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Process Optimization of PECVD SiO2 Thin Film Using SiH4/O2 Gas Mixture

  • Ha, Tae-Min;Son, Seung-Nam;Lee, Jun-Yong;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.434-435
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    • 2012
  • Plasma enhanced chemical vapor deposition (PECVD) silicon dioxide thin films have many applications in semiconductor manufacturing such as inter-level dielectric and gate dielectric metal oxide semiconductor field effect transistors (MOSFETs). Fundamental chemical reaction for the formation of SiO2 includes SiH4 and O2, but mixture of SiH4 and N2O is preferable because of lower hydrogen concentration in the deposited film [1]. It is also known that binding energy of N-N is higher than that of N-O, so the particle generation by molecular reaction can be reduced by reducing reactive nitrogen during the deposition process. However, nitrous oxide (N2O) gives rise to nitric oxide (NO) on reaction with oxygen atoms, which in turn reacts with ozone. NO became a greenhouse gas which is naturally occurred regulating of stratospheric ozone. In fact, it takes global warming effect about 300 times higher than carbon dioxide (CO2). Industries regard that N2O is inevitable for their device fabrication; however, it is worthwhile to develop a marginable nitrous oxide free process for university lab classes considering educational and environmental purpose. In this paper, we developed environmental friendly and material cost efficient SiO2 deposition process by substituting N2O with O2 targeting university hands-on laboratory course. Experiment was performed by two level statistical design of experiment (DOE) with three process parameters including RF power, susceptor temperature, and oxygen gas flow. Responses of interests to optimize the process were deposition rate, film uniformity, surface roughness, and electrical dielectric property. We observed some power like particle formation on wafer in some experiment, and we postulate that the thermal and electrical energy to dissociate gas molecule was relatively lower than other runs. However, we were able to find a marginable process region with less than 3% uniformity requirement in our process optimization goal. Surface roughness measured by atomic force microscopy (AFM) presented some evidence of the agglomeration of silane related particles, and the result was still satisfactory for the purpose of this research. This newly developed SiO2 deposition process is currently under verification with repeated experimental run on 4 inches wafer, and it will be adopted to Semiconductor Material and Process course offered in the Department of Electronic Engineering at Myongji University from spring semester in 2012.

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Research of User's Respondence for Application in Image Achieve of Intangible Cultural Heritage (무형문화유산 영상아카이브 활용을 위한 수용자 반응 연구)

  • Kim, Mee-Shuk;Chung, Sung-Whan
    • The Journal of the Korea Contents Association
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    • v.12 no.8
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    • pp.114-122
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    • 2012
  • The world focus on enhancing national prestige based on the value of traditional culture and history to preserve cultural heritage that make an effort to popularize in public. Hence, the true issue of paradigm for traditional culture are given at recreation for the value of cultural heritage. To study level of awareness of the importance in cultural heritage, proceed on experimental research for two groups that each group as for professionals and laymen. There are five experiment with two groups that of level of immersion, educational effect, interest, intelligibility score in the documentary in achieve which are recorded image and recorded film. The result of experiments, it showed difference between professionals and laymen, high scored of immersion and intelligibility score in professionals group of recorded image, other highly scored of immersion and educational effect in laymen of recorded film. Consequently, it will need historical recording documents to supply divisively with as considering levels and cognitive situation for professionals and laymen to satisfy their intention. And also, the needs for public to develop various source and contents of heritage to have people's interests. For the expert, it demand on educational projects and contents to be initiated in skills and arts.

Effect of the general Characteristics and Oral Public Health Behaviors of the Visually Impaired on the Oral Health Condition (시각장애인의 일반적 특성과 구강보건행태가 주관적인 구강건강상태에 미치는 영향)

  • Lee, Sook-Jeong
    • The Journal of the Korea Contents Association
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    • v.14 no.1
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    • pp.337-345
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    • 2014
  • The visually impaired who have many restrictions on their sight due to impairment of a sense of sight among special senses have substantial difficulties in the areas ranging from very minor behavior in their house to the external activities for social life. Visual impairment may cause many problems in various behaviors for protecting health which have recently drawn a lot of interests. As a method of analysis of collected data, this study conducted the frequency analysis of general characteristics and oral health behavior of the subjects, compared the average of oral public health behavior and oral health condition through t-test and F-test, and conducted the post verification of significant difference among groups with Duncan. For identifying the relevancy between the general characteristics and the oral health behavior, this study conducted Spearman's correlation analysis, and for identifying the impact on subjective, oral health condition, this study conducted multiple regression analysis. SPSS (SPSS20.0 for Windows, SPSS Inc, USA) was used as a statistical program, and the level of significance for determining statistical significance was considered at the level of 0.05. Because the visually impaired are the group whose behaviors for protecting health should be accurately recognized, this study intends to utilize the findings as basic materials for making information communication media suitable for the visually impaired by identifying the real conditions and behaviors of their oral health and analyzing their oral condition caused by such behaviors. With the help of information technology.

