The Effects of Process Parameters on the Composition and Microstructure of Lead Titanate Thin Films deposited by ECR PECVD (ECR PECVD법으로 증착된 lead titanate박막의 조성과 미세구조에 대한 증착변수의 영향)
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- Korean Journal of Materials Research
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- v.7 no.2
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- pp.93-101
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- 1997