• Title/Summary/Keyword: LPE(Liquid Phase Epitaxy)

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Magnetic Properties of La-doped YIG films prepared by LPE(Liquid Phase Epitaxy). (LPE 성장법으로 성장시킨 La 을 첨가한 YIG 막의 자성특성)

  • 김동영;한진우;김명수;이상석
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • 2000.11a
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    • pp.89-92
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    • 2000
  • Liquid Phase Epitaxy 법을 이용하여 La이 첨가된 YIG(Yitrium Ion Garnet)막을 성장시켰다. X선 회절 분석을 이용하여 La의 첨가량을 변화시키며 제조된 막의 격자상수를 조사한 결과, La의 첨가량이 증가함에 따라 성장된 막의 격자상수도 증가하였으며 Y/La이 20인 경우, 막의 격자상수가 기판으로 사용한 GGG의 격자상수와 일치하였다. VSM(Vibration Sample Magnetometer)를 이용하여 구한 막의 포화자화 값은 La의 첨가량과 관계없이 순수한 YIG의 경우와 같은 값인 1750정도로 거의 일정하였다. FMR(FerroMagnetic Resonance) 측정장치를 이용한 막의 강자성 공명선폭을 측정결과 막의 공명선폭은 La의 첨가량과 관계없이 모든 경우에 순수한 YIG보다 감소하였다. 실험범위내의 La의 첨가에 대해서 기판과의 격자불일치가 순수한 YIG의 경우보다 감소하기 때문이다. La의 첨가량이 많은 조건에서 성장시킨 막은 공명선폭이 크고 두께의 증가에 따라서 선폭이 증가하였으며, YLa가 20과 30일 때 성장시킨 막에서는 공명선폭의 절대값도 작고 두께에 따른 공명선폭의 변화도 관찰되지 않았다.

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Magnetic Properties of La-doped YIG Films Prepared by LPE(Liquid Phase Epitaxy) (LPE 성장법으로 성장시킨 La을 첨가한 YIG 막의 자성특성)

  • 김동영;한진우;김명수;이상석
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.3
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    • pp.257-262
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    • 2001
  • Single crystalline films of La doped YIG(yttrium iron garnet) were grown by the liquid phase epitaxy. The lattice constants of films obtained by DCD(double crystalline diffractometer) measurement increased with increasing La contents in films. In particular, lattice constants of films grown wiht Y/La=20 solution were nearly same as those of GGG (gadolinium gallium garnet) substrate. The saturation magnetization measured with VSM (vibrating sample magnetometer) was about 1750Gauss which is the same as that of pure YIG irrespective of La contents in films. FMR(ferromagnetic resonance) linewidth of La doped YIG was smaller than that of pure YIG. Since appropriate La doping decreases the lattice mismatch between film and substrate, the FMR linewidth was Y/La=20 in this experiment.

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Magnetic Properties of La-doped YIG films prepared by LPE(Liquid Phase Epitaxy) (LPE 성장법으로 성장시킨 La 을 첨가한 YIG 막의 자성특성)

  • 김동영;한진우;김명수;이상석
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2000.11a
    • /
    • pp.89-92
    • /
    • 2000
  • Liquid Phase Epitaxy 법을 이용하여 La이 첨가된 YIG(Yitrium Ion Garnet)막을 성장시켰다. X선 회절 분석을 이용하여 La의 첨가량을 변화시키며 제조된 막의 격자상수를 조사한 결과, La의 첨가량이 증가함에 따라 성장된 막의 격자상수도 증가하였으며 Y/La이 20인 경우, 막의 격자상수가 기판으로 사용한 GGG의 격자상수와 일치하였다. VSM(Vibration Sample Magnetometer)를 이용하여 구한 막의 포화자화 값은 La의 첨가량과 관계없이 순수한 YIG의 경우와 같은 값인 1750정도로 거의 일정하였다. FMR(Ferro Magnetic Resonance) 측정장치를 이용한 막의 강자성 공명선폭을 측정결과 막의 공명선폭은 La의 첨가량과 관계없이 모든 경우에 순수한 YIG보다 감소하였다. 실험범위내의 La의 첨가에 대해서 기판과의 격자불일치가 순수한 YIG의 경우보다 감소하기 때문이다. La의 첨가량이 많은 조건에서 성장시킨 막은 공명선폭이 크고 두께의 증가에 따라서 선폭이 증가하였으며, Y/La가 20과 30일 때 성장시킨 막에서는 공명선폭의 절대값도 작고 두께에 따른 공명선폭의 변화도 관찰되지 않았다.