A Study of the Relationship of Green Dietary Education, Self-esteem and Happiness of Middle School Home Economics Students (가정교과의 녹색식생활 교육과 중학생의 자아존중감 및 행복감과의 관계 연구)

  • Kim, Eunsil;Cho, Hyunju;Kim, Yunhwa
    • Journal of Korean Home Economics Education Association
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    • v.27 no.3
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    • pp.63-77
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    • 2015
  • Green dietary education emphasized environmental protection and humanity being conducted in middle schools. To develop effective green dietary education program for adolescents, the factors that affected their green dietary practices has been identified. This study aims to identify psychological factors that drive green dietary practices and effect of dietary education that targets middle school students. Data was collected twice from 242 middle school students in Daegu using a self-administered questionnaire in March and June, 2014. There were significant differences in school achievement, economic level and allowance a month (p<0.05) in the green dietary practices and efficacy of students. Three areas (environment, health and traditional, and appreciation & consideration) which were subgroups of green dietary practices were associated with factors such as family relations, peer relationships, self-competence of self-esteem (p<0.05), and positive and negative feelings of happiness (p<0.001). Green dietary practices efficacy was significantly affected by family relations, peer relationships, self-competence of self-esteem (p<0.05), and positive feeling, negative feeling, and negative relationships of happiness (p<0.001). After green dietary education, interests in green dietary, green dietary practices score, the score of health and environment factors of green dietary practices efficacy significantly higher than before education (p<0.05), but all the factors of self-esteem and happiness did not have any significant changes. This study suggests that green dietary education programs for middle school students could account for psychological factors such as self-esteem, happiness according to gender, school records, economic level and allowance a month to be effective.

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Study on Factors Affecting Life Satisfaction of the Disabled Seniors (장애노인의 삶의 만족도 영향요인 연구)

  • Kim, Seong Hee
    • 재활복지
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    • v.20 no.3
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    • pp.17-43
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    • 2016
  • This study is on understanding the reality of disabled seniors and investigation of factors that affect overall life satisfaction, making a proposal to improve their life quality. Situation data for the disabled, gathered by Korea Institute for Health and Social Affairs (KIHASA) in 2014, was used to perform the study, and the target group is 3,181 people with disability, above the age of 65. Descriptive statistics was presented for data analysis and logistic regression analysis was performed to investigate factors that affect life satisfaction. It was concluded from the analysis that gender, age, presence of spouse (demographic factors), house income, possession of house, presence of pensioner, registration to public pension plan, social discrimination (social-economical factors), level of disability, subjective health status, level of help needed for daily living, presence of care-giver, sufficiency of help, ability to go out by oneself, difficulty of using public transportations, and presence of medical checkups (disability and health factors.) make meaningful effects to life satisfaction of disabled seniors. Based on the derived results, this study suggests intensive interests and care-giving service for disabled seniors that live alone, institutional complementations to guarantee income security, including public or private pensions, improvements to social recognition and environments for discrimination of the disabled, organization of health and medical treatment service and health care system, comprehensive service provision to social welfare for both the disabled and seniors, and comprehensive service provision to both health care and social welfare.

A study on the improvements to revitalize short selling from the perspective of protecting the interests of individual investors (개인투자자 이익보호의 관점에서 본 공매도 활성화를 위한 개선방안 연구)

  • Se-Dong Yang;Jae-Yeon Sim
    • Industry Promotion Research
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    • v.9 no.2
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    • pp.29-35
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    • 2024
  • Recently, the Korean financial market has implemented a ban on unleveraged short selling, and leveraged short selling, which involves selling borrowed securities, is called general short selling. This study sought to come up with improvement measures to revitalize short selling from the perspective of individual investors. Short selling refers to selling stocks you do not own in the stock market, predicting that the stock price of the stock will fall, and borrowing stocks to sell them. Based on the results of this study, the short selling market's growth and improvement plans are as follows. First, a plan must be developed to expand short selling opportunities for individual investors. In the domestic short selling market, including KOSPI and KOSDAQ, foreign and institutional participants account for more than 95% of the market, and individual investors are very small. Therefore, its expansion is inevitable. Second, monitoring and punishment for unfair short selling transactions must be strengthened. Representative improvement measures that can minimize the side effects of short selling include strengthening monitoring of unfair trading and short selling, and raising the level of punishment. In addition, measures must be taken to further increase the level of punishment for short selling related to unfair transactions. Third, the short selling reporting and disclosure system needs to be improved. In the case of Korea, short selling transactions are not yet as active as in developed countries, but there is a need to expand the disclosure system to strengthen market transparency in preparation for future short selling transactions becoming more active. In conclusion, it is reported that if short selling regulations are excessively strengthened, losses may occur in terms of price efficiency and market liquidity, which may ultimately have a negative impact on the market. Therefore, policies related to short selling must be made while taking into account the positive aspects of regulatory effects and the negative impact on the market.

