• 한국정밀공학회지
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• 제31권3호
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• pp.199-205
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• 2014

We propose a new variant of lateral shearing interferometer with a tunable laser source that enables 3D surface profile measurements of freeform optics with high speed, high vertical resolution, large departure, and large field-of-view. We have verified the proposed technique by comparing our measurement result with that of an existing technique and measuring a representative sample of freeform optics. Moreover, we propose a new algorithm that is able to compensate the rotational inaccuracy.

• Journal of the Optical Society of Korea
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• 제14권4호
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• pp.363-367
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• 2010

A new two step on-axis digital holography (DH) is proposed without any assumptions, phase shifting, or complicated optical components. A dual-channel Mach-Zehnder interferometer was employed. Using that setup, the object field can be reconstructed requiring only two step measurements. To eliminate position difference between two charge-coupled device (CCD) cameras, a matched filter algorithm was used. Experimental results are compared to those of the traditional phase shifting technique. The proposed approach can also be applied to single-exposure on-axis DH for real time measurement.

• 대한기계학회논문집A
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• 제28권11호
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• pp.1646-1655
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• 2004

A description of the basic principles of moire interferometry leads to the design of a eight-mirror four-beam interferometer for obtaining fringe patterns representing contour-maps of in-Plane displacements. The technique is implemented by the optical system using an environmental chamber for submicro-displacement mesurement. In order to estimate the reliability and applicabili쇼 of the system developed, the measurement of coefficient of thermal expansion (CTE) for a aluminium block is performed. Consequently, the system is applied to the measurement of thermal deformation of a WB-PBGA package assembly. Temperature dependent analyses of global and local deformations are presented to study the effect of the mismatch of CTE between materials composed of the package assemblies. Bending displacements of the packages and average strains of solder balls are documented. Thermal induced displacements calculated by FEM agree quantitatively with experimental results.

• 한국멀티미디어학회논문지
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• 제21권8호
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• pp.864-875
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• 2018

In this paper, we propose a measurement method for height of white light scanning interferometer using deep learning. In order to measure the fine surface shape, a three-dimensional surface shape measurement technique is required. A typical example is a white light scanning interferometer. In order to calculate the surface shape from the measurement image of the white light scanning interferometer, the height of each pixel must be calculated. In this paper, we propose a neural network for height calculation and use virtual data generation method to train this neural network. The accuracy was measured by inputting 57 actual data to the neural network which had completed the learning. We propose two new functions for accuracy measurement. We have analyzed the cases where there are many errors among the accuracy calculation values, and it is confirmed that there are many errors when there is no interference fringe or outside the learned range. We confirmed that the proposed neural network works correctly in most cases. We expect better results if we improve the way we generate learning data.

• 한국정밀공학회지
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• 제19권4호
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• pp.195-201
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• 2002

We propose a new scheme of high-resolution heterodyne interferometer that employs the two-axial mode He-Ne laser with an inter-mode beat frequency of 600~1000 MHz. An electronic RF-heterodyne circuit lowers the beat frequency down to 5 MHz, so that the phase change of the interferometer output is precisely measured with a displacement resolution of 0.1 nanometer without significant loss of dynamic bandwidth. A thermal control scheme is adopted to stabilize the cavity length with ainus to suppress frequency drifts caused by the phenomena of frequency pulling and polarization anisotropy of the two-axial made laser to a stability level of 2 parts in $10^9$. The two-axial mode HeNe laser yields a high output power of 2.0 mW, which allows us to perform multiple measurements of up to 10 machine axes simultaneously.

• Journal of Magnetics
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• 제18권2호
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• pp.173-177
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• 2013

Cantilever-detected high-frequency electron spin resonance (ESR) is a powerful method of sub-terahertz and terahertz ESR spectroscopy for a tiny magnetic sample at low temperature. In this technique, a small magnetization change associated with ESR transition is detected as deflection of a sample-mounted cantilever. So far, we have succeeded in ESR detection at 370 GHz using a commercial piezoresistive microcantilever. The spin sensitivity was estimated to ${\sim}10^{12}$ spins/gauss. In order to further increase the sensitivity, we adopt a fiber-optic-based detection system using a Fabry-Perot interferometer in place of piezoresistive system. Fabry-Perot cavity is formed between an optical-fiber end and microcantilever surface, and a change in the interference signal, corresponding to the cantilever deflection, is sensitively detected. This system is suitable for low-temperature and high-magnetic-field experiments because of its compact setup and less heat dissipation. In this study, performance of Fabry-Perot interferometer is evaluated, and its application to cantilever-detected ESR measurement is described.

