• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2005년도 추계 학술대회
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• pp.49-54
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• 2005

In the case of a sensitive equipment, it require a vibration free environment to provide its proper function. Especially, lithography and inspection device, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved Giga Class semi conductor wafers. The aim of this study is to evaluate the allowable vibration response of a precision inspect ion equipment, which has some trouble in field, by using experimental measurement data and to proposal a proper ant i-vibration method.

• Korean Membrane Journal
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• 제9권1호
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• pp.34-42
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• 2007

A perovskite-type ($La_{0.6}Sr_{0.4}Ti_{0.2}Fe_{0.8}O_{3-{\delta}}$) dense ceramic membrane was prepared by polymerized complex method, using citric acid as a chelating agent and ethylene glycol as an organic stabilizer. Effect of Ti addition on lanthanum-strontium ferrite mixed conductor was investigated by evaluating the thermal expansion coefficient, the oxygen flux, the electrical conductivity, and the phase stability. The thermal expansion coefficient in air was $21.19\;{\times}\;10^{-6}/K$ at 473 to 1,223 K. At the oxygen partial pressure of 0.21 atm ($20%\;O_2$), the electrical conductivity increased with temperature and then decreased after 973 K. The decrement in electrical conductivity at high temperatures was explained by a loss of the lattice oxygen. The oxygen flux increased with temperature and was $0.17\;mL/cm^2{\cdot}min$ at 1,223 K. From the temperature-dependent oxygen flux data, the activation energy of oxygen ion conduction was calculated and was 80.5 kJ/mol at 1,073 to 1,223 K. Also, the Ti-added lanthanum-strontium ferrite mixed conductor was structurally and chemically stable after 450 hours long-term test at 1,173 K.

• 한국결정성장학회지
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• 제2권1호
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• pp.76-85
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• 1992

열전 재료로 사용되는 $Ag_2S$의 단결정을 밀폐된 석영관내에서 고상의 $Ag_2S$가 분해되면서 성장 계면에 $Ag^+$이온과 전자를 공급하고, 휘발성이 강한 황은 vapour 상태로 전송되면서, $Ag_2S$ 계면에서부터 단결정이 성장하는 고상에서의 전기 화학적인 방법을 이용한 vapour 성장법으로 성장시켰다. 고상에서의 $Ag^+$ 이온의 확산이 성장을 지배하는 온도 영역에서는 bulk $Ag_2S$ 단결정을 얻었으며, Ag 분해 온도가 높을수록, Ag분해 온도와 성장 계면의 온도 차이가 클수록 성장속도가 빠름을 확인하였다. 한편 기상으로의 황의 확산이 성장을 지배하는 영역에서는 whisker Ag$_2$S가 성장되었으며 황의 포화 압력이 증가할수록 성장속도는 증가하였다. 또한, 열전재료의 효율을 결정하는 물성치인 전기 전도도를 측정한 결과 고온상에서 다결정의 전기 전도도가 단결정보다 크게 나타나며, 따라서 열전 효율은 다결정이 우수하다고 생각된다.

• Progress in Superconductivity
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• 제8권2호
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• pp.175-180
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• 2007

High temperature superconductor $YBa_2Cu_3O_{7-x}$ (YBCO) films have been grown by in-situ electron beam evaporation on artificial metal tapes such as ion-beam assisted deposition (IBAD) and rolling assisted biaxially textured substrates (RABiTS). Deposition rate of the YBCO films is $10{\sim}100{\AA}/sec$. X-ray diffraction shows that the films are grown epitaxially but have inter-diffusion phases, like as $BaZrO_3\;or\;BaCeO_3$, at their interfaces between YBCO and yttrium-stabilized zirconia (YSZ) or $CeO_2$, respectively. Secondary ion mass spectroscopy depth profile of the films confirms diffused region between YBCO and the buffer layers, indicating that the growth temperature ($850{\sim}900^{\circ}C$) is high enough to cause diffusion of Zr and Ba. The films on both the substrates show four-fold symmetry of in-plane alignment but their width in the -scan is around $12{\sim}15^{\circ}$. Transmission electron microscopy shows an interesting interface layer of epitaxial CuO between YBCO and YSZ, of which growth origin may be related to liquid flukes of Ba-Cu-O. Resistivity vs temperature curves of the films on both substrates were measured. Resistivity at room temperature is between 300 and 500 cm, the extrapolated value of resistivity at 0 K is nearly zero, and superconducting transition temperature is $85{\sim}90K$. However, critical current density of the films is very low, ${\sim}10^3A/cm^2$. Cracking of the grains and high-growth-temperature induced reaction between YBCO and buffer layers are possible reasons for this low critical current density.

