• ETRI Journal
• /
• v.27 no.2
• /
• pp.188-194
• /
• 2005

We report on the improvement of critical dimension (CD) linearity on a photomask by applying the concept of process proximity correction to a laser lithographic process used for the fabrication of photomasks. Rule-based laser process proximity correction (LPC) was performed using an automated optical proximity correction tool and we obtained dramatic improvement of CD linearity on a photomask. A study on model-based LPC was executed using a two-Gaussian kernel function and we extracted model parameters for the laser lithographic process by fitting the model-predicted CD linearity data with measured ones. Model-predicted bias values of isolated space (I/S), arrayed contact (A/C) and isolated contact (I/C) were in good agreement with those obtained by the nonlinear curve-fitting method used for the rule-based LPC.

• Journal of the Korean Society for Precision Engineering
• /
• v.23 no.4 s.181
• /
• pp.183-190
• /
• 2006

Digital 3D Real Object Duplication System (RODS) consists of 3D Scanner and Solid Freeform Fabrication System (SFFS). It is a device to make three-dimensional objects directly from the drawing or the scanning data. In this research, we developed an office type SFFS based on Three Dimensional Printing Process and an industrial SFFS using Dual Laser. An office type SFFS applied sliding mode control with sliding perturbation observer (SMCSPO) algorithm for control of this system. And we measured process variables about droplet diameter measurement and powder bed formation etc. through experiments. In case of industrial type SFFS, in order to develop more elaborate and speedy system for large objects than existing SLS process, this study applies a new Selective Dual-Laser Sintering (SDLS) process and 3-axis Dynamic Focusing Scanner for scanning large area instead of the existing f lens. In this process, the temperature has a great influence on sintering of the polymer. Also the laser parameters are considered like that laser beam power, scan speed, and scan spacing. Now, this study is in progress to evaluate the effect of experimental parameters on the sintering process.

• Korean Journal of Optics and Photonics
• /
• v.14 no.3
• /
• pp.327-330
• /
• 2003

We present the fabrication and measured performance of a wavelength tunable Butt coupled DBR-LD. An average coupling efficiency between active layer and passive waveguide layer was measured over 85％per facet, and the average threshold current was 21 ㎃ for the waveguide integrated DBR laser. High output power of Butt coupled DBR-LD was obtained over 25 ㎽. As high as 25 ㎽ of output power was achieved by the butt coupled method. The maximum wavelength tuning range is about 7.4 nm, and the side mode suppression ratio was more than 40 ㏈ using 1.3 ${\mu}{\textrm}{m}$ InGaAsP waveguide layer.

• Journal of the Semiconductor & Display Technology
• /
• v.18 no.2
• /
• pp.58-62
• /
• 2019

Diffractive Optical Elements(DOEs) diffracts incident light using the diffraction phenomenon of light to generate a desired diffraction image. In recent years, the use of diffraction optics, which can replace existing refractive optical elements with flat plates, has been increased by implementing various optical functions that could not be implemented in refractive optical devices and by becoming miniaturized and compacted optical elements. Direct laser lithography is typically used to effectively fabrication such a diffractive optical element in a large area with a low process cost. In this study, the process conditions for fabricating patterns of diffractive optical elements in various shapes were found using direct laser lithographic system, and optical performance evaluation was performed through fabrication.

• International Journal of Precision Engineering and Manufacturing
• /
• v.8 no.4
• /
• pp.63-69
• /
• 2007

The two-photon stereolithography (TPS) process is a promising technique for the fabrication of real three-dimensional (3D) nano/micro-structures via application of a femto-second laser, In TPS, when a near-infrared ultrashort-pulsed laser is closely focused onto a confined volume of photocurable resin, only the local area at the center of the focus is cured. Therefore, real 3D microstructures with resolution under the diffraction limit can be fabricated through a layer-by-layer accumulative technique, This process provides opportunities to develop neo-conceptive nano/micro devices in IT/BT industries, However, a number of issues, including development of effective fabrication methods, highly sensitive and functional materials, and neo-conceptive devices using TPS, must be addressed for the realization of industrial application of TPS. In this review article, we discuss our efforts related to TPS: effective fabrication methods, diverse two-photon curable materials for high functional devices, and applications.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.4 no.1
• /
• pp.1-6
• /
• 2003

A novel Solid Freeform Fabrication System, which makes prototype by cutting tapes at the boundary of object and accumulating the tapes, has been developed. In order to overcome the staircase shape at the surface of prototype, the laser beam is irradiated tangent to the surface. Five axis cutting system and the tangent cutting trajectory generation algorithm have been developed.

• Laser Solutions
• /
• v.11 no.2
• /
• pp.33-38
• /
• 2008

Laser micromachining has increasingly been adopted in various advanced industries where the high-precision machining of large-area, high-density and multi-layered components is in a strong demand. To effectively meet the requirements, the laser micromachining process must be carefully monitored. In order to facilitate the development of a new laser micromachining process and/or a new system, we have fabricated a UV laser micromachining platform that is equipped with optical modules for monitoring the process online. They include a laser power stabilizing module, a module for laser-induced breakdown spectroscopy, and an auto-focusing module.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2007.06a
• /
• pp.221-222
• /
• 2007

• Journal of the Optical Society of Korea
• /
• v.9 no.1
• /
• pp.16-21
• /
• 2005

Using a cantilever type nanoprobe having a 100㎚m aperture at the apex of the pyramidal tip of a near-field scanning optical microscope (NSOM), nanopatterning of polymer films are conducted. Two different types of polymer, namely a positive photoresist (DPR-i5500) and an azopolymer (Poly disperse orange-3), spincoated on a silicon wafer are used as the substrate. A He-Cd laser with a wavelength of 442㎚ is employed as the illumination source. The optical near-field produced at the tip of the nanoprobe induces a photochemical reaction on the irradiated region, leading to the fabrication of nanostructures below the diffraction limit of the laser light. By controlling the process parameters properly, nanopatterns as small as 100㎚ are produced on both the photoresist and azopolymer samples. The shape and size variations of the nanopatterns are examined with respect to the key process parameters such as laser beam power, irradiation time or scanning speed of the probe, operation modes of the NSOM (DC and AC modes), etc. The characteristic features during the fabrication of ordered structures such as dot or line arrays using NSOM lithography are investigated. Not only the direct writing of nano array structures on the polymer films but also the fabrication of NSOM-written patterns on the silicon substrate were investigated by introducing a passivation layer over the silicon surface. Possible application of thereby developed NSOM lithography technology to the fabrication of data storage is discussed.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2006.05a
• /
• pp.197-198
• /
• 2006

In the solid freeform fabrication (SFF) system using selective laser sintering (SLS), polyamide-12 powder is currently recognized as general material. In this study, some kinds of polyamide-6 powders with different shape and particlesize were fabricated to investigate the formability, the microstructure and mechanical properties. Also, to develop a more elaborate and rapid system, this study employs a new SLS device with a 3-axis dynamic focusing scanner system instead of the existing fe lens used in commercial SLS. Polyamide-6 powders having the average size of 100 m were treated thermally in order to keep the spherical symmetry in shape. These polyamide-6 powders were mixed with polyamide-12 powders having the average size of 50 m to give the bimodal distribution of size. These mixed powders showed the better fabrication in the selective laser sintering process because the smaller particles of polyamide-11 played an important role in the compact packing of powders by filling the void space between the large particles of polyamide-6. Also, Experiments have performed to evaluate the effect of a scanning path and sintering parameters by fabricating the various 3D objects.