• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.484-487
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• 2001

Amorphous carbon thin films were deposited using laser ablation technique on Si(100) substrates at different temperatures. In this study, effects of the substrate temperature on the properties of amorphous carbon films were systematically investigated. The surface morphologic and structural properties of the films were studied by scanning electron microscopy (SEM) and raman spectroscope, respectively. With increasing of the substrate temperature, the surface morphologies were changed singnificantly. Moreover the intensity ratio of D-band and G-band and the full width at half maximum of these bands were dependent on substrate temperatures.

• 비파괴검사학회지
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• 제34권3호
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• pp.226-232
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• 2014

본 연구에서는 고출력 레이저를 재료 표면에 조사하였을 때 나타나는 어블레이션 현상에 의한 레이저 초음파의 특성을 시뮬레이션과 실험을 통해 분석하였다. 레이저 초음파 기법은 비파괴검사 분야에서 기존의 접촉식 초음파 기법을 적용하기 어려운 환경요인(고온 등)을 극복할 수 있는 장점들을 가지고 있다. 특히, 어블레이션 영역에서는 종파의 신호 세기 및 직진성이 강하므로, 투과 및 반사 신호를 통한 내부결함 검사법으로 활용하기 적합하다. 본 논문에서는 유한요소해석을 통해 어블레이션 영역에서의 레이저 초음파의 발생 및 전파를 해석하였다. 그리고 개발된 유한요소해석 모델을 활용해 결함모사시편을 대상으로 B-Scan을 수행한 결과, 실험 결과와 동일하게 나타나는 것을 확인하였고, 이로부터 개발된 해석모델의 타당성을 검증할 수 있었다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2009년도 추계학술발표대회
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• pp.6.2-6.2
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• 2009

Nanostructured materials arecurrently receiving much attention because of their unique structural andphysical properties. Research has been stimulated by the envisagedapplications for this new class of materials in electronics, optics, catalysisand magnetic storage since the properties derived from nanometer-scalematerials are not present in either isolated molecules or micrometer-scalesolids. This study presents the experimental results derived fromthe various functional materials processed in nano-scale using pulsed laserablation, since those materials exhibit new physical phenomena caused by thereduction dimensionality. This presentation consists of three mainparts to consider in pulsed laser ablation (PLA) technique; first nanocrystallinefilms, second, nanocolloidal particles in liquid, and third, nanocoating fororganic/inorganic hybridization. Firstly, nanocrystalline films weresynthesized by pulsed laser deposition at various Ar gas pressures withoutsubstrate heating and/or post annealing treatments. From the controlof processng parameters, nanocystalline films of complex oxides and non-oxidematerials have been successfully fabricated. The excellentcapability of pulsed laser ablation for reactive deposition and its ability totransfer the original stoichiometry of the bulk target to the deposited filmsmakes it suitable for the fabrication of various functionalmaterials. Then, pulsed laser ablation in liquid has attracted muchattention as a new technique to prepare nanocolloidal particles. Inthis work, we represent a novel synthetic approach to directly producehighly-dispersed fluorescent colloidal nanoparticles using the PLA from ceramicbulk target in liquid phase without any surfactant. Furthermore, novel methodbased on simultaneous motion tracking of several individual nanoparticles isproposed for the convenient determination of nanoparticle sizedistributions. Finally, we report that the GaAs nanocrystals issynthesized successfully on the surface of PMMA (polymethylmethacrylate)microspheres by modified PLD technique using a particle fluidizationunit. The characteristics of the laser deposited GaAs nanocrytalswere then investigated. It should be noted that this is the first successfultrial to apply the PLD process nanocrystals on spherical polymermatrices. The present process is found to be a promising method fororganic/inorganic hybridization.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1572-1577
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• 2003

High-power pulsed laser ablation under atmospheric pressure is studied utilizing numerical and experimental methods with emphasis on recondensation ratio, and the dynamics of the laser induced vapor flow. In the numerical calculation, the temperature pressure, density and vaporization flux on a solid substrate are first obtained by a heat-transfer computation code based on the enthalpy method, and then the plume dynamics is calculated by using a commercial CFD package. To confirm the computation results, the probe beam deflection technique was utilized for measuring the propagation of a laser induced shock wave. Discontinuities of properties and velocity over the Knudsen layer were investigated. Related with the analysis of the jump condition, the effect of the recondesation ratio on the plume dynamics was examined by comparing the pressure, density, and mass fraction of ablated aluminum vapor. To consider the effect of mass transfer between the ablation plume and air, unlike the most previous investigations, the equation of species conservation is simultaneously solved with the Euler equations. Therefore the numerical model computes not only the propagation of the shock front but also the distribution of the aluminum vapor. To our knowledge, this is the first work that employed a commercial CFD code in the calculation of pulsed ablation phenomena.

