• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.05b
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• pp.60-64
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• 2005

Discharge of the flat lamp lighting source research are requested very much. For improving brightness, life time, efficiency of flat lamp, plasma diagnosis of the flat lamp lighting source to understand property of lighting source is very important, distance of discharge electrode is 5.5mm and width is 16.5mm, we measured electron temperature and electron density measured with single langmuir probe in flat lamp, we tested the discharge from 100 Torr to 300 Torr pressure, the Pulse is rectangular pulse with frequency 20kHz and Duty ratio 20%. Resultly, electron temperature decreases and electron density increase as increase the gas pressure and electron temperature decreases and electron density increase as increase the voltage.

• ETRI Journal
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• v.18 no.3
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• pp.195-206
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• 1996

Molecular conformations of stereoregular poly(methyl methacrylate) (PMMA) monolayers have been investigated by scanning probe microscopes. Isotactic and syndiotactic PMMAs were found to have right and left hand helical structures, respectively. On the contrary atactic PMMA showed rather random arrangement of the chains. It has been demonstrated that the PMMA Langmuir-Blodgett (LB) films can be utilized to form nanoscale patterns down to 50 nm and to forma geodesic lens. It has also been manifested that the quantum efficiency of a polymer electroluminescent device can be significantly enhanced by inserting the PMMA LB films between the emitting layer and the cathode. All the applications utilize the unique characteristics of the LB films to form thin and uniform films in the molecular level.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.12a
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• pp.71-74
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• 2006

Discharge of the flat lamp lighting source research arc requested very much. For improving brightness, life time, efficiency of flat lamp, plasma diagnosis of the flat lamp lighting source to understand property of lighting source is very important. distance of discharge electrode is 5.5mm and width is 16.5mm, we measured electron temperature and electron density measured with single langmuir probe in flat lamp. we tested the discharge from 100 Torr to 300 Torr pressure. the Pulse is rectangular pulse with frequency 20kHz and Duty ratio 20%. Resultly, electron temperature decreases and electron density increase as increase the gas pressure and electron temperature decreases and electron density increase as increase the voltage.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2190-2192
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• 2005

Discharge of the flat lamp lighting source research are requested very much. For improving brightness, life time, efficiency of flat lamp, plasma diagnosis of the flat lamp lighting source to understand property of lighting source is very important. distance of discharge electrode is 5.5mm and width is 16.5mm, we measured electron temperature and electron density measured with single langmuir probe in flat lamp. we tested the discharge from 100 Torr to 300 Torr pressure. the Pulse is rectangular pulse with frequency 20kHz and Duty ratio 20%. Resultly, electron temperature decreases and electron density increase as increase the gas pressure and electron temperature decreases and electron density increase as increase the voltage.

• Proceedings of the IEEK Conference
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• 2000.06b
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• pp.302-305
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• 2000

It is important to control the electron energy distribution to have high quality plasma process. A conventional inductively coupled plasma(ICP) source with 13.56MHz power is not adequate for low damage sub-half micron patterning process due to higher electron temperature. Only the pulsed plasma technique seems to provide low electron temperature, and thus low process damage. Recently, a novel method proposed by us, named as ‘Enhanced-ICP’, which uses periodic weak axial magnetic field added to a normal ICP source, has shown great improvement in etch characteristics. changes of plasma characteristics according to the frequency of time-varying axial magnetic field have been observed by probe-time-averaged Langmuir probe.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.131.1-131.1
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• 2015

