• 제목/요약/키워드: Interfacial morphology

검색결과 166건 처리시간 0.024초

Properties of Dy-doped $La_2O_3$ buffer layer for Fe-FETs with Metal/Ferroelectric/Insulator/Si structure

  • Im, Jong-Hyun;Kim, Kwi-Jung;Jeong, Shin-Woo;Jung, Jong-Ill;Han, Hui-Seong;Jeon, Ho-Seung;Park, Byung-Eun
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.140-140
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    • 2009
  • The Metal-ferroelectric-semiconductor (MFS) structure has superior advantages such as high density integration and non-destructive read-out operation. However, to obtain the desired electrical characteristics of an MFS structure is difficult because of interfacial reactions between ferroelectric thin film and Si substrate. As an alternative solution, the MFS structure with buffer insulating layer, i.e. metal-ferroelectric-insulator-semiconductor (MFIS), has been proposed to improve the interfacial properties. Insulators investigated as a buffer insulator in a MFIS structure, include $Ta_2O_5$, $HfO_2$, and $ZrO_2$ which are mainly high-k dielectrics. In this study, we prepared the Dy-doped $La_2O_3$ solution buffer layer as an insulator. To form a Dy-doped $La_2O_3$ buffer layer, the solution was spin-coated on p-type Si(100) wafer. The coated Dy-doped $La_2O_3$ films were annealed at various temperatures by rapid thermal annealing (RTA). To evaluate electrical properties, Au electrodes were thermally evaporated onto the surface of the samples. Finally, we observed the surface morphology and crystallization quality of the Dy-doped $La_2O_3$ on Si using atomic force microscopy (AFM) and x-ray diffractometer (XRD), respectively. To evaluate electrical properties, the capacitance-voltage (C-V) and current density-voltage (J-V) characteristics of Au/Dy-doped La2O3/Si structure were measured.

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저밀도폴리에틸렌(LDPE)/꽃 모양 산화아연(FZnO) 복합필름의 제조 및 물성 분석 (Preparation and Characterization of Low Density Polyethylene (LDPE) and Flower-like Zinc Oxide (FZnO) Composite Films)

  • 김인수;이호준;김도완;서종철
    • 한국포장학회지
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    • 제22권3호
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    • pp.85-93
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    • 2016
  • 본 연구에서는 초음파합성법을 이용하여 항균성과 자외선 차단성이 있는 삼차원 꽃 모양의 구조를 가진 FZnO를 제조하였다. 제조한 FZnO 분말은 E. coli와 S. aureus에 대해 99.9%와 97.8%의 항균력을 나타내었다. 제조한 LDPE/FZnO 복합필름에 대한 FTIR 분석과 SEM 분석결과 LDPE/FZnO 복합필름이 성공적으로 만들어졌지만, LDPE 매트릭스와 FZnO 분말과의 상호작용은 약한 것으로 확인되었다. FZnO 함량이 증가할수록 자외선 차단성이 증가하는 것을 확인할 수 있었다. 또한, FZnO함량이 증가할수록 E. coli와 S. aureus에 대한 항균성이 증가하는 것을 확인하였다. 하지만, 복합필름 내 물성 극대화 및 포장소재로 적용을 위해서는 FZnO 분말과 고분자와의 혼화성 향상에 대한 추가적인 연구가 필요하다는 것을 확인하였다.

MoSi2 복합재료의 굽힘강도 특성 (Flexural strength properties of MoSi2 based composites)

  • 이상필;이현욱;이진경;배동수
    • 한국해양공학회지
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    • 제25권4호
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    • pp.66-71
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    • 2011
  • The flexural strength of $MoSi_2$ based composites reinforced with Nb sheets has been investigated, based on the detailed examination of their microstructure and fractured surface. Both sintered density and porosity of Nb/$MoSi_2$ composites were also examined. Nb/$MoSi_2$ composites were fabricated by different conditions such as temperature, applied pressure and its holding time, using a hot-press device. The volume fraction of Nb sheet in this composite system was fixed as 10%. The characterization of Nb/$MoSi_2$ composites were investigated by means of optical microscopy, scanning electron microscope and three point bending test. Nb/$MoSi_2$ composites represented a dense morphology at the interfacial region, accompanying the creation of two types of reaction layer by the chemical reaction of Nb and $MoSi_2$. Nb/$MoSi_2$ composites possessed an excellent density at the fabricating temperature of $1350^{\circ}C$, corresponded to about 95% of theoretical density. The flexural strength of Nb/$MoSi_2$ romposites were greatly affected by the pressure holding time at the same fabricating temperature, owing to the large suppression of porosity in the microstructure. Especially, Nb/$MoSi_2$ composites represented a good flexural strength of about 310 MPa at the fabricating condition of $1350^{\circ}C$, 30MPa and 60min, accompanying the pseudo-ductile fracture behavior by the deformation of Nb sheet and the interfacial delamination.

