• Title/Summary/Keyword: Indirect deposition

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Solid-Phase crystallization of amorphous silicon films deposited by plasma-enhanced chemical vapor deposition

  • Lee, Jung-Keun
    • Journal of Korean Vacuum Science & Technology
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    • v.2 no.1
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    • pp.49-54
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    • 1998
  • The effect of deposition paratmeters on the solid-phase crystallization of amorphous silicon films deposited by plasma-enhanced chemical vapor deposition has been investigated by x-ray diffraction. The amorphous silicon films were prepared on Si(100) wafers using SiH4 gas with and without H2 dilution at the substrate temperatures between 12$^{\circ}C$ and 38$0^{\circ}C$. The R. F. powers and the deposition pressures were also varied. After crystallizing at $600^{\circ}C$ for 24h, the films exhibited (111), (220), and (311) x-ray diffraction peaks. The (111) peak intensity increased as the substrate temperature decreased, and the H dilution suppressed the crystallization. Increasing R.F. powers within the limits of etching level and increasing deposition pressures also have enhanced the peak intensity. The peak intensity was closely related to the deposition rate, which may be an indirect indicator of structural disorder in amorphous silicon films. Our results are consistent with the fact that an increase of the structural disorder I amorphous silicon films enhances the grain size in the crystallized films.

Estimation of Nitrogen and Sulfur Dry Deposition over the Watershed of Lake Paldang (팔당호 유역에 대한 질소와 황의 건식 침적량 추정)

  • Kim J.Y;Ghim Y. S;Won J.-G;Yoon S.-C;Woo J.-H;Cho K.-T
    • Journal of Korean Society for Atmospheric Environment
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    • v.21 no.1
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    • pp.49-62
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    • 2005
  • Lake Paldang is a main resource of drinking water for 20 million people in the greater Seoul area. Dry deposition amounts of nitrogen and sulfur were estimated for three typical days in each season over the watershed of Lake Paldang. Models- 3/CMAQ (Community Multiscale Air Quality) and MM5 (Mesoscale Model) were used to predict air quality and meteorology, respectively. Aerosols as well as gaseous pollutants were considered. Nitrogen was mainly deposited in the form of HNO, while most of sulfur was deposited in the form of SO$_2$. Contribution of secondary pollutants was the largest in fall since they were transported from the greater Seoul area. However, contribution of secondarily-formed particulate pollutants to the nitrogen deposition was the largest in winter because semi-volatile ammonium nitrate favors lower temperature. Annual deposition amounts of nitrogen and sulfur were 37% and 26% of their emission amounts, respectively, over the watershed of Lake Paldang. Higher value of the nitrogen deposition showed a more influence of pollutants emitted in the greater Seoul area.

Electrical and Optical Properties of Ga-doped SnO2 Thin Films Via Pulsed Laser Deposition

  • Sung, Chang-Hoon;Kim, Geun-Woo;Seo, Yong-Jun;Heo, Si-Nae;Huh, Seok-Hwan;Chang, Ji-Ho;Koo, Bon-Heun
    • Journal of the Korean institute of surface engineering
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    • v.44 no.4
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    • pp.144-148
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    • 2011
  • $Ga_2O_3$ doped $SnO_2$ thin films were grown by using pulsed laser deposition (PLD) technique on glass substrate. The optical and electrical properties of these films were investigated for different doping concentrations, oxygen partial pressures, substrate temperatures, and film thickness. The films were deposited at different substrate temperatures (room temperature to $600^{\circ}C$). The best opto-electrical properties is shown by the film deposited at substrate temperature of $300^{\circ}C$ with oxygen partial pressure of 80 m Torr and the gallium concentration of 2 wt%. The as obtained lowest resistivity is $9.57{\times}10^{-3}\;{\Omega}cm$ with the average transmission of 80% in the visible region and an optical band gap (indirect allowed) of 4.26 eV.

