• 제목/요약/키워드: Ion-beam mixing

검색결과 51건 처리시간 0.032초

원자혼합법으로 증착된 은 박막의 트라이볼로지적 특성에 관한연구 (A Study on the Tribological Characteristics of Thermally Evaporated Silver Films Assisted by Atomic Mixing)

  • 양승호;공호성;윤희성
    • 한국윤활학회:학술대회논문집
    • /
    • 한국윤활학회 2001년도 제34회 추계학술대회 개최
    • /
    • pp.27-34
    • /
    • 2001
  • A new functionally gradient metal coating method using an atomic mixing technique was developed. In this work the effect of silver atomic mixing on the tribological characteristics of silver$.$ films. has been investigated experimentally. Atomic mixing was implemented by using the, bombardment .of accelerated Ar ions during the thermal evaporation coating process of silver films. Experiments were performed in dry conditions using a ball-on-disk test rig at a load range of 19.6 mN - 17.64 N and a sliding velocity of 20 mm/sec. Results showed that the life of functionally gradient silver coating was enhanced about 100 times more than that of thermally evaporated silver coating and 2 times more than that of IBAD silver coating. The functionally gradient. film also showed low friction and wear compared to those of the evaporated silver and

  • PDF

Ion Beam Mixing에 의한 Ni/Si계의 상 형성 및 전이에 관한 연구 (A study on the phase formation and sequence in Ni/Si system during ion beam mixing)

  • 최정동;곽준섭;백홍구;황정남;한정인
    • 한국재료학회지
    • /
    • 제5권5호
    • /
    • pp.503-511
    • /
    • 1995
  • 금속/실리콘계에 대한 이온선 혼합시의 비정질상 및 결정상 형성여부를 예측할 수 있는 모델(ADF Model)과초기 결정상 예측 모델(PDF Model)의 적용을 실험적으로 조사하기 위하여 Ni/Si계에 대한 이온선 혼합을 온도와 이온선량을 변수로 하여 행하였으며 상형ㅅㅇ과정을 해석하였다. 이온선 혼합은 80keV가속기를 이용하여 상온~20$0^{\circ}C$의 온도 범위에서 1.0 $\times$ $10^{15}$Ar^{+}$/$cm^{2}$~2.0 $\times$ $10^{-16}$Ar^{+}$/$cm^{2}$의 이온선량을 변화시키면서 실험하였고, 상분석은 TEM과 GXRD를 이용하였다. Ni/Si게에 대한 ADF값은 0.804로 양의 값을 가지므로 이온선 혼합시 비정실상이 형성되고, $Ni_{2}$Si상이 다른 화합물상보다 훨씬 큰 음의 PDF값을 갖으므로 초기 결정상이 $Ni_{2}$Si가 될 것을 예측하였다. 이러한 예측은 실험결과와 매우 잘 일치하였다. 이상의 연구결과로부터 ADF 및 PDF모델을 이용하여 박막에서 형성되는 상을 보다 정확히 예측할수 잇음을 알 수 있었다.

  • PDF

Eosin을 첨가한 Boric-Acid Glass의 비선형 광학적 특성 (Nonlinear Optical Properties of Eosin-Doped Boric Acid Glass)

  • 유연석
    • 한국광학회지
    • /
    • 제2권3호
    • /
    • pp.133-138
    • /
    • 1991
  • Eosin을 첨가한 boric acid 유리질 포화흡수체의 포화세기는 비교적 낮은 것으로(약 700 mW/$\textrm{cm}^2$) 측정되었고, 세기가 낮은 경우에서도 축퇴4광파혼합에 의해 광학적 위상공액파를 발생시킬 수 있었다. 파장이 488nm인 Ar-ion laser를 사용하여 이 매질에서 DFWM에 의한 위상공액파의 편광특성을 보였고, 위상공액 반사율의 빛의 세기와 파장에 대한 의존성을 측정하였다. 이 매질에서 비축퇴2광파혼합에 의한 에너지 교환은 두 광속의 주파수차가 약 100 Hz 정도인 경우에 최대가 되었다.

