• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.90-93
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• 2003

This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a circle leaf spring mechanism and a capacitive-type sensor. The, contact probe is attached on the z-axis during measurement while aspheric object are supported on the diamond turning machine(DTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of on-machine measurement system in this investigation is capable of providing a repeatability of 10 nanometers with a $\pm$20 uncertainty of 200nmPv.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.260-263
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• 2003

Lasers are used as the source of the interferometers in the industrial field. These lasers need 2 requirements. The first is the narrow linewidth of laser for the long coherence length. The second is the stabilized frequency of laser for the precision measurement. Now HeNe lasers are mostly used and the frequency stability is about 10$^{-9}$ . In this paper, we construct the HeNe laser systems of frequency stabilization using typical 2 method, the beat frequency stabilization method and the intensity difference method. So, we get the frequency stabilities of 2.01$\times$10$^{-9}$ (0.1s), 3.4$\times$10$^{-9}$ (0.1s).

• 한국광학회지
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• 제8권5호
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• pp.362-365
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• 1997

Mach-Zehnder형 외부 광 변조기나 Homodyne 검출기 같은 간섭계 원리를 이용한 장치에서 최대 또는 최소의 광 출력을 유지하도록 두 입력 광 사이의 위상 차를 제어하는 새로운 방법을 제시하였다. 이 방법은 Steepest Descent 알고리즘의 변형된 형태로 Delta Modulation 이론으로 성능을 해석할 수 있다. 이 방법은 기존의 흔들림(dithering) 방법을 적용하기 어려운 저속 펄스가 사용되는 간섭계 장치에도 사용할 수 있다.

• 한국광학회:학술대회논문집
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• 한국광학회 2009년도 창립 20주년기념 특별학술발표회
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• pp.241-242
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• 2009

Characterics of carrier-envelope-offset frequency ($f_{ceo}$) of a femtosecond laser stabilized by the direct locking method were investigated using two f-to-2f interferometers. The stability of $f_{ceo}$ was comaparable to that achieved with a conventional PLL method.

• 한국정밀공학회지
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• 제23권9호
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• pp.102-110
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• 2006

We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source for enhanced precision surface-profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows unequal-path scanning interferometry, which is not feasible with white light. Second, the high spatial coherence of femtosecond pulse lasers enables large-sized optics to be tested in nonsymmetric configurations with relatively small-sized reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.603-606
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• 2000

This dissertation is concerned with ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on an precision xy-stage whose lateral motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed in this investigation is capable of providing a repeatability of 50 nanometers with a $\pm$3$\sigma$ uncertainty of 300 nanometers. Thermal disturbance is found the most significant factor that should be precisely controlled for accurate measurement.

• International Journal of Precision Engineering and Manufacturing
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• 제1권2호
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• pp.115-123
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• 2000

We propose an extended version of multi-step algorithm of self-calibration of interferometric optical testing instruments. The key idea is to take wavefront measurements with near equal steps in that a slight angular offset is intentionally provided in part rotation. This generalized algorithm adopts least squares technique to determine the true azimuthal positions of part rotation and consequently eliminates calibration errors caused by rotation inaccuracy. In addition, the required numbers of part rotation is greatly reduced when higher order spatial frequency terms are of particular importance.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 심포지엄 논문집 정보 및 제어부문
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• pp.345-347
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• 2006

An interferometer is the unique measurement device that can measure the range up to a few meters with sub-nano accuracy and this characteristic makes it as the important sensing device for the emerging nano-mechatronics technologies. The interferometer, however, is very sensitive to the environments such as temperature, humidity, sound noises, vibrations and air turbulences and these factors result in a few hundred nano meter errors. There have been many efforts to reduce these environmental errors. These efforts are mainly focused in reducing the errors inside the interferometer and improving the environments physically. The purpose of this paper is to improve accuracy of the interferometer by using measurement noise models and the Kalman filter algorithm.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2003년도 춘계학술발표대회 논문집
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• pp.14-17
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• 2003

Vibration control of a composite plate with a surface-bonded fiber Bragg grating (FBG) sensor and piezoceramic actuators has been performed using a neural network based adaptive predictive control algorithm. For the detection of Bragg wavelength changes, two cavity lengths in Fabry-Perot read-out interferometers are used in order to produce two quadrature phase shifted signals. The FBG sensor system and real-time neuro-adaptive control algorithm could be applicable to diverse dynamic systems.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.391-395
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• 2002

This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on the single point diamond turning machine(SPDTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of On-machine Measurement System in this investigation is capable of providing a repeatability of 20 nanometers with a $\pm$20 uncertainty of 300 nanometers.