• Title/Summary/Keyword: Inspection Technique

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Interval Scan Inspection Technique for Contact Failure of Advanced DRAM Process using Electron Beam-Inspection System

  • Oh, J.H.;Kwon, G.;Mun, D.Y.;Kim, D.J.;Han, I.K.;Yoo, H.W.;Jo, J.C.;Ominami, Y.;Ninomiya, T.;Nozoe, M.
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.12 no.1
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    • pp.34-40
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    • 2012
  • We have developed a highly sensitive inspection technique based on an electron beam inspection for detecting the contact failure of a poly-Si plugged layer. It was difficult to distinguish the contact failure from normal landing plugs with high impedance. Normally, the thermal annealing method has been used to decrease the impedance of poly-Si plugs and this method increases the difference of charged characteristics and voltage contrast. However, the additional process made the loss of time and broke down the device characteristics. Here, the interval scanning method without thermal annealing was effectively applied to enhance the difference of surface voltage between well-contacted poly-Si plugs and incomplete contact plugs. It is extremely useful to detect the contact failures of non-annealed plug contacts with high impedance.

Dilation and Erosion Technique using a Inspection of the Catenary System Design (침식, 팽창기법을 이용한 전차선 검측 시스템의 설계)

  • Kim, Woo-Sang;Jung, Min-Yong;Kim, Ji-Yoon
    • Journal of the Korean Society for Railway
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    • v.9 no.6 s.37
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    • pp.701-704
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    • 2006
  • The catenaries must guarantee the constant electricity to the trains, so that the safety and the estimate of fatigue degree and the inspection of abrasion degree should be done rapidly. This thesis proposes the system that can manage the performance/failure of the catenaries using the image process as the solution for the weak points of the existing inspection such as the decrease of immediateness and the lack of constancy in the human resources. This study simulates the ALD using VHSV (Virture HSV) which is the unreal HSV images, not getting the real HSV in ages to the image processing technique that repeats the erosion and the expansion of the images as the methods that can monitor the slight/critical defects of the catenaries as dealing with the result of the catenaries inspection images. The final ALD (Abnormal Line Detection) system is designed based on this simulation. I have demonstrated it with the VHSV (Virture HSV) virtual images as the materials of the test and inspected it through testing the defects of the catenaries for the thesis.

Determination of Availability of Domestic Developed Bobbin Probe for Steam Generator Tube Inspection (증기발생기 전열관 와전류검사용 국내 개발 보빈탐촉자 적용성 분석)

  • Kim, In-Chul;Joo, Kyung-Mun;Moon, Yong-Sig
    • Transactions of the Korean Society of Pressure Vessels and Piping
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    • v.7 no.4
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    • pp.19-25
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    • 2011
  • Steam Generator(SG) tube is an important component of Nuclear Power Plant(NPP), which is the pressure boundary between the primary and secondary systems. The integrity of SG tube has been confirmed by the eddy current test every outage. The eddy current technique adopting bobbin probe is currently the primary technique for the steam generator tubing integrity assesment. The bobbin probe is one of the essential components which consist of the whole ECT examination system and provides us a decisive data for the evaluation of tube integrity. Until now, all of the ECT bobbin probes in Korea which is necessary to carry out inspection are imported from overseas. However, KHNP has recently developed the bobbin probe design technology and transferred it to domestic manufacturers to fabricate the probes. This study has been conducted to establish technical requirements applicable to the steam generator tube inspection using the bobbin probes fabricated by the domestic manufactures. The results have been compared with the results obtained by using foreign probe to identify the availability to the steam generator tube inspection. As a result, it is confirmed that the domestic bobbin probe is generally applicable to SG tube inspection in the NPPs.

An Inspection System for Multilayer Co-Extrusion Blown Plastic Film Line (공압출 다층 플라스틱 필름 라인을 위한 결함 검사 시스템)

  • Hahn, Jong Woo;Mahmood, Muhammad Tariq;Choi, Young Kyu
    • Journal of the Semiconductor & Display Technology
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    • v.11 no.2
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    • pp.45-51
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    • 2012
  • Multilayer co-extrusion blown film construction is a popular technique for producing plastic films for various packaging industries. Automated detection of defective films can improve the quality of film production process. In this paper, we propose a film inspection system that can detect and classify film defects robustly. In our system, first, film images are acquired through a high speed line-scan camera under an appropriate lighting system. In order to detect and classify film defects, an inspection algorithm is developed. The algorithm divides the typical film defects into two groups: intensity-based and texture-based. Intensity-based defects are classified based on geometric features. Whereas, to classify texture-based defects, a texture analysis technique based on local binary pattern (LBP) is adopted. Experimental results revealed that our film inspection system is effective in detecting and classifying defects for the multilayer co-extrusion blown film construction line.

