• Journal of the Institute of Electronics Engineers of Korea SD
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• v.45 no.7
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• pp.23-31
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• 2008

Experiment results are presented for gate oxide degradation under the constant voltage stress conditions using MOSFETs with 3-nm-thick gate oxides that are treated by deuterium gas. Two kinds of methods, annealing and implantation, are suggested for the effective deuterium incorporation. Annealing process was rather difficult to control the concentration of deuterium. Because the excess deuterium in gate oxide could be a precursor for the wear-out of gate oxide film, we found annealing process did not show improved characteristics in device reliability, compared to conventional process. However, deuterium implantation at the back-end process was effective method for the deuterated gate oxide. Device parameter variations as well as the gate leakage current depend on the deuterium concentration and are improved by low-energy deuterium implantation, compared to those of conventional process. Especially, we found that PMOSFET experienced the high voltage stress shows a giant isotope effect. This is likely because the reaction between "hot" hole and deuterium is involved in the generation of oxide trap.

• Proceedings of the Materials Research Society of Korea Conference
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• 2010.05a
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• pp.49.2-49.2
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• 2010

Copper oxide films have been deposited on silicon substrates by direct current magnetron sputtering of Cu in O2 / Ar gas mixtures. The target oxidation occurring as a result of either adsorption or ion-plating of reactive gases to the target has a direct effect on the discharge current and the resulting composition of the deposited films. The kinetic model which relates the target oxidation to the discharge current was proposed, showing the one-to-one relationship between discharge current characteristics and film stoichiometry of the deposited films.

• Korean Journal of Materials Research
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• v.6 no.6
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• pp.605-609
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• 1996

MOS 소자의 얇은산화막(thin oxide)불량을 화학적으로 식각하지 않고 불량부위를 광전자방사(photon emission)반응을 이용하여 위치를 확인하고, 이곳을 FIB로 절단하여 불량부위의 단면을 관찰했다. 20nm 두께의 SiO2불량은 셀(cell)영역의 위치에 따른 의존성은 없고, 불량은 저전계의 입자(particle)성 불량과 중간전계의 Si 기판 핏(pit)과 관련된 불량이 주였다. 고전계에서는 전형적인 SiO2 산화막의 절연파괴가 일어난 것이 관찰된다.

• Korean Journal of Materials Research
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• v.12 no.11
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• pp.860-864
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• 2002

$Li^{+}$ extraction reactions with ion-exchange type lithium manganese oxide in an aqueous phase were examined using chemical and x-ray diffraction (XRD) analysis. In the process of extraction reaction, the lithium manganese oxide showed a topotactic extraction of $Li^{+ }$ in the aqueous phase mainly through an ion-exchange mechanism, and the $Li^{+}$ extracted samples indicated a high selectivity and a large capacity for $Li^{+}$ . The electronic structures and chemical bonding properties were also studied using a discrete variational (DV)-X$\alpha$ molecular orbital method with cluster model of (Li$Mn_{12}$ $O_{40}$ )$^{27-}$ for tetrahedral sites and ($Li_{7}$ Mn $O_{38}$ )$^{3}$ for octahedral site in $Li_{1.33}$ $Mn_{1.67}$ / $O_{4}$ respectively. Li in the manganese oxides is highly ionized in both sites, but the net charge of Li was greater for tetrahedral sites than octahedral. These calculations suggest that the tetrahedral sites have higher $Li^{+}$ $H^{+}$ exchangeability than the octahedral sites, and are preferable for the selective adsorption for L $i^{+}$ ions.s.

