• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.331-331
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• 2009

Hafnium oxide ($HfO_2$) attracted by one of the potential candidates for the replacement of si-based oxides. For applications of the high-k gate dielectric material, high thermodynamic stability and low interface-trap density are required. Furthermore, the amorphous film structure would be more effective to reduce the leakage current. To search the gate oxide materials, metal-insulator-metal (MIM) capacitors was fabricated by pulsed laser deposition (PLD) on indium tin oxide (ITO) coated glass with different oxygen pressures (30 and 50 mTorr) at room temperature, and they were deposited by Au/Ti metal as the top electrode patterned by conventional photolithography with an area of $3.14\times10^{-4}\;cm^2$. The results of XRD patterns indicate that all films have amorphous phase. Field emission scanning electron microscopy (FE-SEM) images show that the thickness of the $HfO_2$ films is typical 50 nm, and the grain size of the $HfO_2$ films increases as the oxygen pressure increases. The capacitance and leakage current of films were measured by a Agilent 4284A LCR meter and Keithley 4200 semiconductor parameter analyzer, respectively. Capacitance-voltage characteristics show that the capacitance at 1 MHz are 150 and 58 nF, and leakage current density of films indicate $7.8\times10^{-4}$ and $1.6\times10^{-3}\;A/cm^2$ grown at 30 and 50 mTorr, respectively. The optical properties of the $HfO_2$ films were demonstrated by UV-VIS spectrophotometer (Scinco, S-3100) having the wavelength from 190 to 900 nm. Because films show high transmittance (around 85 %), they are suitable as transparent devices.

• Proceedings of the KIEE Conference
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• 1990.11a
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• pp.85-87
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• 1990

Silicon nitride film was deposited on a silicon wafer using a laser CVD(LCVD) technique, which is based on direct photolysis of $SiH_4/NH_3$ gas mixture by ArF laser beam(${\lambda}=193\;nm$). The refractive index of deposited SiN film is 1.9 at the temperature of $300^{\circ}C$, pressure of 5 torr. The breakdown field strength of LCVD SiN film was 10MV/cm. In IR spectrum, the absorption peak of Si-H, N-H, and Si-N is detected and it is shown that hydrogen is included in SiN film. From analysis of absorption band. it is calculated that density of Si-H, N-H bond is higher than $5{\times}10^{22}cm^{-3}$. LCVD MIS capacitor and PECVD MIS capacitor have injection-type hysteresis but it is known that hysteresis loss of LCVD MIS capacitor is smaller than that of PECVD MIS capacitor. It means that Interface state density of LCVD capacitor is smaller than that of PECVD capacitor. In addition, the flatband voltage($V_{FB}$) of LCVD is smaller than that of PECVD capacitor. And it means that fixed charged density($Q_{FIX}$) of LCVD capacitor is smaller than that of PECVD MIS capacitor.

• Journal of the Korean GEO-environmental Society
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• v.8 no.3
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• pp.59-65
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• 2007

Excess pore pressures in low permeability soils may not dissipate quickly enough and decrease the effective stresses inside the soil, which in turn may cause a reduction of the shear strength at the interface between the soil and the reinforcement in MSE walls. For this condition the dissipation rate of pore pressures is most important and it varies depending on wall size, permeability of the backfill, and reinforcement length. In this paper, a series of numerical analysis has been performed to investigate the effect of those factors. The results show that for soils with a permeability lower than $10^{-3}cm/sec$, the consolidation time gradually increases. The increase in consolidation time indicates the decrease in effective stress thus it will result in decrease in pullout capacity of the reinforcement as verified by the numerical analyses. It is also observed that larger consolidation time is required for longer reinforcement length (longer drainage path).

• Journal of the Korean Geotechnical Society
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• v.15 no.1
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• pp.53-62
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• 1999

Despite the frequent use of the soil-reinforced segmental retaining wall (SRW) system, the roles of the different components comprising the system, such as facing blocks, reinforcements, backfill, and block/backfill interface, are still not fully understood, and much still need to be investigated for more safe and economical design/analysis method. Therefore, this study was undertaken with the aim of understanding the effect of the shear strength of backfill material and the reinforcement stiffness on the behavior of SRW by using the finite element analysis. In the analysis the details of construction sequence and the SRW components were carefully modeled, and a parametric study was performed in order to investigate the effects of shear strength of backfill soil and reinforcement stiffness on the wall displacement and earth pressure, the vertical stress under the reinforced block, the reinforcement and block/reinforcement connection forces. Implications of the findings from this study to current design practices were discussed in detail.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.8 no.1
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• pp.33-40
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• 1988

The new technique has been used to determine the soil-reinforcement interaction. The testing apparatus is essentially a triaxial cell fitted with the capability to house a hollow cylinderical sample. A hollow cylinderical sand specimen with a concentrical layer of reinfarcing material sandwitched in the middle is used in this investigation. The reinforcement is fastened at the base. The hollow specimen can be viewed as a "unit sheet" of a soil-reinforcement composite system of infinite horizontal extent. Axial load as well as inner and outer chamber pressures can be applied to perform a test. The specimen is first subjected to an isotropic stress state corresponding to the overburden pressure. Next, an extension test by reducing the axial load is carried out. The specimen is "loaded" to failure by either the breakage of reinforcing material (tensile failure) or slippage which takes place at the soil-reinforcement interface (i.e. the overcoming of the bonding capacity). Since the reinforcement is fastened at its lower end to the base, any tendency of relative movement between the reinforcement and the sand during an extension test can induce tensile force in the reinforcement thus forming a "reversed pull-out" test condition. Preliminary test results have demonstrated positively of the new approach to test the soil-reinforcement interaction. Reinforcing elements of different extensibility were used to study the deformbility of reinforced soil. Furthermore, both the breakage and the pull-out modes of failure were observed.