• 전기화학회지
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• 제15권4호
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• pp.230-235
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• 2012

분자량이 각각 300(PEGMA300) 및 1100(PEGMA1100) g $mol^{-1}$인 PEGMA와 합성된 $BF_3LiMA$ 리튬염을 이용하여 다양한 조성의 고분자전해질을 제조하고 전기화학적 특성을 평가하였다. 흥미롭게도 AC-impedance 측정법에 의한 상온 이온전도도는 분자량 $300g\;mol^{-1}$로 합성된 액체 고분자전해질에서 $8.54{\times}10^{-7}S\;cm^{-1}$의 값이 얻어진 반면, PEGMA1100으로 합성된 고체상태의 고분자전해질에서 최대 14배 이상 높은 $1.22{\times}10^{-5}S\;cm^{-1}$가 관찰되었다. 이러한 결과는 PEGMA에 ethylene oxide 단위가 5개인 $300g\;mol^{-1}$보다 23개인 $1100g\;mol^{-1}$에서 리튬이온의 배위가 쉽게 일어나기 때문으로 해석된다. 또한 양이온 수율 측정결과 리튬메탈과 $BF_3$간의 반응으로 인해 0.6의 비교적 낮은 값이 나왔지만 초기 3000초 동안에는 0.9 이상의 값이 관찰되어 단일이온 전도체의 특징을 보여주었다.

• 분석과학
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• 제8권1호
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• pp.63-68
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• 1995

수소이온 선택성 막전극을 제조하기 위하여 tribenzylamine, polyvinylchloride, dioctylphthalate, sodium tetraphenylborate와 tetrahydrofuran을 0.02, 0.62, 1.34, 0.02g, 10mL씩 섞고 전기전도도를 개선하기 위하여 acetylene black, 흑연, 탄화규소, 탄화텅스텐을 각기 1g씩 섞었다. 7개의 막전극은 pH 2~9 범위내에서 수소이온에 직선성을 나타내었다. Tribenzylamine을 중성 운반체로 사용한 수소이온에 선택성 막전극을 제조하기 위해 섞은 것 중 가장 좋은 전기전도체는 아세틸렌블랙이었다. 이 막전극은 $20^{\circ}C$에서 Nernstian slope는 이론값에 가장 근사한 값을 나타내었다. 알칼리금속과 알칼리토금속 이온이 수소이온과 공존할 때 나타나는 방해효과는 유리전극보다 오차가 적은 더 좋은 결과를 나타냈다. 이 막전극은 특히 플루오르화수소산 용액에 대해서 재현성 및 안정성 시험에서도 양호한 것으로 나타났다.

• 한국세라믹학회지
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• 제33권6호
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• pp.645-652
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• 1996

The ionic conductivity of NASICON (Na Super Ionic Conductor) solid electrolyte was simulated by using Monte Carlo Method (MCM)based on a hopping model. We assumed that the conduction path of Na ions is Na1→mid-Na→Na2 where the mid-Na sites are shallow potential sites to induce 'a breathing-like movement' of Na ions in the NASICON framework. The minimum of charge correlation factor Fc and the maximum of appeared at nearby x=2.0 The occupancy of mid-Na site affected the depth of potential barrier and the conduc-tivity of the NASICON. At above x=0.3 ln σT vs. 1/T* plots have been shown Arrhenius behavior but in (VWfc)vs. 1/T* have been shown the Arrhenius type tendency at x=1 MCM results accorded with the experi-mental procedure. The role of mid-Na on Na+ ion conduction could be explained by an additional driving force and a breating-like movement model for motions of Na+ ions in the NASICON framework. As we couldn't clearly remarked the model which is the better it seems reasonable to conclude that these hypothesies are suitable to explain the FIC behavior at NASICON.

