• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1319-1320
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• 2007

본 연구는 ZnO 박막을 유도 결합 플라즈마를 이용하여, $BCl_3$/Ar 가스 혼합비, RF 전력, 직류 바이어스 전압과 공정 압력을 변경하면서 실험하였다. ZnO 박막의 최고 식각속도는 80%의 $BCl_{3}/(BCl_{3}+Ar)$에서 700 W의 RF 전력, -150 V의 직류 바이어스 전압, 15 mTorr의 공정 압력, $28^{\circ}C$의 기판 온도로 고정시켰을 때 50 nm/min 이었다. 이 조건에서 ZnO 박막과 $SiO_2$의 선택비는 0.75 이었다.

• Transactions on Electrical and Electronic Materials
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• v.8 no.5
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• pp.206-210
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• 2007

Carbon nanotubes(CNTs) are largely synthesized on Fe catalysts by catalytic chemical vapor deposition. The various shapes and compositions of these nanostructure CNTs were obtained by controlled parameters such as the reaction temperature, gas-mixing ratio. The influence of these parameters is investigated, together with observations of the produced materials after the purification processes. A diameter of CNTs, range from 2 to 10 nm, closely correlated with the size of the catalyst particle found attached to the tube end. The yield of CNTs was estimated to be 88.5 % and the purities of CNTs thus obtained were more than 80 %. The experimental results were documented with field emission scanning electron microscopy and raman spectroscopy and transmission electron microscopy, both before and after the purification.

• Proceedings of the Korean Institute of Resources Recycling Conference
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• 2004.05a
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• pp.74-81
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• 2004

• Korea Information Processing Society Review
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• v.5 no.3
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• pp.56-62
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• 1998

단문 메시지 서비스(Short Message Service)는 짧은 길이의 텍스트 메시지를 이동 단문 단말들간에 전송하는 데이터 서비스이다. 이 서비스는 통화로를 직접적으로 이용하지 않으며 구현과 이용이 쉽고 다양한 부가서비스를 제공할 수 있다 본 논문에서는 단문메시지를 상용 CDMA 망에 구현한 예를 제시하고자 한다. 단문 메시지 센터를 도입하고 메시지 서버를 개발하였으며 기존 이동전화 망의 프로토콜을 단문 메시지 서비스를 위해서 개선하였다 이 프로토콜을 교환기와 이동가입자 위치등록기등의 CDMA 망에 적용하였다.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1380-1381
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• 2006

본 연구는 MgO 박막을 유도 결합 플라즈마를 이용하여, $CF_4/Ar$ 가스 혼합비로 식각하였고, RF 전력, DC-bais 전압과 Process Pressure를 변경하면서 실험하였다. 빛 방출 분석(optical emission spectroscopy, OES)을 이용하여, 플라즈마 진단과 식각 특성과의 관계를 분석하였다. OES 결과로부터 $CF_4$ 첨가비를 50%까지는 증가시킴에 따라 식각률이 증가하였고, 그 후에 Ar 이온이 감소함으로써 식각률이 감소하였다. MgO 박막의 최고 식각률은 50%의 $CF_4/(CF_{4}+Ar)$에서 700 W의 RF 전력, -150 V의 DC-bias 전압, 반응로 압력은 15 mTorr, 기판 온도는 $30^{\circ}C$로 고정시켰을 때 29nm/min이었다. 이 조건에서 MgO 박막과 $SiO_2$의 선택비는 0.06 이었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.140-141
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• 2007

반도체 소자의 공정에 있어서 device scaling으로 인한 고유전 게이트 산화막 (high-k dielectics thin film)의 공정 개발 확보 방안이 필요하다. 본 논문에서는 유도결합 플라즈마를 이용하여 고유전율 박막을 식각하였다. CF4, SF6 등의 가스에서 금속-F, 금속-S 결합의 낮은 휘발성으로 인하여 시료 표면에 잔류하여 낮은 식각률을 보이며 측벽 잔류물을 형성하였으며, HBr, Cl 기반 플라즈마에서 금속-Br, 금속-Cl 결합은 시료 표면으로부터 탈착이 용이하여 효과적인 식각이 이루어짐을 확인할 수 있었다.

