• Korean Journal of Materials Research
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• v.22 no.7
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• pp.374-378
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• 2012

In an effort to overcome the problems which arise when fabricating high-aspect-ratio TSV(through silicon via), we performed experiments involving the void-free Cu filling of a TSV(10~20 ${\mu}m$ in diameter with an aspect ratio of 5~7) by controlling the plating DC current density and the additive SPS concentration. Initially, the copper deposit growth mode in and around the trench and the TSV was estimated by the change in the plating DC current density. According to the variation of the plating current density, the deposition rate during Cu electroplating differed at the top and the bottom of the trench. Specifically, at a current density 2.5 mA/$cm^2$, the deposition rate in the corner of the trench was lower than that at the top and on the bottom sides. From this result, we confirmed that a plating current density 2.5 mA/$cm^2$ is very useful for void-free Cu filling of a TSV. In order to reduce the plating time, we attempted TSV Cu filling by controlling the accelerator SPS concentration at a plating current density of 2.5 mA/$cm^2$. A TSV with a diameter 10 ${\mu}m$ and an aspect ratio of 7 was filled completely with Cu plating material in 90 min at a current density 2.5 mA/$cm^2$ with an addition of SPS at 50 mg/L. Finally, we found that TSV can be filled rapidly with plated Cu without voids by controlling the SPS concentration at the optimized plating current density.

• Journal of the Society of Disaster Information
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• v.18 no.1
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• pp.218-227
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• 2022

Purpose: In the case of cavity discovered by ground penetrating radar exploration, it is necessary to accurately predict the filling amount in the cavity in advance, fill the cavity sufficiently and exert strength to ensure stability and prevent ground subsidence. Method: The cavity waveform analysis method by GPR exploration and the method using the cavity shape imaging equipment were performed to measure the cavity shape with irregular size and shape of the actual cavity, and the amount of cavity filling of the injection material was calculated during rapid restoration. Result: The expected filling amount was presented by analyzing the correlation between the cavity size and the filling amount of injection material according to the cavity scale and soil depth through the method by GPR exploration and the cavity scale calculation using the cavity shaping equipment. Conclusion: The cavity scale measured by the cavity imaging equipment was found to be in the range of 20% to 40% of the cavity scale by GPR exploration. In addition, the filling amount of injection material compared to the cavity scale predicted by GPR exploration was in the range of about 60% to 140%, and the filling amount of the injection material compared to the cavity size by the cavity shaping equipment was confirmed to be about 260% to 320 Purpose: The purpose of this study is to examine the types of crimes taking place in the metaverse, and to establish a crime prevention strategy and find a legal deterrent against it. Method: In order to classify crime types in the metaverse, crime types were analyzed based on the results of previous studies and current incidents. Result: Most of the crimes taking place in the metaverse are done in games such as Roblox or Zeppetto. Most of the game users were teenagers. Looking at the types, there are many teens for sexual crimes, violent crimes, and defamation, but professional criminals are often included in copyright infringement, money laundering using virtual currency, and fraud. Conclusion: Since the types of crimes in the metaverse are diverse, various institutional supplementary mechanisms such as establishment of police crime prevention strategies, legal regulations, and law revisions will have to be prepared.

• Korean Journal of Remote Sensing
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• v.38 no.5_3
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• pp.953-966
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• 2022

Since aerosols adversely affect human health, such as deteriorating air quality, quantitative observation of the distribution and characteristics of aerosols is essential. Recently, satellite-based Aerosol Optical Depth (AOD) data is used in various studies as periodic and quantitative information acquisition means on the global scale, but optical sensor-based satellite AOD images are missing in some areas with cloud conditions. In this study, we produced gap-free GeoKompsat 2A (GK-2A) Advanced Meteorological Imager (AMI) AOD hourly images after generating a Random Forest based gap-filling model using grid meteorological and geographic elements as input variables. The accuracy of the model is Mean Bias Error (MBE) of -0.002 and Root Mean Square Error (RMSE) of 0.145, which is higher than the target accuracy of the original data and considering that the target object is an atmospheric variable with Correlation Coefficient (CC) of 0.714, it is a model with sufficient explanatory power. The high temporal resolution of geostationary satellites is suitable for diurnal variation observation and is an important model for other research such as input for atmospheric correction, estimation of ground PM, analysis of small fires or pollutants.

• Proceedings of the Korean Information Science Society Conference
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• 1998.10c
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• pp.674-676
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• 1998

소자가 sub-quarter um급으로 축소됨에 따라 STI(Shallow Trench Isolation) 기술은 고 집적도의 ULSI 구현에 있어서 중요한 격리 방법으로 많이 사용되고 있다. 현재의 STI 기술은 주로 실리콘 기판을 식각 후 절연물질로 빈 공백이 없이 채우는 (void-free gap filling) 방법 [1,2]과 절연물질을 다시 표면 근처까지 CMP(Chemical Mechnical Polishing)로 etchback하여 평탄화를 하는 방법이 주요한 기술이 되고 있다. 또한 STI 구조로된 격리구조에서 만들어진 MOSFET의 전기적인 특성은 트랜치 격리의 상부 부분의 형태와 gap-filling 물질에 따라 큰 영향을 받게된다. 따라서 본 논문에서는 STI 구조로 만들어진 격리 구조에서 MOSFET의 hump 특성에 관해 연구하였다. 그 결과 hump는 STI 모서리에서 필드 옥사이드의 recess에 의한 모서리 부분에서의 전계 집중과 boron의 segration에 기인한 농도 감소로 인해 hump가 발생하는 것으로 나타났다.

