• 제목/요약/키워드: Indium-tin oxide

검색결과 974건 처리시간 0.028초

반응성 DC 마그네트론 스퍼터링법으로 증착한 ITO 박막의 전기적 특성 평가 (Electrical Properties of ITO Thin Film Deposited by Reactive DC Magnetron Sputtering using Various Sn Concentration Target)

  • 김민제;정재헌;송풍근
    • 한국표면공학회지
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    • 제47권6호
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    • pp.311-315
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    • 2014
  • Indium tin oxide (ITO) thin films (30 nm) were deposited on PET substrate by reactive DC magnetron sputtering using In/Sn(2, 5 wt.%) metal alloy target without intentionally substrate heating during the deposition under different DC powers of 70 ~ 110 W. The electrical properties were estimated by Hall-effect measurements system. The resistivity of ITO thin film deposited using In/Sn (5 wt.%) metal alloy target at low DC power increased with increasing annealing time. However, they increased with increasing annealing time at high DC power. In the case of ITO (Sn 2 wt%), we can't find clear change in resistivity with increasing annealing time. However, carrier density and mobility showed difference behavior due to change of oxygen vacancy.

인광특성이 있는 금속 착물의 합성과 그 물질을 이용한 소자 제작 및 소자 특성 평가 (Study on the Characteristics and Fabrication of Organic Light Emitting Devices Using the Synthesised Phosphorescent Metal Complexes)

  • 김영관;손병청;김준호
    • 한국응용과학기술학회지
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    • 제19권2호
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    • pp.97-102
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    • 2002
  • Recently, the phosphorescent organic light-emitting devices (OLEDs) have been extensively studied for their high internal quantum efficiency. In this study, we synthesised several phosphorescent metal complexes, and certified their composition using NMR. We also investigated the characteristics of the phosphorescent OLEDs with the green emitting phosphor, $Ir(ppy)_{3}$. The devices with a structure of indium-tin-oxide(ITO)/N,N'-diphenyl-N,N'-(3-methylphenyI}-1,1'-biphenyl-4,4'-diamine (TPD)/metal complex doped in host materials/2,9-dimethyl-4,7-diphenyl-l,10-phenanthroline(BCP)/tris (8-hydroxyquinolinato) Aluminum($Alq_{3}$)/Li:Al/Al was fabricated, and its electrical and optical characteristics were studied. By changing the doping concentration of tris(2-phenylpyridine)iridium ($Ir(ppy)_{3}$), we fabricated several devices and investigated their characteristics.

유리기판에 O2 플라즈마 표면처리 후 제작된 ITO 박막의 특성 (Characteristics of ITO Films Grown on an Oxygen Plasma Treated Glass Substrate)

  • 채홍철;홍주화
    • 대한금속재료학회지
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    • 제50권7호
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    • pp.545-548
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    • 2012
  • The optical and electronic properties of Indium Tin Oxide (ITO) thin films deposited on a RF-plasma treated glass substrate were investigated by X-Ray Photoelectron Spectroscopy (XPS), Ultra-violet Photoelectron Spectroscopy (UPS), Reflected Electron Energy Loss Spectroscopy (REELS). The modification of glass substrates was carried out by varying the time of the plasma surface treatment in an oxygen atmosphere. The focus of this research was to examine how the optical and electronic properties of ITO thin films change with the plasma treatment time. The surface energy increased since the carbon bonds were removed from the surface after the glass substrate received the surface treatment. The ITO thin films produced on the glass substrate with surface treatment showed that the high optical transmittance was approximately 85%. The measured band gap energy was as high as 3.23 eV when the plasma treatment time was 60 s and the work function after the treatment was increased by 0.5 eV in comparison to that before the treatment of 60 s. The ITO thin film exhibited an excellent sheet resistance of $2.79{\Omega}/{\Box}$. We found that the optical and electronic properties of ITO thin films can be improved by RF-plasma surface treatment.

