• Journal of the Korean Ceramic Society
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• v.42 no.6 s.277
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• pp.377-383
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• 2005

Generally, the strength achieved of glass-ceramics is higher as is the fracture toughness, as compared with the original glass. This improvement is due to the microstructure consisting of very small crystals. In this study, Ag-doped $45SiO_2-24CaO-24Na_2O-4P_2O_5$ glasses were irradiated to strengthen by the crystallization using Femto second laser Pulses. Through the UV/VIS spectroscope, XRD, Nano-indenter and SEM etc., heat-treated and irradiation of laser pulses without heat-treated samples were analyzed. Two kinds of samples, heat-treated and laser irradiated without heat-treated samples, showed the peaks in the same wavelength near 360 nm. Especially, samples irradiated by 140 mW laser with XYZ stage having at the rate of 100$\~$l000 $\mu$m/s had the largest absorption peak among them, and heat-treated samples was shown lower absorption range than over 90 mW laser irradiated samples. Moreover, samples irradiated by laser had higher values ($4.4\~4.56{\times}10^{-3}(Pa)$) of elastic modulus which related with strength of glass than values of heat-treated samples and these are 1.2$\~$1 .5 times higher values than them of mother glass.

• Journal of the Korean Society for Nondestructive Testing
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• v.29 no.5
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• pp.479-484
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• 2009

Nondestructive evaluation(NDE) of ceramic matrix composites is essential for developing reliable ceramics for industrial applications. In the work, C-Scan image analysis has been used to characterize surface crack of SiC ceramics nondestructively. The possibility of detection of surface crack were carried out experimentally by two types of ultrasonic equipment of SDS-win and $\mu$-SDS, and three types of transducer of 25, 50 and 125 MHz. A surface micro-crack of ceramics was not detected by transducer of 25 MHz and 50 MHz. Though the focus method was detected dimly the crack by transducer of 125 MHz, the defocus method could detect the shape of diamond indenter. As a whole, the focus method and the defocus method came to the conclusion that micro crack have a good possibility for detection.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1398-1401
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• 2005

The nano/microstructure, the aging response (in T5 heat treatment), and the mechanical/tribological properties of the eutectic regions in squeeze-cast A356 alloy were investigated using nano/micro-indentation and mechanical scratching, combined wit optical microscopy and atomic force microscope(AFM). Most eutectic Si crystals in the A356 alloy showed a modified morphology as fine-fibers. The loading curve for the eutectic region was more irregular than that of the primary Al region due to the presence of various particles of varying strength. In addition, the eutectic region showed lower pile-up and higher elastic recovery than the primary Al region. The aging responses of the eutectic regions in the squeeze-cast A356 alloys aged at $150^{\circ}C$ for different times(0, 2, 4, 8, 10, 16, 24, 36 and 72 h) were investigated. As the aging time increased, acicular Si particles in the eutectic regions gradually came to a fine structure. Both Vickers hardness ($H_V$) and indentation ($H_{IT}$) test results showed almost the same trend of aging curves, and the peak was obtained at the same aging time of 10 h. A remarkable size-dependence of the tests was found. The friction coefficient for the eutectic region was lower than that for the primary Al region.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.6
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• pp.425-428
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• 2013

In this paper, we present a novel hydrophilic coating material (Wellture Finetech, Korea) which can be utilized as a coating layer for anti-contamination for electrical and electronic system. The coating material was deposited on 4 inch silicon wafer with several different film thickness. The film thickness was controlled by spin coating speed. After curing of the film, we have scratched by permanent marker to check self-cleaning property of the film. Also we have executed several mechanical tests of the films. As the spin coating speed is increased, the film thickness was thinned from 230 nm to 125 nm. Contact angle of the film was lowered from $30^{\circ}$ to $12^{\circ}$ as the spin coating speed is increased from 700 to 2,500 rpm. On permanent marker scratched film surface coated at 1,000 rpm, we have poured regular city water to investigate self cleaning property of the film. The scratches were gradually separated from the film surface due to super-hydrophilicity of the film. Hardness of spin coated film was 9H measured by ASTM D3363 method. and adhesion of all film was 5B tested by ASTM D3359 method. Also, to get exact hardness value of the film, we have utilized a nano-indenter. As spin speed is increased, the hardness of film was increased from 3 GPa to 5 GPa.

• Tribology and Lubricants
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• v.33 no.4
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• pp.127-133
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• 2017

In order to characterize the adhesive properties and failure mechanisms of diamond-like carbon (DLC) films of two different thicknesses (130 nm and $1.2{\mu}m$), deposited by plasma-enhanced chemical vapor deposition on a Si substrate, scratch testing with a micro-indenter ($12.5{\mu}m$ tip radius) was performed under a linearly increasing load. These scratch tests were conducted under the same test conditions for both films. The critical load of each film was estimated from the scratch test results, based on a sharp increase in the coefficient of friction and a clear distinction of failure modes. The critical load was the basis for evaluating the adhesion strength of the films, and the $1.2{\mu}m-thick$ DLC film had superior adhesion strength. For better understanding of the failure modes, the following analyses were conducted: friction behavior and scratch tracks analysis using scanning electron microscopy, energy-dispersive spectroscopy, and 3-D profilometry. The scratch test results showed that failure modes were related to the thickness of the films. The 130 nm-thick DLC film underwent cohesive failure modes (cracks and chipping) before reaching to a gross failure stage. On the other hand, the thicker DLC film ($1.2{\mu}m-thick$) did not exhibit micro cracks before a sudden gross failure of the film together with the evidence of cracking and chipping of the Si substrate.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.506-506
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• 2013

