• 한국항공우주학회지
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• 제48권6호
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• pp.479-487
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• 2020

본 논문에서는 라만 분광법과 레이저 유도 플라즈마 분광법(LIPS)을 단일 유닛으로 결합한 새로운 형태의 이중 펄스 레이저 시스템을 제안하였다. 본 연구는 라만 분광법으로부터 분자 신호를 추출하면서, 동시에 레이저 유도 플라즈마 방출 신호를 향상시키고자 하였다. 달의 대기압과 같은 저압 조건에서는 플라즈마 신호 검출은 낮은 전자 밀도와 짧은 지속시간, 빠른 플라즈마 팽창 때문에 어려움을 마주치게 된다. 또한, 우주 탐사를 목표로 하는 검출 시스템의 통합에서, 레이저 시스템의 무게 최소화는 payload의 무게 측면에서 중요하다. 0.07 torr 미만의 저압 조건에서 높은 분해능의 스펙트럼 데이터를 제공하는 본 연구의 동시 분자 및 원자 검출방식은 8개의 암석을 이용하여 증명되었다. 이중 펄스 레이저로부터 생성된 연속된 플라즈마는 종래의 플라즈마 분광과 비교하여 방해석의 산소와 칼슘 신호를 2배 향상시킬 수 있었다.

• 한국기계가공학회지
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• 제19권2호
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• pp.9-17
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• 2020

In this study, the surface changes of titanium alloy using laser surface treatment and the surface analysis using laser-induced plasma spectroscopy were carried out. The laser surface treatment induced changes in surface roughness and the diffusion of atmospheric elements. Excessive melting or less melting caused roughness changes, but when moderate levels of energy were applied, a smoother surface could be obtained than the initial surface. In the process, the diffusion of atmospheric elements took place. To analyze the diffusion of atmospheric elements with respect to surface morphology, the surfaces were re-shaped with grinding. In this experimental conditions, the effect of plasma formation by surface roughness was identified. Compensated plasma signals for the material properties were obtained and analysed by removing the background plasma signal.

• 분석과학
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• 제32권4호
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• pp.121-130
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• 2019

Alumina is one of the most important ceramic materials because of its useful physical and chemical properties. Recently, high-purity alumina has been used in various industrial fields. This leads to increasing demand for reliable elemental analysis of impurities in alumina samples. However, the chemical inertness of alumina makes the sample preparation for conventional elemental analysis a tremendously difficult task. Herein, we demonstrated the feasibility of laser ablation for effective sampling of alumina powder. Laser ablation performs sampling rapidly without any chemical reagents and also allows simultaneous optical emission spectroscopy and mass spectrometry analyses. For six alumina samples including certified reference materials and commercial products, laser-induced breakdown spectroscopy (LIBS) and laser-ablation inductively-coupled plasma mass spectrometry (LA-ICP-MS) analyses were performed simultaneously based on a common laser ablation sampling. LIBS was found to be useful to quantify alkali and alkaline earth metals with limits-of-detection (LODs) around 1 ppm. LA-ICP-MS could quantify transition metals such as Ti, Cu, Zn, and Zr with LODs in the range from a few tens to hundreds ppb.

• 분석과학
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• 제33권2호
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• pp.86-97
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• 2020

Reconstruction and separation of explosive-contaminated overlapping fingerprints constitutes an analytical challenge of high significance in forensic sciences. Laser-induced breakdown spectroscopy (LIBS) allows real-time chemical mapping by detecting the light emissions from laser-induced plasma and can offer powerful means of fingerprint classification based on the chemical components of the sample. During recent years LIBS has been studied one of the spectroscopic techniques with larger capability for forensic sciences. However, despite of the great sensitivity, LIBS suffers from a limited detection due to difficulties in reconstruction of overlapping fingerprints. Here, the authors propose a simple, yet effective, method of using chemical mapping to separate and reconstruct the explosive-contaminated, overlapping fingerprints. A Q-switched Nd:YAG laser system (1064 nm), which allows the laser beam diameter and the area of the ablated crater to be controlled, was used to analyze the chemical compositions of eight samples of explosive-contaminated fingerprints (featuring two sample explosive and four individuals) via the LIBS. Then, the chemical validations were further performed by applying the Raman spectroscopy. The results were subjected to principal component and partial least-squares multivariate analyses, and showed the classification of contaminated fingerprints at higher than 91% accuracy. Robustness and sensitivity tests indicate that the novel method used here is effective for separating and reconstructing the overlapping fingerprints with explosive trace.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2013년도 제46회 KOSCO SYMPOSIUM 초록집
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• pp.99-101
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• 2013

The equivalence ratio is measured by LIBS(Laser-induced Breakdown spectroscopy) in hydrocarbon flame and high temperature (${\sim}3200^{\circ}C$) oxyhydrogen flame, where a stoichiometric mixture of hydrogen and oxygen is produced from water through electrolysis. The ratio of the hydrogen and oxygen (H/O) atomic lines intensities is used for quantitatively determining the quivalence ratio. laser energy is evaluated for determining the optimal condition for plasma diagnostics. The minimum laser energy for generating plasma in a laminar premixed hydrocarbon flame was about 70 mJ, whereas oxyhydrogen flame. consequently the irradiated spot of a lower density in high temperature oxyhydrogen flame gave rise to bigger plasma in size, thus limiting the spatial resolution of the LIBS measurement.

