• 한국정밀공학회지
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• 제21권12호
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• pp.13-20
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• 2004

Manufacturing process for the microfluidic device can include such sequential steps as master fabrication, electroforming, and injection molding. The laser ablation using masks has been applied to the fabrication of channels in microfluidic devices. In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation of PET (polyethylene terephthalate) by the excimer laser radiation could be used successfully to make three dimensional master fur nickel mold insert. The mechanism fur ablative decomposition of PET with KrF excimer laser $({\lambda}: 248 nm, pulse duration: 5 ns)$ was explained by photochemical process, while ablation mechanism of PMMA (polymethyl methacrylate) is dominated by photothermal process, the .eaction between PC (polycarbonate) and KrF excimer laser beam generate too much su.face debris. Thus, PET was adopted in polymer master for nickel mold insert. Nickel electroforming using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.

• 한국음향학회지
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• 제16권1호
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• pp.39-46
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• 1997

본 논문에서 XeF, KrF 엑시머레이저 펄스에 의해 금속에서 여기되는 광음향신호를 PZT 변환기로 검출하여 광음향 변환 메카니즘과 지향성패턴을 분석하였다. 고체에서 레이저펄스에 의한 광음향 변환 매카니즘은 조사되는 레이저의 에너지밀도에 따라 열탄성영역과 플라즈마영역으로 나뉘며 두영역에서 서로 다른 양상을 보인다. 열탄성영역에서는 표면과 수평방향의 변위가 크고 플라즈마영역에서는 반사력으로 인해 수직방향의 변위가 크게 나타나는 것으로 모델링되며 이를 중심파장 480nm의 XeF엑시머레이저와 248nm의 KrFdprtlajfp이저를 사용하여 실험적으로 증명하였다. 또한 열탄성 영역에서 최대종파에너지는 $60^{\circ}$, 최대횡파에너지는 $30^{\circ}$부른에서 나타났고 플라즈마영역에서는 최대 종파와 횡파에너지가 각각 $0^{\circ},\;30^{\circ}$부근에서 나타나는 지향특성을 보였다.

• 한국광학회지
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• 제7권4호
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• pp.397-402
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• 1996

레이저 가스를 하나의 횡류팬만으로 순환시키는 동심 원통형 구조의 소형 엑시머레이저를 개발하였다. 이 방치를 1kHz의 고속으로 반복동작시켰을 때 KrF 레이저의 평균출력은 56watt였다. 본 논문에서는 kHz급의 소형 엑시머레이저를 실현할 수 있는 설계 파라메터와 레이저 가스의 CR(Clearing Ratio)특성을 분석하였다. 평균출력 56watt일 때 레이저 효율은 1.2%, CR은 2.97, 출력변동율 .+-.9%이다. 이때 레이저 가스용적은 10 liter이고 방전체적은 1.8(높이)*1.2(폭)*30(길이)=64.8$cm^{3}$이다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1990년도 하계학술대회 논문집
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• pp.462-464
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• 1990

We report the development of a surface discharge preionized KrF discharge Laser with a new type of high-brightness Corona preionizer using a segmented columnar $BaTiO_3$ dielectric. This Laser characteristic was higher value than that obtained with the conventional corona preionizer using a glass, $Al_2O_3ceramic$, Kapton film, or a Teflon insulator.

• 한국광학회:학술대회논문집
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• 한국광학회 1990년도 제5회 파동 및 레이저 학술발표회 5th Conference on Waves and lasers 논문집 - 한국광학회
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• pp.9-12
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• 1990

본 연구는 KrF 엑사이머 레이저 증폭을 하기 위하여 먼저 능동매질을 N도 사용하여 발전기와 증폭기의 시간적인 동기회에 주 목적을 두었고 안정한 증폭기의 출력을 얻기 위해 방전관 에너지의 5%를 예비전리로 최적화 시켰으며 방전에 사용되는 Spark Gap Switch의 내부 인덕턴스를 고찰하였다.

• Journal of information and communication convergence engineering
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• 제1권1호
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• pp.39-43
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• 2003

The technology required to advance the state of the art of ultra-high-intensity excimer amplifier construction to the 100 J/100fs output pulse level is identified. The preliminary design work for very large final amplifier pumped by electron beam module is described, and key design problems and approaches are presented and discussed in detail based on the recent experimental and theoretical results.

• 한국자동차공학회논문집
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• 제2권4호
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• pp.91-99
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• 1994

Tunable KrF Excimer Laser is used here for measuring OH and $O_2$ density distribustion in an open $H_2$/air premixed flame and in a combustion bomb. Laser Rayleigh Scattering(LRS) and Planar Laser Induced Predissociative Fluorescence(PLIPF) methods are used to obtain two-dimensional images of total and specific densities. Laser Excitation wavelengths are calibrated via flame images and combustion bomb images show good qualitative a greement with theoretical calculation. Furthermore images in a combustion bomb can be developed to study real Spark-Ignition engine combustions. Our experimental images show that there are no more collisional quenching problem at high pressure environment(including atmospheric pressure) using predissociative fluorescence technique. Further development to obtain two-dimensional temperature dustribution is ready to use eventhough it is not reported in this paper.

• 소성∙가공
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• 제13권3호
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• pp.268-272
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• 2004

Transparent materials such as fused silica are widely utilized in optical and optoelectronics field because of its outstanding properties, such as transparency in a wide wavelength range, strong damage resistance for laser irradiation, and high thermal and chemical stability. In this study, we made a few micro patterns on the surface of fused silica plate using laser induced wet etching. KrF excimer laser was used as a light source. There were no burrs and micro cracks on the etched surface of fused silica and the flatness of the etched surface was fairly good. We investigated the influence of etchant upon the etch rate and quality in laser induced wet etching. Pyrene-acetone solution and toluene were used as etchant. In the side of etch rate, toluene solution was better than pyrene-acetone solution. But we made in wider range of energy density using pyrene-acetone solution. But pyrene-acetone solution gave us wider window of energy density for successful micro patterning.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2004년도 춘계학술대회 논문집
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• pp.245-249
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• 2004

Transparent materials such as fused silica are important materials in optical and optoelectronics field because of its outstanding properties, such as transparency in a wide wavelength range, strong damage resistance for laser irradiation, and high thermal and chemical stability. However, these properties make it difficult to micromachine silica in micro-sized quantities. In this study, we fabricated a micro patterns on the surface of fused silica plate using laser induced wet etching. KrF excimer laser was used as a light source. There were no burrs and micro cracks on the etched surface of fused silica and the flatness of the etched surface was fairly good. We investigated the influence of etchant upon the etch rate and quality in laser induced wet etching. Pyrene-acetone, toluene, and pyrene-toluene solution were used as etchant. In the side of etch rate, toluene and pyrene-toluene solution were better than pyrene-acetone solution.

• 한국레이저가공학회지
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• 제6권2호
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• pp.35-41
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• 2003

In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation by excimer laser radiation could be used successfully to make 3-D microstructure of PET. The mechanism for ablative decomposition of PET with KrF excimer laser(λ: 248nm, pulse duration: 5ns) was explained by photochemical process. And this process showed PET to be adopted in polymer master for nickel mold insert. Nickel electroforming by using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.