• Applied Microscopy
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• v.45 no.4
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• pp.203-207
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• 2015

Sample preparation is very important for crystal structure analysis of novel nanostructured materials in electron microscopy. Generally, a grid dispersion method has been used as transmission electron microscope (TEM) sampling method of nano-powder samples. However, it is difficult to obtain the cross-sectional information for the tabular-structured materials. In order to solve this problem, we have attempted a new sample preparation method using focused ion beam. Base on this approach, it was possible to successfully obtain the electron diffraction patterns and high-resolution TEM images of the cross-section of tabular structure. Finally, we were able to obtain three-dimensional crystallographic information of novel zeolite nano-crystal of the tabular morphology by applying the new sample preparation technique.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.24-29
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• 2005

Fm (Focused ion beam) system is one of the most important equipments for the nano-scale machining. Various researches have been performed, since it can etch the material and deposit 3-D structure with high-aspect-ratio in the nanometer scale. In spite of those researches, the definite method for the reliability of FIB system has not been reported. In this paper, we proposed the reliability assessment method through nano-pattern fabrication. In the fabricated nano-pattern, the characteristics of FIB system are included. Using this effect, we tried to assess the FIB reliability. First, we suggested reliability assessment items and nano-patterns. And, to know the suitableness of the proposed method, we fabricated several nano-patterns using Nova200(FEI Company) and SMI2050(SEIKO) which are FIB apparatuses. The fabricated nano-patterns are measured with SEM (Scanning Electron Microscope) and compared with designed dimensions. And the compared results showed that the proposed method is suitable for the assessment of FIB system reliability.

• IEIE Transactions on Smart Processing and Computing
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• v.4 no.6
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• pp.384-390
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• 2015

There are two main artifacts in reconstructed images from in-beam positron emission tomography (PET). Unlike generic PET, in-beam PET uses the annihilation photons that occur during heavy ion therapy. Therefore, the geometry of in-beam PET is not a full ring, but a partial ring that has one or two openings around the rings in order for the hadrons to arrive at the tumor without prevention of detector blocks. This causes truncation in the projection data due to an absence of detector modules in the openings. The other is a ring artifact caused by the gaps between detector modules also found in generic PET. To sum up, in-beam PET has two kinds of gap: openings for hadrons, and gaps between the modules. We acquired three types of simulation results from a PET system: full-ring, C-ring and dual head. In this study, we aim to compensate for the artifacts that come from the two types of gap. In the case of truncation, we propose a method that uses prior knowledge of the location where annihilations occur, and we applied the discrete-cosine transform (DCT) gap-filling method proposed by Tuna et al. for inter-detector gap.

• Design & Manufacturing
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• v.14 no.2
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• pp.56-61
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• 2020

Recently, research for machining next-generation micro semiconductor processes and micro patterns has been actively conducted. In particular, it is applied to various industrial fields depending on the machining method in the case of FIB (Focused ion beam) milling. In this study, intends to deal with FIB milling machining technology for ultra-precision diamond tool fabrication technology. Ultra-precision diamond tools require nano-scale precision, and FIB milling is a useful method for nano-scale precision machining. However, FIB milling has a problem of Gaussian characteristics that are differently formed according to the beam current due to the input of an ion beam source, and there are process conditions to be considered, such as a side clearance angle problem of a diamond tool that is differently formed according to the tilting angle. A series of process steps for fabrication a ultra-precision diamond tool were studied and analyzed for each process. It was confirmed that the effect on the fabrication process was large depending on the spot size of the beam and the current of the beam as a result of the experimental analysis.

