• Title/Summary/Keyword: Laser micro-machining

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Automated Inspection System for Micro-pattern Defection Using Artificial Intelligence (인공지능(AI)을 활용한 미세패턴 불량도 자동화 검사 시스템)

  • Lee, Kwan-Soo;Kim, Jae-U;Cho, Su-Chan;Shin, Bo-Sung
    • Journal of the Korean Society of Industry Convergence
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    • v.24 no.6_2
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    • pp.729-735
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    • 2021
  • Recently Artificial Intelligence(AI) has been developed and used in various fields. Especially AI recognition technology can perceive and distinguish images so it should plays a significant role in quality inspection process. For stability of autonomous driving technology, semiconductors inside automobiles must be protected from external electromagnetic wave(EM wave). As a shield film, a thin polymeric material with hole shaped micro-patterns created by a laser processing could be used for the protection. The shielding efficiency of the film can be increased by the hole structure with appropriate pitch and size. However, since the sensitivity of micro-machining for some parameters, the shape of every single hole can not be same, even it is possible to make defective patterns during process. And it is absolutely time consuming way to inspect all patterns by just using optical microscope. In this paper, we introduce a AI inspection system which is based on web site AI tool. And we evaluate the usefulness of AI model by calculate Area Under ROC curve(Receiver Operating Characteristics). The AI system can classify the micro-patterns into normal or abnormal ones displaying the text of the result on real-time images and save them as image files respectively. Furthermore, pressing the running button, the Hardware of robot arm with two Arduino motors move the film on the optical microscopy stage in order for raster scanning. So this AI system can inspect the entire micro-patterns of a film automatically. If our system could collect much more identified data, it is believed that this system should be a more precise and accurate process for the efficiency of the AI inspection. Also this one could be applied to image-based inspection process of other products.

Experimental Investigations into the Precision Cutting of High-pressured Jet for Thin Multi-layered Material (다층박판재료의 초고압 젯 정밀가공에 대한 실험적 연구)

  • Park, Kang-Su;Bahk, Yeon-Kyeung;Lee, Jung-Han;Lee, Chae-Moon;Go, Jeung-Sang;Shin, Bo-Sung
    • Journal of the Korean Society for Precision Engineering
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    • v.26 no.7
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    • pp.44-50
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    • 2009
  • High-pressured jetting is now widely used in the advanced cutting processes of polymers, metals, glass, ceramics and composite materials because of some advantages such as heatless and non-contacting cutting. Similarly to the focused laser beam machining, it is well known as a type of high-density energy processes. High-pressured jetting is going to be developed not only to minimize the cutting line width but also to achieve the short cutting time as soon as possible. However, the interaction behavior between a work piece and high-velocity abrasive particles during the high-pressured jet cutting makes the impact mechanism even more complicated. Conventional high-pressured jetting is still difficult to apply to precision cutting of micro-scaled thin work piece such as thin metal sheets, thin ceramic substrates, thin glass plates and TMM (Thin multi-layered materials). In this paper, we proposed the advanced high-pressured jetting technology by introducing a new abrasives supplying method and investigated the optimal process conditions of the cutting pressure, the cutting velocity and SOD (Standoff distance).