Effects of Neutral Particle Beam on Nano-Crystalline Silicon Thin Film Deposited by Using Neutral Beam Assisted Chemical Vapor Deposition at Room Temperature
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- Proceedings of the Korean Vacuum Society Conference
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- 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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- pp.254-255
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- 2012