• 상하수도학회지
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• 제30권1호
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• pp.87-97
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• 2016

First of all, Fe or/and Mn immobilized granular activated carbons (Fe-GAC, Mn-GAC, (Fe, Mn)-GAC) were synthesized and tested to remove arsenate (As(V)). The results in batch test indicated that Fe-GAC removed As(V) effectively, even though the surface area of Fe-GAC was reduced largely. Moreover, adsorption isotherm test indicated that the experimental data fit well with Langmuir model and the maximum adsorption capacity ($q_{max}$) of Fe-GAC for As(V) was $3.49mg\;g^{-1}$, which was higher than GAC ($2.24mg\;g^{-1}$). In column test, the simulated water, which consisted of As(V), Fe(III), Mn(II) and Ca(II) in tap water, was used. Fe-GAC column with 1 hr of pre-washing time treated As(V) effectively while GAC column removed Fe(III) better than Fe-GAC column. Moreover, the increasing pre-washing time from 1 to 9 hour in Fe-GAC column enhanced Fe(III) removal with little negative impact of As(V) removal. Mostly, the column filled with Fe-GAC and GAC (i.e. the mass ratio of Fe-GAC:GAC = 2:8) showed the higher treatability of both As(V) and Fe(III), even it operated with 1 hr pre-washing time.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.463-463
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• 2012

ITRS (international technology roadmap for semiconductors)에 따르면 MOS(metal-oxide-semiconductor)의 CD (critical dimension)가 45 nm node이하로 줄어들면서 poly-Si/$SiO_2$를 대체할 수 있는 poly-Si/metal gate/high-k dielectric이 대두된다고 보고하고 있다. 일반적으로 high-k dielectric를 식각시 anisotropic 한 식각 형상을 형성시키기 위해서 plasma를 이용한 RIE (reactive ion etching)를 사용하고 있지만 PIDs (plasma induced damages)의 하나인 PIED (plasma induced edge damage)의 발생이 문제가 되고 있다. PIED의 원인으로 plasma의 direct interaction을 발생시켜 gate oxide의 edge에 trap을 형성시키므로 그 결과 소자 특성 저하가 보고되고 있다. 그러므로 본 연구에서는 이에 차세대 MOS의 high-k dielectric의 식각공정에 HDP (high density plasma)의 ICP (inductively coupled plasma) source를 이용한 원자층 식각 장비를 사용하여 PIED를 줄일 수 있는 새로운 식각 공정에 대한 연구를 하였다. One-monolayer 식각을 위한 1 cycle의 원자층 식각은 총 4 steps으로 구성 되어 있다. 첫 번째 step은 Langmuir isotherm에 의하여 표면에 highly reactant atoms이나 molecules을 chemically adsorption을 시킨다. 두 번째 step은 purge 시킨다. 세 번째 step은 ion source를 이용하여 발생시킨 Ar low energetic beam으로 표면에 chemically adsorbed compounds를 desorption 시킨다. 네 번째 step은 purge 시킨다. 결과적으로 self limited 한 식각이 이루어짐을 볼 수 있었다. 실제 공정을 MOS의 high-k dielectric에 적용시켜 metal gate/high-k dielectric CMOSFETs의 NCSU (North Carolina State University) CVC model로 구한 EOT (equivalent oxide thickness)는 변화가 없으면서 mos parameter인 Ion/Ioff ratio의 증가를 볼 수 있었다. 그 원인으로 XPS (X-ray photoelectron spectroscopy)로 gate oxide의 atomic percentage의 분석 결과 식각 중 발생하는 gate oxide의 edge에 trap의 감소로 기인함을 확인할 수 있었다.

• Carbon letters
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• 제15권1호
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• pp.57-66
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• 2014

Three activated carbons (ACs) were prepared using NaOH (N) as an activating agent. Hydrofluoric acid pre-leached rice husk was used as a precursor. After leaching, the precursor was washed with distilled water, dried, crushed, and then sieved; a size fraction of 0.3-0.5 mm was selected for carbonization in the absence of air at $600^{\circ}C$. The carbonization product (LC) was mixed with NaOH at ratios of 1:2, 1:3, and 1:4 (wt of LC: wt of NaOH) and the produced ACs after activation at $800^{\circ}C$ were designated NLC21, NLC31, and NLC41, respectively. Surface and textural properties were determined using nitrogen adsorption at $-196^{\circ}C$, scanning electron microscopy images, thermogravimetric analysis, and Fourier transform infrared spectra. These ACs were used as adsorbents for lead(II) from aqueous solutions. The effects of the textural properties and the chemistry of the carbon surfaces were investigated and the impact of the operation conditions on the capacity for lead(II) sorption was also considered. Modification of NLC41 with $H_2O_2$ and $HNO_3$ gave two other adsorbents, $H_{NLC41}$ and $N_{NLC41}$ respectively. These two new samples exhibited the highest removal capacities for lead(II), i.e.117.5 and 128.2 mg/g, respectively. The adsorption data fitted the Langmuir isotherm and the kinetic adsorption followed pseudo-second order kinetics. The thermodynamic parameters have been determined and they indicated a spontaneous endothermic process.

