• 제목/요약/키워드: Large particle

검색결과 1,311건 처리시간 0.028초

Chemical mechanical planarization 슬러리에 사용되는 point-of-use 필터의 평가 방법 개발 (Development of point-of-use filter evaluation method using chemical mechanical planarization slurry)

  • 장선재;아툴 쿨르카르니;김형우;김태성
    • 한국입자에어로졸학회지
    • /
    • 제12권4호
    • /
    • pp.145-150
    • /
    • 2016
  • During the chemical mechanical planarization (CMP) process, slurry that comprises abrasive particles can directly affect the CMP performance and quality. Mainly, the large particles in the slurry can generate the defects on the wafer. Thus, many kinds of filters have been used in the CMP process to remove unwanted over-sized particles. Among these filters, the point-of-use (POU) filter is used just before the slurry is supplied onto the CMP pad. In the CMP research field, analysis of the POU filter has been relatively exceptional, and previous studies have not focused on the standardized filtration efficiency (FE) or filter performance. Furthermore, conventional evaluation methods of filter performance are not appropriate for POU filters, as the POU filter is not a membrane type, but is instead a depth type roll filter. In order to accurately evaluate the POU filter, slurry FE according to particle size was measured in this study. Additionally, a CMP experiment was conducted with filtered slurry to demonstrate the effects of filtered slurry on CMP performance. Depending on the flow rate and the filter retention size, the FE according to particle size was different. When the small and large particles have different FEs, the total filtration efficiency (TFE) can still have a similar value. For this reason, there is a need to measure the FE with respect to the particle size to verify the effects of the POU filter on the CMP process.

텅스텐 중합금의 부피분율, 입자형상에 따른 단열전단밴드 형성 연구 (The Effects of Volume Ratio and Shape on the Formation of Adiabatic Shear Band in WHA)

  • 이승우;송흥섭;문갑태
    • 소성∙가공
    • /
    • 제11권8호
    • /
    • pp.682-690
    • /
    • 2002
  • The formation of adiabatic shearband in tungsten heavy alloys(WHA) was studied in this investigation. Five prismatic specimens were loaded by high velocity impacts and treated as plane strain problems. To find out the effect of particle's volume ratio, specimens containing 81%, 93% and 97% volume percents of tungsten particles were used. Also the effects of particle's geometry and size on the formation of shearband were studied for 81% volume percent alloys by small size particle model, large size particle model and undulated particle models, and the results were discussed.be used to diagnose the causes of necking and fracture in industrial practice and to investigate whether these defects were caused by material property variation, changes in lubrication, or incorrect press settings. In non-axisymmetric deep drawing, three modes of forming regimes are found: draw, stretch, plane strain. The stretch mode for non-axisymmetric deep drawing could be defined when the major and minor strains are positive. The draw mode could be defined when the major strain is positive and minor strain is negative, and plane strain mode could be defined when the major strain is positive and minor strain is zero. Through experiments the draw mode was shown on the wall and flange are one of a drawn cup, while the plane strain and the stretch mode were on the punch head and the punch corner area respectively, We observed that the punch load of elliptical deep drawing was decreased according to increase of die corner radius and the thickness deformation of minor side was more large than major side.

Gas-liquid interface treatment in underwater explosion problem using moving least squares-smoothed particle hydrodynamics

  • Hashimoto, Gaku;Noguchi, Hirohisa
    • Interaction and multiscale mechanics
    • /
    • 제1권2호
    • /
    • pp.251-278
    • /
    • 2008
  • In this study, we investigate the discontinuous-derivative treatment at the gas-liquid interface in underwater explosion (UNDEX) problems by using the Moving Least Squares-Smoothed Particle Hydrodynamics (MLS-SPH) method, which is known as one of the particle methods suitable for problems where large deformation and inhomogeneity occur in the whole domain. Because the numerical oscillation of pressure arises from derivative discontinuity in the UNDEX analysis using the standard SPH method, the MLS shape function with Discontinuous-derivative Basis Function (DBF) that is able to represent the derivative discontinuity of field function is utilized in the MLS-SPH formulation in order to suppress the nonphysical pressure oscillation. The effectiveness of the MLS-SPH with DBF is demonstrated in comparison with the standard SPH and conventional MLS-SPH though a shock tube problem and benchmark standard problems of UNDEX of a trinitrotoluene (TNT) charge.

유체 시뮬레이션의 격자 내 상세도 향상을 위한 와류 입자 혼합 기법 (Vortex Particle Turbulence for Fluid Simulation)

  • 윤종철;홍정모;김창헌
    • 한국컴퓨터그래픽스학회논문지
    • /
    • 제14권4호
    • /
    • pp.1-5
    • /
    • 2008
  • 본 논문은 유체 시뮬레이션의 격자 내 상세도를 와류입자법(Vortex Particle Method)를 사용하여 향상시킬 수 있는 새로운 방법을 제안한다. 비압축 Navier-Stokes 방정식을 풀어 낸 속도장(Velocity Field)으로 유체의 거시적인 움직임을, 와류입자법으로 생성한 와도장(Vorticity Field)으로 유체의 미세한 움직임을 표현한다. 이 기법은 고해상도 격자에서 선형시스템을 풀지 않기 때문에 고해상도 유체 시뮬레이션을 효율적으로 할 수 있고, 강한 난류 효과를 만들어 낼 수 있다.

