• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 추계학술대회 논문집 전기물성,응용부문
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• pp.49-52
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• 2003

Single crystalline silicon (SCS) was adopted for a reliable micromirror array of biochip fabrication applications. SCS has excellent mechanical properties and smooth surface, which is the best material for micromirror devices. The mirror array has $16{\times}16$ micromirrors and each mirror has a $120{\mu}m{\times}100{\mu}m$ reflective surface. The micromirror has simple torsional beam springs and electrostatic force was used for driving. The designed tilting angle was $9.6^{\circ}$, and the tilting angles were measured according to applied voltages. The surface roughness was measured by a laser profiler. The response time was measured using He-Ne laser and position sensitive diode (PSD), and the lifetime was checked for reliability proof.

• 한국산학기술학회논문지
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• 제5권2호
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• pp.186-190
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• 2004

Nano size 몰드의 제작은 X-ray lithography 방법을 이용하여 몰드를 제작하고, micro size의 경우 Deep UV lithography 방법을 이용하여 몰드를 제작하고 있다. 본 연구에서는 SLS(Selective Laser Sintering)형 RP(Rapid Prototyping System)을 이용하여 미세구조 몰드를 제작하였으며, 패턴의 깊이는 400 ㎛까지 구현하였다. 제작된 몰드의 강도와 내열성을 높이기 위하여 전해도금을 이용하여 몰드의 표면에 Ni를 300 ㎛생성 시켰다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2002년도 ITC-CSCC -3
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• pp.1740-1743
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• 2002

This paper presents the basic concept of a Solid Freeform Fabrication System using a rapid prototyping procedure. The system can fabricate a ceramic model by laser cutting, accumulating, laminating and sintering of each slice. The system is mainly equipped with a laser apparatus, an x-y table, a material transfer system, and an electric oven. The system could fabricate a small object with smooth surface within comparatively short period of time. The system has also shown its effectiveness in terms of the direct application of the object without the secondary mechanical process. The fabricated sample could directly be applied and used to fairly wide practical areas.

• 전자공학회논문지D
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• 제34D권1호
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• pp.35-40
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• 1997

A new method to form the gate oxide and recrystllize the polycrystalline silicon (poly-Si) active layer simultaneously is proposed and fabricated successfully. During te irradiation of excimer laser, the poly-Si film is recrystallized, while the oxygen ion impurities injected into the amorphous silicon(a-Si) film are activated by laser energy and react with silicon atoms to form SiO2. We investigated the characteristics of the sample fabricated by proposed method using AES, TEM, AFM. The electrical performance of oxide was verified by ramp up voltage method. Our experimental results show that a high quality oxide, a pol-Si film with fine grain, and a smooth and clean interface between oxide and poly-Si film have been successfully obtained by the proposed fabrication method. The interface roughness of oxide/poly-Si fabricated by new method is superior to film by conventional fabrication os that the proposed method may improve the performance of poly-Si TFTs.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.1101-1104
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• 1995

Through welding fabrication, user can feel an surficaial and capable unsatisfaction because of welded defects, Generally speaking, these are called weld defects. For checking these defects effectively without time loss effectively, weldability estimation system setup isan urgent thing for detecting whole specimen quality. In this study, by laser vision camera, catching a rawdata on welded specimen profiles, treating vision processing with these data, qualititative defects are estimated from getting these information at first. At the same time, for detecting quantitative defects, whole specimen weldability estimation is pursued by multifeature pattern recognition, which is a kind of fuzzy pattern recognition. For user friendly, by weldability estimation results are shown each profiles, final reports and visual graphics method, user can easily determined weldability. By applying these system to welding fabrication, these technologies are contribution to on-line weldability estimation.

• 한국전기전자재료학회논문지
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• 제17권1호
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• pp.16-20
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• 2004

We present the fabrication and performance of wavelength tunable butt coupled (BT) sampled-grating (SG) distributed bragg reflector (DBR) - planar buried heterostructure (PBH) laser diodes (LD). The fabricated LD showed the high optical output power due to the high coupling efficiency between active and passive components by the BT coupling methods. The series resistance and diode ideality factor of LD were measured to be 3.7 $\Omega$ and 1.35, respectively. The average threshold current was 25 ㎃. The output powers of BT-SG DBR-PBH-LD were obtained to be as high as 12.3 and 24.56 ㎽ at 100 and 200 ㎃, respectively. The maximum wavelength tuning range was about 31 nm and the side mode suppression ratio was about 37 dB.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.1080-1083
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• 1997

Micro-stereolithography is a newly proposed technology as a means that can fabricate 3D micro-structures of free form. It makes a 3D structure by dividing the shape into many slices of relevant thickness along honzontal surfaces, hardening each layer of slice with a laser, and stacking them up to a des~red shape. Scale effect becomes important in this micro-fabrication process, d~fferently from the conventional stereolithography. To realize this micro-stereolithography technology, we developed an equipment using Ar+ laser, xyz stages, controllers and all the optic devices. Using the equipment, a number of micro-structures were successfully fabricated including a winecup of several tens of micrometers.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.445-446
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• 2005

This letter reports the fabrication of polycrystalline silicon thin-film transistors (poly-Si TFT) on flexible plastic substrates using amorphous silicon (a-Si) precursor films by sputter deposition. The a-Si films were deposited with mixture gas of argon and helium to minimize the argon incorporation into the film. The precursor films were then laser crystallized using XeCl excimer laser irradiation and a four-mask-processed poly-Si TFTs were fabricated with fully self-aligned top gate structure.

• 국제학술발표논문집
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• The 1th International Conference on Construction Engineering and Project Management
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• pp.1193-1198
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• 2005

The pre-assembly takes a large portion of the fabrication cost of steel bridges. In order to save the fabrication cost through the improvement of the conventional pre-assembling process, this research investigates a numerical pre-assembly simulation as an alternative to current pre-assembling process. The 3D laser scanning was utilized in site and measuring data for steel box were analyzed. The productivity of pre-assembly simulation system is compared with the conventional pre-assembling system. This paper identifies feasibility on the alternative pre-assembling process and then proposes the scheme of the pre-assembly simulation system development satisfying the current pre-assembly inspection of standards.

• 한국레이저가공학회지
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• 제3권1호
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• pp.29-37
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• 2000

For a development purpose of thick metal / metal Graded-Boundary Materials(GBM), a basic research on the fabrication of Ni-Cr/steel GBM was carried out by a laser beam and its mechanical properties and thermal characteristics were investigated. In order to produce a compositionally graded boundary region between substrate steel and added Ni-Cr alloy, a series of surface alloying treatments was performed with a high power CO$_2$ laser beam. Ni-Cr sheet was placed on a low carbon steel plate(0.18%C), and then a CO$_2$ laser beam was irradiated on the surface to produce a homogeneous alloyed layer. On this first surface-alloyed layer, another Ni-Cr sheet was placed and then the CO$_2$ laser beam was irradiated again to produce second surface-alloyed layer. Sequential repetitions of laser surface alloying treatment 4 times resulted in a graded-boundary region with the thickness of about 1.4mm. Simultaneous concentration profiles of different kinds of alloying elements(Ni and Cr) showed from 42%Ni, 45%Cr and 13%Fe on surface region to 0%Ni, 0%Cr and 99%Fe in substrate region. Also a thermal conductivity gradient resulted in graded-region and its value changed from 0.03㎈/cm s$\^{C}$ in surface region to 0.1㎈/cm s$\^{C}$ in substrate region. Microstructural observation showed that any visible root porosities and solidification shrinkage cracks were not formed in graded region between alloyed layer and substrate region during rapid cooling.