• Title/Summary/Keyword: Laser Diffraction

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Study of Al2O3/ZrO2 (5 nm/20nm) Nanolaminate Composite

  • Balakrishnan, G.;Wasy, A.;Ho, Ha Sun;Sudhakara, P.;Bae, S.I.;Song, J.I.
    • Composites Research
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    • v.26 no.1
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    • pp.60-65
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    • 2013
  • A nanolaminate consisting of alternate layers of aluminium oxide ($Al_2O_3$) (5 nm) and zirconium oxide ($ZrO_2$) (20 nm) was deposited at an optimized oxygen partial pressure of $3{\times}10^{-2}$ mbar by pulsed laser deposition. The nanolaminate film was analysed using high temperature X-ray diffraction (HTXRD) to study phase transition and thermal expansion behaviour. The surface morphology was investigated using field emission scanning electron microscopy (FE-SEM). High temperature X-ray diffraction indicated the crystallization temperature of tetragonal zirconia in the $Al_2O_3/ZrO_2$ multilayer-film was 873 K. The mean linear thermal expansion coefficient of tetragonal $ZrO_2$ was $4.7{\times}10^{-6}\;K^{-1}$ along a axis, while it was $13.68{\times}10^{-6}\;K{-1}$ along c axis in the temperature range 873-1373 K. The alumina was in amorphous nature. The FESEM studies showed the formation of uniform crystallites of zirconia with dense surface.

Effects of Sputter Parameters on Electrochromic Properties of Tungsten Oxide Thin Films Grown by RF Sputtering

  • Nah, Yoon-Chae
    • Korean Journal of Materials Research
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    • v.21 no.12
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    • pp.703-707
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    • 2011
  • The electrochromic properties of tungsten oxide films grown by RF sputtering were investigated. Among the sputter parameters, first the $Ar:O_2$ ratios were controlled with division into only an $O_2$ environment, 1:1 and 4:1. The structure of each film prepared by these conditions was studied by X-ray diffraction, X-ray photoelectron spectroscopy and Rutherford backscattering spectroscopy. The sputter-deposited tungsten oxide films had an amorphous structure regardless of the $Ar:O_2$ ratios. The chemical compositions, however, were different from each other. The stoichiometric structure and low-density film was obtained at higher $O_2$ contents. Electrochemical tests were performed by cyclic voltammetry and chronoamperometry at 0.05 M $H_2SO_4$ solutions. The current density and charge ratio was estimated during the continuous potential and pulse potential cycling at -0.5 V and 1.8 V, respectively. The film grown in a higher oxygen environment had a higher current density and a reversible charge reaction during intercalation and deintercalation. The in-situ transmittance tests were performed by He-Ne laser (633 nm). At higher oxygen contents, a big transmittance difference was observed but the response speed was too slow. This was likely caused by higher film resistivity. Furthermore, the effect of sputtering pressure was also investigated. The structure and surface morphology of each film was observed by X-ray diffraction and scanning electron microscopy. A rough surface was observed at higher sputtering pressure, and this affected the higher transmittance difference and coloration efficiency.

Analysis of Power Degradation and Distortion in Coherent-Beam Combining with Lens Aberration (렌즈 수차에 의한 타일형 빔 결합 출력 감쇠와 왜곡 현상 분석)

  • Kim, Byungho;Na, Jeongkyun;Jeong, Yoonchan
    • Korean Journal of Optics and Photonics
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    • v.31 no.6
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    • pp.290-294
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    • 2020
  • In this paper, we quantitatively analyze the effect of lens aberration on the degradation of beam-coupling efficiency of a tiled coherent-beam combining system. The Zernike polynomial is used to quantify the aberration of the lens, and Fresnel diffraction is applied to numerically simulate the change in the peak light intensity when combined at a distance. The results of this paper will be useful for quantitative prediction of the beam-combining efficiency that is degraded by aberration of the lens, and it is expected to be helpful for the optimal design of a practical tiled coherent beam-combining system.

