• 한국진공학회지
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• 제13권2호
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• pp.59-64
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• 2004

반도체 레이저를 광원으로 사용하는 원자흡수분광 방법으로 금속증기의 증착 공정을 감시하는 연구를 수행하였다. 전자빔 가열 방식을 이용하여 gadolinium (Gd) 금속을 대량으로 증발시켰다. 파장 영역이 770-794 nm (중심파장 780 nm)인 반도체 레이저빔과 388-396 nm 영역의 제 2 고조파 빔을 진공용기에 입사시켜 증발되는 금속증기의 원자흡수 스펙트럼을 실시간으로 기록하였다. 흡수 스펙트럼을 분석하여 증기의 원자밀도를 구했다. 전자빔 출력을 변화시키면서 측정한 원자밀도를 수정 결정 모니터 장치를 사용하여 측정한 증착률과 비교하였다. 산업적으로 많이 사용되는 Ti 등의 증착 공정 감시에 이 실험에서 구현한 레이저 분광장치를 적용할 수 있다는 것을 제시하였다.

• 청정기술
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• 제13권3호
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• pp.228-234
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• 2007

본 연구에서는 금형의 재활용을 촉진하기 위하여 성형공정을 소재의 제거공정과 부가공정으로 보고, 신속 성형 방법인 레이저 직접 금속조형(LADMD) 공정의 환경영향 및 생산성을 제거공정인 밀링가공과 비교하여 평가하였다. 두 가지 형상의 금형에 대하여 CAM 프로그램인 PowerMill을 이용하여 가공경로를 생성하고 가공시간을 예측하여 생산성을 알아본 결과 LADMD 공정의 생산성은 가공량이 유사한 경우에도 밀링공정에 비하여 월등히 우수한 결과를 보였다. 환경 친화적 가공방법으로 알려져 있는 LADMD 공정을 에너지의 사용에 초점을 맞추어 평가한 결과로는 레이저의 발생을 위하여 사용하는 전기에너지의 양이 전통적인 밀링가공법에 비하여 월등하게 많은 점이 앞으로 개선하여야 할 문제임을 알 수 있었다. 여러 가지 장점을 갖고 있는 LADMD 공정은 생산성 및 경제성이 우수하고 자원의 낭비를 줄일 수 있으며 친환경적인 가공법으로 재제조 분야에서 유용하게 사용될 수 있을 것이다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.763-766
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• 2000

The Rapid Prototyping and Tooling technology has been developed. However, most commercial ones currently use resins or waxes as the raw materials. These days. the direct metal deposition methods are researched as a true rapid prototyping and tooling technology. A fundamental study on rapid prototyping and tooling with wire welding technology using $CO_2$ laser radiation was carried out in this paper. The main focus is to develop a simple commercial rapid prototyping and tooling system with the exiting laser welding technology. The process is investigated as a function of laser parameters and process variables. Basic parts were fabricated as out-put and their microstructure, hardness and tensile strength are examined for the reliability. In addition, Its advantages and disadvantages are discussed as a rapid prototyping and tooling system.

• Journal of Welding and Joining
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• 제31권4호
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• pp.13-16
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• 2013

In this research, laser cladding characteristics were investigated for various filler metal feeding methods such as powder, cold wire, and hot wire feeding. Appropriate parameter window, deposition rate, material efficiency and dilution for each filler feeding method were evaluated with same laser power and cladding speed range. Laser powder cladding has wider process parameter window but higher material efficiency and lower dilution were achieved by laser wire cladding. Among these feeding methods, laser hot-wire cladding showed best efficiency in material usage and deposition rate.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.98-99
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• 2012

Deposition of thin films using magnetron sputtering plasmas is a well-developed, classical technology. However, detailed investigations using advanced diagnostics are insufficient in magnetron sputtering, in comparison with plasma-aided dry etching and plasma-enhanced chemical vapor deposition. In this talk, we will show examples of diagnostic works on magnetron sputtering employing metal targets. Diagnostic methods which have fine spatial resolutions are suitable for magnetron sputtering plasmas since they have significant spatial distributions. We are using two-dimensional laser-induced fluorescence spectroscopy, in which the plasma space is illuminated by a tunable laser beam with a planer shape. A charge-coupled device camera with a gated image intensifier is used for taking the picture of the image of laser-induced fluorescence formed on the planer laser beam. The picture of laser-induced fluorescence directly represents the two-dimensional distribution of the atom density probed by the tunable laser beam, when an intense laser with a relatively wide line-width is used. When a weak laser beam with a relatively narrow linewidth is used, the laser-induced fluorescence represents the density distribution of atoms which feel the laser wavelength to be resonant via the Doppler shift corresponding to their velocities. In this case, we can obtain the velocity distribution function of atoms by scanning the wavelength of the laser beam around the line center.

• 한국레이저가공학회지
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• 제2권3호
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• pp.52-61
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• 1999

The laser induced forward transfer(LIFT) technique employs a pulsed laser to transfer parts of a thin metal film from an optically transparent target onto an arbitrary substrate in close proximity to the metal film on the target. In this work, a two-step method, the combination of LIFT process, in which a Au film deposited on the $Al_2$O$_3$ substrate by Nd:YAG laser and subsequent Au electroless metal plating on the by LIFT process generated Au seed, was presented. The influence of laser parameters, wavelength, laser power, film thickness and overlap ratio of pulse tracks, on the shapes of deposit and conductor line after electroless plating is experimentally studied. As a results, the threshold power densities for ablation, deposition and metallization were determined and comparison of threshold value between the wave length 1064nm and the second harmonic generated 532nm. In odor to determine a possible application in the electronic industry, a smallest conduct spot size, line width and isolated line space were generated.