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Growth and structural properties of ZnO co-doped Er :$ LiNbO_3$ thin films by liquid phase epitaxy method (LPE법에 의한 ZnO co-doped Er :$ LiNbO_3$, 박막의 성장 및 구조적 특성)

  • 심장보;전원남;윤석규;윤대호
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.12 no.1
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    • pp.27-30
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    • 2002
  • ZnO co-doped Er:$LiNbO_3$ single crystal thin films have been grown on $LiNbO_3$ (001) substrate by liquid phase epitaxy (LPE) method. The melts of ZnO co-doped Er:$LiNbO_3$ was fixed $Er_2O_3$, concentration (1 mol%) and different ZnO concentrations 3 and 5 mol%. The crystallinity of ZnO co-doped Er :$LiNbO_3$ films became better than the $LiNbO_3$ substrate. At ZnO 5 mol% concentration, the surface of ZnO co-doped Er:$LiNbO_3$ film is affected by compressive stress along both the perpendicular and the parallel direction. Also the surface of ZnO 3 mol% co-doped Er:$LiNbO_3$film is smoother than the original $LiNbO_3$ substrate surface.

Photoreflectance of A $I_x$Ga${1-x}$As(x.<=.0.15) grown by liquid-phase epitaxy (Liquid-phase epitaxy로 성장시킨 A $I_x$Ga${1-x}$As(x.<=.0.15)의 photoreflectance)

  • 배인호;김인수;이철욱;최현태;김말문;김상기
    • Electrical & Electronic Materials
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    • v.7 no.4
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    • pp.300-305
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    • 1994
  • We determined the alloy composition of the liquid-phase epitaxy(LPE) grown $Al_{x}$G $a_{1-x}$ As by the photoreflectance(PR), and observed the variation of PR signal by changing the condition of annealing and thickness of epilayer. As the measuring temperature was decreased, the broadening parameter was decreased, and the amplitude of PR signal was increased. When the temperature of annealing was increased, the surface carrier concentration was decreased and then the shape and amplitude of PR signal were affected by the surface electric field. The structure change was observed when the specimen was annealed for long time at a high temperature. We found that the surface electric field increased when the thickness of epilayer was decreased by etching, because the band bending was increased by the decreased of the width of depletion layer....

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Temperature Dependence of Magnetostatic Waves on the YIG Single Crystalline Thin Film (YIG 단결정 박막에 대한 정자파의 온도의존성 연구)

  • Lee, Soo-Hyung
    • Journal of the Korean Magnetics Society
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    • v.12 no.5
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    • pp.163-167
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    • 2002
  • In order to study the temperature dependence of the magnetostatic wave modes for an YIG thin film, grown by a liquid phase epitaxy method, The ferromagnetic resonance was performed by an FMR spectrometer in the temperature range -140$\^{C}$∼200$\^{C}$. The magnetostatic surface wave and backward volume wave modes show periodic excitations in parallel configuration. The resonance fields of all modes and intensities decreased with decreasing the temperature. All magnetostatic modes can be well explained by the Walker and Damon-Eshbach theory. The calculated saturation magnetization Ms of the YIG thin film was increased with decreasing the temperature. The line widths of magnetostatic modes changed in various trends with decreasing the temperature.