• Korean Journal of Metals and Materials
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• v.46 no.12
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• pp.823-829
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• 2008

The solvent extraction process for the recovery of vanadium from leaching solution of SCR(selective catalytic reduction) spent catalyst was investigated by using Alamine336 as an extractant. The effects of experimental conditions, such as initial pH and concentration of sulfate ion, and ammonia concentration of stripping solution were studied. The extraction percentage of vanadium were increased with the increase of initial pH of leaching solution and decreased with the increase of sulfate ion. More than 99% of vanadium in leaching solution were extracted and stripped at the A/O ratio of 1.0 in 2 stages. On the basis of these results, an optimum solvent extraction process which vanadium was effectively recovered from SCR spent catalyst was proposed.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.2
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• pp.147-150
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• 2019

There is a need for the development of transparent conductive materials that are economical and environmentally friendly with exhibit low resistivity and high transmittance in the visible spectrum. In this study, the deposition rate and uniformity of Al-doped ZnO-thin films were improved by changing the Z-motion of the sputtering system. The deposition rate and the uniformity were determined to be 3.44 nm/min and 1.23%, respectively, under the 10 mm Z-motion condition. During $O_2$ plasma treatment, the intrusion-type metal elements in the thin film were reduced, which contributed to an oxygen vacancy reduction in addition to structural stabilization. Moreover, the sheet resistance was more easily saturated.

• Biomolecules & Therapeutics
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• v.10 no.2
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• pp.129-135
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• 2002

HM10411 is a recombinant granulocyte-colony stimulating factor (rG-CSF) that has been developing as a drug for neutropenia. In this study, antigenic potential of HM10411 was examined by active systemic anaphylaxis (ASA) in guinea pigs and passive cutaneous anaphylaxis (PCA) in guinea pig-guinea pig system. HM10411 was subcutaneously administered at 0,5, and 50 mg/kg and also as a suspension with adjuvant (50 mg/kg+FCA). Ovalbumin (OVA) as a suspension with adjuvant was used to induce positive control responses. In the ASA test, no symptoms except urination and evacuation that were considered as physiological phenomena were observed at 0 and 5 mg/kg. Two of 5 animals at 50 mg/kg showed sneering, dyspnea, or cyanosis. All animals in the adjuvant mixture group showed severe symptoms of anaphylatic shock and 3 of them died. In the PCA test, no antibody against HM 10411 was detected in the sera from the animals sensitized with 0 or 5 mg/kg. Only 1 serum sample from the animals immunized with 50 mg/kg showed positive reaction against HM10411, while all 5 sera collected from the HM10411 and FCA mixture group contained the HM10411-specific antibodies. These results suggest HM10411 is considered to have antigenicity In guinea pig.

• Journal of Communications and Networks
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• v.8 no.2
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• pp.169-174
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• 2006

In this paper, the algorithm of a methodology for the calculation of spectrum requirements was implemented. As well, the influence of traffic distribution ratio among radio access technology groups, spectral efficiency, and flexible spectrum usage (FSU) margin was analyzed in terms of the spectrum requirements, with a view toward for future development of international mobile telecommunication (IMT)-2000 and systems beyond IMT-2000. The calculated spectrum requirement in the maximum spectral efficiency case is reduced by approximately 40% compared to a minimum spectral efficiency case. The effect of the distribution ratio on the required spectrum is smaller than the effect of the spectral efficiency. As the flexible spectrum usage margin increases by 1.0 dB, the total spectrum requirement decreases by 0.9 dB. The required spectrum for the market input parameter, ${\rho}$ = 0.5 is 801.63 MHz, while the required spectrum for ${\rho}$ = 1.0 is 6295.4 MHz. This is equivalent to an increase of 785.32 %.