• 한국광학회지
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• 제12권4호
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• pp.334-338
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• 2001

피조 간섭계의 측정 정밀도를 향상시키기 위해서 광 분할기를 제거한 형태의 피조 간섭계를 구현했다. 단일 모드 광섬유를 구면파 광원으로 사용했고 끝 단을 반사면으로 만들기 위해서 경면 가공했다. 반사면은 적당한 각도로 경사지게 가공되어 있는데 이것은 간섭무늬의 CCD관찰을 용이하게 한다. 경사 단면 광섬유 광원을 이용한 피조 간섭계는 기존의 피조 간섭계에서 구면파를 왜곡시키는 광 분할기를 제거함으로써 측정 정밀도를 향상시킬 수 있었다 또한 동일한 시편의 측정결과를 비교함으로써 기존의 피조 간섭계로부터 개선된 정밀도를 정량적으로 구할 수 있었다. 그리고 경사 단면 광섬유 광원의 구면파정도를 알아보기 위해서 PS/PDI(Phase Shifting/Point Diffraction Interferometer)를 구현함으로써 광원의 구면파 정도를 실험적으로 검증했다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.110-113
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• 2001

We present an interferometer system, which is able to perform both the phase shifting interferometry and white light interferometry. The interferometer system uses a d.c. motor to control the probe position with an accuracy of 10nm, which shows an outstanding performance on white light interferometry. However, the moving mechanism of d.c. motor is not accurate enough for the phase shifting interferometry that requires a moving precision less than 1 nm. We therefore propose a Fourier transform technique to calculate the phase of interferograms, which is strongly resistant to calibration errors and external vibration. Experimental results show that the Fourier transform technique is capable of reducing the measurement error caused by inaccurate movement within 0.1nm.

• Journal of the Optical Society of Korea
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• 제6권1호
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• pp.5-12
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• 2002

A novel interrogation scheme to detect fine Bragg wavelength shift using a long period fiber grating pair with erbium-doped fiber inserted between the two gratings is reported. The technique is shown to feature high resolution and much more immunity to temperature perturbation compared to the conventioned Mach-Zehnder interferometer demodulation system. For quasi-static strain measurement, this approach provides high wavelength resolution of 0.05 pm that corresponds to 41.7 ne in strain and $3.8 $\times$ 10^{-3}$$^{\circ}C$ in temperature. This interrogation system is also employed in dynamic measurement to obtain the minimum detectable strain perturbation of ~ 8.76 ne/H $z^{{\frac}{1}{2}}$ at 100 Hz. Moreover, this interrogation system has prominent thermal stability. This thermal stability comes from the fact that two arms of the interferometer, the core and cladding in erbium-doped fiber, are exposed to nearly the same environment .

• 대한기계학회논문집B
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• 제21권7호
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• pp.939-947
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• 1997

An experimental study of the skin friction measurement in a turbulent boundary-layer has been carried out. The skin friction measurements are made using the laser interferometer skin friction (LISF) meter, which optically detects the rate of thinning of an oil applied to the test surface. This technique produces reliable skin friction data over a wide range of flow situations up to 3-dimensional complicated flows with separation, where traditional skin friction measurement techniques are not applicable. The present measured data in a turbulent boundary-layer on a flat plate using the LISF technique shows a good comparison with the result from the previous velocity profile techniques, which proves the validity of the present technique. An extensive error analysis is carried out for the present technique yielding an uncertainty of about .+-.8%, which makes them suitable for CFD code validation purposes. Finally the measurements of the skin friction in a separated region after a surface-mounted obstacle are also presented.