• Journal of Sensor Science and Technology
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• v.9 no.2
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• pp.134-140
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• 2000

Si wafer direct bonding(SDB) technology is very attractive for both Si-on-insulator(SOI) electronic devices and MEMS applications. This paper presents on pre-bonding according to HF pre-treatment conditions in Si wafer direct bonding. The characteristics of bonded sample were measured under different bonding conditions of HF concentration and applied pressure. The bonding strength was evaluated by tensile strength method. A bond characteristic on the interface was analyzed by using FT-IR, and surface roughness according to HF concentration was analyzed by AFM. Si-F bonds on Si surface after HF pre-treatment are replaced by Si-OH during a DI water rinse. Consequently, hydrophobic wafer was bonded by hydrogen bonding of Si-OH$\cdots$(HOH$\cdots$HOH$\cdots$HOH)$\cdots$OH-Si. The pre-bonding strength depends on the HF pre-treatment condition before pre-bonding. (Min : $2.4kgf/cm^2{\sim}$Max : $14.9kgf/cm^2$)

• Korean Journal of Food Science and Technology
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• v.20 no.6
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• pp.845-849
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• 1988

A laboratory scale storage facility consisting of a cold room, sample jars and a ventilation device was designed and built. Storaging sample jars (1.7 l) for fruit were fabricated with transparent acryl and provided with a constant air flow. For the supplying of air to sample jars, the air distributing system was built with solenoid valves, an air precooling coil and a pressure equalizing tank. To provide the programmable storaging environment of the facility a microprocessor-based controller was designed and installed. The controller was built with the 8 bit microprocessor (Z-80), EPROM, RAM, programmable peripheral interface(8255 PPI), and A/D converter. Softwares for the auto-temperature measurement and control of the storage system were developed and systemized in ROM. The automated storage system was applied to citrus storage, and the temperature of the storage facilities was successfully acquisited to the computer and controlled.

• Korean Journal of Food Science and Technology
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• v.22 no.4
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• pp.479-485
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• 1990

For the automation of a evaporation process, computer based evaporation system was built and applied to acquisition of the process variables with an centrifugal thin film evaporator(Centri-Therm, CT-1B). Controls of the process conditions were performed by computer system for pressure, feeding rate, steam, evaporation temperature and flow rate of cooling water. The data acquisitions were also performed by computer system for the changes in the concentration and temperature readings for steam, evaporation and cooling water at the both inlet and outlet. The control and the acquisition variables were collected through the interface device and analyzed by programs using the PASCAL language. To control the feeding rate during the concentration process, inverter was used. The cooling water for the vapor condensation was controlled by the valve controller and should be supplied with the flow rate of 125 kg/h. The maximum vapor condensation rate was 41.7kg/h at the feeding rate of 125 kg/h.

• International Journal of Automotive Technology
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• v.7 no.7
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• pp.827-832
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• 2006

Occupant classification and position detection have been significant research areas in intelligent safety systems in the automotive field. The detection and classification of seat occupancy open up new ways to control the safety system. This paper deals with a novel algorithm development, hardware implementation and testing of a prototype intelligent safety system for occupant classification and position detection for in-vehicle environment. Borland C++ program is used to develop the novel algorithm interface between the sensor and data acquisition system. MEMS strain gauge hermatic pressure sensor containing micromachined integrated circuits is installed inside the passenger seat. The analog output of the sensor is connected with a connector to a PCI-9111 DG data acquisition card for occupancy detection, classification and position detection. The algorithm greatly improves the detection of whether an occupant is present or absent, and the classification of either adult, child or non-human object is determined from weights using the sensor. A simple computation algorithm provides the determination of the occupant's appropriate position using centroidal calculation. A real time operation is achieved with the system. The experimental results demonstrate that the performance of the implemented prototype is robust for occupant classification and position detection. This research may be applied in intelligent airbag design for efficient deployment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.369-372
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• 2002

In this research, a vision system for detecting tool breakage which is hardly detected by such indirect in-process measurement method as acoustic emission, cutting torque and motor current was developed and embedded into a PC-NC system. The vision system consists of CMOS image sensors, a slit beam laser generator and an image grabber board. Slit beam laser was emitted on the tool surface to separate the tool geometry well from the various obstacles surrounding the tool. An image of tool is captured through two steps of signal processing, that is, median filtering and thresholding and then the tool is estimated normal or broken by use of change of the centroid of the captured image. An air curtain made by the jetting high-pressure air in front of the lens was devised to prevent the vision system from being contaminated by scattered coolant, cutting chips in cutting process. To embed the vision system to a Siemens PC-NC controller 840D NC, an HMI(Human Machine Interface) program was developed under the Windows 95 operating system of MMC103. The developed HMI is placed in a sub window of the main window of 840D and this program can be activated or deactivated either by a soft key on the operating panel or M codes in the NC part program. As the tool breakage is detected, the HMI program emit a command for automatic tool change or send alarm to the NC kernel. Evaluation test in a high speed tapping center showed the developed system was successful in detection of the small-radius tool breakage.