차세대 고집적 MOS 소자를 위한 ALD ZrO2 박막의 특성 연구 (Study on the characteristics of ALD, ZrO2 thin film for next-generation high-density MOS devices)

  • 안성준;안승준
    • 한국산학기술학회논문지
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    • 제9권1호
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    • pp.47-52
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    • 2008
  • 소자가 점점 고집적화 됨에 따라, MOS 소자 제조에 있어서 $SiO_2$의 두께가 ${\sim}1nm$로 낮아질 경우 발생하는 터널링전류와 문틱전압 천이를 방지할 수 있는 새로운 게이트용 유전물질을 개발하여 소자의 크기를 줄이는데 주력하고 있다. 본 실험에서는 원자층증착(ALD: atomic layer deposition) 방법으로 증착된 $ZrO_2$ 박막의 물리적, 전기적 특성에 대하여 연구하였다. ALD $ZrO_2$ 박막을 증착한 후 Ar 가스 분위기에서 $800^{\circ}C$, 1 시간동안 열처리한 다음 XRD, TEM, 그리고 C-V plots을 이용하여 $Pt/ZrO_2/Si$ 소자의 형태, 결정화 동역학, 그리고 경계층 특성을 평가한 결과 열처리에 의해 소자의 특성이 크게 향상됨을 알 수 있었다.

원자력간 현미경을 이용한 TRIP강 저항 점용접부의 미세조직 분석에 관한 연구 (Analysis of Microstructure for Resistance Spot Welded TRIP Steels using Atomic Force Microscope)

  • 최철영;지창욱;남대근;장재호;김순국;박영도
    • Journal of Welding and Joining
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    • 제31권1호
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    • pp.43-50
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    • 2013
  • The spot welds of Transformation Induced Plasticity (TRIP) steels are prone to interfacial failure and narrow welding current range. Hard microstructures in weld metal and heat affected zone arenormally considered as one of the main reason to accelerate the interfacial failure mode. There fore, detailed observation of weld microstructure for TRIP steels should be made to ensure better weld quality. However, it is difficult to characterize the microstructure, which has similar color, size, and shape using the optical or electron microscopy. The atomic force microscope (AFM) can help to analyze microstructure by using different energy levels for different surface roughness. In this study, the microstructures of resistance spot welds for AHSS are analyzed by using AFM with measuring the differences in average surface roughness. It has been possible to identify the different phases and their topographic characteristics and to study their morphology using atomic force microscopy in resistance spot weld TRIP steels. The systematic topographic study for each region of weldments confirmed the presence of different microstructures with height of 350nm for martensite, 250nm for bainite, and 150nm for ferrite, respectively.

고상공정법에 의한 고강도 폴리에틸렌 테이프사와 그 복합재료의 특성 (Characteristics of High Strength Polyethylene Tape Yarns and Their Composites by Solid State Processing Methods)

  • 이승구;조환;주용락;송재경;주창환
    • Composites Research
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    • 제12권2호
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    • pp.91-100
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    • 1999
  • 고상공정법(SSP)에 의한 고강도폴리에틸렌(HSPE) 섬유의 제조는 초고분자량 폴리에틸렌 분말의 압출과 연신으로 용매를 사용하지 않고 제조된다. 고상공정으로 제조된 고강도 PE 테이프사의 특성을 분석한 결과, 고강도 PE 테이프사는 여신비의 증가에 따라 인장강도가 증가하였고, 파단면에서 fibril 분리현상이 많이 생겼다. 고강도 PE 테이프사의 표면을 산소플리즈마로 처리하여, 표면에너지를 측정하였고, 수지와 계면결합력을 분석한 결과, 100W와 5분간의 플라즈마 처리에서 가장 높은 계면결합력을 나타내었다. 고강도 PE 테이프사 강화복합재료의 물성을 겔방사법으로 제조된 고강도 PE 섬유강화 복합재료의 물성과 비교하여 고찰하였다.

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Preparation of graphene oxide incorporated polyamide thin-film composite membranes for PPCPs removal

  • Wang, Xiaoping;Li, Nana;Zhao, Yu;Xia, Shengji
    • Membrane and Water Treatment
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    • 제9권4호
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    • pp.211-220
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    • 2018
  • Incorporating nano-materials in thin-film composite (TFC) membranes has been considered to be an approach to achieve higher membrane performance in various water treatment processes. This study investigated the rejection efficiency of three target compounds, i.e., reserpine, norfloxacin and tetracycline hydrochloride, by TFC membranes with different graphene oxide proportions. Graphene oxide (GO) was incorporated into the polyamide active layer of a TFC membrane via an interfacial polymerization (IP) reaction. The TFC membranes were characterized with FTIR, FE-SEM, AFM; in addition, the water contact angle measurements as well as the permeation and separation performance were evaluated. The prepared GO-TFC membranes exhibited a much higher flux ($3.11{\pm}0.04L/m2{\cdot}h{\cdot}bar$) than the pristine TFC membranes ($2.12{\pm}0.05L/m2{\cdot}h{\cdot}bar$) without sacrificing their foulant rejection abilities. At the same time, the GO-modified membrane appeared to be less sensitive to pH changes than the pure TFC membrane. A significant improvement in the anti-fouling property of the membrane was observed, which was ascribed to the favorable change in the membrane's hydrophilicity, surface morphology and surface charge through the addition of an appropriate amount of GO. This study predominantly improved the understanding of the different PA/GO membranes and outlined improved industrial applications of such membranes in the future.

