• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.12
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• pp.1171-1176
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• 2012

The selective patterning of a carbon nanotube (CNT) forest on a Si substrate has been performed using a femtosecond laser. The high shock wave generated by the femtosecond laser effectively removed the CNTs without damage to the Si substrate. This process has many advantages because it is performed without chemicals and can be easily applied to large-area patterning. The CNTs grown by plasma-enhanced chemical vapor deposition (PECVD) have a catalyst cap at the end of the nanotube owing to the tip-growth mode mechanism. For the application of an electron emission and biosensor probe, the catalyst cap is usually removed chemically, which damages the surface of the CNT wall. Precise control of the femtosecond laser power and focal position could solve this problem. Furthermore, selective CNT cutting using a femtosecond laser is also possible without any phase change in the CNTs, which is usually observed in the focused ion beam irradiation of CNTs.

• Journal of Mechanical Science and Technology
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• v.17 no.12
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• pp.2107-2115
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• 2003

A supersonic dual coaxial jet has been employed popularly for various industrial purposes, such as gasdynamic laser, supersonic ejector, noise control and enhancement of mixing. Detailed characteristics of supersonic dual coaxial jets issuing from an inner supersonic nozzle and outer sonic nozzles with various ejection angles are experimentally investigated. Three important parameters, such as pressure ratios of the inner and outer nozzles, and outer nozzle ejection angle, are chosen for a better understanding of jet structures in the present study. The results obtained from the present experimental study show that the Mach disk diameter becomes smaller, and the Mach disk moves toward the nozzle exit, and the length of the first shock cell decreases with the pressure ratio of the outer nozzle. It was also found that the highly underexpanded outer jet produces a new oblique shock wave, which makes jet structure much more complicated. On the other hand the outer jet ejection angle affects the structure of the inner jet structure less than the pressure ratio of the outer nozzle, relatively.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.11a
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• pp.72-75
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• 2007

레이저를 steel 표면에 조사하면, steel은 레이저의 복사 에너지를 홉수하여 급격히 가열되어 온도가 증가한다. 이때 steel에서는 phase explosion이 발생하고 shock wave와 플라즈마가 생성된다. 본 연구에서는 이 steel의 후면에 고폭화약을 접해 놓고 레이저 가열에 의한 화약의 점화 현상을 살펴보았다. 이를 위해 heat diffusion equation과 chemical heat release를 사용하였고, 고에너지 물질의 열분해 반응을 위해 3 step global kinetics를 사용하였다. 또한, 계산된 결과는 실험 결과와의 비교를 통해 검증 되었다.

• 한국가시화정보학회:학술대회논문집
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• 2002.11a
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• pp.1-6
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• 2002

How is the flow in a rotating impeller. About 35 years have passed since one experimentalist rotating with the impeller. of a huge centrifugal blower made the flow measurements using a hot-wire anemometer (Fowler 1968). Optical measurement methods have great advantages over the intrusive methods especially for the flow measurement in a rotating impeller. One is the optical flow visualization (FV) technique (Senoo, et al., 1968) and the other is the application of laser velocimetry (LV) (Hah and Krain, 1990). Particle image velocimetries (PIVs) combine major features of both FV and LV, and are very attractive due to the feasibility of simultaneous and multi-points measurements (Hayami and Aramaki, 1999). A high-pressure-ratio transonic centrifugal compressor with a low-solidity cascade diffuser was tested in a closed loop with HFC134a gas at 18,000rpm (Hayami, 2000). Two kinds of measurement techniques by image processing were applied to visualize a flow in the compressor. One is a velocity field measurement at the inducer of the impeller using a PIV and the other is a pressure field measurement on the side wall of the cascade diffuser using a pressure sensitive paint (PSP) measurement technique. The PIV was successfully applied for visualization of an unsteady behavior of a shock wave based on the instantaneous velocity field measurement (Hayami, et al., 2002b) as well as a phase-averaged velocity vector field with a shock wave over one blade pitch (Hayami, et al., 2002a. b). A violent change in pressure was successfully visualized using a PSP measurement during a surge condition even though there are still some problems to be overcome (Hayami, et al., 2002c). Both PIV and PSP results are discussed in comparison with those of laser-2-focus (L2F) velocimetry and those of semiconductor pressure sensors. Experimental fluid dynamics (EFDs) are still growing up more and more both in hardware and in software. On the other hand, computational fluid dynamics (CFDs) are very attractive to understand the details of flow. A secondary flow on the side wall of the cascade diffuser was visualized based either steady or unsteady CFD calculations (Bonaiuti, et al.,2002). EFD and CFD methods will be combined to a hybrid method being complementary to each other. Measurement techniques by image processing as well as CFD calculations give a huge amount of data. Then, data mining technique will become more important to understand the flow mechanism both for EFD and CFD.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.1
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• pp.67-71
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• 2010

