• E2M - 전기 전자와 첨단 소재
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• 제9권6호
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• pp.605-615
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• 1996

In this paper, the effect of alkaline oxide addition such as Li$_{2}$O and Na$_{2}$O on the microstructure and humidity sensitivity of V$_{2}$O$_{5}$(2 mol%)-doped TiO$_{2}$(98 mol%) was investigated as a function of amount (0, 1, 2, 5, 10 mol%) of Li$_{2}$O and Na$_{2}$O additives. The pores in the alkaline free sample were distributed mostly in the range between 0.16 and 1.0.mu.m in diameter and its porosity was 23.29%. Li$_{2}$O caused grain overgrowth and reduced the porosity with a narrow distribution of the pore size, leading to poor humidity sensitivity. Na$_{2}$O helped to enlarge the distribution of the pore size through the formation of small soluble phases. The pore sizes of the sample containing Na$_{2}$O 2mol% were distributed mostly in the range between 1.0 and 2.5.mu.m in diameter and its porosity and intrusion volume of mercury were 31.13 % and 0.1155 mL/g respectively, which consequently improved the humidity sensing characteristics such as the sensitivity and temperature-stability. Especially, the addition of 2mol% of Na$_{2}$O improved the humidity-sensing characteristics such as sensitivity and linearity in the whole range between 30 and 90 %RH (Percentage Relative Humidity)y)