Ferromagnetic Resonance Study of an YIG Thin Film Grown by LPE Method (LPE법으로 제조한 YIG 박막에 대한 강자성공명 연구)

  • 이수형;염태호;윤달호;김약연;한기평;이상석
    • Journal of the Korean Magnetics Society
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    • v.9 no.2
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    • pp.85-90
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    • 1999
  • The ferromagnetic resonance study of the magnetostatic wave modes for an YIG thin film, grown by a liquid phase epitaxy method, was performed by an FMR spectrometer at room temperature. The magnetostatic surface wave and backward volume wave modes show periodic excitations in parallel configuration, whereas the complex spectra were observed in perpendicular configuration. The resonance spectra in parallel configuration can be well explained by the Walker and Damon-Eshbach theory. The peak-peak line width of uniform mode was 0.4 Oe. The saturation magnetization $M_s$ of the YIG thin film was calculated as 137 emu/㎤. In order to know the dependence of the magnetostatic modes as a function of the saturation magnetization and the thickness, the (1,1) and (3,1) modes of the magnetostatic backward volume wave were compared and theoretically calculated.

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Effect of Annealing for YIG Single Crystal Thick Films (YIG 단결정 후막의 열처리의 효과)

  • 김근영;윤석규;김용탁;이성문;윤대호
    • Journal of the Korean Ceramic Society
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    • v.40 no.9
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    • pp.855-858
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    • 2003
  • When the PbO-based flux system is used in the Liquid Phase Epitaxy (LPE) method for Yttrium Iron Garnet (YIG) thick film, the effect of Pb ions incorporated into the grown crystal; increase the lattice parameter, changed the uniaxial magnetic anisotropy constant (Ku) or conductance of grown film. It exerts a bad influence on physical property such as increasing optical absorption of grown film. The content of the Pb ion in crystal was decreased by volatilization of Pb ion after annealing; therefore, the lattice parameter of film was reduced on an average 0.0115 ${\AA}$ by the the Pb ion.

LPE meltaback-etch and re-epitaxy of GaAs/AlGaAs for optical micro-lenses fabrication (광소자용 미소렌즈 제작을 위한 GaAs/AlGaAs계 액상식각 및 에피택시)

  • 함성호;권영세
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.34D no.9
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    • pp.64-71
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    • 1997
  • A new etching technique of meltback was investigated for GaAs lensed optical devices with selective windows opending in the LPE (liquid phase epitaxy) system. In the meltback process, the etch depth and the etch shape were controlled by the degree of under-saturation, etch time and other parameters. A GaAs/AlGaAs DH layer was grown on the selectively etched hemispherical well for optical device application such as lensed surface emitting LED. The regrowth process were related with the coolin grate and the well to well spacing. A novel surface emitting LED with hemispherical AlGaAs lens was fabricated using the meltbakc and regrowth as the key process for AlaAs lens array. The light emitting efficiency of the LED was upto three times higher than the similar structure LED without lens. The meltback and regrowth technique was applicable to manufacture the optical device in LPE.

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Structural properties of $Zn:LiNbO_3/Mg:LiNbO_3$ single crystal thin films grown by LPE method (LPE법으로 성장시킨 $Zn:LiNbO_3/Mg:LiNbO_3$ 단결정 박막의 구조적 특성)

  • Lee, H.J.;Shin, T.I.;Lee, J.H.;Yoon, D.H.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.15 no.3
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    • pp.120-123
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    • 2005
  • The 5 mol% ZnO doped $LiNbO_3$ film and the 2 mol% MgO doped $LiNbO_3$ film were grown on the $LiNbO_3$ (001) substrate by liquid phase epitaxy (LPE) method with $Li_2CO_3-V_2O_5$ flux system. The crytsallinity and the lattice mismatch between $Zn:LiNbO_3$, film and $Mg:LiNbO_3$, film were analyzed by x-ray rocking curve (XRC). In addition, the ZnO and MgO distribution in the cross-section of the multilayer thin films was observed using electron probe micro analyzer (EPMA).