Impingement of a high power laser pulse (above 1 GW/$cm^2$) on a metal foil causes its ablation, which is characterized by a rapid expulsion of matter and the initiation of a strong shock wave inside the solid metal. The shock propagates through the foil and reverberates on the rear side, causing its deformation and microparticle ejection, which were deposited on the foil prior to ablation. Based on this principle, we are developing a new drug delivery system - Biolistic gun. Current study is focused on the controllability, stability, efficiency of the system, and characterization of the penetration shapes in various conditions. We have tested the system by applying direct and confined ablation. Several different media combinations were used for confinement-BK7 glass, water, BK7 glass with water, and succulent jelly(ultrasono jelly, RHAPAPHRM). Biological tissue was replicated by a 3% gelatin solution. Present data shows that the confinement results in enhancement of penetration shape reached by 5 um cobalt microparticles. Based on the analysis of the experimental results we observe that the penetration shape of microparticles can be controlled by adjusting the thickness of confinement media.

• Journal of the Korea Institute of Military Science and Technology
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• v.15 no.2
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• pp.201-207
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• 2012

Pulsed lasers at the 613 nm and 1064 nm wavelengths on nanoseconds have been utilized to characterize the damage on Si photodiode exposed to intense illumination. Morphological damages and structural changes at sites on the photodiode irradiated during microseconds of laser pulses were analyzed by FE-SEM images and XRD patterns, respectively. The removal of oxide coating, ripple, melting marks, ridges, and crater on photodiodes were definitely observed in order of increasing the pulse intensities generated above the damage threshold. Then, the degradation in photosensitivity of the Si photodiode irradiated by high power density pulses was measured as a function of laser irradiation time at the various wavelengths. The free charge carrier and thermal diffusion mechanisms could have been invoked to characterize the damage. The relative photosensitivity data calculated using the thermal diffusion model proposed in this paper have been compared with the experimental data irradiated above the damage threshold.

• Proceedings of the Korean Society of Medical Physics Conference
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• 2002.09a
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• pp.396-399
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• 2002

Intense quasi-monochromatic x-ray irradiation from the linear plasma target is described. The plasma x-ray generator employs a high-voltage power supply, a low-impedance coaxial transmission line, a high-voltage condenser with a capacity of about 200 nF, a turbo-molecular pump, a thyristor pulse generator as a trigger device, and a flash x-ray tube. The high-voltage main condenser is charged up to 55 kV by the power supply, and the electric charges in the condenser are discharged to the tube after triggering the cathode electrode. The x-ray tube is of a demountable triode that is connected to the turbo molecular pump with a pressure of approximately 1 mPa. As electron flows from the cathode electrode are roughly converged to the molybdenum target by the electric field in the tube, the weakly ionized plasma, which consists of metal ions and electrons, forms by the target evaporating. In the present work, the peak tube voltage was almost equal to the initial charging voltage of the main condenser, and the peak current was about 20 kA with a charging voltage of 55 kV. When the charging voltage was increased, the linear plasma x-ray source grew, and the characteristic x-ray intensities of K-series lines increased. The quite sharp lines such as hard x-ray lasers were clearly observed. The quasi-monochromatic radiography was performed by a new film-less computed radiography system.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.25.1-25.1
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• 2009