γ-APS로 표면처리된 천연 제올라이트/에폭시 복합재료의 계면특성 (Interfacial Characteristics of Epoxy Composites Filled with γ-APS Treated Natural Zeolite)

  • 이재영;이상근;김상욱
    • 접착 및 계면
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    • 제2권3호
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    • pp.1-8
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    • 2001
  • ${\gamma}$-APS (${\gamma}$-aminopropyltriethoxysilane)로 표면처리된 천연제올라이트와 에폭시 수지 복합 재료의 표면 자유 에너지, 인상강도 및 계면 모폴로지에 대해 연구하였다. 표면처리하지 천연제올라이트의 표면 자유에너지 성분 중에서 무극성 성분인 Lifshitz-van der Waals 성분, ${\gamma}{\frac{LW}{SV}}$$19.22mJ/m^2$이었고, 극성 성분인 Lewis acid-base 성분, ${\gamma}{\frac{AB}{SV}}$$15.27mJ/m^2$이 있다. ${\gamma}$-APS의 처리농도가 증가함에 따라 ${\gamma}{\frac{LW}{SV}}$값은 증가하였지만 ${\gamma}{\frac{AB}{SV}}$는 감소하였으며, 이는 ${\gamma}$-APS의 소수성 성분인 알킬기의 영향이 친수성 기인 아민이나 수산기의 영향보다 커지기 때문이다. 인장강도와 Young율은 ${\gamma}$-APS 처리에 의해 개선되었으며, SEM 분석에 의해 계면특성이 향상되었음을 확인하였다.

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BGA 무연솔더(Sn-3.0Ag-0.5Cu)와 무전해 Ni-W-P 도금층 계면의 열 안정성에 대한 연구 (Study on Thermal Stability of the Interface between Electroless Ni-W-P Deposits and BGA Lead-Free Solder (Sn-3.0Ag-0.5Cu))

  • 신동희;조진기;강성군
    • 마이크로전자및패키징학회지
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    • 제17권1호
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    • pp.25-31
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    • 2010
  • 본 연구에서는 무연 솔더 중 우수한 특성을 보여 실용화된 Sn-3.0Ag-0.5Cu 조성의 솔더를 사용하여 2주 동안의 시효조건에서 W의 함량이 무전해 Ni-W-P 도금층과 솔더와의 계면에서의 IMC 생성에 미치는 영향에 대해서 조사하였다. 도금층내 인의 함량은 8 wt.%로 고정하였고, 텅스텐의 함량은 각각 0, 3, 6 및 9 wt.%로 변화시켰으며, 모든 시료는 $255^{\circ}C$에서 리플로우한 후, $200^{\circ}C$에서 2주 동안 시효처리하였다. 각각의 시료에서 $(Cu,Ni)_6Sn_5$$(Ni,Cu)_3Sn_4$의 IMC가 관찰되었으며, 시효처리시간의 증가에 따라 UBM과 무연납의 계면에서 생성된 IMC가 증가함을 보였고, W의 함량이 높을수록 열적 안정성이 증가하여 $Ni(W)_3P$의 생성 속도를 늦춰 그에 따른 영향으로 IMC의 두께가 증가함을 보였다.

Pt/LiCoO2/LiPON/Cu와 Pt/LiCoO2/LiPON/LiCoO2/Cu 구조를 갖는 Li-free 박막전지 (Li-free Thin-Film Batteries with Structural Configuration of Pt/LiCoO2/LiPON/Cu and Pt/LiCoO2/LiPON/LiCoO2/Cu)

  • 신민선;김태연;이성만
    • 한국표면공학회지
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    • 제51권4호
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    • pp.243-248
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    • 2018
  • All solid state thin film batteries with two types of cell structure, Pt / $LiCoO_2$ / LiPON / Cu and Pt / $LiCoO_2$ / LiPON / $LiCoO_2$ / Cu, are prepared and their electrochemical performances are investigated to evaluate the effect of $LiCoO_2$ interlayer at the interface of LiPON / Cu. The crystallinity of the deposited $LiCoO_2$ thin films is confirmed by XRD and Raman analysis. The crystalline $LiCoO_2$ cathode thin film is obtained and $LiCoO_2$ as the interlayer appears to be amorphous. The surface morphology of Cu current collector after cycling of the batteries is observed by AFM. The presence of a 10 nm-thick layer of $LiCoO_2$ at the interface of LiPON / Cu enhances the interfacial adhesion and reduces the interfacial resistance. As a result, Li plating / stripping at the interface of LiPON / Cu during charge/discharge reaction takes place more uniformly on Cu current collector, while without the interlayer of $LiCoO_2$ at the interface of LiPON / Cu, the Li plating / stripping is localized on current collector. The thin film batteries with the interlayer of $LiCoO_2$ at the interface of LiPON / Cu exhibits enhanced initial coulombic efficiency, reversible capacity and cycling stability. The thickness of the anode current collector Cu also appears to be crucial for electrochemical performances of all solid state thin film batteries.