• 반도체디스플레이기술학회지
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• 제18권4호
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• pp.1-5
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• 2019

This study has been focused on properties of surface technology for large diameter upper electrode using in high density plasma process as like semi-conductor manufacturing process. The experimental studies have been carried out to get mirror surface for upper electrode. For a formation of high surface quality upper electrode, single crystal silicon upper electrode has been mechanical and chemical machining worked. Mechanical machining work of the upper electrode is carried out with varying mesh type using diamond wheel. In case of chemical machining work, upper electrode surface roughness was observed to be strongly dependent upon the etchant. The different surface roughness characteristics were observed according to etchant. The machining result of the surface roughness and surface morphology have been analyzed by use of surface roughness tester, laser microscope and ICP-MS.

• 한국기계가공학회지
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• 제11권1호
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• pp.62-67
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• 2012

Recently UV laser is widely used to process micro parts using various materials such as polymers, metals and ceramics because it has a very high intensity at the focused spot area. It is generally known that there are still some difficulties for alumina($Al_2O_3$) ceramics to directly make micro patterns like holes and lines on the surface of working material using 355nm UV laser because the alumina has a very low absorption coefficient at that wavelength. But nowadays new alumna with nano-porous holes is developed and applied to advanced micro functional parts of IT, BT and BT industries. In this paper, we are going to show the mechanism of photo-thermal ablation for nano-porous ceramics. Inside hole there is a lot of multiple reflections along the depth of hole. Experimentally we can find the micro hole drilling and micro grooving on the surface of nano-porous alumina.

• 한국정밀공학회지
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• 제26권6호
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• pp.50-58
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• 2009

Micro laser fabrication techniques can potentially be used for the manufacture of microstructures on the thin flat surfaces with large diameter that are frequently used in semiconductor industries. However, the large size of wafers can cause the degraded machining accuracy of the surface because it can be tilted or distorted by geometric errors of machines or the holding fixtures, etc. To overcome these errors the off-line focusing error compensation method is proposed. By using confocal autofocus system, the focusing error profile of machined surface is measured along the pre-determined path and can be compensated at the next machining process by making the corrected motion trajectories. The experimental results for silicon wafers and invar flat surfaces show that the proposed method can compensate the focusing error within the level of below $6.9{\mu}m$ that is the depth of focus required for the laser micromachining process.

• 조명전기설비학회논문지
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• 제13권1호
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• pp.1-8
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• 1999

최근 들어 레이저를 이용한 방전 제어 기술에 대한 관심이 여러 분야에서 고조되고 있다. 특히, 레이저의 우수한 특성 때문에 Electro-Discharge Machining(EDM)분야에서 각광을 받고 있다. 본 연구에서는 펄스형 Nd:TAG 레이저를 이용해서 방전 가공 장치에 적용될 수 있는 방전 유도 기술에 관한 기초 데이터의 확보를 위한 실험이 수행되었다. 레이저에 의한 직류 발전 유도 실험의 동작 압력의 범위는 0.2~20 torr였다. 진공조 내의 압력 P와 전극간의 거리 d에 따른 최소 직류 레이저 방전 유도 전압 $V_{G.min}$을 측정하였으며, $V_{G.min}$이 자연 방전전압 VND보다 훨씬 낮고 P.d값에 따른 $V_{G.min}$이 $V_{ND}$와 유사한 경향을 가짐을 확인하였다. 그리고 레이저 출력 에너지 $E_{out}$은 플래쉬램프의 전류 펄스폭 $t_p$가 증가함에 따라 감소하고 $t_p$값이 증가할수록 $V_{G.min}$은 방전 지속 시간 동안에 조사되는 광자량이 감소하기 때문에 더 높아짐을 알 수 있었다. 또한 레이저에 의한 방전 유도 가능범위와 레이저 출력에 따른 방전 유도 특성을 조사하였다.