Back calculation and solution Technique of E-modulus by FWD′s deflection data in Pavement (FWD 처짐치에 의한 포장층 탄성계수 역산 및 해석기법)

  • 위성동
    • Proceedings of the Korean Geotechical Society Conference
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    • 2002.10a
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    • pp.188-200
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    • 2002
  • In this study, a pavement evaluation method is introduced by a case study of the measurement data obtained in Incheon International Airport. Based on the results obtained by both visual inspection and automobile inspection equipments, the pavement surface condition is evaluated and used for maintenance and rehabilitation strategy for pavement. In addition, the special attention was given to the back calculation and solution technique of E-modulus by FWD's deflection data in Pavement.

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Development of Vehicle Sealing Inspection System Using Geometry Matching Method (형상 매칭법을 이용한 비이클 실링 검사 시스템 개발)

  • Lee, Jung-Ho;Park, Chan-Hee;Seo, Young-Soo;Lee, Hyung-Soo;Kim, Han-Joo
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.22 no.1
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    • pp.150-155
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    • 2013
  • This work present a new method of sealing inspection system for vehicle in which foam rubber materials are used for sealing the vehicle parts. This system is composed from a devices comprising non-contact and real-time scanning on visual inspection in machine parts. We have been investigated qualitative factors that influenced on sealing system of vehicle structure which flexibly attenuated vibration and plenty of foam rubber materials having elastic property. However, there are different factors which still depended on outdated technique (personnel subjective judgment) in the performance inspection of rubber parts, specially for cross section inspection. Through a newly developed inspection system which recently applied for the production line, we successfully achieved more effective results of matching rate by about 80 % in the sealing performance inspection with 0.7% to 1.4% in the repeated errors. These are resulted from non-contacted response by CCD camera and vision program using geometry matching method. We expect that this system may be widely applied in the strict inspection parts of more diverse cross-section in future.

Evaluation on the Effect of Ultrasonic Testing due to Internal Medium of Pipe in Nuclear Power Plant (원자력발전소 배관 내부 매질이 초음파검사에 미치는 영향 평가)

  • Yoon, Byung Sik;Kim, Yong Sik;Yang, Seung Han
    • Transactions of the Korean Society of Pressure Vessels and Piping
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    • v.9 no.1
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    • pp.25-30
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    • 2013
  • The periodic inspection of piping and pressure vessels welds in nuclear power plant has to provide reliable result related to weld flaws, such as location, maximum amplitude response, ultrasonic length, height and finally the nature or flaw pattern. The founded flaw in ultrasonic inspection is accepted or rejected based on these data. Specially, the amplitude of flaw response is used as basic parameter for flaw sizing and it may cause some deviation in length sizing result. Currently the ultrasonic inspections in nuclear power plant components are performed by specific inspection procedure which describing inspection technique include inspection system, calibration methodology and flaw characterizing. To perform ultrasonic inspection during in-service inspection, reference gain should be established before starting ultrasonic inspection by the requirement of ASME code. This reference gain used as basic criteria to evaluate flaw sizing. Sometimes, a little difference in establishing reference gain between calibration and field condition can lead to deviation in flaw sizing. Due to this difference, the inspection result may cause flaw sizing error. Therefore, the objective of this study is to compare and evaluate the ultrasonic amplitude difference between air filled and water filled pipe in nuclear power plant. Additionally, the accuracy of flaw sizing is estimated by comparing both conditions.

A Feasibility Study of Guided Wave Technique for Rail Monitoring

  • Rose, J.L.;Lee, C.M.;Cho, Y.
    • Journal of the Korean Society for Nondestructive Testing
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    • v.26 no.6
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    • pp.411-416
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    • 2006
  • The critical subject of transverse crack detection in a rail head is treated in this paper. Conventional bulk wave ultrasonic techniques oftenfail because of shelling and other surface imperfections that shield the defects that lie below the shelling. A guided wave inspection technique is introduced here that can send ultrasonic energy along the rail under the shelling with a capability of finding the deleterious transverse crack defects. Dispersion curves are generated via a semi analytical finite element technique along with a hybrid guided wave finite element technique to explore the most suitable modes and frequencies for finding these defects. Sensor design and experimental feasibility experiments are also reported.

A Study on the Method of Load Distribution for Nonlinear Behaviour in RC-T Bridge (RC-T형교의 비선형거동해석을 위한 하중분배법에 관한 연구)

  • Im, Jung-Soon;Kim, Sung-SunChil;Park, Sung-Yong
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.2 no.1
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    • pp.129-135
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    • 1998
  • The characteristic of load-distribution is investigated by using nonlinear analysis with a field loading test of existing bridge In this study, nonlinear load-distribution technique for quantitative analysis was adopted. The results were compared with linear solution technique with data from failure test at existing RCT-girder bridge and examine the adequacy of the failure mode. The results of this study showed that the linear solution technique and the proposed nonlinear solution technique agreed well in linear region but did not matched well in nonlinear region because of load-redistribution, and that the effect of load-redistribution was considered to analysis of nonlinear region by linear solution.

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