• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.577-577
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• 2013

플라즈마를 이용하는 공정은 반도체 산업에서 박막트랜지스터, 평면 모니터와 LCD 등 다양한 반도체 및 디스플레이 소자를 제작하는데 중요한 기술 중 하나로 발전되어 왔다. 현재 플라즈마 공정 기술을 이용하여 소자의 크기를 수십 나노 이하로 공정함으로써 수율을 향상시킬 수 있었지만, 소자의 미세화는 그 한계점에 봉착하였다. 그러한 이유로 웨이퍼 사이즈의 크기를 대구경화 시킴으로써 이런 문제점을 극복하고자 하였지만, 대구경 웨이퍼 사이즈에 맞는 차세대 대면적 공정 장비와 그에 따른 플라즈마 소스의 개발과 이를 컨트롤 할 수 있는 능력이 매우 절실하게 되었다. 본 연구에서는 대구경 웨이퍼용 플라즈마 소스를 위해 상대적으로 낮은 압력과 고밀도 플라즈마를 발생시킬 수 있는 유도 결합형 플라즈마원을 사용하였다. 하지만 유도 결합형 플라즈마 소스의 경우 대구경화에 따른 안테나의 길이가 길어짐으로써 생기는 정상파 효과를 피할 수가 없게 되었다. 그러한 이유로, 본 연구에서는 정상파 효과를 줄일 수 있는 상대적으로 낮은 주파수를 사용하는 안테나의 형태를 이용하여 실질적인 공정 영역에 있어서의 균일도 문제를 해결하였다. 또한, 플라즈마의 특성조절을 위해 이중주파수를 사용함 으로써 플라즈마 특성 조절을 하였다. 이러한 형태의 이중주파수를 사용하는 플라즈마 소스를 이용하여 10 mTorr의 Ar/CF4 조건에서 양이온 종들을 PSM (Plasma Sampling Mass spectroscopy, HIDEN Inc.)을 통해 에너지를 분석하였다. 이중 주파수에 있어 전력비율에 따라 IEDs (Ion Energy Distributions)는 많은 변화가 관찰되었으며, 인가하는 입력전력에 따라 E-H mode 전이가 일어남을 관찰할 수 있었다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.28 no.6
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• pp.263-270
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• 2018

Recently, porous ceramic materials with anti-static performance are urgently needed for semiconductor and OLED/LCD display manufacturing industry. In this work, we fabricated porous titanium manganese oxide ceramics having the surface resistivity of $10^8-10^{10}$ ohm and enhanced mechanical strength by partial sintering method using nanosized titanium oxide. By addition of nano-sized titanium oxide in the matrix, neck formation between grains was strengthened, which remarkably increased flexural strength up to 170 MPa (@porosity: 15 %), 110 MPa (@porosity: 31 %), compared to 80 MPa (@porosity: 26 %) for pristine titanium manganese oxide ceramics. We evaluated the performances of our ceramics as air-floating module for OLED flexible display manufacturing devices.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2014.10a
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• pp.82-85
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• 2014

With high speed communication network and supplement of high quality multimedia devices, large demand of multimedia service stimulates digital signing industry to step forward to new opportunities. But in order to provide competitive quality services, Integrated management system is required. Digital signs use technologies such as LCD, LED and Projection to display content such as digital images, video, streaming media, and information. Digital signs rely on a variety of hardware to deliver the contents. The components of a typical digital sign installation include one or more display screens, one or more media players, and a content management server for each player. To improve the existing high cost and less efficient management system, this paper suggest cost effective Integrated Digital Signage Management System with the results of analysis of existing system. Also this paper presents an actual implementation on entertainment company to evaluate the suitability, to prove the result of superior performance of proposed system.

• Journal of Korean Ophthalmic Optics Society
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• v.18 no.3
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• pp.347-356
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• 2013

Purpose: To evaluate the visual acuity and visual performance after implantation of a aspheric multifocal (ReSTOR$^{(R)}$ SN6AD3) intraocular lens (IOL). Methods: Nineteen cataract patients (30 eyes) implanted with an aspheric multifocal IOL (ReSTOR$^{(R)}$ SN6AD3) either unilaterally or bilaterally were participated. Visual acuity (VA) and objective optical performance were evaluated at the time of preoperation, 1 week, 1 month, and 3 month after operation. At 3 month of post-operation, objective visual performance were measured and compared with the 38 eyes of 20 age-matched normal control. Distance VA was measured by using the ETDRS LCD chart and intermediate and near visual acuity were measured using Jaeger chart. Objective visual performance was assessed preoperatively and 1 week, 1 month and 3 month postoperatively using a double-pass system (Optical Quality Analysis System) with a 4-mm pupil diameter, the OSI (objective scatter index), MTF (modulation transfer function) cut off and strehl ratio. At 3 month of post-operation, visual acuity and visual performance compared with age matched normal control. Results: The uncorrected distance VA, OSI, MTF cut off and strehl ratio were significantly improved (p<0.05) until 1 month postoperatively. Visual performance of MTF cut off and strehl ratio after 3 month of operation were significantly improved compared to the normal control (p=0.063, p=0.103 respectively), however, OSI was higher than normal control. Patients implanted with aspheric multifocal IOL were satisfied with distance and near VA however, were unsatisfied with intermediate VA and reported glare and halos. Conclusions: The visual performance reaches to a stable condition in 1 month of implantation of aspheric multifocal IOL and improved to the level of age-mated normal patients. Also patients were satisfied with their quality of vision, however, intermediate VA, glare and halos were reported as complications.