• Applied Science and Convergence Technology
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• 제23권6호
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• pp.357-365
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• 2014

A non-invasive method for ion energy distribution measurement at a RF biased surface is proposed for monitoring the property of ion bombardments in capacitively coupled plasma sources. To obtain the ion energy distribution, the measured electrode voltage is analyzed based on the circuit model which is developed with the linearized sheath capacitance on the assumption that the RF driven sheath behaves like a simple diode for a bias power whose frequency is much lower than the ion plasma frequency. The method is verified by comparing the ion energy distribution function obtained from the proposed model with the experimental result taken from the ion energy analyzer in a dual cathode capacitively coupled plasma source driven by a 100 MHz source power and a 400 kHz bias power.

• 한국표면공학회지
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• 제48권4호
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• pp.179-184
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• 2015

Quadrupole Mass Spectrometers (QMS) is a very useful tool in vacuum process diagnosis. Tungsten filament based ion sources are vulnerable to contamination from process gas monitoring. Common symptoms of quadrupole mass spectrometer malfunction is appearance of unwanted contaminant mass peaks or no detection of any ion peaks. We disassembled used quadrupole mass spectrometer and found out black insulating deposits on inside of ion source parts. Five steps of cleaning procedure were applied and almost full restoration of functions were confirmed in two types of closed ion source quadrupole mass spectrometer. By using a numerical modeling (CFD-ACE+) technique, the electric potential profile of ion source with/without insulating deposit was calculated and showed the possibility of quadrupole mass spectrometer malfunction by the deterioration of designed potential profile inside the ion source.

• Nuclear Engineering and Technology
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• 제54권10호
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• pp.3587-3594
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• 2022

A distributed high-speed data acquisition and monitoring system for the RF negative ion source at Huazhong University of Science and Technology (HUST) is developed, which consists of data acquisition, data forwarding and data processing. Firstly, the data acquisition modules sample physical signals at high speed and upload the sampling data with corresponding absolute-time labels over UDP, which builds the time correlation among different signals. And a special data packet format is proposed for the data upload, which is convenient for packing or parsing a fixed-length packet, especially when the span of the time labels in a packet crosses an absolute second. The data forwarding modules then receive the UDP messages and distribute their data packets to the real-time display module and the data storage modules by PUB/SUB-pattern message queue of ZeroMQ. As for the data storage, a scheme combining the file server and MySQL database is adopted to increase the storage rate and facilitate the data query. The test results show that the loss rate of the data packets is within the range of 0-5% and the storage rate is higher than 20 Mbps, both acceptable for the HUST RF negative ion source.

• 반도체디스플레이기술학회지
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• 제23권2호
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• pp.129-134
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• 2024

This study aims to talk about the necessity of solving the PFC gas emission problem raised by the recent development of the semiconductor industry and the remote plasma source method monitoring system used in the semiconductor industry. The 'monitoring system' means that the researchers applied machine learning to the existing monitoring technology and modeled it. In the process of this study, Residual Gas Analyzer monitoring technology and linear regression model were used. Through this model, the researchers identified emissions of at least 12700mg CO2 to 75800mg CO2 with values ranging from ion current 0.6A to 1.7A, and expect that the 'monitoring system' will contribute to the effective calculation of greenhouse gas emissions in the semiconductor industry in the future.

• 청정기술
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• 제27권2호
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• pp.174-181
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• 2021

본 연구에서는 경상남도 지역의 오염감시전용측정망의 5년간(2013 ~ 2017) 자료를 이용하여 주오염원과 분기별 지하수 수질특성을 분석하였다. 주오염원은 산업단지지역, 광산·폐광산지역 및 하수처리시설로 구별하였다. 분석 항목은 현장측정 항목(수온, pH, 전기전도도, 용존산소, 산화물환원전위), 양이온 그리고 음이온이었다. 수온과 pH는 주오염원에 따라 크게 변하지 않았다. 양이온과 음이온의 평균농도의 합은 산업단지지역에서 가장 높았고, 하수처리시설 그리고 광산·폐광산지역 순이었다. 산업단지지역에서는 전기전도도의 값이 가장 높았고, 용존산소의 값이 가장 낮았다. 산업단지지역은 나트륨이온이 가장 높은 구성비를 보인 반면 하수처리시설과 광산·폐광산지역에서는 칼슘이온이 가장 높은 값을 나타내었다. 모든 주오염원에서 중탄산염의 농도가 가장 높게 나타났다. 수온, pH 그리고 양이온과 음이온의 농도는 분기마다 크게 다르지 않았다. 수질유형 중 Na-HCO₃ 유형이 가장 높은 비율을 차지하였으나, 외부 오염의 가능성이 높은 Na-Cl 유형도 오염감시전용측정망의 전체 자료 중 약 20%를 차지하였다.