• 한국정밀공학회지
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• 제22권8호
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• pp.165-173
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• 2005

This paper presents the results for deposition of micrometer-scale metal lines on glass for the development of TFT-LCD circuit repair-system. Although there had been a few studies in the late 1980's for the deposition of metallic interconnects by laser-induced chemical vapor deposition, those studies mostly used continuous wave lasers. In this work, a third harmonic Nd:YLF laser (351nm) of high repetition rates, up to 10 KHz, was used as the illumination source and W(CO)s was selected as the precursor. General characteristics of the metal deposit (tungsten) such as height, width, morphology as well as electrical properties were examined for various process conditions. Height of the deposited tungsten lines ranged from 35 to 500 m depending on laser power and scan speed while the width was controlled between 50um using a slit placed in the beam path. The resistivity of the deposited tungsten lines was measured to be below $1{\Omega}{\cdotu}um$, which is an acceptable value according to the manufacturing standard. The tungsten lines produced at high scan speed had good surface morphology with little particles around the patterns. Experimental results demonstrated that it is likely that the deposit forms through a hybrid process, namely through the combination of photolytic and pyrolytic mechanisms.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.37-37
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• 2003

Ferroelectric random acess memories (FeRAMs) 재료로 주목받고 있는 강유전 물질은 이미 여러 해 전부터 많은 물질들에 대해 연구가 진행되어 왔다. 그 중 낮은 공정 온도를 가지며 큰 remanent polarization 값을 갖는 lead zirconium titanate (PZT) 박막에 대해 많은 연구가 진행되고 있다. 하지만 Pt 기판위에 증착된 PZT 박막은 높은 피로 현상을 보이는 문제가 있다. 최근 Pulsed laser deposition이나 metal-organic vapor phase epitaxy (MOVPE) 등의 방법에 의해 epitaxial substituted-$Bi_4Ti_3O_{12}$ (La, Nd) 박막에 대해 보고가 되고 있다. 본 연구에서는 높은 remanent polarization 값을 갖는 $(Bi,Ce)_4Ti_3O_{12}$ (BCT) 박막을 pulsed laser deposition 방법을 사용하여 증착하였다. 또한 Bismuth의 양을 변화시켜 Bismuth의 양에 따른 remanent polarization의 변화를 확인하여 보았다. 사용된 기판은 Pt/$TiO_2$/$SiO_2$/Si 기판을 사용하였다.

• 한국자동차공학회논문집
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• 제24권4호
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• pp.463-470
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• 2016

In this paper, the characteristics analysis of LMD track, such as including track structure, track wear resistance and track thickness, were analyzed to enhance the deposition efficiency using a diode-pumped disk laser. SKD61 hot work steel plate and Fe based AISI M2 alloy were used as a the substrate and powder for the LMD process, respectively. The laser power, track pitch and powder feed rate among LMD parameters were adopted to estimate the deposition efficiency. As the laser power is increased, heat input and melting pool on the substrate is grown also increases, so resulting in the increased LMD track thickness was increased. Through EPMA mapping analysis of the cross-section in the LMD track, it was observed that all the elements are evenly distributed inside. Therefore, the entire hardness in the LMD track is expected to be almost uniform regardless of location. The characteristics of the LMD specimen were excellent compared to the STD11 specimen in terms of the wear track width and the wear rate as well as the coefficient of friction. Especially the wear rate of LMD specimen has been significantly reduced by 60 % or more. From Based on the experimental results, the prediction formula of LMD thickness was calculated by using laser power, track pitch and powder feed rate.

• Archives of Metallurgy and Materials
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• 제65권4호
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• pp.1365-1369
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• 2020

Direct energy deposition (DED) is a three-dimensional (3D) deposition technique that uses metallic powder; it is a multi-bead, multi-layered deposition technique. This study investigates the dependence of the defects of the 3D deposition and the process parameters of the DED technique as well as deposition characteristics and the hardness properties of the deposited material. In this study, high-thermal-conductivity steel (HTCS-150) was deposited onto a JIS SKD61 substrate. In single bead deposition experiments, the height and width of the single bead became bigger with increasing the laser power. The powder feeding rate affected only the height, which increased as the powder feeding rate rose. The scanning speed inversely affected the height, unlike the powder feeding rate. The multi-layered deposition was characterized by pores, a lack of fusion, pores formed by evaporated gas, and pores formed by non-molten metal inside the deposited material. The porosity was quantitatively measured in cross-sections of the depositions, revealing that the lack of fusion tended to increase as the laser power decreased; however, the powder feeding rate and overlap width increased. The pores formed by evaporated gas and non-molten metal tended to increase with rising the laser power and powder feeding rate; however, the overlap width decreased. Finally, measurement of the hardness of the deposited material at 25℃, 300℃, and 600℃ revealed that it had a higher hardness than the conventional annealed SKD61.