  • PDF

분무 열분해법으로 제조된 미세 Bi-2223 전구분말의 특성 (Characterizations of fine Bi-2223 precursor powder by spray pyrolysis process)

  • 김성환;유재무;고재웅;김영국
    • Progress in Superconductivity
    • /
    • 제6권2호
    • /
    • pp.124-128
    • /
    • 2005
  • Homogeneous and fine powders for Bi-2223 tape were prepared by ultrasonic spray pyrolysis (SP) method from an aqueous solution of metal nitrates. Bi-2223 precursor powders were synthesized with various solutes concentration and pyrolysis temperature. The synthesized precursor powders had a narrow particle size distribution and an average particle size was $\~{\cal}um$. The reactivity of precursor powder by SP method is very high, attributed to the fine and narrow particle size distribution. Bi-2223/Ag tape was prepared using PIT method and followed by various sintering conditions. The precursor powder by SP method promoted a very quick formation of the Bi-2223 phase for short sintering time while the secondary phase such as large AEC phase and $Ca_2PbO_4$ were minimized for SP tapes.

  • PDF

분체 이송관내 압력 조절을 위한 오리피스 주위에서의 입자 유동 및 마모 해석 (Particle Laden Flows Around Orifice Plates for Pressure Control in Pulverized Coal Pipe Lines)

  • 조형희;이재근;박호동;서태원
    • 대한기계학회논문집B
    • /
    • 제22권11호
    • /
    • pp.1499-1508
    • /
    • 1998
  • A numerical study is performed to investigate pressure drops, particle trajectories and erosion around orifice plates in pulverized coal pipe lines. Particle impaction rates change significantly with orifice shapes and Stokes numbers. At Reynolds number of $5{\times}10^5$, the pulverized coal flows well with streamlines and do not collide at the orifice plates at small sizes (${\sim}20{\mu}m$). However, the large particles (over $70{\mu}m$) impact on the front face of the orifice and erode the orifice surface. The pressure loss coefficients around the erode orifice are largely different from the designed original orifice.

라그랑지안 입자모델을 활용한 도시기온 예측기법의 연구 (Study on Urban Temperature Prediction Method Using Lagrangian Particle Dispersion Model)

  • 김석철;윤정임
    • 한국대기환경학회지
    • /
    • 제33권1호
    • /
    • pp.45-53
    • /
    • 2017
  • A high resolution model is proposed for calculating the temperature field of a large city, based upon a Lagrangian particle model. Utilizing the analogy between the heat and mass transport phenomena in turbulent flows, a Lagrangian particle model, originally developed for air pollutant dispersion problems, is adapted for simulating heat transport. In the model conceptual heat particles are released into the atmosphere from the heat sources and move along with the turbulent winds in accordance with the Markov process. The potential temperature assumed to be conserved along with heat particles serves as a tag, so the temperature fields can be deduced from the distribution of particles. The wind fields are constructed from a diagnostic meteorology model incorporating a morphological model designed for building flows. Test run shows the robustness of the modeling system.

Electrocatalyst for the Oxygen Reduction Reaction: from the Nanoscale to the Macroscale

  • Chung, Dong Young;Sung, Yung-Eun
    • Journal of Electrochemical Science and Technology
    • /
    • 제5권3호
    • /
    • pp.65-72
    • /
    • 2014
  • The use of nanoscale electrocatalysts is a promising strategy for achieving high catalyst activity due to their large surface area. However, catalyst activity is not directly correlated to particle size. To understand this discrepancy, many studies have been conducted, but a full understanding has still not been achieved, despite the importance of particle size effects in designing an active catalyst. In this review, we focus on the discussion of particle size effects on the oxygen reduction reaction, and also discussed the nanoscale design beyond the nanoparticle to the meso and macroscale design.

전해질 입자크기에 따른 용융탄산염 연료전지 전해질 지지체의 두께변화에 관한 연구 (The Effect of Carbonate Particle Size Distributions on the Thickness Change of MCFC Electrolyte Matrix)

  • 이형근;김남진;이덕열
    • 한국전기전자재료학회논문지
    • /
    • 제11권5호
    • /
    • pp.384-393
    • /
    • 1998
  • A mixed powder of electrolyte and matrix support materials with a proper proportion was used for the fabrication of an electrolyte matrix sheet. The purpose of this study is to reduce the large change in MCFC cell thickness occurring in the initial start-up period when separate sheets of electrolyte and support are used. A focus was put on how small the carbonate particles could be made. The particle size of the carbonate powder was controlled by ball milling and the distribution was measured using a particle size analyser. The thickness change was reduced to 20% by this approach, which could be compared to 27% observed in a conventional cell. The thickness changes of electrolyte matrix have linear relation sizes of carbonate powders.

  • PDF

Numerical simulations of elliptic particle suspensions in sliding bi-periodic frames

  • Chung, Hee-Taeg;Kang, Shin-Hyun;Hwang, Wook-Ryol
    • Korea-Australia Rheology Journal
    • /
    • 제17권4호
    • /
    • pp.171-180
    • /
    • 2005
  • We present numerical results for inertialess elliptic particle suspensions in a Newtonian fluid subject to simple shear flow, using the sliding bi-periodic frame concept of Hwang et al. (2004) such that a particulate system with a small number of particles could represent a suspension system containing a large number of particles. We report the motion and configurational change of elliptic particles in simple shear flow and discuss the inter-relationship with the bulk shear stress behaviors through several example problems of a single, two-interacting and ten particle problems in a sliding bi-periodic frame. The main objective is to check the feasibility of the direct simulation method for understanding the relationship between the microstructural evolution and the bulk material behaviors.