• 한국항공우주학회지
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• 제39권5호
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• pp.451-457
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• 2011

레이저 조사 시 발생되는 플라즈마는 물질에 따라 특정한 파장의 빛을 방출하므로, 이 빛을 수집하여 물질의 구성 성분을 정성 정량적으로 분석할 수 있다. LIBS(Laser-Induced Breakdown Spectroscopy)는 실시간에 가까운 분석과 원거리 검출이 가능하다는 점에서 우주 자원 탐사 기술로 주목받고 있다. 본 연구에서는 달 환경, 즉 고진공 하에서의 성분 분석을 위하여 double-pulse LIBS 기법을 이용하여 LIBS 신호 세기를 크게 증가시켰다. 또한 시편에 레이저가 조사되는 각도를 조절하여 임의 형상 물질의 분석을 모사하였다.

• Journal of the Optical Society of Korea
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• 제18권1호
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• pp.50-54
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• 2014

In this paper we studied the laser-induced crater depth, mass, and emission spectra of laser-ablated high-density polyethylene (HDPE) polymer using the laser-induced plasma spectroscopy (LIPS) technique. This study was performed using a Nd:YAG laser with 100 mJ energy and 7 ns pulse width, focused normal to the surface of the sample. The nanoscale change in ablated depth versus number of laser pulses was studied. By using scanning electron microscope (SEM) images, the crater depth and ablated mass were estimated. The LIPS spectral intensities were observed for major and minor elements with depth. The comparison between the LIPS results and SEM images showed that LIPS could be used to estimate the crater depth, which is of interest for some applications such as thin-film lithography measurements and online measurements of thickness in film deposition techniques.

• 분석과학
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• 제22권2호
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• pp.141-147
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• 2009

Laser induced breakdown spectroscopy (LIBS)의 정량분석에 대한 측정의 정확도를 향상시키고자, 플라즈마의 특성을 분석하여, 상대적으로 안정적인 Outer sphere에 해당하는 영역을 측정하는 방법으로 Cu alloy sample을 측정하여 분석하였다. 신호의 높은 재현성을 고려한 측정 조건에서 측정이 수행되었으며, 600 mtorr 진공상태에서 20 mm정도의 크기로 플라즈마를 성장시켜, Outer sphere 영역인 플라즈마 성장방향으로 6.0 mm 지점을 측정하였다. 그 결과 Cu의 선형 분석 $R^2$ 값은 0.9886로, Ni의 $R^2$ 값은 0.9988로 획득하였으며, 측정오차는 Ni의 경우 기존보다는 향상된 0.78%의 측정오차를 획득하였다.

• 대한기계학회논문집 C: 기술과 교육
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• 제3권4호
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• pp.291-297
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• 2015

미래의 화석연료를 대체할 가능성이 큰 에너지원으로써, 수소는 인류의 궁극적인 연료로 주목받고 있으나, 작은 분자 크기로 인하여 저장 용기의 작은 틈으로부터 쉽게 누설된다. 본 연구에서는 수소 누설을 탐지하기 위하여 레이저 유도 붕괴 분광법(Laser Induced Breakdown Spectroscopy, LIBS)을 사용하였고, 플라스마 생성 방법에 따른 본 기술의 적합성을 평가하였다. 금속 표면에 플라스마를 일으켜 수소 원자광을 얻는 방법은 플라스마를 작은 레이저 출력 (295mW)에서 유도 할 수 있지만, 수소 기체에 직접 플라스마를 유도하는 방법은 약 2.6배 높은 레이저 출력이 필요하였다. 두 방법 모두 픽 투 베이스(Peak to Base) 비율이 수소농도에 대하여 선형적인 경향을 보였으며, 공기 중 수소의 농도가 5% 미만인 경우 본 기술은 수소 누설 검출에 적합한 기술로 판단된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.98-99
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• 2012

Deposition of thin films using magnetron sputtering plasmas is a well-developed, classical technology. However, detailed investigations using advanced diagnostics are insufficient in magnetron sputtering, in comparison with plasma-aided dry etching and plasma-enhanced chemical vapor deposition. In this talk, we will show examples of diagnostic works on magnetron sputtering employing metal targets. Diagnostic methods which have fine spatial resolutions are suitable for magnetron sputtering plasmas since they have significant spatial distributions. We are using two-dimensional laser-induced fluorescence spectroscopy, in which the plasma space is illuminated by a tunable laser beam with a planer shape. A charge-coupled device camera with a gated image intensifier is used for taking the picture of the image of laser-induced fluorescence formed on the planer laser beam. The picture of laser-induced fluorescence directly represents the two-dimensional distribution of the atom density probed by the tunable laser beam, when an intense laser with a relatively wide line-width is used. When a weak laser beam with a relatively narrow linewidth is used, the laser-induced fluorescence represents the density distribution of atoms which feel the laser wavelength to be resonant via the Doppler shift corresponding to their velocities. In this case, we can obtain the velocity distribution function of atoms by scanning the wavelength of the laser beam around the line center.