플라즈마 진단법으로서 컷오프 탐침과 랑뮤어 탐침은 다양한 분야에서 많은 연구가 진행되었다. 하지만 고밀도 및 균일성 관점에서 많은 이점을 가지고 있는 자화유도결합플라즈마에서 컷오프 탐침의 적용 가능성에 대한 연구는 많이 부족하다. 본 연구에서는 두 가지 탐침법을 이용하여 전자밀도를 비교하고 각각의 특성을 분석하였다. 먼저 랑뮤어 탐침법을 이용하여 RF파워, 압력, 외부자기장에 따른 플라즈마 변수(전자밀도, 전자온도, 플라즈마 전위)를 측정하였다. 외부자기장을 인가하였을 때 전자구속으로 인하여 전 영역의 전자밀도는 증가하였지만 R방향의 전자밀도 분포는 균일하지 않았다. 반면 전자온도는 외부자기장을 인가하였을 때 챔버 중심에서 감소하였으며, 챔버 끝에서 전자온도는 증가하였다. 즉, R방향의 전자온도 분포는 U형태가 나타났다. 또한 컷오프 탐침으로 전자밀도를 측정한 결과 비교적 낮은 $10^{11}/cm^3$ 이하에서 정확한 컷오프 주파수를 확인하여 전자밀도를 구할 수 있었으며, 그 이상의 전자밀도를 갖는 경우 동축케이블의 손상 문제로 인하여 신뢰성 있는 결과를 얻기는 힘들다. 현재 이 문제를 해결하기 위한 연구가 지속적으로 진행 중이다.

• Journal of the Korean Vacuum Society
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• v.7 no.3
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• pp.273-276
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• 1998

Three different parallel antennas are designed to investigate plasma uniformity and magnetic field using a double Langmuir probe and a magnetic probe. Butterfly antenna has the highest density of ~~$2\times10^{11}(\textrmcm^{-3})$ among the three antennas and has electron temperature less than 2 eV, lower than the spiral antenna. It is found that the power efficiency becomes lower with spaced parallel antenna elements due to oppositely directed currents and positive coupling.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.73-73
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• 2008

In this work, the study on the $SiO_2$ film non-uniformity by PECVD (Plasma Enhanced Chemical Vapor Deposition) was performed. Plasma diagnostics was analyzed by a DLP(Double Langmuir Probe) and a probe-type QMS(Quadrupole Mass Spectrometer) in order to investigate the spatial distribution of the plasma species in the chamber. The relationship between the plasma species and the depositing rate of the films was examined. On the basis of this work, it was confirmed that O radical density mainly contributed to the increase in the depositing rate of the $SiO_2$ films and the electron temperature in the plasma had a main effect on the formation of the oxygen radicals.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.223-223
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• 2011

헬리콘 플라즈마는 자기장을 이용하여 높은 전자밀도를 가지게 하는 플라즈마 소스이다. 이러한 장점에도 불구하고, 전자석의 크기 때문에 설치가 어렵고, 전자석을 작동시키기 위해 추가 파워에 대한 비용이 필요하며, 플라즈마의 균일도가 좋지 않아 공정에서는 많이 사용되지 못하였다. 이러한 난점은 UCLA의 Chen이 영구자석을 이용한 새로운 개념의 소스를 개발함으로써 풀릴 수 있다. 이 소스는 헬리콘 플라즈마의 높은 저항을 이용하여 여러 개의 헬리콘 소스를 병렬로 연결이 가능하게끔 한다. 본 연구에서는 우선 Helic Code를 이용하여 floating metal end plate의 위치에 따른 플라즈마의 loading resistance를 계산한 후, 플라즈마의 internal 및 external parameter를 각각 single Langmuir probe와 VI-probe를 이용하여 측정하여 비교해 보았다. 헬리콘 플라즈마의 파장에 따른 보강간섭 조건을 맞췄을 경우, 헬리콘 모드로 전환이 낮은 파워에서 이루워지는 것을 external parameter를 통해 확인해 보았다.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.11
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• pp.566-571
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• 2004

Pulse modulation technique provide additional controling method for electron temperature and density in rf and microwave processing plasma. Transient characteristics of electron density and temperature have been measured in pulse modulated rf inductively coupled argon plasma using simple probe circuit. Electron temperature relaxation is clearly identified in the after glow stage. Controllability of average electron temperature and density depends on the modulation frequency and duty ratio. Numerical calculation of time-dependent electron density and temperature have been performed based on the global model. It has been shown that simple langmuir probe measurement method used for continuous plasma is also applicable to time-dependent measurement of pulse modulated plasma.