• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.249-249
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• 1999

GaN과 같은 III-nitride 반도체 관한 식각 기술의 연구는 blue-emitting laser diode(LD)를 위한 경면(mirror facet)의 형성뿐만아니라 새로운 display 용도의 light emitting diodes (LED), 고온에서 작동되는 광전소자 제조 등에도 그 중요성이 증대되고 있다. 최근에는 III-nitride 물질의 높은 식각속도와 미려하고 수직한 식각형상을 이루기 위하여 ECR(Electron Cyclotron Resonance)이나 ICP(Inductively Coupled Plasma)와 같은 고밀도 플라즈마 식각과 CAIBE(Chemically assisted ion beam etching)를 이용한 연구가 진행되고 있다. 현재 제조되어 지고 있는 LED 및 LD와 같은 광소자의 구조의 대부분은 p-GaN/AlGaN/InGaN(Q.W)/AlGaN/n-GaN 와 같은 여러 층의 형태로 이루어져 있다. 이중 InGaN는 광소자나 전자소자의 특성에 영향을 주는 가장 중요한 부분으로써 현재까지 보고된 식각연구는 undoped GaN에 대부분 집중되고 있고 이에 비해 소자 특성에 핵심을 이루는 InGaN의 식각특성에 관한 연구는 미흡한 상황이다. 본 연구에서는 고밀도 플라즈마원인 ICP 장비를 이용하여 InGaN를 식각하였고, 식각에는 Cl2/CH4, Cl2/Ar 플라즈마를 사용하였다. InGaN의 식각특성에 영향을 미치는 플라즈마의 특성을 관찰하기 위하여 quadrupole mass spectrometry(QMS)와 optical emission spectroscopy(PES)를 사용하였다. 기판 온도는 5$0^{\circ}C$, 공정 압력은 5,Torr에서 30mTorr로 변화시켰고 inductive power는 200~800watt, bias voltage는 0~-200voltage로 변화시켰으며 식각마스크로는 SiO2를 patterning 하여 사용하였다. n-GaN, p-GaN 층 이외에 광소자 제조시 필수적인 InGaN 층을 100% Cl2로 식각한 경우에 InGaN의 식각속도가 GaN에 비해 매우 낮은 식각속도를 보였다. Cl2 gas에 소량의 CH4나 Ar gas를 첨가하는 경우와 공정압력을 감소시키는 경우 식각속도는 증가하였고, Cl2/10%Ar 플라즈마에서 공정 압력을 감소시키는 경우 식각속도는 증가하였고, Cl2/10%CHF3 와 Cl2/10%Ar 플라즈마에서 공정압력을 15mTorr로 감소시키는 경우 InGaN과 GaNrks의 선택적인 식각이 가능하였다. InGaN의 식각속도는 Cl2/Ar 플라즈마의 이온에 의한 Cl2/CHF3(CH4) 플라즈마에서의 CHx radical 형성에 의하여 증가하는 것으로 사료되어 진다.

• Asian Pacific Journal of Cancer Prevention
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• v.15 no.8
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• pp.3681-3686
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• 2014

In this study, we demonstrated selenium (Se) accumulation in Bifidobacterium longum strain (B. longum) and evaluated the effect of Se-enriched B. longum (Se-B. longum) on tumor growth and immune function in tumor-bearing mice. Analysis using high-performance liquid chromatography-inductively coupled plasma mass spectrometry (HPLC-ICP-MS) revealed that more than 99% of Se in Se-B. longum was organic, the main component of which was selenomethionine (SeMet). In the in vivo experiments, tumor-bearing mice (n=8) were orally administrated with different doses of Se-B. longum alone or combined with cyclophosphamide (CTX). The results showed that the middle and high dose of Se-B. longum significantly inhibited tumor growth. When Se-B. longum and CTX were combined, the antitumor effect was significantly enhanced and the survival time of tumor-bearing mice (n=12) was prolonged. Furthermore, compared with CTX alone, the combination of Se-B. longum and CTX stimulated the activity of natural killer (NK) cells and T lymphocytes, increasing the levels of interleukin-2 (IL-2) and tumor necrosis factor-${\alpha}$ (TNF-${\alpha}$), and the leukocyte count of H22 tumor-bearing mice (n=12).