A Qualitative Case Study on Rights-Based Social Work Practice in a Residential Facility for People with Intellectual Disabilities (인권관점에 기초한 사회복지실천 경험에 관한 질적 사례연구 - 장애인거주시설의 종사자 경험을 중심으로 -)

  • Kim, Mi-Ok;Kim, Kyung-Hee
    • Korean Journal of Social Welfare
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    • v.63 no.1
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    • pp.29-55
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    • 2011
  • This study aims to understand the experiences of rights-based social work practice in a residential facility for people with intellectual disabilities. A representative residential facility practicing a human rights perspective was selected by recommendation of professional groups. Using a qualitative case study method, data was collected and analysed. In detail, it explores the experiences of rights-based social work practice at both organizational and individual levels respectively, and then discusses ethical dilemmas that arise from workers in the process of rights-based social work practice. According to results at the organizational level, rights-based social work practice of the residential facility began from workers' interests in needs of users with intellectual disabilities. Some trials to apply human rights in social work practice resulted in regulations for people with intellectual disabilities and stepped up organizational culture on human rights perspectives. And, at the individual level, self determination and choice of users with intellectual disabilities were stressed among various forms of human rights. As the results of rights-based social work practice, it appeared to be improved for the participation of the users, workers' human rights sensitivity, and qualities of rights-based activities. However, ethical dilemmas still existed. Hence, rights-based social work practice should understand a process of dynamic interaction between users and workers, which require workers to endeavor continuously. This study is significant in that it explored rights-based social work practice, focusing on field experiences for the first time in Korea, and suggested practical tasks to settle it down in the future.

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Cyber Threats Analysis of AI Voice Recognition-based Services with Automatic Speaker Verification (화자식별 기반의 AI 음성인식 서비스에 대한 사이버 위협 분석)

  • Hong, Chunho;Cho, Youngho
    • Journal of Internet Computing and Services
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    • v.22 no.6
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    • pp.33-40
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    • 2021
  • Automatic Speech Recognition(ASR) is a technology that analyzes human speech sound into speech signals and then automatically converts them into character strings that can be understandable by human. Speech recognition technology has evolved from the basic level of recognizing a single word to the advanced level of recognizing sentences consisting of multiple words. In real-time voice conversation, the high recognition rate improves the convenience of natural information delivery and expands the scope of voice-based applications. On the other hand, with the active application of speech recognition technology, concerns about related cyber attacks and threats are also increasing. According to the existing studies, researches on the technology development itself, such as the design of the Automatic Speaker Verification(ASV) technique and improvement of accuracy, are being actively conducted. However, there are not many analysis studies of attacks and threats in depth and variety. In this study, we propose a cyber attack model that bypasses voice authentication by simply manipulating voice frequency and voice speed for AI voice recognition service equipped with automated identification technology and analyze cyber threats by conducting extensive experiments on the automated identification system of commercial smartphones. Through this, we intend to inform the seriousness of the related cyber threats and raise interests in research on effective countermeasures.

Intelligent Tutoring System based on Wired and Wireless Internet for the living English 300-certifications Program (생활영어 300 인증제를 대비한 유무선 기반 지능형 교육 시스템)

  • Lee, Young-Seok;Cho, Jung-Won;Kim, Byung-Gyu;Park, Jung-Hwan;Kim, Su-Min;Choi, Byung-Uk
    • Journal of The Korean Association of Information Education
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    • v.9 no.3
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    • pp.533-548
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    • 2005
  • According to the increasing of the internet infrastructure and growth of contents technology, the users can access an education service at anytime and anywhere. In a field of English education, especially, internet technology has enabled learners to communicate with their teachers and multimedia contents technology has been able to provide learner not only lots of interests, but also good effect on English learning. In this paper, we propose a method diagnosing learner's level by using some question-items, which consist of item's type and item's function. Futhermore, the proposed system can support three devices which are PC, PDA, and Mobile Phone on wired and wireless internet communication environments. Also, the system provides multimedia contents including flash movies, image, and audio contents. We have applied the system into real classroom, and we verified that the question-items that system provides has no problem, and our method could improve each learner skill on English education. Therefore, we expect that learner who uses the proposed system will get level-based English learning service at anytime and anywhere.

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The Study on relationship between CSV and Investment Efficiency (CSV와 투자효율성에 관한 연구)

  • Ho-Yeong Kim
    • Journal of Digital Convergence
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    • v.21 no.2
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    • pp.33-40
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    • 2023
  • In this study, we aim to examine the impact of corporate social responsibility implementation, which is a major concern in previous research, on investment efficiency. The research method will be a qualitative study with reference to existing previous research. The three main claims to be addressed in this study will be summarized, and the research variables and research models will be described. As a result of the study, based on existing previous research, this study presented three issues to examine how a high level of corporate social responsibility performance increases investment efficiency. First, we argue that a company's high level of social responsibility will be positively related to investment efficiency. Second, it is argued that investment efficiency will be positively related to individual CSR components that represent the interests of primary stakeholders. Third, it is argued that companies with too high a CSR index and companies with a too low CSR index will have less correlation with investment efficiency. The contribution of this study will be to more accurately understand the impact of CSR on corporate investment efficiency. In the future, it is hoped that additional discoveries will be made through research that adopts the three claims presented in this study as hypotheses and empirically analyzes them. The Journal of Digital Policy & Management. This space is for the abstract of your study in English.