Particle Size Characteristics with the Specification of Yeongdong Illite Powder Products (영동 일라이트 분말 제품의 규격에 따른 입도 특성)

  • EunJi Baek;Yu Na Lee;Eun Jeong Kim;Youngseuk Keehm;Hyun Na Kim
    • Korean Journal of Mineralogy and Petrology
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    • v.36 no.4
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    • pp.345-353
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    • 2023
  • This study aimed to investigate the differences in the commercial powder products of the Yeongdong illite based on sales specifications, specifically examining the mineralogical composition, particle size, and chemical composition according to mesh size. The goal was to understand the characteristics of illite powder products and utilize them as a mineralogical database for exploring various applications. Commercial illite powder samples obtained from two mines were subjected to various experiments, including X-ray diffraction (XRD) analysis, laser diffraction particle size analysis, and scanning electron microscopy analysis, X-ray fluorescence analysis. The XRD analysis revealed that the illite powder products from the two mines mainly consisted of illite/muscovite, quartz, and feldspar, indicating similar constituent minerals matching with those of ores for each mine. Laser diffraction particle size analysis indicated the difference in particle size distribution depending on the product specifications, with particle size uniformity tending to increase with increasing mesh sizes. Scanning electron microscopy analysis showed variations in particle shape and size based on specifications. The size of illite particles did not vary significantly with product specifications, with noticeable changes observed mainly in the particle sizes of quartz and feldspar. Furthermore, although there were some differences in chemical composition among the samples from different mines, no significant variations were observed according to specifications. Based on these results, when considering the application of commercial illite powder, it is essential to carefully select it with the consideration of its specifications to account for characteristic variations. The findings of this study present support the great potential of various application fields of commercial illite powder, contributing to industrial utilization and the development of new technologies.

The Formation of Holographic Data Grating on Amorphous Chalcogenide $Ag/As_{40}Ge_{10}Se_{15}S_{35}$ Thin Films with Various Thickness (두께에 따른 비정질 칼코게나이드 $Ag/As_{40}Ge_{10}Se_{15}S_{35}$ 박막의 홀로그래피 데이터 격자형성)

  • Yea, Chul-Ho;Chung, Hong-Bay
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.55 no.8
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    • pp.387-391
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    • 2006
  • The Ag photodoping effect in amorphous $As_{40}Ge_{10}Se_{15}S_{35}$ chalcogenide thin films for holographic recording has been investigated using a He-Ne laser (${\lambda}$=632.8 nm). The chalcogenide films thickness prepared in the present work were thinner in comparison with the penetration depth of recording light ($d_p=1.66{\mu}m$). It exhibits a tendency of the variation of the diffraction efficiency (${\eta}$) in amorphous chalcogende films, independently of the Ag photodoping. That is, ${\eta}$ increases rapidly at the beginning of the recording process and reaches the maximum (${\eta}_{max}$) and slowly decreases slowly with the exposed time. In addition, the value of ${\eta}_{max}$ depends strongly on chalcogenide film thickness(d) and its maximum peak among the films with d = 40, 80, 150, 300, and 633 nm is observed 0.083% at d = 150 nm (approximately 1/2 ${\Delta}n$), where ${\Delta}$n is the refractive index of chalcogenide thin film (${\Delta}n=2.0$). The ${\eta}$ is largely enhanced by Ag photodoping into the chakogenides. In particular, the value of ${\eta}_{max}$ in a bilayer of 10-nm-thick Ag/150-nm-thick $As_{40}Ge_{10}Se_{15}S_{35}$ film is about 1.6%, which corresponds to ${\sim}20$ times larger than that of the single-layer $As_{40}Ge_{10}Se_{15}S_{35}$ thin film (without Ag). And we obtained the diffraction pattern according to the formation of (P:P) polarization holographic grating using Mask pattern and SLM.

A Study on High Efficiency of Phase Grating (은염에 형성된 위상형 회절격자의 고효율에 관한 연구)

  • Kim, Nam;Gil, Sang-Keun;Park, Han-Kyu
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.26 no.3
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    • pp.145-152
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    • 1989
  • Volume phase diffraction grating is formed in 5${mu}m$ Agfa 8E75 photographic emulsion film using He-Ne laser. It is dependent on the chemical processing rather than materials themselves that high diffraction efficiency can obtained in silver halide emulsions. With potassium dichromate bleach and alcohol drying, overall efficiency of 71% (81% after allowing for reflection at the two surfaces) has been achieved at an exposure of 180${mu}J/cm^2.$ Dichromate cross-linkage and air void by rapid dehydration increase refractive index modulation depth. The grating is swollen, which is newly identified by Scanning Electronic Microscope(SEM) photography, and it causes on-Bragg at larger angle than the recording angle. It is pointed out that controlling the emulsion thickness has an important role as a potential source for high diffraction efficiency.