• Journal of Electrical Engineering and Technology
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• 제1권3호
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• pp.359-365
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• 2006

Since the start of the KSTAR (Korea Superconducting Tokamak Advanced Research) project, Instrumentation and Control (I&C) of the Neutral Beam Test Facility (NB-TF) has been striving to answer diverse requests arising from various facets during the project's development and construction phases. Hard-wired electrical circuits have been designed, tested, fabricated, and finally installed to the relevant parts of the system. In relation to the vacuum system I&C, controlling functions for the rotary pumps, a Roots pump, two turbomolecular pumps, and four cryosorption pumps have been constructed. I&C for the ion source operation are the temperature and flow rate signal monitoring, Langmuir probe signal measurements, gradient grid current measurements, and arc detector circuit. For the huge power system to be monitored or safely operated, many temperature measurement functions have also been implemented for the beam line components like the neutralizer, bending magnet, ion dump, and calorimeter. Nearly all of the control and probe signals between the NB test stand and the control room were made to be transmitted through the optical cables. Failures of coolant flow or beam line vacuum pressure were made to be safely blocked from influencing the system by an appropriate interlock circuit that will shut down the extraction voltage application to the system or prevent damages to the vacuum components. Preliminary estimation of the beam power through the calorimetric measurement shows that 87.9% of the total power of the 60kV/18A beam with 200 seconds duration is absorbed by the calorimeter surface. Most of these I&C results would be highly appropriate for the construction of the main NBI facility for the KSTAR national fusion research project.

• 대한화학회지
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• 제39권12호
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• pp.902-909
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• 1995

Ion trap 질량분석기와 Quadrupole 질량분석기를 이용한 밀가루 중 유기인제(dimethoate, diazi-non, parathion-methyl, fenithion, malathion) 및 인삼 중 BHC 이성질체들의 정성 정량 분석에 대한 유용성을 평가하기 위해 검출한계를 구하고, 검량선을 작성하였다. 이온화 방법으로 EI와 CI를 사용하여 mass fragmentation pattern을 비교하여 정성분석에 적용하였으며, scan과 selected ion monitoring(SIM) mode로 미량분석법으로서의 유용성을 평가하였다. 검출한계는 ion trap에서 scan시 0.008-0.225ng이었으며, quadru-pole에서는 scan시 0.23-3.1ng, SIM 측정시 0.032-0.68ng으로ion trap이 quadrupole의 scan시 보다 2-300배, SIM보다 4-30배까지 검출한계가 낮았다. 검량선의 직선성은 ion trap과 quadrupole모두 0.9이상이었다. 밀가루 추출물은 Bio-Bead S-X3를 사용하여 정제하였고, 인삼은 Florisil column으로 정제하였다. 5종의 유기인제의 회수율은 80% 이상이었으며, BHCs의 회수율은 60-90%이었다.

• Journal of Biosystems Engineering
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• 제42권4호
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• pp.350-357
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• 2017