• Korean Journal of Optics and Photonics
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• v.11 no.2
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• pp.73-79
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• 2000

We measure a beam diameter of scan and sub-scan direction of LSD (Laser Scanning Urnt) which uses $fheta$ lens produced by injecLion molding method as a scanning lens. While the measured beam diameter in scan direction, which is $62muextrm{m}$ to $68\mu\textrm{m}$, shows similar size comparing to the design beam diameter, the sub-scan beam diameter shows sIzable beam diameter deviation as much as 37 11m ranging from $78\mu\textrm{m}$ to $115\mu\textrm{m}$. Injection molding lens has the surface figure error due to the shrinkage III the cooling time and the internal distortion (birefringence) due to the uneven cooling conditIOn so that these bring about wavefront aberration (i.e., the enlargement of beam size), and are eventually expre~sed as the deterioration of the pdnting image. In this paper. we first measure and analyze beam diameter, birefringence (polanzation ratio), and asphedcal figure error of mIens in order to know the principle cause of the beam diameter deviation in sub-scan directIOn. And Lhen. through the analysis of a designed depth of focus and a calculated field curvature (imaging position of the optical axis directIon) using the above figure elTor data, we know Lhat the birefringence IS the main factor of sizable beam diameter deVIation in sub-scan direction. ction.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.484-488
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• 1997

BSCCO thin film is fabricated cia both processes of co-deposition and layer-by-layer deposition at an ultralow growth rate using ion beam sputtering method. The adsorption of Bi atom and the appearance of Bi-2212 phase shows large differance between both processes. It is found that the resident time of Bi vapor species on the surface of the substrate strongly dominates the film composition and the formation of the structure.

• Polymer(Korea)
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• v.29 no.6
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• pp.588-592
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• 2005

For the purpose of obtaining polycarbonate film which blocks ultra-violet ion beam was irradiated onto the surface of PC film. This method has gotten several advantages compared with the techniques, such as the protection of changes in film thickness and UV blocking material deposited onto a base film. In order to investigate UV blocking PC film, the optical and chemical characteristics, surface morphology and lightfastness were confirmed by UV/Vis, FTIR(ATR) spectroscopy, AFM, and Q-UV fasoess analyses. As a result, it was shown that the modified PC film was able to block almost all of UV region and easily control the degree of UV block. The optical changes in the film were attributed to chemical changes in PC surface by ion beam irradiation. Moreover, we expect that the modified PC film can durably block UV due to no changes in colour and UV transmittance after UV fastness test.

• Korean Journal of Metals and Materials
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• v.46 no.7
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• pp.458-463
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• 2008

High purity Fe thin films were prepared by the ion beam deposition method with $^{56}Fe^{+}$ions on the Si substrate at the room temperature. The Fe thin films were deposited at the ion energy of 50 eV and 100 eV. Microstructural properties were investigated on the atomic scale using high-resolution transmission electron microscopy (HRTEM). It was found that the Fe thin film obtained with the energy of 50 eV having an excellent corrosion resistance consists of the amorphous layer of ~15 nm in thickness and the bcc crystalline layer of about 30 nm in grain size, while the thin film obtained with the energy of 100 eV having a poor corrosion resistance consists of little amorphous layer and the defective crystalline layer. Furthermore the crystal structures and arrangements of the oxide layers formed on the Fe thin films were analyzed by processing of the HRTEM images. It was concluded that the corrosion behavior of Fe thin films relates to the surface morphology and the crystalline structure as well as the degree of purification.

• Applied Microscopy
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• v.47 no.3
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• pp.171-175
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• 2017

Negative staining has been traditionally used for exosome imaging; however, the technique is limited to surface topology only and can cause staining artifacts. Therefore, to analyze the internal structure of exosomes, we employed a method of block preparation, thin sectioning, and electron tomography. In addition, an automatic serial sectioning technique with 15-nm thickness through focused ion beam was employed to observe the three-dimensional structure of exosomes of various sizes. Cryo-transmission electron microscopy revealed the near-to-native structure of exosomes.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2000.11a
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• pp.97-100
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• 2000

Si$_2$Sr$_2$CuO$\sub$x/(Bi(2201)) thin films are fabricated by atomic layer by layer deposition using ion beam sputtering(IBS) method. During the deposition, 10 %-ozone/oxygen mixture gas of typical 5.0 ${\times}$ 10$\^$-5/ Torr is applied with ultraviolet light irradiation for oxidation. XRD and RHEED investigations reveal out that a buffer layer with some different compositions is formed at the early deposition stage of less than 10 units cell and then c-axis oriented Bi(2201) is grown.