Assessment of Nitrous Oxide (N2O) Emissions from Farmland in 2011 with IPCC Guideline Methodology

  • Jeong, Hyun Cheol;Kim, Gun Yeob;Lee, Jong Sik;Choi, Eun Jung;Ko, Jee Yeon;So, Kyu Ho
    • Korean Journal of Soil Science and Fertilizer
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    • v.46 no.6
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    • pp.570-574
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    • 2013
  • This study was conducted to assess $N_2O$ emissions in agricultural soils of Korea under the 1996 IPCC (Intergovernmental Panel on Climate Change) methodology. $N_2O$ emissions in agricultural soils were calculated the sum of direct emission and indirect emission by the N sources and emissions by field burning of crop residues. $N_2O$ emission was highest in animal manure as 1,547 $CO_2$-eq Gg. Indirect emissions by atmospheric deposition and leaching and runoff were 1,463 and 1,753 $CO_2$-eq Gg, respectively. $N_2O$ emission by field burning of crop residues was highest in pepper due to the residue/crop ratio and field burning ratio.

Effect of Plasma Enhancement on the Al-doped ZnO Thin Film Synthesis by MOCVD (유기금속화학기상증착법에 의한 ZnO:Al 필름 합성에서 플라즈마 인가 효과)

  • Seomoon, Kyu
    • Journal of the Korean Solar Energy Society
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    • v.39 no.1
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    • pp.33-40
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    • 2019
  • Al-doped ZnO (AZO) thin films were synthesized on Si(100) wafers via plasma enhanced metal organic chemical vapor deposition (PE-MOCVD) method using diethyl zinc (DEZ) and N-methylpyrrolidine alane (MPA) as precursors. Effects of Al/Zn mixing ratio, plasma power on the surface morphology, crystal structure, and electrical property were investigated with SEM, XRD and 4-point probe measurement respectively. Growth rate of the film decreased slightly with increasing the Al/Zn mixing ratio, however electrical property was enhanced and resistivity of the film decreased greatly about 2 orders from $9.5{\times}10^{-1}$ to $8.0{\times}10^{-3}{\Omega}cm$ when the Al/Zn mixing ratio varied from 0 to 9 mol%. XRD analysis showed that the grain size increased with increasing the Al/Zn mixing ratio. Growth rate and electrical property were enhanced in a mild plasma condition. Resistivity of AZO film decreased down to $7.0{\times}10^{-4}{\Omega}cm$ at an indirect plasma of 100 W condition which was enough value to use for the transparent conducting oxide (TCO) material.

Corrosion Resistance of Blended Concrete and Its Application to Crack Healing (혼합 콘크리트의 부식 저항성과 균열 치유 적용)

  • Lee, Chang-Hong;Kim, Tae-Sang;Song, Ha-Won
    • Journal of the Korea Concrete Institute
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    • v.21 no.6
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    • pp.689-696
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    • 2009
  • In this study, electro-deposition method was applied to heal cracks in various blended concrete. The performance of the method was indirectly monitored by measuring impressed voltage, electrolyte, galvanic current monitoring, linear polarization resistance, and directly by image analysis of the cracks. The indirect and direct monitoring values are compared to develop guidelines for relating the indirect measures to actual crack healing. As a result, It was found that impressed voltage was convergence to 2.9V after 20000 minutes. From the galvanic current test results of artificial crack healing, the corrosion resistance showed that the order of 0.4 $>$ 0.6 $>$ 0.5 water to cement ratio. Furthermore, in view of binder, the corrosion resistance order was calculated OPC $>$ 60%GGBS $>$ 10%SF $>$ 30%PFA. Finally, It was found that 76.47% of healed crack surface calculated from the artificial crack healing technique using electrochemical deposition method.

