• 제목/요약/키워드: Layer transfer(LT)

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저가격 박막 실리콘 기판을 위한 단결정 실리콘 웨이퍼에 layer transfer 형성 연구 (Cost down thin film silicon substrate for layer transfer formation study)

  • 권재홍;김동섭;이수홍
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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    • pp.85-88
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    • 2004
  • Mono-crystalline silicon(mono-Si) is both abundant in our environment and an excellent material for Si device applications. However, single crystalline silicon solar cell has been considered to be expensive for terrestrial applications. For that reason, the last few years have seen very rapid progress in the research and development activities of layer transfer(LT) processes. Thin film Si layers which can be detached from a reusable mono-Si wafers served as a substrate for epitaxial growth. The epitaxial films have a very high efficiency potential. LT technology is a promising approach to reduce fabrication cost with high efficiency at large scale since expensive Si substrate can be recycled. Low quality Si can be used as a substrate. Therefore, we propose one of the major technologies on fabricating thin film Si substrate using a LT. In this paper, we study the LT method using the electrochemical etching(ECE) and solid edge.

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리튬이온전지의 유기용매분해에 따른 SEI film 형성과 전기화학적 거동에 관한 연구 (A study on the SEI film formation as organic solvent decomposition of lithium ion batteries and its electrochemical behavior)

  • 김민성;구할본
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.545-549
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    • 2001
  • We have produced electrolyte solution out of 1.15M $LiPF_6$ EC/EMC/DEC/PC(30/55/10/5 by vol%) as a reference, and at the same time, performed basic physical property test using a single solvent of 1.15M $LiPF_6$ DEC, DMC, EMC and a 2 component electrolyte solution of 1.15M $LiPF_6$ EC/DEC(1/2 by vol%) and PC/DEC(1/2 by vol%). Cyclic Voltammetry Analysis showed that, compared to existing carbonate organic solvent, the addition of DEC,DMC and EMC brought the de-decomposition peak of salt anion of $PF_6$ and the solvent at lower oxidization potential of 2.3V, 0.7V and 2.1V(vs. $Li/Li^+$). In addition, a kinetics current peak, in which intercalation of Lt is proceeded at 750mV, 450mV(vs. $Li/Li^+$), was confirmed. These findings suggest that the DEC solvent decomposition occurred at an electric potential lower than that of oxidization of existing carbonate organic solvent. Through the impedance analysis, we checked electric charge transfer resistance($R_{ct}$) according to the electric potential of $Li^+$ intercalation at 750mV(vs. $Li/Li^+$), which was the same as the resistance ($R_f$) and cyclic voltammetry of SEI film that was formed at Reference. By doing so, we found that the significant decrease of polarization resistance($R_p$) when Reference was played a part in the formation of compact SEI layer at the initial decomposition reaction.

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