• 대한기계학회논문집
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• 제16권1호
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• pp.1-12
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• 1992

본 연구에서는 가공기 자체의 파라메터와 성능에 관한 연구로서 출력 에너지 가 서로 다른 가공기를 사용하여 SUS 304 스테인리스 시험편을 관통, 절단하면서 출력 에너지와 최대 출력을 비교하여 보고, 시험편 관통시 주파수와 출력 에너지와의 관계, 시험편 관통시 응융 금속 제거량에 의한 절단 속도의 예측, 서로 다른 출력의 가공에 있어서 슬릿 절단 폭, 커프 폭, 드로스 길이, 절단면의 표면 거칠기 등을 비교하여 출 력차에 따른 가공 특성을 고찰하였다.

• 한국안전학회지
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• 제6권4호
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• pp.58-65
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• 1991

In - process measurement of surface roughness is introduced which employs an optical method by using laser beam. This makes it possible to detect the surface roughness not only along the circurnferential path but also along the feed direction even during machining. The maximum roughness value is always abtainable from the reading along the feed direction.

• 한국산업융합학회 논문집
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• 제20권4호
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• pp.307-311
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• 2017

Ultra short pulse laser processing with the PI (polyimide) substrate is conducted to increase flexibility and radius of curvatures. A femtosecond laser is used to perform micro machining by minimizing the heat effect in PI substrate. The laser processing according to the parameters, such as fabricated line width, depth, laser power, distance between lines, is carried out to understand the characteristics of fabricated lines. A bending test is carried out to evaluate bending shapes and the radius of curvature after bending and spreading it 1000 times. The results demonstrates that the radius of curvature decreases in deepen lines and increases with the augment of the number of the fabricated lines, and distance between lines.

• 한국레이저가공학회지
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• 제17권3호
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• pp.10-14
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• 2014

By the specific character of femtosecond laser controlled volume of magnitude of micrometer scale could be ablated without melting phase in SKD11 and SUS304. According to the laser machining parameters various sectional shapes could be engraved on the surface of metals. Typical engraved lines were $10{\mu}m$ wide and deep. Coarse-milled surface was made $10{\mu}m$ lower than the original elevation by a bunch of laser-engraved lines in suitable spacing. The repeated banks with a height of $10{\mu}m$ could be made with the combination of the intact area.

• 한국레이저가공학회지
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• 제11권2호
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• pp.20-25
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• 2008

Polyimide is one of the useful materials in industry. The surface treatment of polyimide by a femtosecond laser can help accurate and fine fabrication of microstructure. And it can change the transmittance and reflectance of polyimide, too. We put femtosecond laser pulses on polyimide for rectangular or square type surface treaments and observe the change of transmittance and reflectance. Pulsewidth is 172 fs, laser power changes for fabrication are from 5 mW to 20 mW, and transmittance and reflectance are measured under 20m W, 300m W, and 920 mW. Pulse patterning is stable and almost no unwanted surface damage is shown. As power increases, working depth increases but working line width does not increase significantly. As speed changes, they also have same results. It shows the efficiency of a femtosecond laser is good and thermal damage is small for polyimide.

• 한국정밀공학회지
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• 제14권1호
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• pp.142-149
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• 1997

Ceramic-coated anilox roll for printing is resistant to corrosion and wear, and hence has enhanced life and quality. Laser engraving is used typically for machining holes to store ink in this roll. Since engraved hole size and shape are directly related to laser processing parameters, it is necessary to know the rela- tionships among these parameters. In this study, the parameters for engraving of ;oasma sprayed ceramic coatings with Nd:YAG laser were studied. Relationships between hole shape and processing parameters were analyzed. Cr$_{2}$O$_{3}$ceramic was found to be most suitable for Nd:YAG laser engraving. It was found that hole depth can be increased by using higher energy pulses. Effect of using different assistant gases was small to the final results. For better results, it was suggested to use a very stable laser with shorter pulses and higher pulse energy.