• 제목/요약/키워드: Laser micro-machining

검색결과 132건 처리시간 0.023초

미세성형공정에서의 폴리머 레올로지의 정량화 (Quantitative rheology of polymers in high resolution structuring)

  • 김병희;김헌영;김호;김광순;강신일
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 춘계학술대회
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    • pp.1036-1042
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    • 2003
  • The hot embossing process has been mentioned as one of major nanoreplication techniques. This is due to its simple process, low cost, high replication fidelity and relatively high throughput. As the initial step of quantitating the embossing process , simple parametric study about embossing time have been carried out using high-resolution masters which patterned by the DRIE process and laser machining. Under the various embossing time, the viscous flow of thin PMMA films into microcavities during compression force has been investigated. Also, a study about simulating the viscous flow during embossing process has planned and continuum scale FDM analysis was applied on this simulation. With currently available test data and condition, simple FDM analysis using FLOW3D was made attempt to match simulation and experiment.

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Al 6061의 초정밀 절삭특성 (Ultra Precision cutting Characteristics for Al 6061)

  • 박상진
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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    • pp.591-596
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    • 2000
  • The needs of ultra precision machined parts is increase every days. But the experimental data of nonferrous metal is insufficient. The cutting behavior in micro cutting area is different from that of traditional cutting because of the size effect. Al6061 is widely used as optical parts such as LASER reflector's mirror or multimedia instrument. Al6061 opper is machined by ultra precision machine with natural diamond tool. From the experiment and discussion on the cutting force and worked surface roughness as the variable spindle speed, feed rate and depth of cut. As a result, the cutting force increases as the increasing depth of cut, but the worked surface roughness does not increase so much. The surface roughness is good when spindle sped is above 1200rpm, and feed rate is small. The influence of depth of cut is very small.

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레이저를 이용한 미세가공 (Laser Micro Machining in MEMS)

  • 윤경구;이성국;김재구;최두선;신보성;황경현
    • 한국광학회:학술대회논문집
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    • 한국광학회 2000년도 하계학술발표회
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    • pp.48-49
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    • 2000
  • 최근 몇 년 동안 레이저는 품질과 신뢰성의 계속적인 향상으로 인하여 여러 산업 응용분야에서 폭넓게 사용되어 지고 있다. 재료가공에 있어서 레이저의 적용분야는 금속의 절단, 용접 및 드릴링, 세라믹의 스크라이빙, 플라스틱과 복합재료의 절단 및 여러 가지 재료의 마킹, 등을 포함한다. 이러한 가공 메카니즘은 레이저의 조사에 의하여 재료를 용융, 증발시키는 열적 메카니즘이다. 특히 요즘에는 자외선 영역의 조사와 높은 빔의 세기에 의해 다른 종류의 에너지 전달 메카니즘이 가능한 UV 영역의 엑사이머 레이저의 사용이 증가하고 있다.$^{(1)}$ 이러한 엑사이머 레이저가 기존의 다른 레이저에 비해서 갖는 이점은 다음과 같다. 첫째, 모든 금속이 엑사이머 레이저에 대해서는 높은 흡수율을 가지므로 레이저 에너지가 가공 에너지로 효율적으로 변환되기 때문에 얇은 표면층에서 완전히 흡수하게 된다. (중략)

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미세금형 가공을 위한 전기화학식각공정의 유한요소 해석 및 실험 결과 비교

  • 류헌열;임현승;조시형;황병준;이성호;박진구
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2012년도 춘계학술발표대회
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    • pp.81.2-81.2
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    • 2012
  • To fabricate a metal mold for injection molding, hot-embossing and imprinting process, mechanical machining, electro discharge machining (EDM), electrochemical machining (ECM), laser process and wet etching ($FeCl_3$ process) have been widely used. However it is hard to get precise structure with these processes. Electrochemical etching has been also employed to fabricate a micro structure in metal mold. A through mask electrochemical micro machining (TMEMM) is one of the electrochemical etching processes which can obtain finely precise structure. In this process, many parameters such as current density, process time, temperature of electrolyte and distance between electrodes should be controlled. Therefore, it is difficult to predict the result because it has low reliability and reproducibility. To improve it, we investigated this process numerically and experimentally. To search the relation between processing parameters and the results, we used finite element simulation and the commercial finite element method (FEM) software ANSYS was used to analyze the electric field. In this study, it was supposed that the anodic dissolution process is predicted depending on the current density which is one of major parameters with finite element method. In experiment, we used stainless steel (SS304) substrate with various sized square and circular array patterns as an anode and copper (Cu) plate as a cathode. A mixture of $H_2SO_4$, $H_3PO_4$ and DIW was used as an electrolyte. After electrochemical etching process, we compared the results of experiment and simulation. As a result, we got the current distribution in the electrolyte and line profile of current density of the patterns from simulation. And etching profile and surface morphologies were characterized by 3D-profiler(${\mu}$-surf, Nanofocus, Germany) and FE-SEM(S-4800, Hitachi, Japan) measurement. From comparison of these data, it was confirmed that current distribution and line profile of the patterns from simulation are similar to surface morphology and etching profile of the sample from the process, respectively. Then we concluded that current density is more concentrated at the edge of pattern and the depth of etched area is proportional to current density.

