• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.523-524
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.99-100
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.373-374
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• 2008

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04a
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• pp.129-132
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• 2000

The PDP(Plasma Display Panel) barrier rib material on the glass substrate was patterned for fabrication of the PDP cell using Nd:YAG laser(1064 nm) which can generate the second(532 nm) and forth(266 nm) harmonic wave by HGM(harmonic generation modules). At a scan speed of 20 ${\mu}m/s$ with the second harmonic wave(532 nm) of Nd:YAG laser, the etching threshold laser fluence of the PDP material was 6.5 $mJ/cm^2$ and a sample(thickness = 180 ${\mu}m$) on the glass substrate was removed clearly at a laser fluence of 19.5 $mJ/cm^2$. In order to increase the throughput of the fabrication we divided a single-beam into multi-beams by using a metal mask between the sample and the focusing lens. As a result, 10 lines of PDP cell were formed by one laser beam scanning at a scan speed of 200 ${\mu}m/s$ and a laser fluence of 2.86 $J/cm^2$.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.12
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• pp.13-20
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• 2004

Manufacturing process for the microfluidic device can include such sequential steps as master fabrication, electroforming, and injection molding. The laser ablation using masks has been applied to the fabrication of channels in microfluidic devices. In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation of PET (polyethylene terephthalate) by the excimer laser radiation could be used successfully to make three dimensional master fur nickel mold insert. The mechanism fur ablative decomposition of PET with KrF excimer laser $({\lambda}: 248 nm, pulse duration: 5 ns)$ was explained by photochemical process, while ablation mechanism of PMMA (polymethyl methacrylate) is dominated by photothermal process, the .eaction between PC (polycarbonate) and KrF excimer laser beam generate too much su.face debris. Thus, PET was adopted in polymer master for nickel mold insert. Nickel electroforming using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.

• Laser Solutions
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• v.14 no.1
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• pp.14-18
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• 2011

Semiconductor industry demands decrease in line/space dimensions of IC substrates. Particularly for IC substrates for CPU, line/space dimensions below $10{\mu}m/10{\mu}m$ are expected to be used in production since 2014. Conventional production technologies (SAP, etc.) based on photolithography are widely agreed to be reaching capability limits. To address this limitation, the embedded circuit fabrication technology using laser ablation has been recently developed. In this paper, we used a nanosecond UV laser and a picosecond UV laser to fabricate embedded circuit patterns into a buildup film with $SiO_2$ powders for IC substrate. We conducted SEM and EDS analysis to investigate surface quality of the embedded circuit patterns. Experimental results showed that due to higher recoil pressure, picosecond UV laser ablation of the buildup film generated a better surface roughness.

• Laser Solutions
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• v.18 no.3
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• pp.14-19
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• 2015

A helical fabricating method using $CO_2$ laser was utilized for producing cone-shaped structure on a silica substrate. Output power and the number of scanning radiation were modified in order to control the structure. The experiment shows that the depth and width of cone-shape were increased with higher output power of the laser and the number of scanning. We demonstrate fabrication of multidirectional side-firing optical fiber with diameter of 440 um using the $CO_2$ laser fabrication technique.

• Korean Journal of Materials Research
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• v.11 no.9
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• pp.792-796
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• 2001

For electron beam lithography and SEM(scanning electron microscopy) applications, miniaturized electrostatic lenses called a microcolumn have been fabricated. In this paper, we report the fabrication technique for 20~30$\mu\textrm{m}$ apertures of electron lenses based on silicon and Mo membrane using an active Q-switched Nd:YAG laser. Experimental conditions of laser micromachining for silicon and Mo membrane are improved. The geometrical structures, such as the diameter and the preciseness of the micron-size aperture are dependent upon the total energy of the laser pulse train, laser pulse width, and the diameter of laser spot.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.12
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• pp.59-66
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• 2019

In this study, we developed a novel laser sintering deposition system (LSDS) based on solid free-form fabrication (SFF) technology as it has the potential to fabricate complex geometries with controllable architecture for bone tissue engineering applications. The 3D biphasic calcium phosphate (BCP) scaffolds were fabricated with a pore size of 800㎛, a line width and height of 1000㎛, and an overall size of 8.2×8.2×8.0 mm3 according to the design of experiment (DOE) results. Additionally, an optimized manufacturing process using response surface analysis was established to fabricate 3D BCP scaffolds. The fabricated 3D BCP scaffolds were sintered at 950℃, 1050℃, 1150℃, and 1250℃ according to sintering processes with a furnace. As the sintering temperature increased, the porosity increased. Through the compressive strength test, the 3D BCP scaffolds sintered at 1050℃ presented good results of about 0.76 MPa. These results suggest that fabrication methods for 3D bioceramic scaffolds using LSDS may meet the basic requirements for bone tissue engineering.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.3 no.2
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• pp.126-130
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• 2002

This paper presents the basic concept of new solid freeform fabrication system using rapid prototyping method. The system could fabricate an arbitrary ceramic form by laser cutting, transferring, stacking, and sintering of each slide. The system consists mainly of laser apparatus. X-Y table, a slide transferring system, and electric oven. The system could fabricate an object that has smooth surface with comparatively short period of time. The system is effective in terms of its direct fabrication capability without second mechanical process. The fabricated shape could directly be used as part of a whole assembly and therefore its method could be applied to various application areas.