  • PDF

The Enhancement of Corrosion Resistance for WC-Co by Ion Beam Mixed Silicon Carbide Coating

  • 여순목;김동진;박재원
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
    • /
    • pp.101-101
    • /
    • 2010
  • A strong adhesion of a silicon carbide (SiC) coating on a WC-Co substrate was achieved through an ion beam mixing technique and the corrosion resistance of the SiC coated WC-Co was investigated by means of a potentiodynamic electrochemical test. In the case of 1 M NaOH solution, a corrosion current density for a SiC coated WC-Co with a heat treatment at $500^{\circ}C$ displays about 50 times lower than that for the as-received WC-Co. However, in the case of 0.5 M H2SO4 solution, a corrosion current density for a SiC coated WC-Co displays about 3 times lower than that for as-received WC-Co. We discussed the physical reasons for the changes of the corrosion current densities at the different electrolytes.

  • PDF

The Change of Magnetic Easy Axis in Ion Beam Mixed Co/Pt Multilayer

  • Kim, S.H.;Chang, G.S.;Son, J.H.;Kim, T.Y.;Chae, K.H.;Kang, S.J.;Lee, J.;Jeong, K.;Lee, Y.P.;Whang, C.N.
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
    • /
    • pp.162-162
    • /
    • 2000
  • We have studied magnetic properties of Co/Pt multilayered films which have attracted great interest as high-density magneto-optical (MO) recording media due to their good MO properties. For this study, [Pt(45 )/Co(35 )]$\times$8 films were deposited with a Pt buffer layer of 60 on Si(100) substrate by alternating electron-beam evaporation in a high vacuum and were ion beam mixed by using 80keV Ar+ at 25$0^{\circ}C$. Especially, an external magnetic field was added to help changing magnetic property during ion beam mixing (IBM). The intermixing of Co and Pt layers after IBM was confirmed with Rutherford Backscattering Spectroscopy (RBS) and Transmission Electron Microscopy (TEM). The MO property of the film was measured with magneto-optical Kerr spectrometer and the change of magnetic easy axis in the film plane was observed from Ker loop data. This anomalous result might be correlated with the change of atomic structure due to the intermixing effect.

  • PDF

THE FABRICATION OF A PROCESS HEAT EXCHANGER FOR A SO3 DECOMPOSER USING SURFACE-MODIFIED HASTELLOY X MATERIALS

  • Park, Jae-Won;Kim, Hyung-Jin;Kim, Yong-Wan
    • Nuclear Engineering and Technology
    • /
    • 제40권3호
    • /
    • pp.233-238
    • /
    • 2008
  • This study investigates the surface modification of a Hastelloy X plate and diffusion bonding in the assembly of surface modified plates. These types of plates are involved in the key processes in the fabrication of a process heat exchanger (PHE) for a $SO_3$ decomposer. Strong adhesion of a SiC film deposited onto Hastelloy X can be achieved by a thin SiC film deposition and a subsequent N ion beam bombardment followed by an additional deposition of a thicker film that prevents the Hastelloy X surface from becoming exposed to a corrosive environment through the pores. This process not only produces higher corrosion resistance as proved by electrolytic etching but also exhibits higher endurance against thermal stress above 9$900^{\circ}C$. A process for a good bonding between Hastelloy X sheets, which is essential for a good heat exchanger, was developed by diffusion bonding. The diffusion bonding was done by mechanically clamping the sheets under a heat treatment at $900^{\circ}C$. When the clamping jig consisted of materials with a thermal expansion coefficient that was equal to or less than that of the Hastelloy X, sound bonding was achieved.

플라즈마중합 (MMA-Sty-TMT) 박막의 레지스트 특성조사 (A study on the resist characteristics of plasma polymerized thin film of (MMA-Sty-TMT))

  • 박종관;박상현;박복기;정해덕;한상옥;이덕출
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 1994년도 하계학술대회 논문집 C
    • /
    • pp.1268-1270
    • /
    • 1994
  • Fine lithographic technology in a submicron design regime is necessary for the fabrication of VLSI circuits. In such lithography, fine pattern delineation is performed by electron beam, ion beam and X-ray lithography instead of photolithography. Therefore, the new resist materials and development method have been required. So, we are investigating another positive E-beam resists which have high sensitivity and dry etching resistance, Plasma co-polymerized resist was prepared using an interelectrode gas-flow-type reacter. Methymethacrylate, tetramethyltin and styrene were chosen as the monomer to be used. The delineated pattern in the resist was developed with gas-flow-type reactor using an argon and 02 as etching gas. We studied about the effects of discharge power and mixing rate of the co-polymerized thin :film. The molecular structure of thin film was investigated by ESCA and IR, and then was discussed in relation to its quality as a resist.