• Transactions of the Society of Information Storage Systems
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• v.1 no.2
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• pp.192-196
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• 2005

In this paper, we investigated the possibility of replicating patterned media by nano-injection molding process with a metallic nano-stamper. The original nano-master was fabricated by E-beam lithography and ICP etching process. The metallic nano-stamper was fabricated using a nanoimprint lithography and nano-electroforming process. The nano-patterned substrate was replicated using a nano-injection molding process without additional etching process. In nano-injection molding process, since the solidified layer, generated during the polymer filling, deteriorates transcribability of nano patterns by preventing the polymer melt from filling the nano cavities, an injection-mold system was constructed to actively control the stamper surface temperature using MEMS heater and sensors. The replicated polymeric patterns using nano-injection molding process were as small as 50 nm in diameter, 150 nm in pitch, and 50 nm in depth. The replicated polymeric patterns can be applied to high density patterned media.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.28 no.3A
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• pp.166-170
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• 2003

In this paper, the characteristics of Koch island microstrip patch antenna are investigated by numerical and experimental methods. The Koch patch is fractal shaped antenna which can be characterized by two properties such as space-filling and self-similarity. Due to its space-filling property of fractal structure, the proposed Koch fractal patch antennas are smaller in size than that of conventional square patch antenna. From numerical and experimental results, it is found that as the iteration number and iteration factor of Koch patch increase, its resonance frequency becomes lower than that of conventional patch, thus contributes to antenna size reduction. In particular, when the fractal iteration factor is 1/4, the fractal antenna is 45% smaller in size than that of conventional patch, while maintaining radiation patterns comparable to those of rectangular antenna and cross polarization level is about -20~-14 dB.

• Proceedings of the Korean Society of Computer Information Conference
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• 2021.07a
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• pp.283-284
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• 2021

최근 SARS-CoV-2 백신들의 예방접종이 진행됨에 따라 코로나 19 팬데믹의 종결이 예상되고 있다. 하지만 계속해서 출현 중인 변종 바이러스들은 팬데믹 종결의 위험요소로 남아있다. 본 논문에서는 사전학습된 단백질 BERT와 단백질-단백질 상호작용 모델을 활용한 SARS-CoV-2 스파이크 단백질의 변이 예측 분석 알고리즘을 제안한다. 제안하는 기술은 변이 단백질 서열의 예측과 변이 단백질과 human ACE2 수용체의 친화도에 따른 자연선택으로 이루어진다. 이를 통해 시간이 지나며 나타날 수 있는 변종 바이러스들을 시뮬레이션 할 수 있어 변종 바이러스들의 해결에 기여할 것으로 기대된다.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.31 no.2
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• pp.214-219
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• 1986

This study was conducted to provide basic information to breeders and agronomists working with sesame. Grain filling rate were investigated for eight plant types classified by branching habit, capsules per axil, carpels and loculi of a capsule. Two typical cultivars were chosen for plant type among 527 gene pools. Grain filling rate didn't increase with little difference between lower and middle part capsules, Jut significantly decreased in upper part. Grain filling rate of lower part, main stem and center capsules appeared higher than that of upper part, branch and side capsule for grain filling. Mono-capsule setting and unbranched plant type were higher for grain filling than tricapsule setting and branched type due to inactive ripenness on branched capsule. NMB type showed that best maturity and relatively good grain filling in BTB type despite it's largest sink capacity. NTQ and BTQ type appeared poor ripenness because of immaturity of higher part side capsules; however it was believed that there were still possibilities for improving ripenness in 3 capsule and 4 carpels 8 loculi type by the good maturity of 1 capsule and 4 carpels 8 loculi type.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.37A no.9
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• pp.753-761
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• 2012

In this paper, we study a power allocation technique for Tomlinson-Harashima precoding (THP) in multi-user multiple input single output (MISO) downlink systems. In contrast to previous approaches, a mutual information based method is exploited for maximizing the sum rate of zero-forcing THP systems. Then, we propose a simple power allocation algorithm which assigns proper power level for modulo operated users. Simulation results show that the proposed scheme outperforms a conventional water-filling method, and it provides similar performance with near optimal method with much reduced complexity.

• Proceedings of the Korean Society of Disaster Information Conference
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• 2022.10a
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• pp.307-308
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• 2022

본 논문에서는 현장에서 발생된 점토에 양질토사를 혼합하여 노상 및 노체에 대한 쌓기 재료로 사용하기 위한 기초 연구로서 사용적합성 여부를 실험하여 분석하였다. 본 연구와 같은 방법을 현장에 적용할 경우에 공사비 절감이 가능할 것으로 판단된다.