• Nuclear Engineering and Technology
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• 제28권1호
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• pp.44-55
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• 1996

원자력 발전소에서 방사성 요오드를 제거하기 위해 사용되는 원료활성탄과 2%, 5%TEDA(Triethylene-Diamine) 첨착활성탄을 이용하여 원소요오드와 유기요오드인 메틸요오드에 대한 흡착특성을 분석하였다. 여러 흡착 등온식을 선정하여 실험치와 비교함으로서 선정된 흡착 등온식의 적합성 여부를 검증하였다. 흡착평형 실험결과 Dubinin-Astakhov(DA) 등온식이 여러 가지 흡착등온식 가운데 가장 적합한 것으로 나타났다. 흡착표면의 흡착에너지 분포가 불균일(Heterogeneous)하기 때문에 포텐셜 (Potential) 에너지를 근거로 하는 DA등온식이 흡착평형 관계를 보다 정확하게 나타내는 것으로 생각된다. 흡착표면의 불균일성을 확인하기 위해 흡착에너지 분포도를 원료활성탄과 첨착활성탄에 대해 상호 비교하였다 활성탄-요오드 흡착시스템에서 불균일성은 활성탄의 기공구조 분만 아니라 흡착질과 활성탄과의 상호관계에 의해서도 영향을 받게된다 따라서 흡착표면의 불균일성은 활성탄을 첨착함에 따라서 증가하게 되고 원소요오드보다 유기요오드의 경우 불균일성이 더 커지는 것으로 보여진다.

• 산업기술연구
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• 제27권A호
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• pp.195-202
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• 2007

Milled Korean pine (Pinus densiflora) wood was used to evaluate its adsorption capacity of Cu(II) ions from aqueous solution by running a series of batch experiments. Prior to the tests, the milled woods were pretreated with 1N NaOH, 1N $HNO_3$, and distilled water, respectively, to examine the effect of pretreatment. Within the tested pH range between 3 and 6, copper adsorption efficiency of NaOH-treated wood(96~99%) was superior to the $HNO_3$-treated wood(19~31%) and distilled water-treated wood(18~35%). The efficiency of copper removal by wood enhanced with increasing solution pH and reached a maximum copper ion uptake at pH 5~6. Adsorption behavior of copper onto both raw and $HNO_3$-treated woods was mainly attributed to interaction with carboxylic acid group. For NaOH-treated wood, carboxylate ion produced by hydrolysis or saponification was a major functional group responsible for Cu sorption. NaOH treatment of wood changed the ester and carboxylic acid groups into carboxylate group, whereas $HNO_3$ treatment did not affect the production of functional groups which could bind copper. A pseudo second-order kinetic model fitted well for the sorption of copper ion onto NaOH-treated wood. A batch isotherm test using NaOH-treated wood showed that equilibrium sorption data were better represented by the Langmuir model than the Freundlich model.

• Carbon letters
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• 제18권
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• pp.49-55
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• 2016

Refuse-derived fuel (RDF) produced using municipal solid waste was pyrolyzed to produce RDF char. For the first time, the RDF char was used to remove aqueous copper, a representative heavy metal water pollutant. Activation of the RDF char using steam and KOH treatments was performed to change the specific surface area, pore volume, and the metal cation quantity of the char. N₂ sorption, Inductively Coupled Plasma-Atomic Emission Spectrometer (ICP-AES), and Fourier transform infrared spectroscopy were used to characterize the char. The optimum pH for copper removal was shown to be 5.5, and the steam-treated char displayed the best copper removal capability. Ion exchange between copper ions and alkali/alkaline metal cations was the most important mechanism of copper removal by RDF char, followed by adsorption on functional groups existing on the char surface. The copper adsorption behavior was represented well by a pseudo-second-order kinetics model and the Langmuir isotherm. The maximum copper removal capacity was determined to be 38.17 mg/g, which is larger than those of other low-cost char adsorbents reported previously.

• Environmental Engineering Research
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• 제19권3호
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• pp.247-253
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• 2014

The aim of this study was to characterize quintinite in fluoride removal from aqueous solutions, using batch experiments. Experimental results showed that the maximum adsorption capacity of fluoride to quintinite was 7.71 mg/g. The adsorption of fluoride to quintinite was not changed at pH 5-9, but decreased considerably in highly acidic (pH < 3) and alkaline (pH > 11) solution conditions. Kinetic model analysis showed that among the three models (pseudo-first-order, pseudo-second-order, and Elovich), the pseudo-second-order model was the most suitable for describing the kinetic data. From the nonlinear regression analysis, the pseudo-second-order parameter values were determined to be $q_e=0.18mg/g$ and $k_2=28.80g/mg/hr$. Equilibrium isotherm model analysis demonstrated that among the three models (Langmuir, Freundlich, and Redlich-Peterson), both the Freundlich and Redlich-Peterson models were suitable for describing the equilibrium data. The model analysis superimposed the Redlich-Peterson model fit on the Freundlich fit. The Freundlich model parameter values were determined from the nonlinear regression to be $K_F=0.20L/g$ and 1/n=0.51. This study demonstrated that quintinite could be used as an adsorbent for the removal of fluoride from aqueous solutions.