MEH-PPV 농도에 따른 유기발광다이오드의 전기$\centerdot$ 광학적 특성

  • 공수철;백인재;유재혁;임현승;장호정;장영철
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2005년도 추계 학술대회
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    • pp.142-146
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    • 2005
  • 패턴화된 ITO (indium tin oxide)/Glass 기판 위에 정공수송층인 PEDOT:PSS [poly(3,4-othylenedioxythiophene):poly(styrene sulfolnate)]와 발광층인 MEH-PPV [poly(2-methoxy-5-(2-ethyhexoxy)-1,4phenylenvinylene)]를 사용하여 ITO/PEDOT:PSS/MEH-PPV/AI 구조를 갖는 고분자 유기 발광다이오드 (polymer light emitting diode: PLED)를 제작하였다. PLED 제작시 MEH-PPV 의 농도를 ($0.1\;wt\%\;{\~}\;0.9\;wt\%$) 변수로 하여 박막의 표면 거칠기와 박막 층의 마찰재수(friction coefficient) 측정을 통하여 농도에 따른 특성 변화를 조사하였다. MEH-PP 의 농도를 $0.1\;wt\%$ 에서 $0.9\;wt\%$ 로 증가함에 따라 발광 층의 RMS (root mean square)같은 1.72 nm 에서 1.00 nm 로 감소하여 거칠기가 개선되는 경향을 보여 주었다. 그러나 박막간의 마찰계수는 0.048 에서 0.035 로 감소하여 박막간의 접합상태가 나빠지는 현상을 나타내었다. 소자의 전기, 광학적 특성의 경우 MEH-PPV 농도가 $0.5\;{\~}\;0.9\;wt\%$ 범위에서 약 0.35 mA (at 9V)의 전류밀도를 나타내었으며, 최대 휘도는 $0.5\;wt\%$ 농도에서 $409\;cd/m^2$의 값을 나타내었다.

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대향 타겟식 스퍼터링으로 증착한 ITO 박막이 적용된 유기발광다이오드의 특성 (Characteristics of OLED Cells Fabricated with ITO Films Deposited by using Facing Target Sputtering (FTS) System)

  • 김상모;이상민;금민종;이원재;김경환
    • 반도체디스플레이기술학회지
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    • 제17권2호
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    • pp.71-75
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    • 2018
  • In this study, we prepared OLED cell with ITO (Indium Tin Oxide) films grown on the glass substrate by facing targets sputtering. Before fabrication of OLED cells, we investigated properties of ITO films deposited at various sputtering conditions. To investigate properties of as-prepared films, we employed four-point probe, UV-VIS spectrometer, X-ray diffractometer (XRD), field emission scanning electron microscopy (FE-SEM), hall-effect measurement. As a results, as-prepared ITO films have high transmittance of over 85 % in the visible range (300-800 nm) and a resistivity of under $10^{-4}$ (${\Omega}-cm$). Their resistivity increased as a function of oxygen gas flow and substrate temperature. OLED cell with ITO films were fabricated by thermal evpoeartor. Properties of OLEDs cell referring to properties of ITO films.

실리콘 태양전지 투명전극용 스크린 프린팅을 이용한 구리 도금 전극 패터닝 형성 (Formation of Copper Electroplated Electrode Patterning Using Screen Printing for Silicon Solar Cell Transparent Electrode)

  • 김경민;조영준;장효식
    • 한국재료학회지
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    • 제29권4호
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    • pp.228-232
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    • 2019
  • Copper electroplating and electrode patterning using a screen printer are applied instead of lithography for heterostructure with intrinsic thin layer(HIT) silicon solar cells. Samples are patterned on an indium tin oxide(ITO) layer using polymer resist printing. After polymer resist patterning, a Ni seed layer is deposited by sputtering. A Cu electrode is electroplated in a Cu bath consisting of $Cu_2SO_4$ and $H_2SO_4$ at a current density of $10mA/cm^2$. Copper electroplating electrodes using a screen printer are successfully implemented to a line width of about $80{\mu}m$. The contact resistance of the copper electrode is $0.89m{\Omega}{\cdot}cm^2$, measured using the transmission line method(TLM), and the sheet resistance of the copper electrode and ITO are $1{\Omega}/{\square}$ and $40{\Omega}/{\square}$, respectively. In this paper, a screen printer is used to form a solar cell electrode pattern, and a copper electrode is formed by electroplating instead of using a silver electrode to fabricate an efficient solar cell electrode at low cost.

대면적 저누설 커패시터를 위한 최적화 블레이드 코팅 기반 고분자 유전체 프린팅 (Printing of Polymer Dielectric via Optimal Blade Coating for Large-scale Low-Leakage Capacitors)

  • 서경호;배진혁
    • 센서학회지
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    • 제30권1호
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    • pp.51-55
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    • 2021
  • We demonstrated a polymer dielectric with low leakage characteristics through an optimal blade coating method for low-cost and large-scale fabrication of metal-insulator-metal (MIM) capacitors. Cross-linked poly(4-vinylphenol) (C-PVP), which is a typically used polymer dielectric, was coated on a 10 × 10 cm indium-tin-oxide (ITO) deposited glass substrate by changing the deposition temperature (TD) and coating velocity (VC) in the blade coating. During the blade coating, the thickness of the thin c-PVP varied depending on TD and VC owing to the 'Landau-Levich (LL) regime'. The c-PVP-dielectric-based MIM capacitor fabricated in this study showed the lowest leakage current characteristics (10-6 A/㎠ at 1.2 MV/㎠, annealing at 200 ℃) and uniform electrical characteristics when TD was 30 ℃ and VC was 5 mm/s. In addition, at TD = 30 ℃, stable leakage characteristics were confirmed when a different electric field was applied. These results are expected to positively contribute to applications with next-generation electronic devices.