Pattern 웨이퍼 상의 오염입자 제거는 반도체 산업의 주된 과제 중 하나이다. Pattern의 선폭이 좁아짐에 따라 Pattern에 손상을 가하지 않고 오염입자를 제거 하는 것은 더욱 어려워지고 있다. 그뿐만 아니라 기존 습식세정 공정에서의 화학액에 의한 환경오염 및 박막의 손실도 문제가 되기 시작했다. 이러한 문제를 해결하기 위해 기존 세정공정에서 화학액의 농도를 낮추고 Megasonic 등을 이용하여 세정력을 보완하는 방법들이 연구되고 있다. 하지만 습식세정의 경우 강한 화학작용으로 인한 표면 손상 및 물 반점의 문제는 여전히 이슈가 되고 있다. 이러한 단점을 극복하기 위하여 건식 세정법이 제시되고 있으며 이 중 레이저 충격파는 레이저를 집속시켜 발생된 충격파를 이용하여 입자를 제거하기 때문에 국부적인 세정이 가능하며 세정력 조절이 가능하여 손상이 세정을 할 수 있다. 그러나 Pattern의 구조에 의해 전되는 세정력의 차이가 발생하고 Trench 내부의 오염입자제거 문제점이 발생할 수 있다. 시편은 Si STI Pattern을 100 nm PSL Particle (Red Fluorescence, Duke Scientific, USA) 을 50ppm 농도로 희석시킨 IPA에 dipping 하여 오염시킨 후 N2 Gas를 이용하여 건조하여 준비하였다. 그리고 레이저 충격파 세정 시스템은 최대 에너지 1.8 J까지 가능한 레이저를 발생하는 1,064 nm Nd:YAG 레이저를 이용하여 실험하였다. 레이져 충격파 실험은 충격파와 시편사이의 거리, gap distance와 에너지를 변환하여 세정효율을 관찰하였다. 세정효율은 세정 전후의 입자 감소량을 현광현미경 (LV-150, Nikon, Japan)를 이용하여 측정하였다. 그 결과, Trench 내부의 오염입자의 경우 Trench 밖의 오염입자에 비해 세정효율이 떨어지는 것으로 나타났으나 시편과 레이저 초점과의 거리가 가까워짐에 따라 Trench 내부의 오염입자에 대한 세정 효율을 증가시킬 수 있었다.

• Journal of the korean academy of Pediatric Dentistry
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• v.36 no.1
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• pp.114-118
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• 2009

Sialolithiasis is the formation of calcific concretions within the ductal system of major or minor salivary glands. The submandibular gland is most involved because of its high viscosity of the saliva and the long, curved duct. It may occur at any age but, it is most common in middle-aged adults and rare in childhood. Clinical symptoms in sialolithiasis are variable but, swelling is the most common, followed by the pain. Clinical examination and radiographic examination(panoramic and mandibular occlusal radiographs, sialography, intraoral-, extraoral- ultrasound, CT scan, MRI and sialoendoscopy) can help to confirm a diagnosis and localize a stone. The treatment is surgical intervention, either removal of the sialolith or sialoadenectomy. However, non-invasive techniques including shock-wave lithotripsy, $CO_2$ laser and endoscopic treatment used in selected cases. A 5-Year-old girl referred from private practice for evaluation of a yellowish mass on the floor of the mouth. She complained that it had became three times bigger than four months ago when it was found for the first time and she had some pain on submandibular gland area occasionally. On physical examination, a firm and yellowish mass could be seen at the orifice of the submandibular duct. Diagnosis is the submandibular sialolithiasis in the anterior Wharton`s duct. Under local anesthesia, stone was removed.