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KrF 엑시머 레이저를 이용한 웨이퍼 스텝퍼의 제작 및 성능분석

  • 이종현;최부연;김도훈;장원익;이용일;이진효
    • Korean Journal of Optics and Photonics
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    • v.4 no.1
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    • pp.15-21
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    • 1993
  • This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

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Effect of Oxygen Pressure on the Electrical Properties of ZnO Transparent Thin Films on Flexible Teflon Substrate (산소압력이 테프론 휨성 기판위에 형성된 ZRO 투명박막의 전기적 특성에 미치는 영향)

  • Suh Kwang Jong;Chang Ho Jung
    • Korean Journal of Materials Research
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    • v.15 no.4
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    • pp.271-274
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    • 2005
  • We investigated the crystalline and electrical properties of ZnO thin films for transparent electrode as a function of the oxygen pressures during the deposition. The ZnO thin films were deposited on a flexible teflon substrates by the pulsed laser deposition. From the X-ray diffraction, ZnO films showed c axis oriented ZnO(0002) crystal structure. The FWHM (full width at half maximum) values decreased from $0.51^{\circ}\;to\;0.34^{\circ}$ as the oxygen pressure increased from 0.1 mTorr to 10.0 mTorr showing the improvement of crystallinity. The resistivity and hall mobility of ZnO film deposited at the oxgen pressure of 0.1 mTorr at $200^{\circ}C$ was about $5\times10^{-4}\Omega{\cdot}cm\;and\;20cm^2/V{\cdot}s$, respectively. The optical transmittance of the ZnO films on flexible teflon substrate was found to be above $85\%$.

Coherent Diffraction Imaging at PAL-XFEL

  • Kim, Sangsoo;Nam, Kihyun;Park, Jaehyun;Kim, Kwangoo;Kim, Bongsoo;Ko, Insoo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.85.2-85.2
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    • 2016
  • With the advent of ultra-short high-intense XFEL (X-ray Free Electron Laser), time-resolved dynamics has become of great importance in exploring femtosecond real-world phenomena of nanoscience and biology. These include studying the response of materials to femtosecond laser excitation and investigating the interaction of XFEL itself with condensed matter. A variety of dynamic phenomena have been investigated such as radiation damage, ultrafast melting process, non-equilibrium phase transitions caused by orbital-lattice-spin couplings. As far as bulk materials are concerned, the sample size has no effect on the following dynamic process. As a result, imaging information is not required by and large. If the sample size is of tens of nanometers, however, sample starts to experience quantum confinement effect which, in turn, affects the following dynamic process. Therefore, to understand the fundamental dynamic phenomena in nano-science, time-resolved imaging information is essential. In this talk, we will briefly introduce scientific highlights achieved in XFEL-based dynamics. In case of bio-imaging, recent scientific topics will be mentioned as well. Finally, we will aim to present feasible topics in ultrafast time-resolved imaging and to discuss the future plan of CXI beamline at PAL-XFEL.

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Optical Assembly and Fabrication of a Micro-electron Column (마이크로 전자렌즈의 광학적 정렬과 조립)

  • Park, Jong-Seon;Jang, Won-Kweon;Kim, Ho-Seob
    • Korean Journal of Optics and Photonics
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    • v.17 no.4
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    • pp.354-358
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    • 2006
  • A silicon lens and an insulator of pyrex, components of a micro-electron column, should be assembled by aligning and stacking simultaneously. An optical alignment of a diffraction beam and a laser welding were employed for the assembly of a source lens and an Einzel lens with precision within $\pm$4% for the maximum aperture size. The experimental condition for optical alignment and laser welding are explained. Anodic bonding was used to assist in stacking lenses. A micro-electron column of smaller apertures assembled with precise alignment and fabrication was tested with a current image of a Cu grid of 9$\mu$m in linewidth, and showed a higher resolution in acceleration mode.