• Korean Journal of Veterinary Service
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• v.33 no.3
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• pp.299-302
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• 2010

This study was conducted to determine the content of heavy metals in meats available on the Korean markets. Trace metals (Pb, As and Cd) were detected in 4 kinds, 172 samples by inductively coupled plasma-mass spectrometry (ICP-MS). The values of heavy metals in meats were as follows; In beef, mean (minimum~maximum) values of the heavy metals were Pb: 0.075 (0.020~0.190)mg/kg, As: 0.010 (0.001~0.050)mg/kg and Cd: 0.43(0.07~2.11)${\mu}g/kg$. In pork, mean (minimum~maximum) values of the heavy metals were Pb: 0.065 (0.012~0.171)mg/kg, As: 0.004 (ND~0.021)mg/kg and Cd: 0.43(0.08~1.09)${\mu}g/kg$. In chiken, mean (minimum~maximum) values of the heavy metals were Pb: 0.060(0.016~0.211)mg/kg, As: 0.008 (ND~0.042)mg/kg and Cd: 0.42 (0.02~3.80)${\mu}g/kg$. In duck, mean (minimum~maximum) values of the heavy metals were Pb: 0.070 (0.011~0.157)mg/kg, As: 0.005 (0.001~0.011)mg/kg and Cd: 0.87 (0.15~3.75)${\mu}g/kg$. This results will be used as a basic data for the future legislation on the regulation and control of heavy metal in meats.

• 한국신재생에너지학회:학술대회논문집
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• 2009.11a
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• pp.619-619
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• 2009

Recently, silica nanostructures are widely used in various applicationary areas such as chemical sensors, biosensors, nano-fillers, markers, catalysts, and as a substrate for quantum dots etc, because of their excellent physical, chemical and optical properties. Additionally, these days, semiconductor silica and silicon with high purity is a key challenge because of their metallurgical grade silicon (MG-Si) exhibit purity of about 99% produced by an arc discharge method with high cast. Tremendous efforts are being paid towards this direction to reduce the cast of high purity silicon for generation of photovoltaic power as a solar cell. In this direction, which contains a small amount of impurities, which can be further purified by acid leaching process. In this regard, initially the low cast rice-husk was cultivated from local rice field and washed well with high purity distilled water and were treated with acid leaching process (1:10 HCl and $H_2O$) to remove the atmospheric dirt and impurity. The acid treated rice-husk was again washed with distilled water and dried in an oven at $60^{\circ}C$. The dried rice-husk was further annealed at different temperatures (620 and $900^{\circ}C$) for the formation of silica nanospheres. The confirmation of silica was observed by the X-ray diffraction pattern and X-ray photoelectron spectroscopy. The morphology of obtained nanostructures were analyzed via Field-emission scanning electron microscope(FE-SEM) and Transmission electron microscopy(TEM) and it reveals that the size of each nanosphares is about 50-60nm. Using the Inductively coupled plasma mass spectrometry(ICP-MS), Silica was analyzed for the amount of impurities.

• Journal of the Korean Society for Heat Treatment
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• v.27 no.6
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• pp.281-287
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• 2014

Microstructural and mechanical characteristics of Al-6Si-2Cu alloy for engine mount bracket prepared by gravity casting (as-cast) and die-casting (as-diecast) process have been investigated. For the microstructural characterization, the inductively coupled plasma mass spectrometry (ICP-MS), optical microscope (OM), scanning electron microscope (SEM) and electron probe microanalysis (EPMA) analyses are conducted. For the intermetallic phases, the X-ray diffraction (XRD) and energy dispersive spectroscopy (EDS) are also conducted with quantitative and qualitative analysis. Micro Vickers hardness and static tensile test are achieved in order to measure mechanical properties of alloys. Secondary dendrite arm spacing (SDAS) of as-cast and as-diecast show 37um and 18um, respectively. A large amount of coarsen eutectic Si, $Al_2Cu$ intermetallic phase and Fe-rich phases are identified in the Al-6Si-2Cu alloy. Mechanical properties of gravity casting alloy are much higher than those of die-casting alloy. Especially, yield strength and elongation of gravity casting alloy show 2 times higher than die-casting alloy. After shot peening, shot peening refined the surface grains and Si particles of the alloys by plastic deformation. The surface hardness value shows that shot peening alloy has higher value than unpeening alloy.

• The Korean Journal of Food & Health Convergence
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• v.6 no.1
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• pp.21-27
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• 2020

The levels of five heavy metals (mercury, cadmium, lead, copper and zinc) were analyzed in edible tissues of Lophius piscatorius Linnaeus, 1758 marketed in Sinop coasts of the Black Sea by using inductively coupled plasma mass spectrometry. With the present study, heavy metal values of this fish in the Black Sea were examined for the first time. The mean concentrations in mg kg^-1 wet wt. of Hg, Cd, Pb, Cu and Zn were 0.022, 0.009, 0.035, 6.3 and 16 mg kg^-1 wet wt., respectively. The results of the present study indicate that the consumption of muscle from anglerfish can be considered safe in terms of permissible legal limits. It is clear that, Zn showed the high accumulation in muscle tissue followed by Cu, while non-essential metals Hg, Cd and Pb showed the low accumulation. This could be explained by the fact that Zn and Cu are essential elements in the bodies of living organisms and has an important role in different physiological processes. In the present study, heavy metal levels in angler fish were low. Likewise, the calculated HI values were lower than one. In conclusion, the results of the present study indicate that the consumption of muscle from anglerfish can be considered safe in terms of permissible legal limits and hazard index values.