• 전자공학회논문지T
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• 제36T권1호
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• pp.8-12
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• 1999

산소이온 펌핑효과를 나타내는 8% 이트리아가 함유된 ZrO\sub 2\ 이온 전도체를 기판으로 하여 그 위에 NO\sub x\가스에 대해 감지효과를 갖고 있는 것으로 알려져 있는 WO\sub 3\산화물 반도체를 사용하여 박막시편을 제작하였다. 각 소자의 NO\sub x\ 가스에 대한 전기적 특성과 열처리 온도에 따른 미세구조의 변화를 조사하였고, 특히 8YSZ 기판에 가해준 전압에 의한 NO\sub x\ 가스 감지의 증대효과를 조사하였다. 열처리 온도에 따른 WO\sub 3\ 박막표면의 SEM사진의 분석에서 열처리하지 않은 WO\sub 3\ 박막은 비결정질 상태이지만 600℃이상의 열처리 온도에서 결정화가 이루어졌고 사방경계상의 WO\sub 3\ 피크가 나타났으며 온도가 증가함에 따라 (111)면과 (001)면이 특히 많이 성장하였다. 측정온도 400℃에서 8YSZ 기판에 전압을 가하지 않았을 때보다 전압을 가하였을 경우가 더 안정되고 더 큰 응답을 보였으며, 특히 2V 일 때가 가장 높은 감도를 나타내었다. 그리고 NO\sub 2\ 가스보다 NO 가스에 대한 회복특성이 훨씬 우수했다.

• 한국수소및신에너지학회논문집
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• 제17권1호
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• pp.62-68
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• 2006

High temperature electrolysis is a promising technology to produce massively hydrogen using renewable and nuclear energy. Solid oxide fuel cell materials are candidates as the components of steam electrolysers. However, the polarization characteristics of the typical electrode materials during the electrolysis have not been intensively investigated. In this study, NiO electrode was deposited on YSZ electrolyte by spin coat process and firing at $1300^{\circ}C$. Pt electrode was applied on the other side of the electrolyte to compare the polarization characteristics with those by NiO during electrolysis. The $H_2$ evolution rate was also monitored by measuring the electromotive force of Lambda probe and calculated by thermodynamic consideration. At low current density, Pt showed lower cathodic polarization and thus higher current efficiency than Ni, but the oxidation of Ni into NiO caused the increase of anodic resistance with increasing current density. High overpotential induced high power consumption to produce hydrogen by electrolysis.

• 한국수소및신에너지학회논문집
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• 제7권1호
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• pp.29-37
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• 1996

Alkaline water electrolysis has been commercialized as the only large-scale method for a long time to produce hydrogen and the technology is superior to other methods such as photochemical, thermochemical water splitting, and thermal decomposition method in view of efficiency and related technical problem. However, such conventional electrolyzer do not have high electric efficiency and productivity to apply to large scale hydrogen production for energy or chemical feedstocks. Solid polymer electrolyte water electrolysis using a perfluorocation exchange membrane as an $H^+$ ion conductor is considered to be a promising method, because of capability for operating at high current densities and low cell voltages. So, this is a good technology for the storage of electricity generated by photovoltaic power plants, wind generators and other energy conversion systems. One of the most important R&D topics in electrolyser is how to minimize cell voltage and maximize current density in order to increase the productivity of the electrolyzer. A commercialized technology is the hot press method which the film type electrocatalyst is hot-pressed to soild polymer membrane in order to eliminate the contact resistance. Various technologies, electrocatalyst formed over Nafion membrane surface by means of nonelectrolytic plating process, porous sintered metal(titanium powder) or titanium mesh coated with electrocatalyst, have been studied for preparation of membrane-electrocatalyst composites. In this study some experiments have been conducted at a solid polymer electrolyte water electrolyzer, which consisted of single cell stack with an electrode area of $25cm^2$ in a unipolar arrangement using titanium mesh coated with electrocatalyst.