• Title/Summary/Keyword: Laser process

Search Result 2,460, Processing Time 0.03 seconds

Study on low-k wafer engraving processes by using UV pico-second laser (Low-k 웨이퍼 레이저 인그레이빙 특성에 관한 연구)

  • Nam, Gi-Jung;Moon, Seong-Wook;Hong, Yoon-Seok;Bae, Han-Seong;Kwak, No-Heung
    • Proceedings of the Korean Society of Laser Processing Conference
    • /
    • 2006.11a
    • /
    • pp.128-132
    • /
    • 2006
  • Low-k wafer engraving process has been investigated by using UV pico-second laser with high repetition rate. Wavelength and repetition rate of laser used in this study are 355nm and 80MHz, respectively. Main parameters of low-k wafer engraving processes are laser power, work speed, assist gas flow rate, and protective coating to eliminate debris. Results show that engraving qualities of low-k layer by using UV pico-second pulse width and high repetition rate had better kerf edge and higher work speed, compared to one by conventional laser with nano-second pulse width and low repetition rate in the range of kHz. Assist gas and protective coating to eliminate debris gave effects on the quality of engraving edge. Total engraving width and depth are obtained less than $20{\mu}m$ and $10{\mu}m$ at more than 500mm/sec work speed, respectively. We believe that engraving method by using UV pico-second laser with high repetition rate is useful one to give high work speed of laser material process.

  • PDF

Numerical Simulation of Transport Phenomena for Laser Full Penetration Welding

  • Zhao, Hongbo;Qi, Huan
    • Journal of Welding and Joining
    • /
    • v.35 no.2
    • /
    • pp.13-22
    • /
    • 2017
  • In laser full penetration welding process, full penetration hole(FPH) is formed as a result of force balance between the vapor pressure and the surface tension of the surrounding molten metal. In this work, a three-dimensional numerical model based on a conserved-mass level-set method is developed to simulate the transport phenomena during laser full penetration welding process, including full penetration keyhole dynamics. Ray trancing model is applied to simulate multi-reflection phenomena in the keyhole wall. The ghost fluid method and continuum method are used to deal with liquid/vapor interface and solid/liquid interface. The effects of processing parameters including laser power and scanning speed on the resultant full penetration hole diameter, laser energy distribution and energy absorption efficiency are studied. The model is validated against experimental results. The diameter of full penetration hole calculated by the simulation model agrees well with the coaxial images captured during laser welding of thin stainless steel plates. Numerical simulation results show that increase of laser power and decrease of welding speed can enlarge the full penetration hole, which decreases laser energy efficiency.

A Study of Welding Characteristics of Inconel 600 Alloy by High Power Laser (고출력 레이저를 이용한 인코넬 600 합금의 용접 특성 연구)

  • 송성욱;유영태;신호준
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
    • /
    • 2004.04a
    • /
    • pp.203-208
    • /
    • 2004
  • The laser welding process is one of the most advanced manufacturing technologies owing to its high speed and deep penetration. Welding characteristics of Inconel 600 Alloy using a continuous wave Nd:YAG laser are experimentally investigated. The major process parameters studied in the present laser welding experiment were position of focus, laser power, travel speed. The gap and offset maintained as small as possible. Optical microscope were used to investigate the microstructures of the welded zone. The follow conclusions can be drawn the laser power and travel speed have a pronounced effect the fusion zone size and shape.

  • PDF

Selective Electrodeposition on Titanium Surface Using Laser Beam (레이저빔을 이용한 티타늄 표면에서의 선택적 구리 전해도금)

  • Shin, Hong Shik
    • Journal of the Korean Society of Manufacturing Technology Engineers
    • /
    • v.26 no.1
    • /
    • pp.44-49
    • /
    • 2017
  • Titanium has been used in various fields due to its good corrosion and erosion resistance, and superior mechanical properties. The process for selective electro-deposition on a titanium surface using laser beam is proposed in this paper. The process consists of laser irradiation, electro-deposition, and ultrasonic cleaning. Laser irradiation can change the surface morphology of titanium. Through laser irradiation, the surface cleaning effect and a rough surface can be achieved. The surface roughness of titanium was measured according to the laser beam conditions. The characteristics of selective electro-deposition on titanium surface according to surface roughness are investigated by various analytical methods such as SEM, and EDS.

Laser-induced Thermochemical Wet Etching of Titanium for Fabrication of Microstructures (레이저 유도 열화학 습식에칭을 이용한 티타늄 미세구조물 제조)

  • 신용산;손승우;정성호
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.21 no.4
    • /
    • pp.32-38
    • /
    • 2004
  • Laser-induced thermochemical wet etching of titanium in phosphoric acid has been investigated to examine the feasibility of this method fur fabrication of microstructures. Cutting, drilling, and milling of titanium foil were carried out while examining the influence of process parameters on etch width, etch depth, and edge straightness. Laser power, scanning speed of workpiece, and etchant concentration were chosen as major process parameters influencing on temperature distribution and reaction rate. Etch width increased almost linearly with laser power showing little dependence on scanning speed while etch depth showed wide variation with both laser power and scanning speed. A well-defined etch profile with good surface quality was obtained at high concentration condition. Fabrication of a hole, micro cantilever beam, and rectangular slot with dimension of tess than 100${\mu}{\textrm}{m}$ has been demonstrated.