• Korean Journal of Fisheries and Aquatic Sciences
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• v.43 no.3
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• pp.270-276
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• 2010

This study estimated the heavy metal concentrations in octopus (Octopus minor) and conducted a food safety assessment of octopus. Octopus, a benthic cephalopod, was collected from the Seosan intertidal zone on the west coast of Korea. The samples were digested with acids, and then the cadmium (Cd), copper (Cu), and zinc (Zn) contents were analyzed using inductively coupled plasma mass spectrometry (ICP-MS). The Cd, Cu, and Zn range of concentrations in octopus were 0.06-19 (mean 5.8), 44-1,463 (mean 354.8), and 76-929 (mean 247.9) mg/kg on a dry weight basis, respectively. The concentrations of heavy metals were higher in the internal organs than in the mantle. Of the three heavy metals, copper had the highest concentrations in the internal organs because of the existence of hemocyanin bound with copper in octopus blood, whereas zinc had the highest concentrations in the mantle. No relationship between the concentration of heavy metals and biological parameters (length, weight, and sex) was found. The ratios (I/M) of the heavy metal concentrations in internal organs and mantle were highest for cadmium, although cadmium had much lower concentrations in the internal organs compared with copper and zinc. Considering the provisional tolerable weekly intake (PTWI) of the three heavy metals and the average intake of octopus per day, all three elements should have no adverse effects on humans.

• Journal of Korean Society for Atmospheric Environment
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• v.21 no.4
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• pp.423-430
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• 2005

This study was investigated with sample digestion techniques and a reliability of the analytical results for a quantitative analysis of a standard reference material ('urban particulate matter', SRM 1648). The metallic elements were analyzed by inductively coupled plasma mass spectrometry (ICP-MS) with closed vessel microwave acid digestion method and atomic absorption spectroscopy (AAS). Quality control of the overall analytical procedures for metallic element determinations of standard reference material were estimated by analysis of a SRM 1648. Three digestion solutions $(type\;1:\;HNO_3,\;type\;2:\;HNO_3\;and\;H2O_2(4'1)\;mixture,\;type\;3:5.55\%\; HNO_3\;and\;16.75\%\;HCI\;mixture)$ were applied to SRM 1648. As a result, three digestion solutions used in this study are completely unable to digest Cr of SRM 1648. Reliability of Cr and As showed some errors in the digestion with digestion solution type (3) due to the influence of chlorides. Type (3) digestion solutions are sufficient to fulfill the digestion of As as well as Se in SRM 1648. ICP-MS results showed the improvement in accurate and precise determination of some trace elements like Cd, V and Pb in SRM 1648. It is important to use the proper digestion solution for each element to qualify analytical precision.

• Journal of the Korean Chemical Society
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• v.43 no.4
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• pp.412-417
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• 1999

The analytical results obtained by microwave digestion and acid digestion methods for sample pretreatment to determine metal impurities in silicon wafer by inductively coupled plasma-mass spectrometry (ICP-MS) were compared. In order to decompose the silicon wafer, a mixed solution of $HNO_3$ and HF was added to the sample and the metal elements were determined after removing the silicon matrix by evaporating silicon in the form of Si-F. The recovery percentages of Ni,Cr and Fe were found to be 95∼106% for both microwave digestion and acid digestion methods. The recovery percentage of Cu obtained by the acid digestion method was higher than that obtained by the microwave digestion method. For Zn, however, the microwave digestion method gave better result than the acid digestion method. Fe was added to a silicon wafer using a spin coater. The concentration of Fe in this sample was determined by lCP-MS, and the same results were obtained in the two pretreatment methods.

• Korean Journal of Veterinary Service
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• v.34 no.3
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• pp.279-284
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• 2011

This study was carried out to estimate the heavy metal contents (Pb, Cd, Cr, Cu, Mn) in avian eggs sold in Seoul area, Korea from August to December, 2010. The contents of lead, cadmium, chrome, copper, manganese were estimated by inductively coupled plasma mass spectrometry. The concentrations of heavy metals (mean${\pm}$standard deviation, mg/kg) in the avian eggs were as follows: Pb $0.010{\pm}0.018$, Cd $0.000{\pm}0.001$, Cr $0.018{\pm}0.022$, Cu $0.637{\pm}0.163$, Mn $0.397{\pm}0.132$. The contents of lead and cadmium in the eggs were lower than that in meat and other foods of previously reported results. Whereas the contents of copper, manganese were similar to the previously previous results. The average daily intakes of lead and cadmium in the avian eggs were 0.1 and 0.8% respectively, as compared with PTWI (Provisional Tolerable Weekly Intakes) established by FAO/WHO Expert Committee for Food Safety Evaluation.