A study on the improvement of crystallinity and surface roughness of polycrystalline diamond films deposited by MPCVD method (MPCVD 방법에 의해 증착된 다결정 다이아몬드 박막의 결정성 및 표면 거칠기 향상에 관한 연구)

  • Shin, Wan-Chul;Seo, Soo-Hyung;Park, Jin-Seok
    • Proceedings of the KIEE Conference
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    • 2001.07c
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    • pp.1349-1351
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    • 2001
  • Polycrystalline diamond films are deposited by using a microwave plama CVC system, where the bias-enhanced nucleation (BEN) method is employed. Effects of the varying microwave power, the surface treatment by hydrogen plasma, and the cyclic hydrogen etching during deposition on the crystallinity as well as on the surface roughness of deposited films are examined by Raman spectroscopy, SEM, and AFM. A novel method for achieving a smoother diamond surface is also suggested through the indirect wafer bonding and back-side polishing.

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Properties of Inclined Silicon Carbide Thin Films Deposited by Vacuum Thermal Evaporation

  • Hamadi Oday A.;Yahia Khaled Z.;Jassim Oday N.S.
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.5 no.3
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    • pp.182-186
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    • 2005
  • In this work, thermal evaporation system was employed to deposit thin films of SiC on glass substrates in order to determine the parameters of them. Measurements included transmission, absorption, Seebak effect, resistivity and conductivity, absorption coefficient, type of energy band-gap, extinction coefficient as functions of photon energy and the effect of increasing film thickness on transmittance. Results explained that SiC thin film is an n-type semiconductor of indirect energy band-gap of ${\sim}3eV$, cut-off wavelength of 448nm, absorption coefficient of $3.4395{\times}10^{4}cm^{-1}$ and extinction coefficient of 0.154. The experimental measured values are in good agreement with the typical values of SiC thin films prepared by other advanced deposition techniques.

A Study on Obesity Management by Body Shape Correction Program (체형교정을 통한 비만치료에 대한 소고(小考))

  • Lim, Hyung-Ho;Song, Yun-Kyung
    • Journal of Korean Medicine for Obesity Research
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    • v.5 no.1
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    • pp.133-140
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    • 2005
  • The prevalence of obesity at all ages in increasing epidemically worldwide. There were many study of an indirect method on fat mass measurement in obesity, but were few study to determine the possible relationships between local fat deposition and health-related fitness parameters in overweight and obesity. We has reviewed on the somatotype characteristics, ideal posture and biomechanics, and adipose tissue of connective tissue, myofacia continuity. We consider that these unique 'whole systems' view is of vital importance to understanding the role of adipose tissue in musculoskeletal system and to application of body shape correction program.

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Assessment on Nitrous oxide (N2O) Emissions of Korea Agricultural Soils in 2009 (2009년 우리나라 농경지 토양에서의 N2O 배출량 평가)

  • Jeong, Hyun-Cheol;Kim, Gun-Yeob;Lee, Deog-Bae;Shim, Kyo-Moon;Lee, Seul-Bi;Kang, Kee-Kyung
    • Korean Journal of Soil Science and Fertilizer
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    • v.44 no.6
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    • pp.1207-1213
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    • 2011
  • This study was conducted to assess $N_2O$ emissions in agricultural soils of Korea. According to 1996 and 2006 IPCC (Intergovernmental Panel on Climate Change) methodology, $N_2O$ emission was calculated the sum of direct emission ($N_2O_{DIRECT}$) and indirect emission ($N_2O_{INDIRECT}$). To calculate $N_2O$ emissions, emission factor was used default of IPCC and activity data was used the food, agricultural, forestry and fisheries statistical yearbook of MIFAFF (Ministry for Food, Agriculture, Forestry and Fisheries). It was emitted 8,608 $N_2O$ Mg resulted from direct emission by application of chemical fertilizer and animal manure, input in n-fixation crops and input of crop residues and emissions converted $N_2O$ into $CO_2$ equivalent was 2,668 $CO_2$-eq Gg. Indirect emission as $N_2O_{(G)}$ (atmospheric deposition of $NH_3$ and $NO_X$) and $N_2O_{(L)}$ (leaching and runoffs) were 4,567 and 6,013 $N_2O$ Mg and emissions converted $N_2O$ into $CO_2$ equivalent were 1,416 and 1,864 $CO_2$-eq Gg, respectively. Total $N_2O$ emission in Korea agricultural soil in 2009 was 5,948 $CO_2$-eq Gg.