• 소성∙가공
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• 제11권7호
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• pp.601-607
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• 2002

Optically transparent materials such as fused silica, quartz and crystal have become important in the filed of optics and optoelectronics. Laser ablation continues to grow as an important technique for micromachining and surface modification of various materials, because many problems caused by direct contact between tools and workpiece can be avoided. Especially, laser ablation with excimer lasers enables fine micromachining of transparent materials such as fused silica, quartz and crystal, etc. In this study, laser-induced wet etching of fused silica in organic solution was conducted. KrF excimer laser was used as a light source and acetone solution of pyrene was used as etchant. Changing the number of laser pulses, micro holes of various depths are fabricated.

• 한국기계가공학회지
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• 제19권10호
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• pp.105-110
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• 2020

Radioactive Oxides are formed on the surface of the primary equipment in a nuclear power plant. In order to remove the oxide film that is formed on the surfaces of the equipment, chemical and physical decontamination technologies are used. The disadvantage of traditional technologies is that they produce secondary radioactive wastes. Therefore, in this study, the short-pulsed laser eco-friendly technology was used in order to reduce production of the secondary radioactive wastes. They were also used to minimize the damages that were caused on the base material and to remove the contaminated oxide film. The study was carried out using a Stainless steel 304 specimen that was coated with nickel-ferrite particles. Further, the laser source was selected with two different wavelengths. Furthermore, the depth of the coating layer was analyzed using a 3D laser microscope by changing the laser ablation conditions. Based on the analysis, the optimal conditions of ablation were determined using a 1064nm short-pulsed laser ablation technique in order to remove the radioactively contaminated oxide film from the irradiated stainless steel surface.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.2163-2165
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• 2005

A pulsed laser ablation deposition (PLAD) technique has been used for producing fine particle as well as thin film at relatively low substrate temperatures. However, in order to manufacture and evaluate such materials in detail, motions of plume particles generated by laser ablation have to be understood and interactions between the particles by ablation and gas plasma have to be clarified. Therefore, this paper was focused on the understanding of plume motion in laser ablation assisted by Ar plasma at 50(mTorr). Two-dimensional hybrid model consisting of fluid and particle models was developed and three kinds of plume particles which are carbon atom (C), ion $(C^+)$ and electron were considered in the calculation of particle method It was obtained that ablated $C^+$ was electrically captured in Ar plasmas by strong electric field (E). The difference between motions of the ablated electrons and $C^+$ made E strong and the collisional processes active.

• 대한기계학회논문집A
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• 제24권7호
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• pp.1847-1853
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• 2000

A computer simulation technique for 2-dimensional laser generated ultrasonic waves was developed for visualization and investigation of ultrasonic propagation in solids. The technique is similar to a finite difference method (FDM) and a mass-particle model method, but uses a new nodal calculation method based on fundamental consideration of an elastic wave equation. By this method, the propagation behavior oflaser generated ultrasonic wave in thermoelastic and ablation mode is visualized and shows good agreement with previous experimental result or the numerical analysis result by Green function.

• 마이크로전자및패키징학회지
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• 제14권3호
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• pp.29-36
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• 2007

본 논문에서는 펨토초 레이저를 사용하여 정밀하고 효과적인 레이저 어블레이션 작업이 가능한지를 확인하기위한 수치 해석 및 가공 작업을 수행하였다. 이를 위하여 Si 재료 내부의 에너지 전달 메커니즘에 대한 수치해석을 실시하였으며, Si 웨이퍼에 각각 다른 조건으로 적용된 레이저 플루언스 값으로 $100\;{\mu}m$ 직경의 미세 관통 홀을 형성한 후, 광학현미경과 3차원 표면 형상 측정 장비를 사용하여 형성된 미세 관통 홀의 가공성과 열영향부의 발생 정도를 관찰하고 분석하였다. 실험 결과를 통해 레이저 플루언스 조건에 따른 열영향부의 발생 정도를 분석하였으며, 또한 최소한의 열영향부를 가지며 우수한 홀 가공성을 보이는 최적의 미세 관통 홀 가공 조건을 도출하였다.

• 한국재료학회지
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• 제4권4호
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• pp.401-405
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• 1994

Laser ablation기술에 의해 Pt와 $YBa_Cu_3O_{7-x}$(YBCO)전극위에 epitaxially성장된 BST박막의 조성과 전기적 특성이 연구되었다. RBS분석으로부터 Pt전극 위에 증착된 BST박막의 결정성이 YBCO전극 위에 증착된 것보다도 더 우수하였다. $600^{\circ}C$에서 Pt 전극위에 증착된 BST박막은 100kHz의 주파수에서 유전상수가 320, 유전손실이 0.023이었다. Pt전극위에 증착된 BST박막의 누설전류 밀도가 TBCO전극위에 증착된 것 보다도 더 작았다. 0.15MV/cm의 전기장 하에서 누설전류밀도는 약 0.8 $\mu \; A/ \textrm{cm}^2$이었다.