• 제목/요약/키워드: LACVD

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GaAs계 OMVPE 및 Laser CVD System 연구 (Studies of OMPVE and LACVD for GaAs semiconductors)

  • 정동호
    • 한국광학회:학술대회논문집
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    • 한국광학회 1989년도 제4회 파동 및 레이저 학술발표회 4th Conference on Waves and lasers 논문집 - 한국광학회
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    • pp.210-213
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    • 1989
  • An early phase of the OMVPE and LACVD studies of growing AlGaAs/GaAs films is reported. The AlGaAs/GaAs epitaxy to the level of obtaining MOW structures is a crucial step for the fabrication of the devices such as SEED and/or DOES which are basic parts of the OEIC. The analysis of the OMVPE system is shown for this purpose and the basic results of the LACVD are also presented.

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Growth of $MgB_2$ Thin Films by LACVD

  • Jung, S.G.;Lee, N.H.;Kang, W.N.
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 2007년도 High Temperature Superconductivity Vol.XVII
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    • pp.55-55
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    • 2007
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