• Proceedings of the IEEK Conference
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• 2001.10a
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• pp.409-412
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• 2001

The high purity manganese oxides were made from the dust, generated in AOD process that produces a medium-low carbon ferromanganese and collected in the bag filter. Manganese oxide content in the dust was about 90%, and its phase was confirmed as Mn₃O₄. In the extraction of manganese, because of remaining amorphous MnO₂, the dust was reduced to MnO by roasting with charcoal. The pulp density of the reduced dust can control pH of the solution more than 4 and then Fe ion is precipitated to a ferric hydroxide. Because a ferric hydroxide co precipitates with Si ion etc, Fe, Si ion was removed f개m the solution. Heating made water to be volatized and nitrates was left in reactor Then nitrates were a liquid state and stirring was possible. Among the nitrates in reactor, only the manganese nitrate which have the lowest pyrolysis temperature pyrolyzed into β-MnO₂powder and NO₂(g) at the temperature less than 200℃. When the pyrolysis of manganese nitrate has been completed about 90%, injection of water stopped the pyrolysis. Nitrates of impurity dissolved and the spherical high purity β-MnO₂powders were obtained by filtering and washing. Mn₂O₃or Mn₃O₄ powder could be manufactured from β-MnO₂powder by controlling the heating temperature. Lastly, a manufactured manganese oxide particle has 99.97% purity.

• Resources Recycling
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• v.13 no.2
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• pp.9-15
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• 2004

A large tons of spent iron oxide catalyst come from the Styrene Monomer(SM) production company. It is caused to pollute the land and underground water due to the high alkali contents in the catalyst by burying them in the landfill. In order to recycle the spent catalyst, a basic study on the recovery of chromium ion from metal plating wastewater with the spent catalyst was carried out. The iron oxide catalyst adsorbed physically $Cr^{+6}$ in the lower pH 3.0, that is the isoelectric point of the spent catalyst. It was found that the iron oxide catalyst reduced the $Cr^{+6}$ into Cr+3 by the oxidation of ferrous ion into ferric ion on the surface of catalyst, and precipitated as $Cr(OH)_3$ in the higher than pH 3.0. The $Cr^{+6}$ was recovered 2.0∼2.3g/L catalyst in the range of pH 0.5∼2.0, but it was recovered 1.5 g/L catalyst at pH 3.0 of wastewater. The recovery of Cr was increased as the higher concentration in the continuous process, but the flowrates were nearly affected on the Cr recovery.

• Proceedings of the Korean Vacuum Society Conference
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• 1996.06a
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• pp.120-120
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• 1996

• Proceedings of the Korean Vacuum Society Conference
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• 1999.02a
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• pp.69-69
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• 1999

• Electrical & Electronic Materials
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• v.9 no.3
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• pp.284-290
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• 1996

The electrical properties of bulk galsses in the system Na$_{2}$O-CaO-Al$_{2}$O$_{3}$-B$_{2}$O$_{3}$-SiO$_{2}$ containing 20 to 30mol% sodium which have been subjected to a sodium .tautm. silver ion exchange reaction for 24, 36 and 48 hrs. were analysed by impedance spectroscopy method. Ion exchanged glasses exhibit activation energy values lower than those of the untreated ones. The electrical conductivity increase with sodium content and ion exchanging time. In this experiment the electrical conductivity exhibits a manximum value of 1.78*10$^{-4}$ S/cm at 200.deg. C which contains 30mol% sodium and subjects ion exchange reaction for 48hrs.

• Journal of the Korean Ceramic Society
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• v.32 no.10
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• pp.1093-1102
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• 1995

Water-soluble phosphate glasses containing Ag or Cu ion were prepared through melting process. Then the powdered glass samples were dissolved in D.I. water at room temperature with changing the dissolution time. In terms with the glass composition, dissolution characteristics, bactericidal effects and cytotoxicities were investigated. Dissolved amounts increased uniformly with dissolution time, and the dissolution rate was higher for ternary glass than for binary glass and with less metal oxide amount. And the dissolution rate of the glass with Ag ion was higher than that with Cu ion, and the bactericidal effect of the glass with Ag ion was also greater. Solution with more than 25 ppm of Ag was observed to have strong cytotoxicity to L929, and solutions of lower Ag concentration or with Cu seemed to have little cytotoxicity.