Improvement of Penetration Characteristics by Plasma Augmented Laser Welding of Small Diameter Stainless Steel Tubes (PALW을 이용한 소경 스테인리스강 튜브의 용입특성 개선)

  • Hwang Jae-Ryeon;Yoon Suk-Hwan;Na Suck-Joo
    • Journal of Welding and Joining
    • /
    • v.22 no.6
    • /
    • pp.30-35
    • /
    • 2004
  • Laser welding is obviously an attractive method to join small, thin parts such as small stainless steel tubes, but it is very sensitive to the joint clearance and tolerance, and this makes laser welding difficult to obtain consistent welding qualities over time. Recently, Plasma Augmented Laser Welding(PALW) is being developed to solve these problems. In this study, plasma arc welding(PAW) was introduced to join conventional V-grooved butt joint of thin stainless steel strips using single laser heat source in manufacturing small stainless steel tubes. The effect of the welding speed enhancement is investigated by the experiments. Effects of welding directions, distance between the heat sources and intensity of arc heat source on the optimal welding speed was investigated. Through this research, it was confirmed that PALW process has higher welding speed and robustness than laser welding process.

A Study on the YAG Laser Machining of Cr Thin Films (YAG 레이저에 의한 Cr박막가공에 관한 연구)

  • 강형식;홍성준;박홍식;전태옥
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 1997.04a
    • /
    • pp.1053-1057
    • /
    • 1997
  • Laser thin film process with a Q-switch pulsed YAG laser was performed for micro machining. In this research, we performed basic Cr thin film on glass substrates removal machining experiments. Form experiments, it happens not only evaporration of thin film but also spatter and cohesion of melting substance in working region, when machining a Cr thin film by Q-switch YAG laser beam irradiation. Critical energy of surface irradiation type by irradiation direction of laser in a face composing thin film on the glass is higher than that of back irradiation type, but the latter is favorable because of spatter appearance. In case of image formation position when laser beam is irradiated, the defocus is permitted to a certain extent within forcus depth. Ifexceeds focus depth, formation of pattern is vanishing step by step.

  • PDF

Welding Characteristics of Inconel 600 using a high power CW Nd:YAG Laser (고출력 CW Nd:YAG 레이저를 이용한 인코넬 600의 용접 특성)

  • Yoo Young-Tae;Shin Ho-Jun;Lim Kie-Gon
    • Transactions of the Korean Society of Machine Tool Engineers
    • /
    • v.13 no.6
    • /
    • pp.119-126
    • /
    • 2004
  • The welding characteristics of Inconel 600 Alloy using a continuous wave Nd:YAG laser are experimentally investigated. The major process parameters studied in the present laser welding experiment were the positions of focus, laser power and travel speed of laser bean We measured the fusion zone size and its shape using an optical microscope for the observation of cross-sectional area. We performed two tests regarding the tension and the micro hardness for welding quality estimation. Then we measured residual stress in welds by electronic speckle pattern interferometry(ESPI). In conclusion the optimum butt welding process parameters were 0.5mm focus position, 1.6kW laser power, 1m/min travel speed and 5.5$\ell$/min assist gas discharge.

Precision microdrilling of alumina ceramic substrates by femtosecond laser ablation (펨토초 레이저 어블레이션을 이용한 알루미나 세라믹 기판의 정밀 마이크로 드릴링)

  • Kim, S.H.;Sohn, I.B.;Noh, Y.C.;Lee, J.M.;Jeong, S.H.
    • Laser Solutions
    • /
    • v.11 no.1
    • /
    • pp.25-31
    • /
    • 2008
  • The characteristics of femtosecond laser ablation of $Al_2O_3$ for prescision microfabrication are studied experimentally. Specifically, the process time during femtosecond laser drilling of microholes with $sub-100{\mu}m$ diameter are investigated for varying laser fluence, scan speed and beam path designs like trepanning with continuously changed start points. The accumulation of sub-micrometer size particles within the hole and the deterioration of edge clarity and roundness for decreasing hole diameter are examined and through process optimization the microdrilling with good hole quality is achieved using a femtosecond laser system (repetitionrate 1 kHz, wavelength 785 nm, pulse duration 185 fs)

  • PDF

Development of Post-Processor and Cutting Motion Simulator for 5-axis CNC Laser Cutting Machine (5축 레이저 절단기용 포스트프로세서 및 절단 모션 시뮬레이터 개발)

  • Kang, Jae-Gwan
    • Journal of the Korean Society of Manufacturing Process Engineers
    • /
    • v.8 no.4
    • /
    • pp.7-13
    • /
    • 2009
  • Five-axis laser cutting has great advantages when it is applied to 3-dimensional machining requiring high cutting quality. For developing 5-axis CNC laser cutting systems, however, many problems such as rotating a laser head or a working table, 5-axis servo-control mechanism, tool path generation and post processing, and collision avoidance between a laser head and a work-piece should be solved. In this paper, we deal with developing a dedicated CAM system based on UG-NX3 for 5-axis laser cutting machine. Two essential modules such as post-processor and cutting motion simulation was developed. The developed system was applied to cutting curve defined on 3-D workpiece in order to show the validity of the proposed methods.

  • PDF