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Experimental Investigation of Concave and Convex Micro-Textures for Improving Anti-Adhesion Property of Cutting Tool in Dry Finish Cutting

  • Kang, Zhengyang;Fu, Yonghong;Chen, Yun;Ji, Jinghu;Fu, Hao;Wang, Shulin;Li, Rui
    • International Journal of Precision Engineering and Manufacturing-Green Technology
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    • 제5권5호
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    • pp.583-591
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    • 2018
  • Tool-chip adhesion impacts on cutting performance significantly, especially in finish cutting process. To promote cutting tools' anti-adhesion property, the concave micro-grooves texture (MGT) and convex volcano-like texture (VLT) were fabricated separately on lathe tools' rake faces by laser surface texturing (LST). Various orientations of MGT and different area densities (9% and 48%) and regions (partial and full) of VLT were considered in textured patterns designing. The following orthogonal cutting experiments, machining of aluminum alloy 5038, analyzed tools' performances including cutting force, cutting stability, chip shape, rake face adhesion and abrasion. It indicated that under dry finish cutting conditions, MGT contributed to cutting stability and low cutting forces, meanwhile friction and normal force reduced by around 15% and 10%, respectively with a weak correlation to the grooves' orientation. High density VLT tools, on the other hand, presented an obvious anti-adhesion property. A $5{\mu}m$ reduction of crater wear's depth can be observed on textured rake faces after long length cutting and textured rake faces presented half size of BUE regions comparing to the flat tool, however, once the texture morphologies were filled or worn, the anti-adhesion effect could be invalid. The bearing ratio curve was employed to analysis tool-chip contact and durability of textured surfaces contributing to a better understanding of anti-adhesion and enhanced durability of the textured tools.

레이저 유도 광열 효과를 이용하여 제작된 오목한 광섬유 팁의 곡률 반경에 관한 연구 (A Study on the Radius of Curvature of Concave Optical Fiber Tips fabricated by Laser-Induced Photothermal Effect)

  • 최지원;손경호;유경식
    • 한국전자통신학회논문지
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    • 제14권5호
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    • pp.871-876
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    • 2019
  • 본 논문에서는 플루오린화 수소산(Hydrofluoric acid: HF) 수용액과 광섬유에 인가된 $1.55{\mu}m$ 파장의 레이저를 통해 유도된 광열 효과를 이용하여 오목한 광섬유 팁을 제작하였다. 제작 과정에서 인가한 레이저의 세기, 식각 시간, HF 수용액의 농도에 따른 광섬유 팁 오목 면의 곡률 반경을 광학 현미경을 이용하여 측정하였으며 곡률 반경이 세 변인에 대하여 어떻게 변화하는지 분석하였다. 또한, Free Spectral Range(FSR)와 Scanning electron microscope(SEM) 촬영을 통해 현미경을 이용한 측정 방법의 신뢰성을 검증하였다. 본 논문을 통해 광섬유 팁의 오목 면 제작 과정에서 변인에 따라 곡률 반경을 조절할 수 있게 됨으로써 기존의 HF 수용액을 이용한 광섬유 식각 방법의 한계점을 극복할 수 있었다.