MoS2의 형상변조를 통한 광전기화학 성능 촉진 (Promoting Photoelectrochemical Performance Through the Modulation of MoS2 Morphology)

  • 서동범;김의태
    • 한국재료학회지
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    • 제32권1호
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    • pp.30-35
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    • 2022
  • The development of advanced materials to improve the efficiency of photoelectrochemical (PEC) water splitting paves the way for widespread renewable energy technologies. Efficient photoanodes with strong absorbance in visible light increases the effectiveness of solar energy conversion systems. MoS2 in a two-dimensional semiconductor that has excellent absorption performance in visible light and high catalytic activity, showing considerable potential as an agent of PEC water splitting. In this study, we successfully modulated the MoS2 morphology on indium tin oxide substrate by using the metalorganic chemical vapor deposition method, and applied the PEC application. The PEC photocurrent of the vertically grown MoS2 nanosheet structure significantly increased relative to that of MoS2 nanoparticles because of the efficient transfer of charge carriers and high-density active sites. The enhanced photocurrent was attributed to the efficient charge separation and improved light absorption of the MoS2 nanosheet structure. Meanwhile, the photocurrent property of thick nanosheets decreased because of the limit imposed by the diffusion lengths of carriers. This study proposes a valuable photoelectrode design with suitable nanosheet morphology for efficient PEC water splitting.

Efficiency enhancement of the organic light-emitting diodes by oxygen plasma treatment of the ITO substrate

  • Hong, J.W.;Oh, D.H.;Kim, C.H.;Kim, G.Y.;Kim, T.W.
    • Journal of Ceramic Processing Research
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    • 제13권spc2호
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    • pp.193-197
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    • 2012
  • Oxygen plasma has been treated on the surface of indium-tin-oxide (ITO) to improve the efficiency of the organic light-emitting diodes (OLEDs) device. The plasma treatment was expected to inject the holes effectively due to the control of an ITO work-function and the reduction of surface roughness. To optimize the treatment condition, a surface resistance and morphology of the ITO surface were investigated. The effect on the electrical properties of the OLEDs was evaluated as a function of oxygen plasma powers (0, 200, 250, 300, and 450 W). The electrical properties of the devices were measured in a device structure of ITO/TPD/Alq3/BCP/LiF/Al. It was found the plasma treatment of the ITO surface affects on the efficiency of the device. The efficiency of the device was optimized at the plasma power of 250 W and decreased at higher power than 250 W. The maximum values of luminance, luminous power efficiency, and external quantum efficiency of the plasma treated devices increase by 1.4 times, 1.4 times, and 1.2 times, respectively, compared to those of the non-treated ones.

저분자 유기 광다이오드 소자의 p형 유기물 두께에 따른 전류 특성에 관한 연구 (A Study on the Thickness Dependence of p-type Organic Layer on the Current of Small Molecule-based Organic Photodiode)

  • 김영우;이동운;전용민;조의식;권상직
    • 반도체디스플레이기술학회지
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    • 제22권3호
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    • pp.101-105
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    • 2023
  • Organic photo Diodes (OPDi) give multiple advantages in the growing interest of the flexible optoelectronic devices. Organic semiconductors are freeform as they can deposit on any substrate, so it could be flexible. But the inorganic material photodiodes (PDs) are usually fabricated on silicon wafers which are solid. So, normally PDs are inflexible. By those reasons, we decided to make the vacuum deposited small molecule OPDi. We have investigated the OPDi's J-V characteristic by changing the thickness of p-type layer of OPDi. This device consists of indium-tin-oxide (ITO) / 2,3:6,7-dibenzanthracene (pentacene) / buckminsterfullerene (C60) / aluminum (Al). Its J-V characteristics were measured in the probe station(4156C) that can give dark condition while measuring. And for the luminance characteristics, the photocurrent was measured with the bright halogen lamp and a probe station.

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