  • PDF

Study in Mechanism of Hydrogen Retention by C-SiC Films with IR

  • Huang, N.K.;Xiong, Q.;Liu, Y.G.;Yang, B.;Wang, D.Z.
    • Journal of Korean Vacuum Science & Technology
    • /
    • 제6권1호
    • /
    • pp.46-50
    • /
    • 2002
  • C-SiC films with different content of SiC on stainless steel substrate were prepared with ion beam mixing. It was found that hydrogen concentrations in C-SiC coatings was higher than that in stainless steel after H$\^$+/ ion implantation followed by thermal annealing. Infrared (IR) transmission measurement was used to study the mechanism of hydrogen retention by C-SiC films. The vibrational features in the range between 400 and 3200 cm$\^$-1/ in IR transmission spectra show the Si-CH$_3$, Si-CH$_2$, Si-H, CH$_2$and CH$_3$bonds, which are responsible for retaining hydrogen.

  • PDF

Ce:$BaTIO_3$, Mgo:$LiNbO_3$와 Fe:$LiNbO_3$ 결정에서의 이광파혼합 실험 (Two-wave mixing in Ce:$BaTIO_3$, Mgo:$LiNbO_3$ and :$LiNbO_3$ crystals)

  • 주원제;박주형;곽장만;오차환;송석호;한양규;김필수
    • 한국광학회지
    • /
    • 제9권6호
    • /
    • pp.423-427
    • /
    • 1998
  • 광정보처리용 매질로 많이 사용되는 $LiNbO_3$$BaTIO_3$ 결정에 대한 이광파혼합 실험을 통하여 광정보처리 소자로서의 특성을 조사하였다. 조사된 결정들은 각각 QJADYDD로 사용되는 것들로서,$BaTIO_3$는 0.03% mol의 ceruim이 첨가된 것이며, 두 개의 LiNbO3는 각각 0.03% mol의 Fe와 6% mol의 MgO 가 첨가된 것이다. 이광파혼합을 위한 기록광으로는 $Ar^+$ 이온 레이저를 사용하였고, 실시간으로 기록, 소거 및 감쇠를 관찰하기 위한 검출광으로는 He-Ne 레이저를 이용하였다. 각 결정들에 대하여 회절격자의 기록-감쇠 및 소거 특성, 조사광에 대한 응답특성, 또한 각 선택성을 측정하고 비교하였다.

  • PDF

X-ray Absorption Near-edge Studies of Au1-xPtx alloys

  • Y.D. Chung;Lim, K.Y.;Lee, Y.S.;C.N.Whang;Park, B.S.;Y.Jeon
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
    • /
    • pp.164-164
    • /
    • 2000
  • Since Au-Pt alloys have various atomic structures depending upon composition and annealing temperature, it is very interesting to investigate the electronic structures of alloys. We studied the changes of the electronic structure I the Au-Pt alloys by x-ray absorption near edge spectroscopy (XANES). Two kinds of Au-Pt alloy samples were prepared by arc melting methods and ion-beam-mixing technique. The Pt L2, 3-edge and Au L2, 3-edge X-ray absorption spectra (XPS) were measured with the electron yield mode detector at the 3C1 beam line of the Pohang Light Source (PLS). It was found that there was a substantial decrease in the area of the Pt L2, 3 white lines compared with that of pure Pt. The observed decrease in white line area was attributed to an increase in the number of pure Pt. The observed decrease in white line area was attributed to an increase in the number of 5d-electrons at the Pt site upon alloy formation. However, the Au L2, 3 edge spectra for Au-Pt alloys are all similar to that of pure Au. This implies that the 5d hole count of Au is not changed by alloy formation with Pt.

  • PDF