• Environmental Engineering Research
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• 제19권2호
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• pp.157-163
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• 2014

The adsorption of Cr(VI) from aqueous solutions to activated carbon fiber (ACF) was investigated using both batch and flow-through column experiments. The batch experiments (adsorbent dose, 10 g/L; initial Cr(VI) concentration, 5-500 mg/L) showed that the maximum adsorption capacity of Cr(VI) to ACF was determined to 20.54 mg/g. The adsorption of Cr(VI) to ACF was sensitive to solution pH, decreasing from 9.09 to 0.66 mg/g with increasing pH from 2.6 to 9.9; the adsorption capacity was the highest at the highly acidic solution pHs. Kinetic model analysis showed that the Elovich model was the most suitable for describing the kinetic data among three (pseudo-first-order, pseudo-second-order, and Elovich) models. From the nonlinear regression analysis, the Elovich model parameter values were determined to be ${\alpha}$ = 162.65 mg/g/h and ${\beta}$ = 2.10 g/mg. Equilibrium isotherm model analysis demonstrated that among three (Langmuir, Freundlich, Redlich-Peterson) models, both Freundlich and Redlich-Peterson models were suitable for describing the equilibrium data. In the model analysis, the Redlich-Peterson model fit was superimposed on the Freundlich fit. The Freundlich model parameter values were determined to be $K_F$ = 0.52 L/g and 1/n = 0.56. The flow-through column experiments showed that the adsorption capacities of ACF in the given experimental conditions (column length, 10 cm; inner diameter, 1.5 cm; flow rate, 0.5 and 1.0 mL/min; influent Cr(VI) concentration, 10 mg/L) were in the range of 2.35-4.20 mg/g. This study demonstrated that activated carbon fiber was effective for the removal of Cr(VI) from aqueous solutions.

• Advances in environmental research
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• 제3권2호
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• pp.163-172
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• 2014

Magnetite was chosen as a typical adsorbent to study its phosphate adsorption capacity in water body with low concentration of phosphorus (below $2mg\;PL^{-1}$). Magnetite was collected from Luoyang City, Henan Province, China. In this research, three factors have been studied to describe the adsorption of phosphate on magnetite, which was solution concentration (concentration ranging from 0.1 to $2.5mg\;PL^{-1}$), suspension pH (1 to 13) and temperature (ranging from $10^{\circ}C$ to $40^{\circ}C$). In addition, the modified samples had been characterized with XRD and FE-SEM image. The results show that iron ions contains in magnetite were the main factors of phosphorus removal. The behavior of phosphorus adsorption to substrates could be fitted to both Langmuir and Freundlich isothermal adsorption equations in the low concentration phosphorus water. The theoretical saturated adsorption quantity of magnetite is 0.158 mg/g. pH has great influence on the phosphorus removal of magnetite ore by adsorption. And pH of 3 can receive the best results. While temperature has little effect on it. Magnetite was greatly effective for phosphorus removal in the column experiments, which is a more practical reflection of phosphorous removal combing the adsorption isotherm model and the breakthrough curves. According to the analysis of heavy metals release, the release of heavy metals was very low, they didn't produce the secondary pollution. The mechanism of uptake phosphate is in virtue of chemisorption between phosphate and ferric ion released by magnetite oxidation. The combined investigation of the magnetite showed that it was better substrate for water body with low concentration of phosphorus.

• 상하수도학회지
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• 제33권4호
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• pp.251-258
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• 2019

The physical treatment such as chemical precipitation or adsorption was usually added after biological treatment in wastewater treatment process since it was enforced to reduce the concentration of phosphate for wastewater effluent to 0.2 mg/L as P which was well known as one of main nutrient causing eutrophication in waterbody. Therefore, the new material functioned for both adsorption and disinfection was prepared with Fe and Cu, and $TiO_2$, respectively, by changing the ratio of concentration referred to tri-metal (TM). According to SEM-EDS, $TiO_2$ was 30~40% composition for any TM regardless of any synthesis condition. However, the ratio of composition for Fe and Cu was dependent on the initial Fe and Cu concentration, respectively. The removal efficiency of phosphate was obtained to 15% at low initial concentration and the maximum uptake (Q) was calculated to ~11 mg/g through Langmuir isotherm model using TM1 which was synthesized at 1000 mg/L, 1000 mg/L, and 2 g (10 g/L) for $Fe(NO_3)_3$, $Cu(NO_3)_2$, $TiO_2$, respectively. In disinfection test, the efficiency of virus removal using TM was increased with increase of dosage of TM and can be reached 98% at 0.2 g.