• Journal of the Microelectronics and Packaging Society
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• v.11 no.4 s.33
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• pp.81-86
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• 2004

A new method to improve the wet etching characteristics is described. The anisotropic wet-etching of (100) Si with megasonic wave has been studied in KOH solution. Etching characteristics of p-type (100) 6 inch Si have been explored with and without megasonic irradiation. It has been observed that megasonic irradiation improves the characteristics of wet etching such as an etch uniformity and surface roughness. The etching uniformity on the whole wafer with and without megasonic irradiation were less than ${\pm}1\%$ and more than $20\%$, respectively. The initial root-mean-square roughness($R_{rms}$) of single crystal silicon is 0.23 nm. It has been reported that the roughnesses with magnetic stirring and ultrasonic agitation were 566 nm and 66 nm, respectively. Comparing with the results, etching with megasonic irradiation achieved the Rrms of 1.7 nm on the surface after the $37{\mu}m$ of etching depth. Wet etching of silicon with megasonic irradiation can maintain nearly the original surface roughness after etching process. The results have verified that the megasonic irradiation is an effective way to improve the etching characteristics such as etch uniformity and surface roughness.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.16 no.3
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• pp.95-100
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• 2006

Synthesis of the non-swelling property micas was carried out by hydrothermal method. In order to artificially induce the diffusion of ions, a rotating system was attached to the hydrothermal apparatus and by adding 0.7 mm zircon beads, synthesis of the non-swelling property micas could be performed in a low temperature area. The hydrothermal conditions for the preparation of micas were a reaction temperature of $260^{\circ}C$, for 72 hrs, using $1K_2O,\;1Al(OH)_3,\;4Mg(OH)_2\;and\;6SiO_2$ as the starting materials and a 8M-KOH solution as the hydrothermal solvent. The micas obtained under these conditions were a plate shape with a size of $2.89{\mu}m$ and showed a whiteness of over 97 %. Also, through the FT-IR analysis, because the absorption peak of the $Mg_3OH$ vibration was observed at approximately $3700cm^{-1}$, it could be known that it was phlogopite of non-swelling property showing the chemical composition of $KMg_3AlSi_3O_{10}(OH)_2$. This result was very consistent with the EDS analysis where O (41.34 %), Mg (3.88 %), Al (11.45 %), Si (17.62 %) and K (25.71%) elements were detected.

• Journal of Sensor Science and Technology
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• v.7 no.3
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• pp.147-153
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• 1998

The strain characteristics of a fiber optic Fabry-Perot pressure sensor with high sensitivity using a $Si_{3}N_{4}/SiO_{2}/Si_{3}N_{4}$ (N/O/N) diaphragm is experimentally investigated. A 600 nm thick N/O/N diaphragm was fabricated by silicon anisotropic etching technology in 44 wt% KOH solution. An interferometric fiber optic pressure sensor has been manufactured by using a fiber optic Fabry-Perot intereferometer and a N/O/N diaphragm. The 2 cm length fiber optic Fabry-Perot interferometers in the continuous length of single mode fiber were produced with two pieces of single mode fiber coated with $TiO_{2}$ dielectric film utilizing the fusion splicing technique. The one end of the fiber optic Fabry-Perot interferometer was bonded to a N/O/N diaphragm. and the other end was connected to an optical setup through a 3 dB coupler. For the N/O/N diaphragm sized $2{\times}2\;mm^{2}$ and $8{\times}8\;mm^{2}$, the pressure sensitivity was measured 0.11 rad/kPa and 1.57 rad/kPa, respectively, and both of the nonlinearities were less than 0.2% FS.

• Analytical Science and Technology
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• v.11 no.6
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• pp.460-468
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• 1998

Schiff base ligands such as $SOPDH_2$, $SNDH_2$, $EBNH_2$, and $PBNH_2$ and their Co(II) complexes such as [$Co(II)(SND)(H_2O)_2$], [$Co(II)(SOPD)(H_2O)_2$], [$Co(II)(EBN)(H_2O)$], and [$Co(II)(PBN)(H_2O)$] have been synthesized. The mole ratio of Shiff base ligand to cobalt(II) for the Co(II) complexes was found to be 1:1. Also these complexes have been configurated with hexa-coordination. Reduction of dioxygen was investigated by cyclic voltammetry at glassy carbon electrodes modified with Schiff base Co(II) complexes in 1 M KOH aqueous solution. At modified glassy carbon electrode with Schiff base Co(II) complexes, reduction peak current of oxygen was increased and peak potential was shifted to more positive direction compared to bare glassy carbon electrode. The electrokinetic parameters such as number of electron and exchange rate constant were calculated from the results of cyclic voltammogrms. The reduction of dioxygen at glassy carbon electrode has been $2e^-$ reaction pathway. Exchange rate constant at glassy carbon electrode modified with Co(II) complexes was increased 2~10 times compared to bare electrode.

• Applied Chemistry for Engineering
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• v.16 no.4
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• pp.581-587
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• 2005

In order to obtain a highly purified p-dioxanone (PDX) as monomer of biodegradable polymer, suitable solvent must be selected. The selection was based on the solubility of impurities, and partial layer melt crystallization were carried out under the presence of solvent. The solubility of PDX in various solvents such as ethyl acetate, tetrahydrofuran, acetone, alcohols (methanol, ethanol, 1-propanol, 1-butanol and 1-pentanol) were measured over the temperature range of $-10{\sim}15^{\circ}C$. As solubility parameters, the mixing and dissolution enthalpy between the PDX and the solvents was studied based on empirical equations and the regular solution theory. The solubility and the temperature dependency of the solubility with the solvents of acetone, ethylacetate, and tetrahydrofuran of PDX were shown to have relatively high values compared to the alcohol type solvents. Also, in same alcohols, the smaller molecules and higher polarity gave higher solvency. In partial layer melt crystallization, small amount of ethylacetate selectively dissolved impurities and gave highly purified p-dioxanone, over 99.9% purity.

