonant frequency (fr) is 144kHz and 128kHz at the load resistant of $7.5{\Omega}$ that is a similar to calculating matching impedance. The gain (G) obtained 0.19 and 0.08 at each resonant frequency, when applied input voltage is 25V. The temperature difference with the variation of load resistant was increased with increasing load resistant and was the lowest at $7.5{\Omega}$ near the matching of output impedance.

• The Korean Journal of Ceramics
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• 제5권4호
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• pp.409-413
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• 1999

A two-beam polarization (TBP) interfermeter with a reflection configuration for measuring the linear electroptic coefficient is described and investigated experimentally and theoretically. It is shown that a TBP interferometer can be used for measuring the Pockels coefficient of thin film with a strong Fabry-Perot effect. The TBP interferometer technique is used to measure the effective differential linear electro-optic coefficient $re=r_{33}-(n_0/n_0)^3r_{13}$of lead zirconate titanate (PZT) thin film. The results are in agreement with known data.

• 한국세라믹학회지
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• 제34권5호
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• pp.461-466
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• 1997

Dielectric and piezoelectric properties of (Pb1-1.5xLnx)(Ti0.98Mn0.02)O3 ceramics with x=0~0.2 have been investigated. Pb(Ti0.98Mn0.02)O3 showed poor sinterability and cracking on cooling, but the substitution of Nd3+ ions into Pb2+ sites resulted in dense microstructures without cracking through reducing crystallographic anisotropy. The Nd3+ substitution, however, deteriorated the temperature stability of the piezoelectric properties because of lowering the Curie point. Electromechanical anisotropy(Kt/Kp) indicated a maximum value of 10 when x=0.1. This result might be attributed to the counteracting effects that with increasing x, the lattice anisotropy decreases while the poling becomes easier due to the increase in O2- vacancy concentration. Thickness-shear mode resonators with (Pb0.85Nd0.1)(Ti0.98Mn0.02)O3 composition showed good resonant characteristics around 4.5 MHz.