Ag (Silver) 박막은 낮은 전기 저항과 높은 가시광대의 반사율을 가져 T-OLED (Top Emission-Organic Light Emitting Diode)의 Anode로 각광 받고 있지만, 일반적인 Ag 박막의 일함수는 4.3 eV 이하로 T-OLED의 Anode로 사용하기에는 낮은 단점이 있다. 따라서 이를 극복하기 위한 방법으로 Ag 박막 표면을 산화시켜 일함수를 증가시키기 위한 연구가 진행중에 있다. 하지만 연구는 단순히 일함수를 증가시키는 것에 한정되어 있을 뿐 UV 처리된 박막의 nano-mechanics 특성에 대한 연구는 현재 전무하다. 따라서 본 연구에서는 순도 99.9%의 Ag 타겟을 이용하여 rf magnetron sputter 장비를 통해 Ag 박막을 증착 하였고, 이후 UV (Ultra-Violet) 램프를 통해 시료 표면을 산화시켰다. 특히, 이 논문의 주요 관심사인 박막의 nano mechanics 특성 분석을 위하여 nano indenter와 SPM (Scanning Probe microscope) 장치를 활용 하였다. 실험 결과 후처리 시간이 3분 이하인 경우 박막이 비결정질의 silver oxide로 성장하는 것을 확인하였으며, 이때 박막의 면저항은 $0.16{\Omega}$/sq.에서 $0.55{\Omega}$/sq.로 증가하는 것을 관찰할 수 있었고, 3분 이후, 비결정질의 silver oxide가 conducting 특성을 갖는 silver oxide 결정을 이루면서 면저항이 $0.55{\Omega}$/sq.에서 $0.21{\Omega}$/sq.로 감소하는 것을 보았다. 또한 결정질의 박막이 자라는 3분이상의 박막에서 surface hardness는 급격하게 증가($3.57{\rightarrow}9.47$ GPa)했으며, 6분 이후에는 감소하는($9.47{\rightarrow}3.46$ GPa) 경향을 보였다. 이러한 경향은 silver oxide의 결정 크기가 Ag 결정 보다 크므로 상대적인 압축응력을 받아 표면 경도가 증가됐다. 처리시간 6분 이후, 경도 감소는 박막의 표면 물성이 불안정해졌기 때문이다.

• Journal of the Korean Society for Heat Treatment
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• v.23 no.1
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• pp.29-33
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• 2010

Titanium nitride (TiN) films were deposited on the polycarbonate substrate by using radio frequency (RF) magnetron sputtering without intentional substrate heating. After deposition, the films were bombarded with intense electron beam for 20 minutes. The intense electron irradiation impacts on the crystalline, hardness and surface roughness of the TiN films. The films irradiated with an electron beam of 300 eV show the small grains on the surface, while as deposited TiN films did not showany grains on the surface. Also the surface harness evaluated with micro indenter was increased up to 18 Gpa at electron energy of 900 eV after electron beam irradiation. In addition, surface root mean square (RMS) roughness of the films irradiated with intense electron beam affected strongly. The films irradiated by electron beam with 900 eV have the lowest roughness of 1.2 nm in this study.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.31 no.2
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• pp.57-62
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• 2003

Nano-bending method is presented to measure the Poisson's ratio of thinfilms for MEMS (Micro-Electro-Mechanical Systems) applicaiton. The douvle-ring specimen is designed and fabricated based on the surface micromachining process to facilitate the measurement of the Poisson's ratio. The Poisson's ratio can be obtained through analyzing the linear load-displacement relationship of the double ring specimen subjected to nano-indenter loading. The Present nano-bending mehod is an in-situ measurement approach due to the compatibility to the surface micromachining process. The Poisson's ratio is locally obtained at the location of the double ring specimen with micro dimension. To validate the nano-bending method, the Poisson's ratio of LPCVD (Low Pressure Chemical Vapor Deposition) poly-silicon with thickness of 2.3㎛ is investigated. Experimental results reveal that the Poisson's ratio of the poly-silicon film is 0.2569. The standard deviation of the nano-bending measurement for the stiffness of double ring specimens is 2.66%.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.12
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• pp.98-106
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• 2016

Measurements of the elastic modulus and hardness using a nano indentation machine rely on the equation for the fitted contact area, which is valid for only sink-in materials. For most soft engineering materials that involve pile-up behavior rather than sink-in, the contact area equation underestimates the contact area and thus overestimates the elastic modulus and hardness. This study proposes a correction method to amend erroneous hardness measurements in pile-up situations. The method is a supplemental derivation to the original hardness measurement with the known value of the elastic modulus. The method was examined for soft engineering metals, Al 6061 T6 and C 12200, via tensile tests, nano indentation tests, impression observations, and finite element analysis. The proposed technique shows reasonable agreement with the analytical results accounting for strain gradient plasticity from a previous study.

• Journal of the Microelectronics and Packaging Society
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• v.27 no.3
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• pp.83-88
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• 2020

The evolution of smartphones has led to numerous researches in the mechanical behavior of flexible devices. Due to the nano-size of the thin flexible film, nanoindentation is widely used to evaluate its mechanical behaviors, such as elastic modulus, and hardness. However, the commonly used Oliver-Pharr method is not suited for analyzing the indentation force-depth curves of hard films on soft substrates, as the effects of soft substrate is not considered theoretically. In this study, the elastic modulus of the thin film was evaluated with references to other reported models which include the substrate effect, and with calibration of the indentation depth for the pile-ups between the indenter and test surface. We fabricated test samples by deposition of amorphous metal film on polyimide and silicon wafers for verification of modified models.