Purpose: In-situ monitoring of water quality is fundamental to most environmental applications. The high cost and long delays of conventional laboratory methods used to determine water quality, including on-site sampling and chemical analysis, have limited their use in efficiently managing water sources while preventing environmental pollution. The objective of this study was to develop an on-site water monitoring system consisting mainly of an Arduino board and a sensor array of multiple ion selective electrodes (ISEs) to measure the concentration of $NO_3$ ions. Methods: The developed system includes a combination of three ISEs, double-junction reference electrode, solution container, sampling system consisting of three pumps and solenoid valves, signal processing circuit, and an Arduino board for data acquisition and system control. Prior to each sample measurement, a two-point normalization method was applied for a sensitivity adjustment followed by an offset adjustment to minimize the potential drift that could occur during continuous measurement and standardize the response of multiple electrodes. To investigate its utility in on-site nitrate monitoring, the prototype was tested in a facility where drinking water was collected from a water supply source. Results: Differences in the electric potentials of the $NO_3$ ISEs between 10 and $100mg{\cdot}L^{-1}$ $NO_3$ concentration levels were nearly constant with negative sensitivities of 58 to 62 mV during the period of sample measurement, which is representative of a stable electrode response. The $NO_3$ concentrations determined by the ISEs were almost comparable to those obtained with standard instruments within 15% relative errors. Conclusions: The use of the developed on-site nitrate monitoring system based on automatic sampling and two-point normalization was feasible for detecting abrupt changes in nitrate concentration at various water supply sites, showing a maximum difference of $4.2mg{\cdot}L^{-1}$ from an actual concentration of $14mg{\cdot}L^{-1}$.

• Journal of Advanced Marine Engineering and Technology
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• 제40권1호
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• pp.28-33
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• 2016

배터리는 휴대폰, 전기자동차, 무인잠수정 등과 같은 분야에서는 주 동력원으로 사용되고, 일반 자동차에서는 시동기 또는 램프구동용으로 사용되며, 일반 선박에서는 비상전원으로 사용되고 있다. 2차 전지로는 납축전지와 리튬이온 배터리를 많이 사용하고 있으며, 납축전지는 가격이 비교적 저렴하고 안전하다. 리튬이온전지는 에너지 밀도가 높고 출력이 우수하며 수명이 긴 장점이 있으나 공기 중의 수분과 반응하여 폭발의 위험성을 가지고 있다. 그러나 최근에는 방수, 방염, 방진 기술의 발달에 힘입어 리튬배터리의 사용이 증가하고 있고, 특히 하이브리드 선박 및 전기추진 선박 등의 주동력원으로 사용될 만큼 그 사용범위가 점점 넓어지고 있으므로 좀 더 엄격한 배터리의 관리가 필요하다. 하이브리드 선박에서는 500kWh 이상의 대용량 동력원을 만들기 위하여 셀(Cell) 단위로 이루어진 수십 개의 리튬배터리가 들어 있는 팩들로 접속이 된 전원을 사용한다. 따라서 배터리 점검에 필요한 검출 전압, 전류 및 온도 데이터들을 관리용 서버로 보내 주는 유선 점검 및 감시시스템을 구현하는 데에는 많은 전선과 통신 모듈이 필요하다. 본 논문에서는 직렬통신 모듈보다 가격이 저렴하고 전선을 사용하지 않는 저 전력 블루투스(Bluetooth low energy, BLE) 무선통신 모듈과 전력선 모뎀을 사용하여 하이브리드 선박용 리튬배터리 저가형 점검 및 감시시스템을 구현하고자 한다. 배터리의 점검요소에는 잔존용량(State of charge, SOC)과 잔존수명(State of health, SOH)이 있으며, 제안한 시스템은 이들을 규칙적으로 점검하여 배터리의 수명 예측과 예방 정비를 할 수 있기 때문에 안전사고를 방지할 수 있을 것으로 전망된다.

• 한국항공우주학회지
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• 제45권2호
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• pp.140-147
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• 2017

본 논문에서는 전기추진 무인항공기의 동력원으로 주로 사용되고 있는 리튬폴리머 배터리의 상태 모니터링을 위해 기존에 자체 개발한 동력 모니터링 장치인 PMU의 개선 및 제작에 관하여 기술하였다. 개선된 PMU는 비행에 필요한 다양한 센서와 모터의 구동에 안정적인 전압과 전류를 제공하며 모니터링 채널과 온도센서의 추가로 상태 모니터링의 정밀도가 향상되었다. 지상 시험환경을 통해 무인항공기에 탑재되는 PMU의 전압전류 측정값을 보정하고 실제 비행시험을 통해 개선된 성능을 확인하였다.