나노초 레이저 가공을 활용한 초소수 표면 특성을 가지는 사출 금형에 관한 연구 (A Study on the Injection Mold with Superhydrophobic Surface Properties Using Nanosecond Laser Machining)

  • 박정래;김혜진;박지영;성시명;홍서연;송기혁
    • Design & Manufacturing
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    • 제17권3호
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    • pp.48-54
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    • 2023
  • In this study, an injection mold with ultra-small surface properties was manufactured using nanosecond laser processing. A superhydrophobic characteristic analysis was performed on the PET specimen manufactured through this. To this end, a hydrophobic pattern was defined using the Cassie-Baxter model. The defined features were selected with a spot diameter of 25um and pitch spacing of 30um and 35um. As a result of the basic experiment, it was confirmed that the fine pattern shape had an aspect ratio of 1:1 when the pitch interval was 35um and 20 iterations. Through the determined processing conditions, a hydrophobic pattern was implemented on the core surface of KP4. A specimen with a hydrophobic pattern was produced through injection molding. The height of the molded hydrophobic pattern is 20 ㎛ less than the depth of the core and the contact angle measurement results are 92.1°. This is a contact angle smaller than the superhydrophobic criterion. Molding analysis was performed to analyze the cause of this, and it was analyzed that the molding was not molded due to the lack of pressure in the injection machine.

오목한 광섬유 팁의 방사특성에 관한 연구 (A Study on the Radiation Characteristics of Concave Optical Fiber Tips)

  • 손경호;유경식
    • 한국전자통신학회논문지
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    • 제12권5호
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    • pp.731-736
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    • 2017
  • 본 논문에서는 광통신용 공진기에 필요한 광섬유의 오목한 면 제작에 관한 연구를 진행하였다. 불산(Hydrofluoric acid) 용액과 이 용액에 잘 흡수될 수 있는 파장인 $1.55{\mu}m$의 레이저를 인가하여 광열효과를 유도하였고, 식각 용액에서의 광열효과를 통해 광섬유 끝단의 곡률 반경을 자유롭게 변경할 수 있는 점을 현미경 사진 촬영으로 확인하였다. 빔 프로파일러를 이용하여 제작한 결과물의 끝단에서 방사되는 빔의 크기 변화를 관측하여 유효성을 검증하였고 본 논문의 저자들은 제시한 방식이 광통신용 공진기에 적용 가능성이 있을 것으로 보고 있다.

자동 정렬 펀칭 시스템의 개발과 디버링 (Development of auto-alignment punching system and de-burring)

  • 홍남표;신홍규;김병희;김헌영
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2003년도 춘계학술대회논문집
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    • pp.434-438
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    • 2003
  • The shearing process for the sheet metal is normally used in the precision elements such as semi-conductor components. In these precision elements, the burr formation brings a bad effect on the system assembly and demands the additional de-burring process. In this paper, we have developed the desktop-type precision punching system to investigate the burr formation mechanism and present kinematically Punch-die auto aligning methodology, for the purpose of burr unifomizing and minimizing, between the rectangular shaped punch and die. By using the scanning electron microscope, the aligned punching results are compared with the miss-aligned ones. Also, we measured the relative burr heights using the self-designed laser measuring device for insitu self aligning. Since it is hard to get the perfect, so called, burr-free edges during the shearing process, we introduced the ultrasonic do-burring machine. The de-burring operation was carried out by a novel do-burring method, the reversal flow resistance method, under different machining loads and abrasive types. The final do-burring results show the validity of our punching do-burring system pursuing the burr-free punched elements.

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수정유리와 SF-5 유리의 ELID 연삭특성 비교 (Comparative Study on the Grinded Surface Characteristics of Quartz Glass and SF-5 Glass using ELID(Electrolytic In-Process Dressing) Grinding)

  • 박상후;양동열;곽태수;오오모리히토시
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.94-97
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    • 2003
  • A precise fabrication technology of glass is increasingly demanded fer the latest Industrial applications of spherical lenses. micro-optical components, laser applications and so on. Most of cases, the surface roughness of glass is required to be minute for improving the optical characteristics. Then. the machining characteristics of SF-5 glass and quarts glass were studied by using the ELID grinding process to get mirror surface and productivity compared with a general lapping process. A rotary type grinder with ELID generator was used to make the mirror surface of glass and a Mitutoyo surface tester and a nano-hardness tester were also used to measure the grinded surface or glass. As the results of experiments. they showed that the surface roughness(Ra) of SF-5 glass was under 7.8 nm and that of quartz glass was under 3.0 nm using the # 8000 grinder. So, the possibility of highly efficient and accurate surface for optical components can be achieved by the ELID grinding process.

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