• Korean Chemical Engineering Research
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• v.50 no.1
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• pp.50-54
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• 2012

In this study, PANI and PANI/$TiO_2$ composites were prepared as electrode materials for a supercapacitor application. Cyclic voltammetry (CV) was performed to investigate the supercapacity properties of these electrodes in an electrolyte solution of 6 M KOH. The PANI/$TiO_2$ composites were polymerized by amount of various ratios through a simple in-situ method. The morphological properties of composites were analyzed by SEM and TEM method. The crystallinity of the composite and $TiO_2$ particle size were identified using X-ray diffraction (XRD). In the electrochemical test, The electrode containing 10 wt% $TiO_2$ content against aniline units showed the highest specific capacitance (626 $Fg^{-1}$) and delivered a capacitance of 286 $Fg^{-1}$ reversibly at a 100 $mVs^{-1}$ rate. According to the surface morphology, the increased capacitance was related to the fact that nano-sized $TiO_2$ particles (~6.5 nm) were uniformly connected for easy charge transfer and an enhanced surface area for capacitance reaction of $TiO_2$ itself.

• Journal of the Korean Applied Science and Technology
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• v.34 no.4
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• pp.947-953
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• 2017

In this study, the regeneration efficiency of the amino acid salt absorbent which can be applied to carbon dioxide absorption / regeneration process was confirmed. The regeneration efficiency has a great influence on the economical judgment of the process. so, continuous regeneration experiment was conducted to establish economical process. The amino acid salts used in the experiments are Potassium L-lysinate and Potassium L-alaninate. Each amino acid and potassium hydroxide(KOH) were mixed at a 1: 2 molar ratio. In order to confirm the regeneration efficiency of the absorbent, carbon dioxide was absorbed in the two materials, and the carbon dioxide desorption experiment was carried out by heating. The initial reaction rate was L-alanine was faster. Over time, L-lysine, desorption higher concentrations of carbon dioxide. L-lysine showed higher regeneration efficiency than L-alanine, (L-alanine 47.26% and L-lysine 62.11%). As a result of the continuous regeneration experiment using the L-lysine having good absorption and regeneration efficiency, it was confirmed that the regeneration efficiency decreases as the number of regeneration increases.

• Resources Recycling
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• v.30 no.1
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• pp.44-52
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• 2021

This study investigated the effect of the type of alkaline precipitant used on the synthesis of lithium hydroxide by examining the behavior of lithium hydroxide produced using lithium sulfate recovered from a waste lithium secondary battery as a raw material. The double-replacement reaction (DRR) process was used to remove the impurities contained in the lithium salt precursor of lithium sulfate and to improve the efficiency of the synthesis of lithium hydroxide. The experiment was conducted by control the molar ratio of the precursor ([Li]/[OH]), the reaction temperature, and the composition of the alkaline precipitant (KOH, Ca(OH)2, Ba(OH)2) used for the production of highly-crystalline lithium hydroxide. A secondary solid-liquid separation was performed following the reaction to remove the impurities generated, and the purified aqueous solution of lithium hydroxide was evaporated to remove the moisture and obtain the product as a powder. The crystallinity and synthesis behavior of the product were examined.

• Journal of Conservation Science
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• v.35 no.2
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• pp.159-168
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• 2019

Plasticizers, which are added to plastics, can cause exudation, which means that the plasticizer comes out from surface of the plastics. This causes the surface of plastic artworks to become sticky, and this allows dust and pollutants to become attached to the surface. Therefore, in this study, the degradation characteristics and chemical cleaning methods of each type of plasticizer are evaluated using PVC specimens. To evaluate the degradation characteristics and chemical cleaning methods, microscopic observation, chromaticity and weight measurement, and FT-IR spectroscopy were performed. The results showed that PVCs containing different plasticizers have different degradation patterns. Especially, the PVC containing TOTM showed discoloration and exudation. In the evaluation of the chemical cleaning methods, ethyl alcohol and KOH solution showed good effects, but their stability was not good. Surfactant was found to have a good cleaning effect and stability as a cleaner for exudated plasticizers.

• Korean Chemical Engineering Research
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• v.61 no.3
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• pp.472-478
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• 2023

In this study, the acetaldehyde removal characteristics of activated carbon (AC) for air purifier filters were investigated using metal catalysts-impregnation and functional group-modification method. The AC with a high specific surface area(1700 m²/g) and micropores was prepared by KOH activation of coconut charcoal and the efficiency of catalyst and functional group immobilization was examined by varying the drying conditions within the pores after immersion. The physical properties of the prepared activated carbon were analyzed by BET, ICP, EA, and FT-IR, and the acetaldehyde adsorption performances were investigated using gas chromatography (GC) at various impregnation and modified conditions. As the concentration of impregnation solution increased, the amount of impregnated metal catalysts increased, while the specific surface area showed a decreasing trend. The adsorption tests of the metal catalyst-impregnated and functional group-modified activated carbons revealed that excellent adsorption performance in compositions MgO10@AC, CaO10@AC, EU10@AC, and H-U3N1@AC, respectively. The MgO10@AC, which showed the highest adsorption performance, had a breakthrough time of 533.8 minutes and adsorption capacity of 57.4 mg/g for acetaldehyde adsorption. It was found that the nano-sized MgO catalyst on the activated carbon improved the adsorption performance by interacting with carbonyl groups of acetaldehyde.